JP2002189019A - System for measuring and monitoring exhaust gas - Google Patents

Abstract

PROBLEM TO BE SOLVED: To create and disclose indices for altering and optimizing process conditions and to reduce the discharge of pollutants in an exhaust gas measuring and monitoring system, for measuring and monitoring exhaust gases discharged from an incinerator for incinerating waste. SOLUTION: In the exhaust gas measuring and monitoring system for measuring and monitoring exhaust gases discharged from an incinerator for incinerating waste, the components of the exhaust gases are measured on a plurality of items. On the basis of the components of each item, a reference numerical value is created, and the exhaust gases are monitored, on the basis of the reference numeral values thereafter.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an exhaust gas measurement / monitoring system for measuring and monitoring exhaust gas discharged from an incinerator for incinerating general waste and industrial waste.

[0002]

2. Description of the Related Art When waste is incinerated at a refuse incineration plant, highly toxic dioxin is generated in the exhaust gas, causing environmental pollution, and has become a serious social problem in recent years. Here, dioxin is a general term for polychlorinated dibenzoparadioxins (PCDDs) having 75 types of isomers and polychlorinated dibenzofurans (PCDFs) having 135 types of isomers. PCBs). Hereinafter, dioxins and a group of compounds related thereto are abbreviated as dioxins.

[0003] Various methods have been attempted in recent years for measuring dioxins from exhaust gas.
There is one as disclosed in Japanese Patent Application Laid-Open No. 10-267245. JP-A-10-267245 discloses that
The secondary combustion air volume is adjusted based on multiple parameters such as the exhaust gas analyzer and CO concentration meter that measure the concentration of chlorobenzene and chlorophenols, the furnace outlet temperature, and the secondary combustion air volume. Thus, it is disclosed that the generation of dioxins in exhaust gas is suppressed.

[0004]

In the prior art, incinerators are controlled based on parameters that change every moment, such as each measurement value sampled from the outlet of the furnace, according to a unique arithmetic expression. . In other words, since a unique arithmetic expression is used, the control method itself does not change. Also, the correlation of each parameter is based on a predetermined unique correlation and does not change.

However, in an actual apparatus, from the start of combustion in an incinerator until exhaust gas is discharged from the chimney into the atmosphere, the exhaust gas passes through many spaces having different temperatures, and many chemical reaction processes in the exhaust gas. Is discharged through. Further, even when the process conditions are constant, the properties of the exhaust gas may change in a time series. Exhaust gas undergoing such a complicated process has various changes in properties, and the correlation between the parameters obtained from the measuring device is not always uniform, but changes dynamically.
Therefore, in order to reduce dioxins, it is necessary to analyze the trend of accurate parameter correlation, change and optimize process conditions.

In the prior art, the calculation method for performing control is constant, and it is difficult to follow such a dynamic change.

SUMMARY OF THE INVENTION An object of the present invention is to provide a system for measuring and monitoring exhaust gas discharged from an incinerator for incinerating waste, in which a process condition is changed and optimized. The purpose of this is to disclose indicators for the reduction of emissions and to reduce emissions of harmful substances.

[0008]

The object of the present invention is to measure and monitor the exhaust gas discharged from an incinerator for incinerating waste, by measuring the components of the exhaust gas over a plurality of items, This is achieved by creating a reference value based on the reference value and thereafter monitoring the exhaust gas based on the reference value.

A specific example will be described below. (1) System Configuration In order to achieve the above object, in a specific example, chlorophenols and chlorobenzenes which are precursors of dioxins in exhaust gas and hydrocarbons which are indicators of unburned substances are reduced from atmospheric pressure to low vacuum. Mass spectrometer that ionizes in a region, quantifies the ions by mass spectrometry, and continuously obtains the concentration of dioxins, chlorophenols, chlorobenzenes and hydrocarbons in the exhaust gas, and the mass spectrometer In the above, other components (parachloric acid chloride, hydrogen bromide, sulfuric acid, moisture, oxygen, carbon monoxide, etc.) obtained simultaneously with the ions of the dioxins, chlorophenols, and chlorobenzenes are subjected to data processing by the mass spectrometer. And the higher-order management equipment section, and further transport the measurement gas (exhaust gas) from the flue to the mass spectrometer. In a pipeline system provided in a Nox meter, a Sox meter, an HCL meter, a CO meter, and an oxygen meter that continuously monitor the components of the exhaust gas, the components and concentrations thereof are collected by branching, or Different from the collecting position, it is collected in a separate piping system, the information is collected by the data processing unit of the mass spectrometer and the higher-order management equipment unit, and further, the electric power, which is the operation variable of the plant, The set temperature of the dust collector, the process flow rate and the process temperature of the exhaust gas line are collected and collected by the data processing unit of the mass spectrometer, and the calculation to analyze and judge the “properties” of the exhaust gas based on these information The means is provided in the mass spectrometer or a higher-level management device unit, and the result of the calculation means is transmitted and disclosed to another higher-level management device or control device. (2) Functional Configuration (2-1) Detection of Specific Components in Exhaust Gas by Mass Spectrometer In the above mass spectrometer, dioxins, chlorophenols, chlorobenzenes having chlorine and oxygen elements in the exhaust gas in a plurality of molecules. Detection with high sensitivity. Chlorine and oxygen are elements having high electronegativity, and organic compounds containing many of these elements tend to capture low-energy thermoelectrons and become negative ions. Chlorophenols have one or more chlorine atoms and one oxygen atom in the molecule. Also, chlorobenzenes have one or more chlorine atoms in the molecule.
The highly toxic dioxins have from 4 to 8 chlorine atoms and 2 oxygen atoms in the molecule. For this reason, dioxins and the like are efficiently ionized by thermoelectrons generated by negative corona discharge at atmospheric pressure, and continuous monitoring becomes possible by taking the amount of ions into the mass spectrometer without attenuation. At this time, in the mass spectrometer, H2SO4, HBR, H2SO4, NOX, SO
Molecules with high electronegativity, such as X and CO3, are also likely to become negative ions, and are simultaneously ionized and detected.

Further, in the present mass spectrometer, the unburned substances (hydrocarbon compounds) in the exhaust gas are efficiently ionized by thermionic electrons generated by switching to a positive corona discharge, and the ions are converted into the mass spectrometer. , Continuous monitoring becomes possible.

At this time, the ion accelerating voltage applied to each electrode and the lens system is switched from negative to positive in synchronization with switching of the needle electrode from negative corona discharge to positive corona discharge.

According to the above configuration, when a positive voltage is applied to the needle-shaped electrodes, the sample ionized into positive ions is accelerated on the path where the voltage of each electrode reaches the detection section of the mass spectrometer, and the efficiency is increased. Product ions can be detected well.

Preferably, the switching of the voltage applied to the needle portion includes a power source for outputting a positive high voltage, a power source for outputting a negative high voltage, and a switching mechanism for switching the connection between the two power sources and the needle portion. And the switching mechanism operates in synchronization with the polarity switching of the ion acceleration voltage and the drift voltage switching.

In the case of measuring positive ions, a positive high voltage is applied to each electrode as an ion accelerating voltage so that “electrode voltage 1> electrode voltage 2”, and a positive high voltage is applied to the needle electrode. Applied. When measuring negative ON, a negative high voltage is applied to the ion accelerating voltage so that “electrode voltage 1 <electrode voltage 2”, and a negative high voltage is applied to the needle electrode. These switching operations are all performed synchronously.

[0015] With this, both the positive and negative ions generated in the ionization chamber can be measured with high sensitivity. (2-2) Extraction of characteristic components other than the specific substance in the exhaust gas by the process sensor Secondly, apart from the components in the exhaust gas, HC generally provided in the plant as an exhaust gas monitoring sensor is used.
Process data from an L meter, NOX meter, SOX meter, CO meter, oxygen meter, etc. are obtained.

(2-3) Process variable information Third, apart from the data from the mass spectrometer and the data from each process sensor, the operation and operation of the plant
Data such as the operating temperature of the electric precipitator, the input steam flow rate, the temperature distribution and flow rate in the flue, and the like, which are operation variables for adjustment, are obtained. (2-4) Calculation means The data group from the mass spectrometer, the process sensor, and the process variable information of the items (2-1) to (2-3) is converted into a data processing unit of the mass spectrometer or a data processing unit of the mass spectrometer via a converter. Stored in the upper management device. Such data varies depending on the amount and quality of refuse input to the incineration plant, and the plant operation at that time also differs in various ways.

