JP2002205792A - Box structure for heat treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a box structure for heat treatment equipment which is easy to mount heat insulating materials and can obtain excellent heat insulating effects. SOLUTION: Panels 41 to 45 are placed via a heat insulating material 5 on external surfaces of an inner vessel 3 in which heat treatment is to be performed, and the panels 41 to 45 are fixed to one another to provide an outer vessel 4. An outer vessel cover 6 (61 and 62) is also mounted on an external surface of the outer vessel 4 with a gap.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a housing structure of a heat treatment apparatus.

[0002]

2. Description of the Related Art FIG. 5 is a view schematically showing a housing structure of a conventional heat treatment apparatus. First, in (a), a square cylindrical outer container 102 is set on a base 101.
Then, a pre-assembled inner container 103 for performing heat treatment inside is inserted into the outer container 102. After the insertion, the heat insulating material 104 is pushed into the gap between the outer container 102 and the inner container 103 as shown in FIG.

[0003]

In the case structure of the conventional heat treatment apparatus as described above, the heat insulating material 104 is provided from above.
The work of pushing in is not easy, and the work efficiency is poor. Further, the heat insulating material 104 may not reach the lower corner, and in such a case, a sufficient heat insulating effect cannot be obtained.

[0004] In view of the above-mentioned conventional problems, an object of the present invention is to provide a housing structure of a heat treatment apparatus in which a heat insulating material can be easily mounted and an excellent heat insulating effect can be obtained.

[0005]

According to the housing structure of the heat treatment apparatus of the present invention, a panel is disposed on an outer surface of an inner container for performing heat treatment therein through a heat insulating material, and the panel is fixed to the outer container. The outer container is provided with an outer container cover with a gap kept on at least a part of the outer surface of the outer container. In the housing structure of the heat treatment apparatus configured as described above, after the inner container is installed, the panels are arranged via the heat insulating material, and the panels are fixed to each other to form the outer container. In addition, the surface temperature of the outer container cover is lower than that of the outer container by forming an air layer between the outer container and the outer container.

[0006]

FIG. 1 is a view showing the appearance of a heat treatment apparatus according to an embodiment of the present invention, wherein FIG.
(B) is a right side view with respect to (a). FIG.
FIG. 3 is a plan view showing a schematic structure inside the heat treatment apparatus. In FIG. 1, the heat treatment apparatus includes a large number of support legs 1.
The heat treatment chamber 2 is configured on a rectangular parallelepiped base 1 supported by a.

In FIG. 1 and FIG. 2, a heat treatment chamber 2 has a box-shaped inner container 3 that can be sealed and an outer surface that covers the other five surfaces (back, front, both side surfaces, and upper surface) except the bottom surface of the inner container 3. Container 4;
A heat insulating material 5 provided between the inner container 3 and the outer container 4 and between the bottom surface of the inner container 3 and the upper surface of the base 1, an outer container cover 6 covering a part of the outer surface of the outer container 4, And a top cover 7 above the outer container cover 6. The outer container 4 is the above 5
It is composed of five panels (details will be described later) corresponding to the surfaces, and each panel has a lid-like shape with its edges being bent. An inspection door 8 is provided on the back side of the heat treatment chamber 2, and a shutter 10 which is opened and closed when loading or unloading the workpiece 9 is provided on the front side. A heat insulating material 5 is attached inside the inspection door 8 and the shutter 10, respectively.

Inside the inner container 3 (FIG. 2), there are provided a heater 11, a sirocco fan 12 for circulating hot air, and a filter 13 for keeping the hot air below a predetermined cleanliness. When the sirocco fan 12 is driven to rotate by the motor 14 attached to the outside of the outer container 4, the hot air circulates in the path indicated by the arrow, and the object 9 is heat-treated. The processing object 9 is, for example, a glass substrate used for a flat display such as a liquid crystal panel or a plasma display panel, and is mounted on a rack (not shown) in multiple stages. The space for accommodating the motor 14 is covered with a decorative cover 15.

