JPH09243123A - Air supply unit for turbulent flow type clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an air outlet (air supply unit) which can reduce the temperature irregularity in a clean room by enhancing the air flow diffusing performance instead of a conventional air outlet where a local low temperature area is easily generated directly under the outlet in a turbulent flow type clean room, thereby rapidly mixing diffused air flow with the indoor air. SOLUTION: The air supply unit for a turbulent flow type clean room regulates the temperature, humidity and cleanliness of the air discharged from the clean room 3, and again supplies it to the room 3. In this case, the air conditioning system has a plurality of air guide blades disposed in a blind state in the supply port 12 of the air resupplied to the room 3, at least four or more guide valves 16 mounted to make it possible to individually alter the angles of the respective blades and disposed together so that the entirety becomes the shape near a square shape in the state that the mounting directions of the respective valves 16 can be independently altered.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an air supply device for a turbulent flow type clean room, and more particularly to an air supply device effective for quickly equalizing the temperature in the turbulent flow type clean room.

[0002]

2. Description of the Related Art A room (hereinafter referred to as "clean room") which is particularly required to maintain a high degree of cleanliness in the room.
That. ), The air conditioning system generally takes out the dirty air in the clean room once, replenishes it with fresh air, adjusts it to a predetermined air condition, supplies the adjusted air to the clean room again, and repeats thereafter. The so-called circulation method is adopted. Specifically, the main equipment for air conditioning is arranged outside the clean room, and the dirty air, the temperature-increased air, the air whose humidity has changed and the like in the clean room are taken out from the clean room and then led to the air conditioning equipment. Air conditioners are generally equipped with filters, heat exchangers, steam generators and blowers so that the cleanliness (number of dust particles of 0.5 micron or more in one foot cube), temperature, humidity and air volume in the clean room can be adjusted. Etc. are provided. Therefore, the air guided to the air conditioning equipment is separately mixed with fresh air introduced to the air conditioning equipment from the outside, and then the cleanliness, temperature, humidity, and air volume are adjusted to desired set values, and then, again in the clean room. To be supplied to.

[0003]

By the way, in the above-mentioned air conditioning system, the temperature is adjusted by adjusting the temperature of the air before being supplied to the clean room so that the temperature at a certain point (temperature measurement point) in the clean room becomes a desired value. Although it is performed by a simple control of changing the temperature of the air, the re-supply of the adjusted air into the clean room is a method of blowing air into the room from the air outlet, so immediately below the air outlet, the blown cold air blasts are Since the air does not immediately become fully mixed with air, it may cause a temperature drop.

That is, in the conventional turbulent flow type clean room air conditioning system, air outlets are generally provided on the ceiling at a plurality of equal intervals, and most of the supplied air is blown out from the ceiling directly to the floor. To be done. Therefore, in the room, the vertical stacking state of air is disturbed, that is, a turbulent flow is formed. From a plan view, the temperature inside the room changes significantly in the area corresponding to an area slightly larger than the air supply port, and there is little temperature change other than that, resulting in a very non-uniform temperature distribution. ing. And
The relaxation of this non-uniform temperature distribution is left to the mixing due to natural air convection. This causes various problems. For example, cold air (hereinafter “cold air”)
That. ) Is specifically stated,
When precision equipment such as semiconductor inspection equipment is placed directly under the air outlet, the cold air supplied directly hits the precision equipment and causes dew condensation.As a result, dew removal work must be performed before moving the precision equipment. There is a problem of being forced. In addition, if plants and animals inhabit near the air outlet, it will adversely affect the physical condition and growth of plants and animals, and if food is stored in the room, the uneven temperature distribution will immediately deteriorate the quality. , Leading to problems such as loss of product value.

As one measure for solving such a problem, blowing air into the turbulent flow type clean room is
It is conceivable to carry out from various air outlets in various directions, that is, to install an air diffusing device for stirring the so-called guide airflow so that the air in the room can be quickly mixed.