According to the prior art, these individual pieces of information are handled in a single manner, so that it takes a lot of time to find the correlation between these pieces of data. It took more time to find the best operating parameters.

The calculating means of the present system is a calculating means for diagnosing or judging the property state of the exhaust gas based on data representing the property of the exhaust gas and information data resulting from the operation and operation.

An "eigenspace when the applicable exhaust gas is operated" is created based on information from various analyzers and plant variables at the time of the applicable exhaust gas, and thereafter, it is calculated from a difference from the "eigenspace when the applicable exhaust gas is operated". A method of sequentially comparing the isolation values of the respective eigenspaces, and disclosing the main parameters (characteristic elements) in each parameter or element forming the “eigenspace when the relevant exhaust gas is operated”. did.

Hereinafter, a detailed flow of the method will be described. (A) Collection of data for creating a specific space of the exhaust gas In the operation mode of an arbitrary plant, when the property of the exhaust gas changes, data for creating a space of the “specific space of the exhaust gas” at that time is collected. This "specific space of the exhaust gas" is different in the configuration, incinerator, and operation method of various incineration plants. You can do it.

For example, in the weekly operation mode on a daily basis, the refuse to be injected into the incineration plant is relatively soft and in a dry state and satisfies the regulation value of the exhaust gas at the steady incineration amount. Is relatively soft and moist, and satisfies the regulation value for exhaust gas at steady incineration volume. The garbage input into the incineration plant is categorized into a relatively hard and moist state and a state of steady incineration that satisfies the emission gas regulation value. Eigenspace ”. Alternatively, it is also possible to set the operation time completely opposite to the above as “the intrinsic space of the exhaust gas”. (B) Create a data group of the reference space of the “eigenspace of the exhaust gas” in the above item (A). The data group of the item (A) is normalized to each “eigenspace of the exhaust gas” by the average value and standard deviation. Become (C) Creating a reference space for the “eigenspace of the exhaust gas” A statistical amount D の 2 (Maharanobis distance) of the “eigenspace of the exhaust gas” is obtained from the data group of item (B). The Mahalanobis distance is a two-dimensional matrix determined only by the number of each element, and the distance is calculated according to the number of data used. The average value is “D ＾ 2”, the average value is “about 1”, and the standard deviation is σ _i int.

Further, after the above calculation, a value other than the expected value observed in the “eigenspace of the exhaust gas” is set, or a statistic D ^ 2intair of “when no exhaust gas is introduced” is obtained.
Its average value is “about 1” and its standard deviation is σint.

This value (D ^ 2intair) indicates the absolute “isolation distance” of each “specific space of the exhaust gas”, and is an index indicating the difference.

In the creation of such a reference space, since the specific substances such as chlorophenols in the exhaust gas are separately calibrated by an internal sample, they need not be used at the time of this creation. Alternatively, it is also possible to input the value of the range that can be calibrated and use it as the reference space.

Further, at this time, the characteristic parameters of the D ^ 2int are extracted and stored using the "eigenspace of the exhaust gas" D ^ 2_int and the data used to create the D ^ 2 intair. By such an operation, the characteristic parameter leading to the present D ^ 2 int is determined. (D) Collection and monitoring of observation data Observation data from exhaust gas is collected (generally different from the data at the time of creating the reference space).

The collected data is subjected to data processing in the same manner as in the above-mentioned items (A) and (B), and D ＾ of the collected data is obtained.
Calculate 2 x (Maharanobis distance). (1) This value D ＾ 2x is compared with the statistic D ^ 2int (maharanobis distance) of the “reference space of the“ eigenspace of the exhaust gas ”obtained in the above item (C)”. If there is no difference between D ^ 2 x and D ＾ 2int in the item (1), for example, a disclosure that “operation can be continued” is made.

On the other hand, if there is a difference, for example, the disclosure of "operation change" is made, and the main factor that has reached the separation distance is disclosed. For example, “CO change”, “HCL change”
And so on. Such information prompts a change in the operation / control state on the plant side.

The "reference space" is defined such that the average vector of the measured values is zero, and the average of the Mahalanobis distances of the objects belonging to the reference space is 1. Therefore, it is the same regardless of the reference space, but since the ideal state corresponding to the zero point is unknown, an operator, a technician or an expert of each plant defines the reference space and measures the reference space. From the data, determine the zero point and the unit quantity.

As described above, the Mahalanobis distance is a distance indicating how far the measured object is separated from the reference space. When the object to be measured does not belong to the reference space, and when the degree of isolation of the distance can be determined by the measured value, the value is set as the signal level value, and the main parameter (characteristic element) when each parameter is increased or decreased is set as the signal level value. calculate. If the degree of isolation of the distance cannot be determined from the measured value, but it is clear that the distance does not fall within the reference space, the isolation of each parameter is classified based on the two-level category of using or not using each parameter. Judge its effectiveness against distance.

In such an operation, important parameters can be finally discarded and selected for all the parameters taken up.

It is also possible to calculate the Mahalanobis distance by using the above-described procedure using only the selected and selected parameters.

In the above-mentioned mass spectrometer, dioxins, chlorophenols and chlorobenzenes having a plurality of chlorine and oxygen elements in the exhaust gas are elements having high electronegativity, and organic compounds containing many of these elements are low. Since the thermal electrons of the energy are easily captured and turned into negative ions, they are efficiently ionized by the thermal electrons generated by the negative corona discharge, and the amount of the ions is taken in, so that the amount can be detected with high sensitivity and continuous calibration becomes possible. Further, H2 in the exhaust gas
SO4, HBR, H2SO4, NOX, SOX, CO3
A molecule having a high electronegativity, such as, is also likely to become a negative ion, and is also ionized at the same time. By capturing the amount of the ion, the amount can be monitored with high sensitivity and continuously. In addition, since the absolute amounts of harmful specific substances such as dioxins, chlorophenols, and chlorobenzenes are calibrated inside the analyzer, the index of only such an amount defines the properties of the exhaust gas. It is possible.

The detected ionic species are components indicating the properties of the exhaust gas.

Further, in the present mass spectrometer, the components in the exhaust gas are efficiently ionized by thermionic electrons generated by switching to the positive corona discharge, and the amount of the ions is taken into a spectrometer. A hydrocarbon-based compound, which is an indicator of a combustible substance, also has high sensitivity and enables continuous monitoring.

The detected ionic species are components indicating the properties of the exhaust gas.

That is, dioxins, chlorophenols, chlorobenzenes, H2SO contained in exhaust gas
4. HBR, H2SO4, NOX, SOX, CO3 and hydrocarbon compounds can be detected with high sensitivity, and exhaust gas components and their properties can be continuously measured and monitored.

In the present system, information other than the components indicating the properties of the exhaust gas from the mass spectrometer is used for general monitoring sensors such as an HCL meter, NOX meter, SOX meter, and CO meter provided in the plant. Can be added to the component indicating the property, the information indicating the property of the exhaust gas is increased, and the accuracy is further improved.

Further, apart from the above-mentioned information other than the components indicating the properties of the exhaust gas, the operating temperature of the plant equipment, the input steam flow rate, the temperature distribution in the flue, and the operating variables for operating and adjusting the operation of the plant. Since data such as the flow rate can be added to the component indicating the property, the information indicating the property of the exhaust gas and the information of the process variable can be integrated and constructed, and further comprehensive measurement, monitoring, and operation can be performed. Will be possible.

The data and the operation and
Based on the information data resulting from the operation, the "calculation means" monitors or determines the "proper exhaust gas property state".

The “proper exhaust gas property state” defines an “eigenspace or reference space” by an operator, a technician or an expert of each plant. This "eigenspace or reference space"
Is a raw data value group measured in, for example, "the refuse to be put into the incineration plant is relatively soft and in an operating state that satisfies the emission gas regulation value in a dry state and steady incineration amount", or A quantified data value group in which the indicated values are categorized (1, 2, 3,...) May be used.

As described above, the "reference space" is defined such that the average vector of the measured values is zero, and the average of the Mahalanobis distances of the objects belonging to the reference space is 1.
Therefore, it is the same regardless of the reference space, but since the ideal state corresponding to the zero point is unknown, an operator, a technician or an expert of each plant defines the reference space and measures the reference space. The zero point and unit quantity are determined from the data.