Next, the heat treatment chamber 2 configured as described above
Will be described. FIG. 3 is an exploded perspective view showing an assembling procedure of a main housing constituting the heat treatment chamber 2. It is assumed that the inner container 3 has been assembled in advance. In the figure, first, the inner container 3 is placed at a predetermined position on the base 1 via a heat insulating material 5 and fixed to the base 1. Next, five panels 41, 42, 43, 44, which constitute the outer container 4,
45, four panels 41 on the back, front and both sides
The heat insulating material 5 is put on the inner surface side of. Then, each of them is arranged along the corresponding surface of the inner container 3, and each panel 4
1 to 44 are fastened to each other and also to the base 1. In addition, the remaining one panel 45 is stacked on the top plate of the inner container 3 with the heat-insulating material 5 interposed therebetween, with the side of the edge portion having no turn-down facing down. To 44. Thus, the outer container 4 (41 to 45) is formed on the five surfaces of the inner container 3 via the heat insulating material 5. The heat insulating material 5 is disposed on the entire outer surface (six surfaces) of the inner container 3 including the bottom surface. Since this work is the work of attaching the panels 41 to 45 after attaching the necessary heat insulating material 5 in advance, it can be performed easily and in a short time. Insulation material 5
Can reliably reach all six surfaces, so that an excellent heat insulating effect can be obtained.

FIG. 4 is a longitudinal sectional view showing a fastening structure between members at the upper part of the outer container 4. As shown in FIG. After the outer container 4 is constructed as described above, the top cover 7 is attached to the upper end surfaces of the rear panel 41 and the right panel 44 of the outer container 4 as shown in FIG. The top cover 7 is attached to a part other than the elevating part of the shutter 10 on the front side, but this is not shown. A large number of holes 7a for passing air are provided in the lower end surface of the top cover 7 in the attached state. Subsequently, the rear panel 61 and the right panel 62 of the outer container cover 6 are attached. The upper portions of these panels 61 and 62 are fastened to the top cover 7, and the lower portions are fastened to the base 1. By attaching the outer container cover 6, as shown in FIG.
44) and an air layer is formed. Thereby, the surface temperature of the outer container cover 6 is lower than the surface temperature of the outer container 4. In addition, the outer container cover 6 has a meaning of hiding bolts and the like exposed on the surface of the outer container 4 to improve the appearance.

Finally, the inspection door 8 is attached to the rear panel 61 of the outer container cover 6 in FIG. 3, and the shutter 10 and the like are attached to the front side to complete the main housing of the heat treatment chamber 2. I do. The outer container cover 6 and the top cover 7 can be provided not only on the rear surface and the right side surface but also on other surfaces as necessary.

[0012]

The present invention configured as described above has the following effects. According to the housing structure of the heat treatment apparatus of the present invention, since the outer container is formed by fixing the panels to each other via the heat insulating material after the inner container is installed, the heat insulating material can be easily mounted, The outer container is easy to assemble. In addition, since the heat insulating material reaches every corner without fail, an excellent heat insulating effect can be obtained. Furthermore, since the outer container cover forms an air layer between the outer container and the outer container, the surface temperature of the outer container cover is lower than that of the outer container, which is safe.

[Brief description of the drawings]

FIG. 1 is a view showing the appearance of a heat treatment apparatus according to an embodiment of the present invention, wherein (a) is a rear view and (b) is a right side view with respect to (a).

FIG. 2 is a plan view showing a schematic structure inside the heat treatment apparatus.

FIG. 3 is an exploded perspective view showing an assembling procedure of a main housing constituting a heat treatment chamber of the heat treatment apparatus.

FIG. 4 is a longitudinal sectional view showing details of a fastening structure between members in an upper portion of the outer container of the housing.

FIG. 5 is a perspective view schematically showing a housing structure of a conventional heat treatment apparatus.

[Explanation of symbols]

 3 inner container 4 outer container 5 heat insulating material 6 outer container cover 41-45 panel 61 back side panel 62 right side panel

Claims (1)

[Claims] A panel is disposed on the outer surface of an inner container in which heat treatment is to be performed, via a heat insulating material, and the panel is fixed as an outer container, and a gap is maintained in at least a part of the outer surface of the outer container. A housing structure of the heat treatment apparatus, wherein an outer container cover is provided.