However, the mounting of such an air diffusing device requires a large amount of equipment and mounting work, resulting in a large increase in equipment cost and maintenance cost. Therefore, the inventors of the present invention, the blowing itself of the air from the ceiling is the same as the conventional, by providing a suitable deflection plate immediately after being blown, if the air is evenly diffused in the horizontal direction, The same effect without using such a large-scale air diffuser, that is, based on the idea that the blowing airflow in a turbulent clean room can be quickly mixed with room air to reduce temperature unevenness in the room, The present invention has been achieved through repeated studies to find out how to effectively and appropriately arrange such a deflector. That is, an object of the present invention is that, when the reconditioned air is supplied into the turbulent flow type clean room, the blowing airflow can be quickly exchanged with the room air by enhancing the airflow diffusion performance of the air passing through the air blowing port. The point is to provide a very economical and compact product that can be mixed to reduce the temperature unevenness in the room.

[0007]

In order to achieve the above-mentioned object, the invention according to claim 1 of the present invention exhausts indoor air to maintain a high degree of cleanliness in the room to a predetermined level. After adjusting the conditions, in the air supply device of the turbulent flow type clean room in which the temperature, humidity and cleanliness of the room are adjusted by recirculating into the room, the air supplied to the turbulent flow type clean room is re-supplied. At least four guide valves, each of which has a plurality of air guide blades arranged in a blind shape and are attached so that the angle of each guide blade can be individually changed, are independent of each other in the mounting direction of each guide valve. It is characterized in that it is arranged so as to be shaped like a square as a whole in a state that can be changed to.

By setting the mounting structure of the plurality of air guide vanes as described above, the volume of the turbulent flow type clean room,
Regardless of conditions such as the position of the air outlet (the center or the edge of the ceiling), simply adjusting the angle of the air guide vanes and the mounting direction of the guide valve in advance to meet the conditions The air (for example, cold air) that has passed through can be immediately diffused evenly in the horizontal direction. As a result, the blown airflow can be quickly mixed with the indoor air, and a turbulent clean room with less temperature variation in the room can be secured. In addition, the number of air outlets provided on the ceiling can be reduced. Therefore, the present invention, as an air supply device for securing such a turbulent flow type clean room, can be made very economical because it does not use a large-scale air diffusion device as in the past, and is compact. Is.

According to a second aspect of the present invention, in the configuration of the first aspect of the invention, the guide valve is arranged in a storage case attached to the air outlet. Is. By arranging the guide valve in the storage case in this way, it becomes easy to adjust the angle of each air guide vane, the mounting direction of the guide valve, and the cleaning of these members, and maintenance can be made advantageous. Like

According to a third aspect of the present invention, in the construction of the first or second aspect of the invention, six or more of the guide valves are assembled and the air guide of the guide valve located in the central portion of the assembly group. The blade is characterized in that its angle is adjusted so that the air passing through the guide valve is directed downward. When the number of guide valves is 5 or less, for example, when 4 are likely to be used, the effect of diffusing the air passing through the air outlet in all directions can be fully exerted, but it is directly below the air outlet. Since the direction receives wind pressure, so to speak, a decompressed space is formed. As a result, a part of the air that has flowed out so as to diffuse in all directions tends to flow backward in a direction directly below, and in this case, the flow of the air supplied as a result is partially disturbed, so that the effect of the present invention There is room for improvement from the point of maximizing the use of. Therefore, when there are six or more guide valves, for example, when there are six guide valves, the central one or two guide valves are adjusted so that the air flows directly downward, so that such a backflow of air is prevented and blown. Air that has passed through the outlet can be evenly diffused in all directions. Therefore, the effects of the present invention can be maximized.

According to a fourth aspect of the present invention, in the configuration of the first to third aspects of the invention, the storage case is formed of a perforated plate. By thus using the perforated plate as the storage case, the air passing through the storage case can be rectified and then supplied in all directions, so that the diffusion efficiency in the horizontal direction can be improved. Therefore, it is possible to more reliably form a uniform temperature distribution in the horizontal direction from a position just below the outlet, that is, at a height close to the ceiling, and a laminated state of air without vertical turbulence, that is, a laminar flow state. The advantage is that

According to a fifth aspect of the present invention, in the configuration of the first to fourth aspects of the invention, the guide valve and the storage case are formed of a light metal plate capable of preventing static electricity. It is a feature. In general, dust has a property of easily adhering to an electrostatic charge, so when the air outlet in which the dust is present is made of a plastic material, the dust adheres to the member and grows. . For this reason, work for cleaning / removing is required, and if left untreated, the efficiency of the air conditioning itself becomes poor. However, if the guide valve and the storage case made of a light metal that can prevent static electricity are used as in the present invention, such an inconvenience can be avoided and the effects of the present invention can be sufficiently exhibited.