Therefore, at the time of measurement, the Mahalanobis distance is an index indicating how far the measured object is separated from the reference space.

For this reason, when the object to be measured does not belong to the reference space, it can be determined that the properties of the exhaust gas at the time of the measurement have changed (at this point, the changed content is the component of the exhaust gas or the process variable). It is unknown).

Next, when the degree of separation of the distance can be determined from the measured value or the categorized (1, 2, 3,...) Quantified data, each parameter is increased or decreased using the value as a signal level value. The main parameter (feature element) in the case is calculated. If the degree of isolation of the distance cannot be determined from the measured value, but it is clear that the distance does not fall within the reference space, the isolation of each parameter is classified based on the two-level category of using or not using each parameter. The validity of the distance is determined, and a main parameter (feature element) is calculated.

In such an operation, important parameters that isolate the “proper exhaust gas property state” to be measured are selected and discarded. Therefore, by disclosing this important parameter to the plant operator / manager, etc.,
It is possible to derive measures to improve the operation of the plant.

Further, as the operation and operation of the plant matures, the "reference space" and "important parameters" can be categorized, so that efficient plant operation can be achieved.

[0047]

Embodiments of the present invention will be described below with reference to the drawings. (System Configuration Example) FIG. 1 is a diagram showing a system configuration for automatically and continuously analyzing and measuring chlorobenzenes, chlorophenols, hydrocarbons and other components in exhaust gas.

FIG. 2 is a diagram showing an example of the configuration of the mass spectrometer unit in detail.

This will be described below with reference to FIGS.

This system mainly comprises a mass spectrometer unit 10000 and an HCL meter 100 other than the mass spectrometer.
01, CO total 10002, NOX total, SOX total 100
03, a process sensor group such as an oxygen meter 10004, and the following components.

A collection pipe 1000 for directly sampling the exhaust gas to be measured from a pipe or a chimney of a plant, a filter (1) 1004 for removing dust, oil, mist and hydrogen chloride in the collected exhaust gas; The sample transport pipe (1) 1001 for introducing the exhaust gas into the mass spectrometer main body, the sample transport pipe (2) 1003 provided separately from the apparatus main body, and the sample transport pipe (2) 1003 separately from the apparatus main body. Connected to the sample connection pipe 400 in the main body.
And a branch at one end of the sample transport pipe (1) 1001 to take the exhaust gas sample into the apparatus, guide an exhaust gas containing dioxins, chlorophenols, and chlorobenzenes at a predetermined flow rate, and introduce a sample introduction flange. 33 (FIG. 2) is connected to a sample introduction tube 34 (FIG. 2).

The sample introduced through the sample connection pipe 400 is supplied to the sample introduction pipe 3 provided on the sample introduction flange 33.
4 and is introduced into the sample introduction flange 33.

A part of the sample introduced into the sample introduction flange 33 is introduced into the ionization chamber 10, and the rest is a discharge pipe (2) 36 provided in the sample introduction flange 33 or a discharge provided in the ionization chamber 10. It is discharged from the pipe (1) 16.

The total of the flow rate introduced into the ionization chamber 10 and the flow rate discharged from the discharge pipe (2) 36 or the discharge pipe (1) 16 provided in the ionization chamber 10 is about 1-2 l / mi.
About n.

These flow rates are set by a flow meter 402 and a variable throttle device 401 provided in the sample connection pipe 400. Flow meter 402 and variable aperture device 40
1 may be integrated by a mass flow controller.

The sample to be introduced into the ionization chamber 10 is the electrode (1) 2 provided on one surface of the sample introduction flange 33.
Flows out through the fine pores 21, and the stream lines do not diffuse through the fine pores 21.

The sample containing the detector is ionized in a corona discharge region generated between the electrode (1) 2 and the needle electrode 1 to which a high voltage is applied. This part corresponds to the “ionization part” 10 shown in FIG. The voltage applied to the needle electrode 1 is about 1 to 6 kV when generating positive ions and about -1 to -6 kV when generating negative ions. Supply at

The electrode (1) 2 and a needle electrode applied with a high voltage
In the corona discharge region generated between poles 1
Components undergo ionization and molecular reactions. At such time, ionization
In the course of the molecular reaction, NO3^― Suppresses the ion generation reaction of
Two^―It is important that the existence areas of NO and NO do not overlap
By increasing the speed of the sample flowing out through the pores 21,
O2^― + NO → NO3^―Reaction and ionization efficiency
It is important to increase.

On the other hand, O 2 ⁻ + CP (chlorophenols)
→ (CP_H) ^- + Ion generated by HO2 is electrode (1)
Due to the electric field generated between the electrode 2 and the needle electrode 1 to which a high voltage is applied, ions are drawn out over the flow and taken into the mass spectrometer.

If contaminants such as hydrogen chloride are present in the exhaust gas, an ion-molecule reaction occurs between the O2 ions and the contaminants, and the ionization of the chlorophenols and the like changes.

[0061] For this ^{reason, O2 - + HCL → CL -} +
The reaction of HO2 is carried out by using the removing agent provided in the sample connection pipe 400 and the removing agent and the filter (1) provided in the sample transport pipe (1) 1001.
It is desirable to reduce by the removing agent in 1004. However, since a 100% removal rate cannot be expected, even if impurities such as the HCL and other corrosive gases are present to some extent, if the efficiency of the ionization section is constant and stable, there is a practical problem in continuous measurement. Absent. For this reason, it is desirable that the ion source section be configured to ensure stable corona discharge and durability. In the present embodiment, the needle electrode 1 is located in order to secure the stability and durability of the corona discharge section. This is a configuration example in which a means for separately supplying a pure gas such as dry air or argon to the ionization section is provided to the ionization section. This supply amount is generally set lower than the flow rate flowing out of the fine holes 21.

The operation will be described with reference to FIG. The needle electrode 1 is fixed to the tip of a needle holder tube 11, one end of the needle holder tube 11 is connected to a back gas (2) supply tube 12, and the other end is provided with an HV terminal 13 for supplying power. are doing.

At the end of the back gas (2) supply pipe 12, a back gas connection pipe 300 for supplying a gas such as dry air or argon from the outside, a flow meter 302 for controlling the amount thereof, and a variable throttle device 301 are provided. .

In such a configuration, the pure gas such as the dry air or argon is supplied to the tip of the needle electrode 1 through the needle holder tube 11 as a parallel flow at all times. In the case of (1), oxygen, which is a seed source of primary ionization, can be continuously supplied to the corona discharge region, so that constant primary ions independent of the oxygen concentration in the sample gas can be generated. Therefore, corona discharge is stabilized. Further, since this supplied gas serves as a shield gas for isolating the needle tip, which is at the highest temperature, it is further stabilized and has an effect of preventing corrosion of the needle electrode 1. Such a configuration may be deleted if it can be determined that the configuration is not necessary depending on the properties of the exhaust gas.

The needle holder tube 11 is attached to a needle fixing fitting 14, and the needle fixing fitting 14 is attached to an ionizing flange 15.
, So that it is removable. With this configuration, even in the event that the corona discharge section is hindered, only this portion can be easily regenerated by replacement, cleaning, or the like, thereby improving maintainability.

The sample that has passed through the ionization section is discharged from a discharge pipe (1) 16 provided on the ionization flange 15. On the other hand, a heater (1) 17 is further mounted on the ionization flange 15. This is provided to keep the ionization temperature of the ionization section constant.
This further stabilizes ionization.

Further, the ionization flange 15 is attached to the sample introduction flange 33 via the terminal plate 22.
An electrode (1) 2 is mounted inside the terminal plate 22, and the terminals of the terminal plate 2 are connected to the power generation unit 120 via the power line 121.
It is connected to.

Further, in such a configuration, the needle electrode 1
, The pores 21, the ionization flange 15, and the sample introduction flange 33 are coaxially arranged, and are unitized by function (corona needle discharge section, sample exhaust / warming section, corona discharge electrode section, sample introduction section). In addition, disassembly, reassembly, and replacement work are possible in each unit.

The ionized detector, oxygen, HCL, and other molecules pass through the pores 21 and flow into the sample introduction flange 33 in the pore diameter region of the pores 21. This means that the flow velocity in the sample introduction flange 33 is lower than the flow velocity in the corona discharge region, and the kinetic energy of ionized molecules is large, so that ions can be extracted even when the flow reverses to the flow of the sample. are doing.

