JP2002213785A - Air conditioning system for clean room stair - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air conditioning system for a clean room stair capable of assuring high cleanliness and reducing a space. SOLUTION: The air conditioning system of the clean room stair comprises a stair chamber A provided in a clean room of multilayer stairs, a plurality of paces 1 provided in the chamber A, folding stairs 2 and 2 having no riser and provided between the paces 1 and 1, and a clean unit 10 provided in a lower part of the pace 1 and having an air flow diffusion plate 15. The unit 10 diffuses the air flow sucked at the lower part of the pace 1 to the overall stairs to clean the air.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air conditioning system for a clean room in a factory for manufacturing semiconductors and liquid crystals.

[0002]

2. Description of the Related Art Conventionally, in a clean room of a factory for manufacturing semiconductors, liquid crystals, etc., when a cleanliness class of 100,000 (0.5 μm) is required in about two layers of stairs, a tread is made to have a grating (porous) structure. A method has been adopted in which air is blown out from the ceiling surface of the staircase and is sucked in at a position near the floor on the lower floor. In a multi-layered semiconductor factory, not only vertical transport in a clean room but also high cleanliness (class 5000-0.3 μm) for multiple layers is required for workers.
This is because stairs are more likely to generate garbage than horizontal walking,
Since there is a concern that the garbage may collect on the floor and soar during walking, grating treads have been employed.

[0003]

However, in the above-mentioned conventional air-conditioning system, there is a problem that, when a multi-layered staircase is formed, garbage on the upper floor goes down to the lower floor in order and hits pedestrians. In addition, since high cleanliness is required, it has been an issue to secure high cleanliness by blowing out the ceiling or sucking the lower part.

[0004] To solve this problem,
There has been an air conditioning system for a clean room staircase as disclosed in JP-A-2000-249379. In this air conditioning system, a folded staircase provided in a clean room on a multi-story floor, a plurality of landings provided in the staircase and stairs provided therebetween, and ventilation provided adjacent to the staircase A duct, a suction port arranged near the floor of each landing, connected to the ventilation duct, and a fan filter unit installed at each landing inside the ventilation duct, wherein each fan filter unit is After blowing clean air into the staircase, the air is sucked in from the lower floor through a ventilation duct.

[0005] However, in the air conditioning system of the clean room stairs, a frame or wall for mounting the fan filter unit is required in a direction orthogonal to the landing of each stair, so that a space for the fan filter unit is required. There was a problem that this would hinder the plan design.

The present invention has been made in view of the above-mentioned conventional problems, and has as its object to provide an air conditioning system for a clean room staircase that can ensure high cleanliness and reduce space.

[0007]

In order to achieve the above object, the present invention provides a staircase provided in a clean room on a multi-story floor, a plurality of landings provided in the staircase, and a plurality of landings provided between the landings. It is provided with a folded staircase without a riser and a clean unit provided below the landing and having an airflow diffusion plate, and the clean unit cleans the airflow sucked at the landing by diffusing it throughout the stairs. It is characterized by the following.

[0008] The clean unit is suspended below the landing, and is provided with an air chamber, a suction fan, a high-performance filter and an airflow diffusion plate, or an air chamber, a low or medium-performance filter, a suction fan, a high-performance filter and an airflow diffusion. It has a board. Further, the clean unit is suspended below the landing, and includes a low or medium performance filter, a suction fan, a high performance filter, and an air diffusion plate, and the landing corresponds to an upper portion of the clean unit suspension position or the entire surface. It is characterized by a grating plate. Further, the airflow diffusion plate is formed of punching metal, and has a first opening that blows obliquely downward along the direction of the stairs, and a second opening that blows downward, and the aperture ratio of the first opening Is larger than the aperture ratio of the second opening.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, an embodiment of a clean room staircase air conditioning system according to the present invention will be described in detail. FIG.
Is a sectional view showing an air conditioning system of a clean room staircase of the present invention, and FIG. 2 is an enlarged sectional view showing an example of the clean unit in FIG.

The air conditioning system for a clean room staircase according to the present invention is applied to a stair room A provided in a clean room on a multi-story floor, as shown in FIG. In the staircase A, a plurality of landings 1, which are partially or entirely covered with grating plates,
1,1,... Are provided alternately, and a plurality of stairs 2, 2, 2,.
・ It is provided as a folded staircase with a slant in the vertical direction. Using the hanging metal fittings at the lower part of each landing 1, the clean units 10 and 10 having the airflow diffusion plate are suspended, and the airflow sucked at the landings 1 and 1 is diffused throughout the stairs.

As shown in FIG. 1, the clean unit 10 is a suspended fan filter unit, and includes an air chamber 11 serving as an air flow inlet and a suction fan 13.
And a high-performance filter 14 and an airflow diffusion plate 15. This high-performance filter 16 is made of PTFE fiber and PE
A filter material formed from a combination of T nonwoven fabrics, glass fibers or other fibers, foams, etc., is folded to increase the filtration area and unitized. The required performance (class 50)
00-0.3 μm). Note that a low or medium performance filter (not shown) may be arranged between the air chamber 11 and the suction fan 13.