The invention according to claim 6 is characterized in that, in the configuration of the invention according to claims 1 to 5, the turbulent flow type clean room is a room in which an integrated circuit test apparatus is installed. By making the present invention suitable for a turbulent flow type clean room in which an integrated circuit test device is installed, it is possible to prevent the occurrence of dew condensation in the integrated circuit test device which has conventionally occurred in such a turbulent flow type clean room, and to perform dew removal work Can be eliminated. The invention according to claim 7 is characterized in that, in the configuration of the invention according to claims 1 to 5, the turbulent flow type clean room is a room where animals and plants live. By making the present invention suitable for a turbulent flow type clean room where animals and plants live, inconveniences that have conventionally occurred in such a turbulent flow type clean room, that is, inhabitation of animals and plants due to uneven temperature distribution. It is possible to eliminate the adverse effect on it. The invention according to claim 8 is characterized in that, in the configuration of the invention according to claims 1 to 5, the turbulent flow type clean room is a room for handling food. By making the present invention suitable for a turbulent flow type clean room that handles foods, the disadvantages that have conventionally occurred in such a turbulent flow type clean room, that is, deterioration of food quality due to uneven temperature distribution, Can solve the problem of product value.

[0014]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings (FIGS. 1 to 6). FIG. 1 is a schematic explanatory view showing an air conditioning system of a turbulent flow type clean room (hereinafter simply referred to as “room” in the description of the embodiments) in which an integrated circuit test device is installed, and FIG. 2 is arranged at an air outlet of the room. FIG. 4 is a perspective view representatively showing one of a plurality of guide valves to be operated, FIG. 3 is a perspective view in which six guide valves are provided in a perforated plate storage case, and FIG. 4 is shown in FIG. It is a perspective view which shows the state which looked at the storage case made from a perforated plate from the back side.

As shown in FIG. 1, an air conditioning system for a room in which an integrated circuit test apparatus is installed basically includes ducts 4 and 6 for connecting both the room 3 and the air conditioning system 1 installed outside the room 3. It consists of and. The air conditioning equipment 1 for circulating the air in the room 3 and the room 3 in which the integrated circuit test device 2 is installed are connected by a duct 4. The air-conditioning equipment 1 is configured to include a filter 7, a water heater 8, a water cooler 9, a steam generator 10, and a blower 11. The outlet of the blower 11 is connected to the duct 4. Further, a suction fan 5 for taking in fresh air from outside is provided on the side wall of the air conditioning equipment 1, and an outlet of the suction fan 5 is provided for guiding the air taken out from the room 3 to the air conditioning equipment 1. Duct 6
The tip is open.

The duct 4 is a pipe for sending the air reactivated through the air conditioning equipment 1 into the room 3, and is installed so as to crawl on the back side (upper side surface in the drawing) of the ceiling 40 in the room 3. ing. A connecting pipe 13 that penetrates the ceiling 40 and opens to the inside of the duct 4 is provided at the center of the recessed space 40 a formed in the ceiling 40. That is, the air outlet 12 for the room 3 is secured by the connecting pipe 13 and the recess space 40a. A filter 15 for removing dust contained in the supplied air is attached at a position closer to the room 3 side of the recess space 40a. Further, below the filter 15, the ceiling 40
A perforated plate storage case 23 in which six guide valves 16 peculiar to the present invention are stored is attached to a position slightly below the lower surface of the above.

As shown in FIG. 2, each guide valve 16 is constructed by attaching side plates 19 to both ends of air guide blades 18 arranged in parallel in a blind shape. Installation is
This is done by tightening bolts and nuts at the center of both ends of each air guide vane 18 and the center of each side plate 19. By loosening the nut, the angle of each air guide vane 18 can be changed from 0 ° to 90 °.
It is designed so that it can be changed in the range of °. The upper edge portion 18a of each air guide vane 18 allows the air flowing from the connecting pipe 13 to pass through the guide valve 16 without difficulty even if the mounting angle of each air guide vane 18 is changed.