Next, these ionized molecules are taken into the first stage of a differential exhaust chamber described later. There is no problem if the diameter of the pores at the first stage of the differential pumping chamber is the same as the diameter of the pores 21. However, since the pumping capacity of the pump provided in the differential pumping chamber is generally limited, the pressure damping ratio is generally reduced. , About 1/10 to 1/100. Therefore, it is necessary to converge the generated ions before taking them into the first stage of the differential exhaust chamber. or,
The generated ions also include corrosive gas such as HCL. When these gases flow into the differential exhaust chamber or the mass spectrometer described later, the detection sensitivity deteriorates and the durability of the device itself decreases. Further, there is a concern that replacement and regeneration of each component in the vacuum chamber will greatly deteriorate maintenance. For this reason, in the present embodiment, means for converging ions flowing out to the sample introduction flange 33 (the ion drift section 20),
The configuration is such that corrosive gas such as HCL does not flow into a vacuum chamber described later.

The ions that have passed through the ion drift portion 20 in the sample introduction flange 33 are converted into fine holes 31 of the electrode (2) 3.
Flows into. At this time, by providing the other surface side of the electrode (2) 3 (the back side of the surface through which the sample gas flows) with a pure gaseous material equivalent to the pressure of the sample introduction flange 33 chamber,
The inflow of the sample gas containing the corrosive gas can be prevented, which is convenient for a differential exhaust chamber and a mass spectrometer described later.

In the embodiment of the present invention, the electrode (2) 3
The pure gas body is drawn into a sealed micro space between the first exhaust flange 4 and the first exhaust flange 4 of the differential exhaust chamber. This space is provided between the electrode (2) 3 and the first pore 4 by the terminal plate (2) 3
A back gas (1) supply pipe 44 is provided at a position other than the first fine hole 41 of the first fine hole flange 4 with an interposed member 2 or a seal member interposed therebetween. A back gas connecting pipe 303 for supplying a gas such as dry air, argon, nitrogen, helium, etc., a flow meter 305 for controlling the amount thereof, and a variable throttle device 304 are provided.

In this configuration, the pure gas such as dry air, argon, nitrogen, helium, etc. is always supplied into the space via the back gas (1) supply pipe 44, and the pure gas is supplied to the first pore. From 41, it flows into the differential exhaust chamber. At this time, by setting the flow rate substantially equal to the flow rate drawn into the differential chamber, the sample gas does not flow at all.

Further, as shown in FIG. 2, the position of the back gas (1) supply pipe 44 and the first fine hole 41 are separated from each other, so that the stream lines are concentrated on the first fine hole 41. Become.
The first fine hole 41 and the fine hole 31 of the electrode (2) 3 are arranged coaxially to prevent diffusion of ions.

On the other hand, the ionized molecules extracted to the pores 31 of the electrode (2) 3 are formed by the dry air,
It is mixed in a gas stream line of argon, nitrogen, helium or the like. At this time, since the streamlines are concentrated in the first pores 41, they are efficiently taken into the first pores 41 (since they are mixed along the streamlines) (ion drift 30).

Further, as shown in FIG.
Reference numeral 3 applies a voltage from the outside via a terminal plate (2) 32 and a power supply generator 120 and a connection line 122. At this time, a potential difference occurs between the first pore 41 and the electrode (2) 3,
The ions can be accelerated, and the ions can be converged on the first pores 41 by the convex shape of the first pores 41.

That is, the ionized molecules extracted to the pores 31 of the electrode (2) 3 are subjected to the fluid force of the gas flow of the dry air, argon, nitrogen, helium, etc., and the first pores 41 and the electrode ( 2) The first pore 4
1 is transported with high efficiency. Further, since the sample gas does not flow, the vacuum chamber is filled only with a high-purity inert gas dilute fluid, and the effect of the chemical noise or the back gas is reduced, so that long-term continuous operation is possible.

In this configuration, when measuring positive ions, the voltage of the electrode (1) 2 is set higher than that of the electrode (2) 3, and the voltage of the electrode (1) 2 is actually 1000 V (V).
1) The electrode (2) 3 has a voltage of about 300 V (V2), and the voltage of the first pore flange 4 is about 50 V (V3). Conversely, when measuring negative ions, it is the opposite of measuring positive ions,
The voltage of the electrode (1) 2 is set higher than that of the electrode (2) 3. In practice, the voltage of the electrode (1) 2 is -1000 V (V1),
(3) is about -300 V (V2), and the voltage of the first pore flange 4 is about -50 V (V3).

The positive / negative switching operation can be executed by the HV power supply 110 manually or within a series of operations of a measurement sequence provided in the apparatus.

Furthermore, since the temperature between the ion drift portion 20 and the electrode (2) 3 in the sample introduction flange 33 and the first pore flange and the temperature of the ion drift portion 30 are more stable, the sample introduction flange is stable. A heater (2) 35 is provided at one end of 33 and a heater 42 is provided at the first pore flange 4, and the temperature is made uniform by external control.

The piping, the electrodes 2 and the terminal plate 2 constituting the ion drift section 30 may be deleted if it is determined that they do not need to be provided depending on the properties of the exhaust gas.

The positive or negative ions generated as described above are taken into the first pore 41.

In the present embodiment, the shape of the exhaust system in which the ions 41 taken into the first pores are passed through the vacuum chamber whose pressure is gradually reduced and introduced into the mass spectrometer (chamber) of the high vacuum chamber. A differential exhaust chamber configuration that can further improve ion permeability with respect to the position and arrangement has been achieved.

In this configuration, the pressure in the first differential chamber between the first and second fine holes 41 and 51 is about 0.1 to 10 T
orr, the damping ratio of the pressure in the second differential chamber between the second pore 51 and the third pore 61 is about 1/10 to 1/50, and the third pore 61 and the fourth pore 71 The pressure in the third differential chamber can be reduced to 0.001 to 0.005 Torr by reducing the pressure decay ratio of the pressure in the third differential chamber to about 1/10, and ions can be reduced to about φ0. 0.2 to 0.6 as a converged ion beam flow.

This ion beam is applied to the fourth fine holes 71 (φ
0.2 to 0.6), and becomes a molecular flow in the mass spectrometry chamber 80.

In such a configuration, the ions that have been in an ion beam flow (viscous flow) behavior under a high pressure have a longer mean free path as the pressure is gradually reduced. At this time, when an electric field is generated in the direction in which the ions are accelerated, the ions accelerate in the electric field and fly repeatedly to collide with neutral molecules. By this collision, water molecules and the like can be desorbed, and the convergence thereof is improved as the pressure becomes lower, as in the above-mentioned ionized portion. Therefore, the first pore flange 43 of the first pore 41, the second pore flange 5 of the second pore 51, and the third pore 6 forming the respective qualities of the differential chamber.
In order to generate an ion accelerating electric field in the third pore flange 6 of the first and the fourth pore flange 7 of the fourth pore 71, the drift power source (2) 130 supplies V1 and V to the respective pore flanges.
2, V3 and V4 are applied. Here, when the ions were positive ions, V1>V2>V3> V4, and when the ions were negative, V1 <V2 <V3 <V4.

Each of the pores in each of these flanges is arranged coaxially to suppress misalignment of the ion transmission region due to eccentricity. Furthermore, by adjusting and setting these potentials from the outside, the degree of desolvation caused by collision of ions with neutral molecules is changed.Furthermore, even if convergence of ions and errors during assembly occur. The error is absorbed.

The exhaust pump provided in the differential exhaust section is
An exhaust pump such as a rotary pump, a scroll pump, a mechanical booster pump, or a turbo molecular pump can be applied. In FIG. 2, a scroll pump 210 is used for exhausting the differential exhaust portion (the exhaust amount is 300 to 900 l / min).
In this case, a turbo molecular pump 220 (discharge amount is about 150 to 300 l / s) is used for exhausting the mass spectrometric unit 80. The back pressure of the turbo molecular pump 220 is shared by the scroll pump 210 by the connection pipe (B) 76.

Further, each of the flanges is provided with fine holes 52, 62, 72 for adjusting each pressure, so that the pressure of each chamber can be adjusted according to the capacity of the applied exhaust pump.

The ions in the molecular flow region flowing out of the last stage of the differential pumping chamber are first converged by the first converging lens 81 provided at the entrance of the mass analyzer 80. As this converging lens, an Einzel lens composed of three (81, 82, 83) electrodes is usually used.