The air diffusion plate 15 attached to the clean unit 10 is formed of a perforated metal or the like having small holes, and is a first air blower for blowing out the air-conditioning air sucked from above from obliquely downward. Opening 16a
And a second opening 16b for blowing downward. The first opening 16a and the second opening 16
b indicates that the aperture ratio can be adjusted by the size and number of holes in the punched metal, and the first opening 16a has an aperture ratio of 20 to 2
The opening ratio is set to 5%, and the opening ratio of the second opening 16b is set to 15%, so that more air-conditioning air blows obliquely downward.

Are provided between the landings 1, 1, 1..., Respectively, are a plurality of steps (steps) 2a, 2a, 2a. Step board 2a, 2
are composed of a pair of side girders 2b, 2b for fixing a, 2a... and handrails (not shown), and are strip steps having no riser between the upper and lower steps 2a. This staircase has no riser that hinders the flow of air-conditioning air, so the flow of air-conditioning air in staircase 2 is very good, and garbage does not stay on the staircase. Can be done.

In the air-conditioning system of the clean room stairs configured as described above, the clean unit 10 is attached to the lower part of each landing 1 which has become an empty space, so that new space and materials for attaching the clean unit 10 are required. Instead, the space factor can be increased and the equipment cost can be reduced.

The air-conditioned air, which has been made highly purified by the clean unit 10 installed in the landing 1, descends from the air diffusion plate 15 along the slope of the stairs 2 as shown by the arrow in FIG. The air is diffused from the air chamber 11 of the clean unit 10 installed at the landing 1 below, and is again cleaned to a high degree by the high-performance filter 13.
It is blown out from 5. First opening 1 of airflow diffusion plate 15
6a is mounted diagonally below, so that the air-conditioned air blown out from the first opening 16a passes between the upper and lower steps 2a of the stairs 2 to effectively enhance the cleaning action of the stairs 2. It is possible.

The landing 1 may be provided with a mesh airflow inlet on a single flat plate, but the landing surface may have a slit structure or a grating structure made of punching metal like the landing 3. Landing 3 configured in this way
Since air-conditioning air circulates over the entire tread, not only the stairs but also the entire landing can be kept at a high degree of cleanliness.

FIG. 3 is a side view showing a modification of the clean unit. This example shows a case where a part of each landing 1 serving as the airflow inlet 1a of the clean unit 10 or the entire surface is covered with a grating plate, and the clean unit 20 is suspended below the airflow inlet 1a. As shown, the clean unit 20 includes a coarse (low-performance) or medium-performance filter 12, a suction fan 13, a high-performance filter 14, and an airflow diffusion plate 15. Also in this case, the airflow sucked in at the landings 1 and 1 is diffused throughout the stairs. Since the stairs do not have a riser that hinders the flow of the air-conditioning air, the flow of the air-conditioning air at the stairs 2 is very good, And the like do not remain on the stairs, so that the stairs can always be kept at high cleanliness.

As described above, the air conditioning system of the clean room stairs according to the present invention comprises a folded stair room provided in a multi-story clean room, a plurality of landings provided in the stair room, and A plurality of stairs provided therebetween, and a clean unit provided at the lower part of the landing and provided with an airflow diffusion plate, wherein the clean unit diffuses the airflow sucked at the upper part of the landing across the lower stairs. As a result, a special space and materials for installing the clean unit are not required, so that the clean room can be effectively used and the facility cost can be reduced. In addition, since the clean unit is provided with the diffusion plate, the air-conditioning air can be actively circulated through the stairs, so that the stairs can be highly clean.

[Brief description of the drawings]

FIG. 1 is a side view showing an embodiment of a clean room staircase air conditioning system according to the present invention.

FIG. 2 is a plan view of FIG.

FIG. 3 is a side view showing a modified example of the clean unit in FIG.

[Explanation of symbols]

A Staircase 1 Landing
1a Airflow inlet 2 Stairs 2a Step board
2b Side girders 10 Clean unit 11 Air chamber
12 Coarse filter 13 Fan 14 High performance filter
15 air diffusion plate 16a first opening 16b second opening

Claims (4)

[Claims] 1. A staircase provided in a clean room on a multi-story floor, a plurality of landings provided in the staircase, a folded staircase without a riser provided between each landing, and a lower part of the landing. A clean unit provided with an airflow diffusion plate, wherein the clean unit cleans the airflow sucked in at the landing by diffusing the airflow throughout the stairs. 2. The clean unit is suspended below a landing, and has an air chamber, a suction fan, a high-performance filter and an air diffusion plate, or an air chamber, a low or medium-performance filter, a suction fan, a high-performance filter and The air conditioning system for a clean room staircase according to claim 1, further comprising an airflow diffusion plate. 3. The clean unit is suspended below a landing and includes a low- or medium-performance filter, a suction fan, a high-performance filter and an air diffusion plate, and the landing is located above a clean unit suspension position. 2. The air conditioning system for a clean room staircase according to claim 1, wherein the part or the whole surface is covered with a grating plate. 4. The airflow diffusion plate is formed of punched metal, and blows out obliquely downward along a staircase direction.
3. The clean room according to claim 1, further comprising: a first opening and a second opening that blows downward, wherein an opening ratio of the first opening is larger than an opening ratio of the second opening. 4. Air conditioning system for stairs.