The perforated plate storage case shown in FIG.
It's called a "punch case." ) And a specific configuration when the guide valve 16 is stored in the case will be described below with reference to FIGS. 3 and 4. As shown in FIG. 3, the punch case 2
There are 6 guide valves 16 inside the 3 (typically 3
Only the group is shown. ) Is stored in the guide valve 16
The mounting angle of the air guide vanes 18 may be changed so that the mounting directions of the guide valve 16 as a whole are different from each other. However, when the air outlet 12 is not near the end of the ceiling 40, the air guide vanes 18 of the two guide valves 16 located at the center are directed to the bottom of the other four guide valves in principle. The angle of each air guide vane 16 is changed so that 16 is directed in different directions sequentially (for example, north, south, east, and west directions). A flange portion 24 is formed on the peripheral portion of the punch case 23, and has screw holes 27 provided at appropriate intervals. As shown in FIG. 1, the flange portion 24 is screwed to the lower surface of the ceiling 40 so that the plurality of guide valves 16 can be easily attached directly below the air outlet 12.

Next, the operation of the room air conditioning system configured as described above will be described. When the air conditioning system is operated, first, the suction fan 5 rotates and fresh air outside is guided to the air conditioning equipment 1. Introduced amount is room 3
About 3% of the amount of air taken out and circulated is preferable. This is because the room pressure of the room 3 can be maintained in a preferable state by adding this amount of air. The introduced air is mixed with the air discharged from the room 3, and then the dust in the mixed air is first removed by the filter 7. Then, it is exchanged by passing through either the water heater 8 or the water cooler 9 depending on the detected temperature in the room 3. The air that has passed through the water heater 8 or the water cooler 9 is adjusted to have a desired humidity while passing through the steam generator 10, and then sent to the blower 11. The adjusted air pushed out into the duct 4 by the blower 11 reaches the inside of the air outlet 12 through the duct 4 and the connecting pipe 13. The reached air is supplied from the entire lower surface of the filter 15 and reaches the guide valve 16 after finer dust (dust that cannot be removed by the filter 7) is completely removed by the filter 15.

The air reaching the guide valve 16 enters between the air guide vanes 18 (see FIG. 3), and the air guide vanes 18
Flows along the surface of the. As described above, since the guide valve 16 is arranged so that the air guide vanes 18 face all directions, the air passing through the guide valve 16 naturally flows so as to spread in all directions. Therefore, the blown-out airflow quickly mixes with the room air around the ceiling of the room 3. As a result, the temperature inside the room 3 is small, that is, the room 3 is in a substantially uniform room temperature state.

Therefore, even when cold air is supplied from the air outlet 12, it is possible to avoid the occurrence of dew condensation in the integrated circuit test apparatus 2 which has been a problem in the conventional air conditioning system in the turbulent flow room. The air below the room 3 is taken out by an exhaust fan 25 provided on the lower part of the side wall of the room 3 and then sent to the air conditioning equipment 1 through the duct 6 for recirculation.

The above embodiment describes the case where the air supply device of the turbulent flow type clean room according to the present invention is applied to the integrated circuit test device room. The present invention can be applied to a room where food is handled, such as a pet shop, and a food factory, and a suitable air conditioning system can be constructed with a configuration that can easily incorporate a deodorizing material.

[0023]

[Comparative Example] Hereafter, the uniformity of the temperature distribution obtained by the air-conditioning system in which the air supply device according to the present invention is applied to the integrated circuit test equipment room is compared with the temperature distribution obtained by the conventional air-conditioning system of the integrated circuit test equipment room. Compare while referring to.
FIG. 5 is an indoor air velocity measurement diagram obtained when the air conditioning system of the conventional integrated circuit test equipment room is operated, and FIG. 6 is operating the air conditioning system of the integrated circuit test equipment room equipped with the air supply device of the present invention. It is a wind velocity measurement figure of the room obtained when doing. 5 and 6, both of which are viewed from the ceiling of the test equipment room toward the floor, where the solid line encircles the square is the position where the integrated circuit test equipment exists, and the dotted line encloses the rectangle is the guide. The position where the valve is present is shown. The arrow in the dotted line indicates the direction in which air is supplied by each guide valve, and the black dot indicates that it is oriented directly below.