Next, the focused ions further pass through a lens electrode 84 having a slit. The convergent lens 8
By the electrodes 1, 82, and 83, ions passing through the fourth pore 71 converge at the lens electrode 84, and neutrons and the like that do not converge collide with the slit portion of the lens electrode 84 and go to the mass spectrometer side. It has a difficult structure.

The ions passing through the lens electrode 84 are
The light is polarized and converged by a double-cylindrical polarizer including an inner cylinder electrode 86 and an outer cylinder electrode 85 having a large number of openings. In the double-cylindrical polarizer, the light is deflected and converged by using the electric field of the outer cylinder electrode 85 that has exuded from the opening of the inner cylinder electrode 86.

The ions having passed through the double cylindrical polarizer are introduced into the ion trap mass spectrometer. The ion trap mass analyzer includes a gate electrode 91a, an end cap electrode 92, a ring electrode 94, a brim electrode 921, an insulating ring 93, and an ion extraction lens 91b.

The gate electrode 91a serves to prevent external ions from being introduced into the mass spectrometer when the ions trapped in the ion trap mass spectrometer are taken out of the ion trap mass spectrometer.

The pores 92a of the end cap electrode 92
The ions introduced into the ion trap mass spectrometer through the ionizer collide with a buffer gas such as helium introduced into the ion trap mass spectrometer, and their trajectories are reduced. By scanning the high-frequency voltage thus extracted, the ions are discharged out of the ion trap mass spectrometry unit from the pores 92b of the end cap electrode 92 for each mass analysis number, and are passed through the ion extraction lens 91b to the ion converter 101 and the ion detector 1.
40. The buffer gas is supplied to a back gas (3) connection pipe 104 and a back gas (3) supply pipe 10 from a cylinder 105 of a back gas 3 such as He provided outside.
4 continuously supplied.

[0096] Ion trap mass analyzer pressure inside when introducing the buffer gas 10 ^- is about ⁴ Torr ^{- 3} ~ ^10.

The measurement sequence, data processing, and voltage control of the ion trap mass spectrometer are executed by the data processor / controller 230 in the mass spectrometer.

One of the advantages of the ion trap mass spectrometer is that it has a characteristic of trapping ions, so that even if the concentration of the sample is low, it can be detected by prolonging the accumulation time. Therefore, even when the sample concentration is low, the ion can be concentrated at a high magnification at the ion trap mass spectrometer, and the pretreatment of the sample such as concentration can be greatly simplified.

Various types of mass spectrometers can be applied to the mass spectrometry of the generated ions. For example, a quadrupole mass spectrometer that performs mass separation using the same high-frequency electric field, a mass spectrometer in a magnetic field, and the like can be used. The same applies to the case where a magnetic field type mass spectrometer using mass dispersion of the above or another mass spectrometer is used.

The description will be given with reference to FIG. Gas molecules that have been ionized by the ion source and unreacted gas are supplied to the discharge pipe (2) 36 of the sample introduction flange 33 and the ionization flange 15.
Is discharged from the discharge pipe (s) 1005 through the discharge pipe (1) 16 of the above. The discharged gas is transferred to the sample transport pipe (2).
Returned to 1003.

Further, this gas is supplied to the sample transport tubes 1001, 10
The gas is sucked by a suction pump 1002 provided in the system 03 (pipe) and further sent out by an exhaust fan 1006 located on the downstream side of the suction pump.
7, a piping system for discharging the exhaust gas to a pipe or a chimney of a plant is provided.

Further, one end of a sample connection pipe 400 is connected to the upstream side of the sample transport pipe (2) 1003, and a differential pressure generator (throttle mechanism) 1008 is provided downstream thereof, and the discharge port is provided downstream thereof. Tube (s) 1005 is connected.

The flow rate of the sample connection pipe 400 is set based on the amount of differential pressure generated by the differential pressure generator 1008.

Also, a pump 1009 is provided upstream of the back gas (1), (2) connection pipes 300, 303,
The air is sucked, and the air is cleaned downstream of the mist through a filter or the like (not shown) for mist removal and supplied as a back gas to the ion source and the ion drift unit.

The piping system (1001 to 1008, 10
The flow path constituted by the reference numeral 07 plays a role of stably sending the collected sample gas to the monitor unit at a constant flow rate without loss due to adsorption or condensation of the substance to be measured on the way. Therefore, the entire sampling section is heated to about 100 ° C. to 300 ° C.

The mass spectrometer (monitor) selectively ionizes the substance to be measured in the fed sample gas with high efficiency, and mass-analyzes the generated ions by the mass spectrometer to obtain the object to be measured. Are continuously detected.

Quantitatively determining the abundance of the target substance from the ion current value at the mass number derived from the object to be measured and the relationship between the amount of the standard substance prepared in advance and the ion current value (calibration curve) Can be done.

For example, in the case of 2,3-dichlorophenol (molecular weight: 162, mass number of observed ions 161), a change in ion intensity with respect to the concentration of the sample gas is measured, and a calibration curve is prepared. The concentration data of the sample gas at that time is calculated from the calibration curve and the observed ion intensity. The obtained data is further organized, processed by the data processing / control unit 230 together with the concentration of the components and other parameters, and continuously displayed and stored. Alternatively, the upper management device 2 is used as data for controlling combustion in the refuse incineration plant.
03 and other higher management devices and control devices. In order to estimate the dioxin concentration from the concentrations of chlorobenzene and chlorophenols, the concentration is calculated by using a correlation obtained in advance.

When an ion trap mass spectrometer is used, higher selectivity can be obtained as compared with a normal mass spectrum. This is an MS / MS method in which energy is injected into molecular ions trapped inside the ion trap mass spectrometer, and the ions are dissociated by collision with buffer gas (He or the like) molecules in the electrode. In the case of an organic chloride, an ion from which one or two chlorine atoms are eliminated from a molecular ion is observed by the MS / MS method. For example, in the case of 2,4-dichlorophenol, ionization using negative corona discharge gives (MH)
^-, (M: Molecular, H: hydrogen) negative ions that are generated. When this negative ion is dissociated by the MS / MS method, the chlorine atom becomes 1
Negative ions which are desorbed are generated. Observing this negative ion can provide very high selectivity. By quantifying the amount of negative ions from which one chlorine atom has been eliminated from the peak intensity, the amount of dichlorophenol in the exhaust gas can be estimated. This measurement process is repeated when there are a plurality of molecular species to be measured.

Although the above description has been made mainly on the case where the atmospheric pressure chemical ionization method in the negative ionization mode is used,
The exhaust gas contains various components. For this reason, the present mass spectrometry unit enables continuous measurement in the positive ionization mode for a hydrocarbon-based compound of an aromatic compound represented by benzene or the like or a compound having a small chlorine number. For example, in the case of hydrocarbon-based ions, which are the main components of unburned substances, and also benzene and monochlorobenzene, M + ion species are generated by a positive ionization mode atmospheric pressure chemical ionization method.

Therefore, in actual sample gas measurement, the HV power supply 110 shown in FIG. 2 supplies each voltage from the power supply generator 120 and its power supply line 123 in synchronization with the measurement sequence of the apparatus, and performs predetermined control. Originally, the positive and negative ionization modes are measured alternately or repeatedly for a predetermined period. Thereby, the information amount of ions in the sample gas can be increased.

FIGS. 3 (A) and 3 (B) show examples of results of confirming the characteristics of the specific ions in the apparatus alone.

The measurement conditions were as follows. The sample transport tube 1001 of the present apparatus was filled with dichlorophenol (concentration: 5 μg / Nm
3) was mixed with air, and the concentration was changed by changing the mixing ratio. At this time, the flow rate was 11 / min, the corona discharge current of the needle electrode was 5 to 10 μA, the ion uptake time was 0.1 second, and the temperature was 150 ° C. In the figure, the vertical axis indicates the relative ionic strength normalized by the ionic strength.

FIG. 3A shows the change in the density. As can be seen from the figure, the resolution is about 0.2 μg / Nm3,
The linearity was 2 to 10% or less, and a good linear relationship was obtained.

FIG. 3B shows an output example of a mass spectrum.

The measurement conditions are the same as above, except that trichlorophenol, dichlorophenol and
Tetrachlorophenol was added. In the figure, the vertical axis indicates the relative ionic strength normalized by the ionic strength. As shown in the figure, it can be seen that the peaks of the mass spectra of dichlorophenol (DCP), trichlorophenol (TCP), and tetrachlorophenol (TeCP) are clearly analyzed. Furthermore, the spectra of oxygen and nitrogen in the air, which is the medium of the sample, were also observed, and an extremely good mass spectrum was obtained.

FIG. 4A shows another example of mass spectrum output.

The measurement conditions and method are as follows. Simulated exhaust gas (a gas containing a small amount of impurities such as hydrogen chloride, sulfuric acid, and hydrogen bromide and a hydrocarbon-based gas substance) and air are mixed in the sample transport tube 1001 of the present apparatus. Dichlorophenol (DCP), trichlorophenol (TCP), tetrachlorophenol (T
eCP) was added. Further, as an internal sample, an internal sample generator 1100 was provided in the apparatus and quantitatively generated, and added to the sample transport tube 1001 at the internal sample transport tubes 1101 and 1102.

In the figure, the vertical axis indicates the relative ion intensity normalized by the ion intensity, the white portion indicates the observed value under the condition of FIG. 3B, and the black portion indicates the pseudo exhaust gas. The result.

As shown in the figure, dichlorophenol (D
The peaks of the mass spectra of CP), trichlorophenol (TCP), and tetrachlorophenol (TeCP) are clearly analyzed, and the spectra of oxygen and nitrogen in air, which is the medium of the sample, and the spectra of the added internal sample and hydrocarbons The system (switched to positive ions) was also observed, and furthermore, HCL
Good mass spectra were obtained at the same time for ions, H2SO4 ions, and HBr ions, and it was confirmed that the difference in the type of the pseudo exhaust gas used was clearly significant.

The spectrum intensities of the oxygen and nitrogen are attenuated as compared with FIG. 3B, but the spectrum intensities are reduced by the concerted reaction with the acid-based ions such as the HCL ions. It is presumed that.

FIG. 4 (B) shows the condition under the condition of FIG. 4 (A).
FIG. 7 is a diagram showing a temporal change of a predetermined observed ion intensity when the mixing ratio and each concentration are intentionally changed.
Under any of the operating conditions, it was confirmed that the intensity change varied depending on the operating conditions and sufficiently followed the intensity.

In the present invention, as shown in FIG. 1, apart from the mass spectrometer unit: 1000, an HCL meter 10001, a CO meter 10002, a NOX meter / SOX meter 1003, an oxygen meter 10
04 and the like. The sensor group includes a collection pipe 1000 for directly sampling the exhaust gas to be measured from a plant pipe or a chimney, a filter (1) 1004 for removing dust, oil, and mist in the collected exhaust gas, and a mass for the collected exhaust gas. The sample gas is connected to a sample connection pipe (3) 10005 provided separately from the pipe meter introduced into the analyzer section 10000, and an exhaust gas having a predetermined flow rate is guided and measured. FIG. 4B shows an example of the measurement. As is well known, these values are information groups that change every moment depending on the operation state of the process and must be monitored.

The outputs of the various process sensor groups are supplied to the data processing / control unit 230 and the RS232 of the mass spectrometer unit.
The data processing / control unit 230 is connected via a sensor signal cable 1202 such as C or RS485 or a communication cable 1201. Further, the data processing / control unit 230 is connected to a higher-level management device 1203 for plant operation.

Further, in this system configuration, in order to accurately grasp the properties of the exhaust gas, these measured quantities are used to determine the temperature of the electrostatic precipitator, the input steam flow rate, the line temperature (for example, the sensor 20000 shown in FIG. 1), the removing agent, and the like. Collect process variable data such as the input amount of

Conventionally, such various kinds of information are often handled singly and spontaneously, making it impossible to comprehensively and accurately grasp the properties of the exhaust gas.

In this embodiment, such information and data are collected in the data processing / control unit 230 or the management device 1203 of the mass spectrometer unit 1000, and are continuously collected in a predetermined format to obtain a comprehensive data. It is a system that can measure and monitor the properties of the exhaust gas.

As described above, the properties of the exhaust gas differ depending on the amount of waste and the quality of the waste in each incineration plant, the configuration of the incinerator, the type of removal filter used, and the operating conditions thereof. However, in any case, the emission concentration is regulated by the officially prescribed value, and it is necessary to perform a process operation / operation that satisfies the prescribed value.

The process operation and operation have been standardized to some extent by the experience and wisdom of the professional technicians and business operators of each incineration plant. -Variations occur due to wisdom. Alternatively, even if a multivariate variable treatment is performed, the number of parameters for each factor is large, a highly accurate correlation cannot be obtained, and it is difficult to associate each factor with the property of exhaust gas. In addition, since a large amount of time (for analysis, analysis, and the like) is required, offline work is mainly performed, and time and effort are required, resulting in poor efficiency.

For this reason, in this embodiment, in order to more accurately grasp the properties of the exhaust gas, this is realized by the following method.

FIGS. 5 and 6 are diagrams showing the concept for determining the properties of exhaust gas from information from each of the above-mentioned analyzers.

In FIG. 5, the property information of the exhaust gas is
(1) Gas component analysis result information from mass spectrometer and (2)
The information group is composed of information from the process variable sensor and (3) plant operation variable information, and this information group is a data group for determining the properties of the exhaust gas.

The data group is collected at the time of the relevant exhaust gas property to create a state variable of the relevant exhaust gas property (the reference space). Next, by sequentially comparing the reference space data with data collected at the time of normal measurement and monitoring, the reference space data is processed by a calculation unit described later, and a difference between the relevant exhaust gas property (the reference space) is determined. to decide. Therefore, at this time, it is needless to say that the data is individually disclosed.

Further, the main parameter or characteristic element (in the data group of (1) to (3)) which induces the difference (isolation value) is calculated.

FIG. 6 is a diagram showing in detail the contents of the "data format" of the state variable.

Data processing of the mass spectrometer 10000
This shows a format example 1300 in the work file of the control unit 230 or the higher-level management device 1203, which is an example representing the “state variable” of the exhaust gas, and has a two-dimensional “table” format. I am taking.

In the state variables of the “exhaust gas property eigenmode determination parameter = reference space” of the exhaust gas,
Each measurement is registered as a “row”, and this “row” is arranged and formatted for each state variable (column).

In this figure, “exhaust gas property 0” is treated as the reference space of the exhaust gas, and “exhaust gas property 1
4 "means a data group created at a different time from the data group used when the reference space was created.
Any of the above-mentioned “exhaust gas properties 1 to 4” can be defined as the reference space.

FIG. 7 shows a “data format 1300” of the state variables (“emission mode eigenmode determination parameter”) collected during the exhaust gas in the present system.
FIG. 5 is a diagram showing a method of creating a “reference space” for determining the properties of the corresponding exhaust gas and the concept thereof. FIG. 8 is a flow chart showing the calculation method of FIG. 7 in detail, and also shows a calculation flow after the creation of the reference space and a judgment method.

In FIG. 7, the properties of the exhaust gas are edited in the format 1300 from the components of the exhaust gas collected from the respective equipment groups and data such as process variables and plant operation variables. As described above, these data are two-dimensional tables, and “columns” are assigned the number (n) of state variables to be monitored in accordance with the properties of the relevant exhaust gas, and “rows” are collected. Is the number of samples to be performed (p). This two-dimensional table is represented by X (i
= P, j = n). At this time, the specific substance differs depending on each plant, and can be deleted because it can be individually quantified by the mass spectrometer unit as described above. Alternatively, if the range that can be measured by the mass spectrometer is set to, for example, 0.1 to 10 μg / NM 3, random numbers can be generated in the range and can be taken in as data.

The condition of X (i, j) is p
> = N, and p is preferably a number of data that is 2 to 3 times or more of n.

The “specific space of the exhaust gas” differs in the configuration, the incinerator, and the operation method of various incineration plants. "Can be defined.

For example, in the operation mode on a weekly basis on a daily basis, (1) the refuse introduced into the incineration plant is relatively soft, and the sewage satisfies the exhaust gas regulation value in a dry state and steady incineration amount. (2) incineration The garbage put into the place is relatively soft and damp.
The state where exhaust gas regulation values are satisfied at steady incineration volume. (3) The garbage input into the incineration plant is relatively hard and dry.The state where exhaust gas regulation levels are satisfied at steady incineration volume. ) The garbage put into the incinerator is relatively hard and damp.
Categorization is made into a state where the regulation value of the exhaust gas is satisfied at the steady incineration amount, and any of the above-mentioned operation times is defined as a “reference space for the exhaust gas”. Alternatively, the operation time completely opposite to the above (1) to (4) can be set as the “reference space for the exhaust gas”.