In the conventional air conditioning system, the air supplied into the test equipment chamber flows down straight in the floor direction.
Therefore, as shown in FIG. 5, in the vicinity of the integrated circuit test apparatus, the range F of the flow velocity range of air is 0.50 m / s or more, which is the maximum. Further, in a place away from the integrated circuit test equipment, the range of the flow velocity of air is 0.05, which is the minimum.
The range A is less than or equal to m / s. That is, since the distance between the maximum range and the minimum range is very large, and the boundary line of the flow velocity range is crowded, the room as a whole can be viewed flatly and vertically even at room temperature. It can be understood that the unevenness is remarkable.

On the other hand, when the air conditioning system of the present invention is operated, the flow velocity of air is 0.30 as shown in FIG.
It exists from a range E of m / s to 0.50 m / s to a range A of 0.05 m / s or less. However, the range A of 0.05 m / s or less is much narrower than the case of FIG. Further, there is no range F of 0.50 m / s or more. In this way, the distance between the maximum range and the minimum range is small, and the boundary line of the flow velocity range is different from that in the case of FIG. It is easy to understand that the unevenness is very small.

The total cost required to achieve the same effect as the above-described air conditioning system of the present invention by installing a large air diffusing device on the ceiling and operating the device is calculated. As a result, it was found that the air-conditioning system was 10 times more effective, and the effectiveness of the air conditioning system according to the present invention, particularly the economic superiority, became clear.

[0027]

As described above, according to the first aspect of the present invention, a plurality of air guide vanes are provided in a blind shape at the outlet of the air re-supplied to the turbulent flow type clean room. In addition, at least four guide valves are installed so that each guide vane can be individually changed in angle, and the guide valves are assembled so that the overall shape is close to a square with the mounting direction of each guide valve being independently changeable. It has been arranged. Therefore, the blown airflow can be quickly mixed with the indoor air, and a turbulent flow type clean room with little temperature unevenness in the room can be secured. Therefore, the present invention, as an air supply device for securing such a turbulent flow type clean room, can be made very economical because it does not use a large-scale air diffusion device as in the past, and is compact. Is.

According to the invention described in claim 2, in addition to the effect of the invention described in claim 1, by arranging the guide valve in the storage case, the angle of each air guide vane and the mounting direction of the guide valve can be adjusted. It is possible to easily clean these members, and it is possible to make the maintenance advantageous.

According to the invention of claim 3, in addition to the effect of claim 1 or 2, in the case where there are 6 or more guide valves, for example, 6 guide valves, air is directed downwardly in the central 1 or 2 groups. It is possible to prevent the backflow of air at the center and to evenly diffuse the air that has passed through the air outlets in all directions by adjusting so that the air flows in the direction. Therefore, there is an effect that the effect of the present invention can be maximized.

In addition to the effects of the inventions of claims 1 to 3, the invention according to claim 4 uses a perforated plate as the storage case to rectify the air passing through the storage case and then omnidirectionally. It is possible to increase the diffusion efficiency in the horizontal direction, since it can be supplied to. Therefore, it is possible to more reliably form a uniform temperature distribution in the horizontal direction from a position just below the outlet, that is, at a height close to the ceiling, and a laminated state of air without vertical turbulence, that is, a laminar flow state. It has the effect.

According to a fifth aspect of the present invention, in the construction of the first to fourth aspects of the invention, the guide valve and the storage case are formed of a light metal plate capable of preventing static electricity.
In general, dust has a property of easily adhering when it is charged with static electricity.Therefore, when the air outlet in which the dust is present is made of a plastic material,
Dust adheres to the member and grows. Therefore, cleaning
The work for removal is required, and if left untreated, the efficiency of the air conditioning itself deteriorates. However, according to the present invention, such an inconvenience does not occur and the effects of the present invention can be sufficiently exerted.

According to the invention of claim 6, in addition to the effects of claims 1 to 5, by making the present invention suitable for a turbulent flow type clean room in which an integrated circuit test device is installed, It is possible to prevent the dew condensation of the integrated circuit test apparatus from occurring in the turbulent flow type clean room and to eliminate the need for the dew removal work.