Alternatively, the "reference space" can be defined by the operator, technician or expert of each plant to define the properties of the corresponding exhaust gas during a predetermined operation as the reference space (see the exhaust gas of FIG. 6). Corresponding to any one of properties 1 to 4). X (i, j) is converted and normalized by a statistical method,
Let the matrix be X '(i, j).

X ′ (i, j) = (X (i, j) −μj) / σj Here, μj is an average value of p values for each parameter, and σj is a standard deviation of p values for each parameter D ＾ 2 ( Calculation of Mahalanobis distance) (-1) A correlation matrix R (s, t) between parameters is calculated from X ′ (i, j).

At this stage, the matrix becomes an nxn square matrix (correlation matrix) corresponding to the number of parameters.

[0147] (-2) D ＾ 2 is calculated from the transposed matrix X ″ (i, j) of X ′ (i, j) and the inverse matrix R ^ (s, t) of R (s, t). For each of the collected data (row by row), p D ＾ 2 values are calculated.

D ＾ 2 i = X ″ (i, j) * R ^ (s,
t) * X ′ (i, j) / j The p values of D ＾ 2 i become a reference space that represents a unique state of the device.

The Mahalanobis distance is a two-dimensional matrix determined only by the number of each element, and the distance is calculated according to the number of data used. The average value of the distance is about 1, and the standard deviation is a distribution “D ＾ 2 int” which can be regarded as preferably a substantially normal distribution of σint.

For example, after the above calculation, a value other than the expected value observed in the “eigenspace of the exhaust gas” is set, or the statistic D ^ 2 intair of “when no exhaust gas is introduced” is obtained. Its average value is “about 1” and its standard deviation is σint
It is. However, the reference space is defined as “D ＾ 2 int =” D ^ 2
Intair "and the introduction of the above-mentioned simulated exhaust gas (A in FIG. 4) indicates an enormous separation distance (largely separated to the right in the diagram shown in FIG. 7). This is because the reference space is air. Therefore, it means that gas other than air has been mixed, and also that some of the parameters for creating the reference space or some parameters have changed due to the interaction.

That is, since the distance gradually increases from the reference space based on the information used when creating the corresponding exhaust gas, it can be determined that the state has changed to a state different from the corresponding exhaust gas (see FIG. 5). Calculation means 1400 shown).

By continuously operating the system based on the reference space, it is possible to continuously measure and monitor the change in the properties of the exhaust gas.

In addition, the conventional management method using a single alarm value,
Compared with the method of judging the ranking of alarms by a combination of parameters, the change in exhaust gas state can be grasped more comprehensively, and statistical processing can be easily realized, so that the reliability is high and the versatility is excellent. Comparison of observation data with reference space (1) Collect observation data from exhaust gas.

The collected data is subjected to data processing in the same manner as described above, and D ＾ 2 × (Maharanobis distance) of the collected data is calculated. (2) The value D ＾ 2 x is compared with the statistical value D ^ 2int (Maharanobis distance) of the “reference space of the eigenspace of the exhaust gas”. (3) If there is no difference between D ^ 2 x and D ＾ 2int in the above item (1),
For example, the disclosure is made that “operation can be continued” and the operation is continued (by the calculation means 1400 shown in FIG. 5).

Further, as described above, the Mahalanobis distance is a distance indicating how far the measured object is separated from the reference space.

When the object to be measured does not belong to the reference space, and when the degree of separation of the distance can be determined by the measured value, the value is set as the signal level value, and the main parameter (characteristic Element).

Assuming that the level value of the signal value is M and the number is 1 or 1 category (1, 2,..., 1), the Mahalanobis distance to those objects is obtained in a linear form.

L = M1 * D1 From the above equation, the variation (increase / decrease) of the item is separated into the variation of the proportional term, the variation of the item and the variation of the error by analysis of variance, and the contribution is obtained. The main parameters (feature elements) are discarded and selected (by the calculating means 1400 shown in FIG. 5).
If the degree of isolation of the distance cannot be determined from the measured value, but it is clear that the distance does not fall within the reference space, the isolation of each parameter is classified into two levels using or not using each parameter. The validity of the distance is determined (by the calculating means 1400 shown in FIG. 5).

Since the Mahalanobis distance is calculated using all the items picked up, the following operations are required when selecting the items. That is, for each item or for each group of items, a two-level category of not adopting the item (group including the item) that employs the item (group including the item) is used. The significance may be compared and calculated, and then selected.

For example, when the number of items is 30, the two-level orthogonal table L32 that can be used is used, and the Mahalanobis distance is calculated using the specified item or group under each experimental condition of each orthogonal table. Is calculated. Next, the significant difference is tested under each experimental condition, and the contribution of each item or group including the item is determined and selected.

In this operation, finally, important parameters are discarded and selected from all the parameters taken up. Thereafter, the Mahalanobis distance is calculated using only the selected / selected parameters, and when the isolation distance increases, the characteristic parameter is presented (by the calculating means 1400 shown in FIG. 5).

For example, “CO change”, “HCL change”,
“Temperature change” and the like. Such information prompts a change in the operation / control state on the plant side.

FIG. 9 is a diagram showing a change in the state of measurement and monitoring of exhaust gas when the present system is applied.

For example, the distance of Mahalanobis at the time of creating the above-mentioned reference space is set to “D ^ 2 int”, and under such circumstances, the exhaust gas is put into the incineration plant. It is assumed that it was created in the case where "under operating conditions" where the amount of gas satisfies the emission gas regulation value is maintained.

Next, in the format 1300, the state variables indicating the properties of the exhaust gas at the present time are measured and collected (“read observation data” section in FIG. 8).

Next, "calculation of D ^ 2 Xi" shown in FIG. 8 is performed.

Next, “comparison / diagnosis / judgment with reference space” shown in FIG. 8 is performed. At this time, the D ^ 2 Xi is the D shown in FIG.
If it can be determined that there is no significant difference from ^ 2 int (the distribution of Mahalanobis distance is not significantly different from D ^ 2int), the above-mentioned "The garbage input into the incineration plant is relatively soft, dry and steady incineration amount. It can be determined that the "operating state satisfying the emission gas regulation value" is "maintained". In such a case, the operation is continued while maintaining the operation parameters of the plant operation.

On the other hand, as shown in FIG. 9, when it can be determined that D ^ 2 Xi clearly has a significant difference from D ^ 2 int (the distance distribution of Mahalanobis has a significant difference from D ^ 2 int) However, it can be determined that the above-mentioned "the refuse to be put into the incineration plant is relatively soft and is in a dry state and an operation state where the incineration amount satisfies the regulation value of the exhaust gas at a steady incineration amount". For this reason, it is estimated that the properties of the exhaust gas have changed due to one of the reasons such as “difference in the input waste quality and amount thereof”, “change of operation mode parameters”, and “abnormality of the process monitoring device”. In such a case, it is not preferable to continue the operation while maintaining the operation parameters, equipment, and the like of the plant operation as they are, so that a measure is required.

In such a case, for each parameter, the average value and standard deviation at the time of creating the reference space and the average value and standard deviation of each parameter at the time of observation / collection are sequentially compared, or by a general principal component analysis method. Also disclose the results because the main factors can be estimated.

Further, in the present embodiment, if the degree of separation of the distance can be determined from the measured value or the quantified data categorized (1, 2, 3,...), The value is set as the signal level value and By increasing or decreasing the parameters, parameters (feature elements) having a large contribution ratio among the parameters are extracted, and the parameters are disclosed, thereby suggesting the direction of the treatment. For example, if the main parameters of d ^ 2 Xi shown in FIG. 9 are “CO concentration” and “hydrogen chloride”, “CO concentration is changing.”
When the message “HCL concentration is changing” is displayed, the driver or maintenance person performs an operation of correcting the increase or decrease and also performs an operation of increasing or decreasing the amount of the HCL removing agent to be charged. If the degree of isolation of the distance cannot be determined from the measured value, but it is clear that the distance does not fall within the reference space, the isolation of each parameter is classified into two levels using or not using each parameter. By extracting a parameter (feature element) having a large contribution ratio between the parameters with respect to the distance and disclosing the parameter, the direction of the treatment is suggested. For example, assuming that the main parameters of d ^ 2 Xi +1 shown in FIG. 9 are “Nox concentration”, “CiHi”, and “gas temperature”, “Nox concentration is changing.” If the message "Concentration is changing." Or "Gas temperature is changing." Is displayed, the driver or maintenance person performs an operation of correcting the increase or decrease and also performs an increase or decrease operation of the gas temperature.