According to the invention of claim 7, in addition to the effects of claim 1 to claim 5, the present invention is suitable for a turbulent flow type clean room where animals and plants inhabit. It is possible to obtain the effect of eliminating the inconvenience that has occurred in such a turbulent flow type clean room, that is, the adverse effect on the habitation of plants and animals due to the uneven temperature distribution.

According to the invention of claim 8, in addition to the effects of claims 1 to 5, the present invention is suitable for a turbulent flow type clean room where food is handled. It is possible to solve the problems that have occurred in such a turbulent flow type clean room, that is, the problems of food quality deterioration and product value problems caused by uneven temperature distribution.

[Brief description of drawings]

FIG. 1 is a schematic explanatory view showing an air conditioning system of a turbulent flow type clean room in which an integrated circuit test device is installed.

FIG. 2 is a perspective view typically showing one of a plurality of guide valves arranged at an air outlet of a turbulent flow type clean room.

FIG. 3 is a perspective view of six guide valves provided in a perforated plate storage case.

FIG. 4 is a perspective view showing a state where the perforated plate storage case shown in FIG. 3 is viewed from the back side.

FIG. 5 is an indoor wind speed measurement diagram obtained when the air conditioning system of the conventional integrated circuit test apparatus room is operated.

FIG. 6 is a wind velocity measurement diagram in a room obtained when an air conditioning system in which the air supply device of the present invention is applied to an integrated circuit test device room is operated.

[Explanation of symbols]

 1 Air Conditioning Equipment 2 Integrated Circuit Testing Equipment 3 Integrated Circuit Testing Equipment Room (Turbulent Flow Clean Room) 4, 6 Duct 5 Suction Fan 8 Water Heater 9 Chiller 10 Steam Generator 11 Blower 12 Air Outlet 16 Guide Valve 18 Air Guide Wing 23 Perforated plate storage case A Air flow

 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Akitoshi Yoshiyo 75 Wada-cho, Nishiwaki-shi, Hyogo Genesis Technology Co., Ltd. Nishiwaki Plant (72) Inventor Ichiro Hata 75 Wada-cho, Nishiwaki-shi, Hyogo Genesis Technology Co., Ltd. Company Nishiwaki Works (72) Inventor Kyohei Yamashita 2-26-20 Minami-Otsuka, Toshima-ku, Tokyo Techno-Ryowa Tokyo Main Store (72) Inventor Keiji Kato 2-26-20 Minami-Otsuka, Toshima-ku, Tokyo Stock company Techno Ryowa Tokyo head office (72) Inventor Masafumi Kikuchi 2-7-3 Tenma, Kita-ku, Osaka City, Osaka Prefecture Techno Ryowa Osaka branch (72) Inventor Seiichi Imai Minami Toshima-ku, Tokyo 2-26-20 Otsuka In-house Techno Ryowa Co., Ltd.

Claims (8)

[Claims] 1. The temperature, humidity and cleanliness of the room are adjusted by discharging the indoor air and adjusting it to a predetermined air condition in order to maintain the cleanliness of the room at a high level. In the turbulent flow type clean room air supply device, a plurality of air guide vanes are arranged in a blind shape at the outlet of the air re-supplied to the turbulent flow type clean room, and each guide vane is individually angled. Characterized by arranging at least four guide valves that are mounted so that they can be changed so that the overall shape is close to a square with the mounting direction of each guide valve being independently changeable. Turbulent flow clean room air supply device. 2. The air supply device for a turbulent flow type clean room according to claim 1, wherein the guide valve is arranged in a storage case attached to the air outlet. 3. At least six guide valves are assembled, and the air guide vanes of the guide valves located at the center of the assembly are angle-adjusted so that the air passing through the guide valves is directed downward. An air supply device for a turbulent flow type clean room according to claim 1 or 2. 4. The air supply device for a turbulent flow type clean room according to claim 1, wherein the storage case is formed of a perforated plate. 5. The guide valve and the storage case are formed of a light metal plate capable of preventing static electricity.
An air supply device for a turbulent flow type clean room according to claim 4. 6. The air supply device for a turbulent flow type clean room according to claim 1, wherein the clean room is a room in which an integrated circuit test device is installed. 7. The air supply device for a turbulent flow type clean room according to claim 1, wherein the clean room is a room where plants and animals live. 8. The air supply device for a turbulent flow type clean room according to claim 1, wherein the clean room is a room for handling food.