In this operation, important parameters that isolate the "proper exhaust gas property state" to be measured are sequentially discarded and selected. Further, as described above, the amount of increase or decrease in the specific substances of chlorobenzene and chlorophenols present in the exhaust gas is also disclosed as individual information.

Therefore, by disclosing such important parameters to the plant operator / manager, it is possible to guide measures to improve the operation and operation of the plant, and to improve the reliability of operation. I do.

Further, as the operation and operation of the plant mature, the "reference space" and "important parameters" can be quantified by categorizing each site individually, so that a more efficient plant can be obtained. Operation is achievable, and versatility is high because it does not depend on the plant.

The system according to the present embodiment utilizes these data even when a new plant is built or when starting an N-fold plant or N-fold process. From the viewpoint of economic indicators such as the above, emission gas management and planning can be realized, and more efficient management and planning work becomes possible. (Other Embodiments) As another embodiment of the present system,
In the configuration shown in FIG. 1, the analyzers, the process variable sensor group, and the information group of the plant operation variable can be appropriately selected, and are not limited.

The information and the calculation means can be provided in a central upper management device for monitoring and controlling the entire plant. In such a case, in particular, the burden on the mass spectrometer and higher-level management equipment can be reduced, real-time performance can be expected, and a large amount of various plant variable data and process data can be collected. Plant management, planning, operation, service work, and the like can be performed.

FIG. 10 shows another embodiment.

In this embodiment, the mass spectrometer 1000
Exhaust gas analyzers such as an HCL meter 10001, a CO meter 10002, a NOX meter / SOX meter 1003, and an oxygen meter 1004 are connected by individual sample connection pipes (3) 10005 and 10006, and exhaust gas of a predetermined flow rate is connected. It is configured to guide and measure.

According to this configuration, the method of creating the reference space for obtaining the properties of the exhaust gas and the method of monitoring, judging, and diagnosing do not impair the functions thereof. Since the analyzer can be arranged as an analyzer that more accurately captures the characteristics of the exhaust gas, there is an effect that the properties of the exhaust gas can be measured and monitored with higher accuracy.

Further, since each of the above-mentioned analyzers can be used even if it is already installed, the analyzer is excellent in expandability and has a large effect of labor saving.

According to this embodiment, specific substances such as dioxins, chlorophenols and chlorobenzenes in exhaust gas can be continuously collected directly from the flue, and can be monitored continuously.

According to this embodiment, the properties of the exhaust gas can be measured in real time by simultaneously collecting the substances other than the specific components of the dioxins, chlorophenols and chlorobenzenes, the process variable information, and the plant operation variable. It is possible to measure, analyze, and monitor continuously.

Furthermore, dynamic operation parameters and treatment methods of the plant can be disclosed in real time, and there is an effect that stable operation of the plant and reduction of air pollution can be obtained.

[0183]

According to the present invention, when measuring and monitoring exhaust gas discharged from an incinerator for incinerating waste, an index for changing and optimizing process conditions is disclosed, and an indicator for harmful substances is disclosed. Emissions can be reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing a configuration example of an exhaust gas measurement / monitoring system according to an embodiment of the present invention.

FIG. 2 is a diagram illustrating a configuration example of a mass spectrometer unit in detail.

FIG. 3 is a diagram showing a measurement example of a specific substance.

FIG. 4 is a diagram showing an output example of a specific substance.

FIG. 5 is a diagram showing property information of exhaust gas.

FIG. 6 is a diagram showing an example of a state variable format.

FIG. 7 is a diagram showing a flow of creating an exhaust gas property space.

FIG. 8 is a diagram showing a flow of a property diagnosis of exhaust gas.

FIG. 9 is a diagram showing an example of a state change of exhaust gas.

FIG. 10 is a diagram showing another embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Needle electrode, 2 ... Electrode (1), 3 ... Electrode (2), 4 ... First pore flange (1), 5 ... Second pore flange, 6 ... Third pore flange, 7 ... Fourth Pore flange, 10: ionization chamber, 11: needle holder, 12: back gas 2 supply pipe,
13 HV terminal, 14 needle fixing bracket, 15 ionization flange, 16 discharge pipe (1), 17 heater (1), 2
0: ion drift portion, 21: pore in electrode 1, 22: terminal plate (1), 30: other ion drift portion, 31: pore in electrode 2, 32: terminal plate (2), 33: sample introduction Flange, 34: sample introduction tube, 35: heater (2), 36: discharge tube (2), 41: first pore, 42: spacer, 43 ...
First pore flange (2), 44 ... back gas 1 supply pipe,
51: second pore, 52: side hole (2), 61: third pore, 62: side hole (3), 71: fourth pore, 72: side hole (4), 73: heater, 76 .., Connecting tube, 80, mass spectrometer, 81, 82, 83, converging lens, 84, lens electrode, 85, outer cylinder electrode, 86, inner cylinder electrode, 91, gate electrode, 92, end cap electrode, 92a, b ... pores in the end cap electrode, 93 ... insulating ring, 94 ... ring electrode, 101 ... ion converter, 103 ... back gas 3 supply pipe, 104 ... back gas 3 connection pipe, 105 ... back gas 3 cylinder, 110 ... Hv power supply, 111: HV power supply line, 120: drift power supply (1), 121, 122, 1
23 ... power supply line, 130 ... drift power supply (2), 140 ...
Ion detector, 210: pump (1), 220: pump, 230: data processing / control unit, 301: variable throttle device, 302: flow meter, 400: sample connection pipe, 40
DESCRIPTION OF SYMBOLS 1 ... Variable throttle apparatus, 402 ... Flow meter, 921 ... Spit electrode, 1000 ... Collection tube, 1001 ... Sample transport tube (1), 1002 ... Suction pump, 1003 ... Sample transport tube (2), 1004 ... Filter, 1005 ... Exhaust pipe (s), 1006 ... exhaust fan, 1007 ... exhaust gas exhaust pipe, 1008 ... differential pressure generator (throttle mechanism), 1009 ... pump, 1100 ... internal sample generator, 1101, 1102 ...
Internal sample transport pipe, 1201, 1202 ... communication, electric signal line, filter, 1203 ... upper management device, 1000
0: mass spectrometer, 10001: HCL meter, 10002: CO
Total, 10003 NOX / SOX total, 10004 Oxygen total, 1
0005, 10006 ... sample connection pipe (3), 20000
... Process sensor.

Claims (20)

[Claims] An exhaust gas measurement / monitoring system for measuring and monitoring exhaust gas discharged from an incinerator for incinerating waste, comprising: measuring exhaust gas components over a plurality of items; An exhaust gas measurement / monitoring system that creates a reference value and monitors exhaust gas based on the reference value. 2. The exhaust gas measurement / monitoring system according to claim 1, further comprising a mass spectrometer in the plant for analyzing a specific substance (component) of the exhaust gas, wherein the mass spectrometer includes a specific substance contained in the exhaust gas. (Components) are measured and measured with various analyzers separately provided with substances (components) such as SOX, NOX and hydrogen chloride other than the specific substances (components) contained in the exhaust gas. Measures with various sensors separately equipped with process variables such as pressure and flow rate, collects information on plant operation variables such as the amount of a dust collector provided in the plant and the input amount of steam and the like, and collects information on the mass spectrometer and the like. From the information of the measurement values from the analyzer other than the above and the information of the plant operation variables, create the property (specific specific space or reference space) of the exhaust gas, and separate from the exhaust gas of the property, a daily plan It consists of the measured values of the mass spectrometer collected for measuring and monitoring the exhaust gas during operation, the measured values from analyzers such as SOX meter, NOX meter and hydrogen chloride meter, and information on plant operation variables. A means for comparing the observed data group (monitored data) with the property (specific eigenspace or reference space) to diagnose the property of the observed data group (monitored data); An exhaust gas measurement / monitoring system characterized by measuring, diagnosing, and monitoring changes in data and properties. 3. The exhaust gas measurement / monitoring system according to claim 2, wherein the (specific specific space or reference space) and (monitoring data)
Is a hydrocarbon-based substance from the mass spectrometer, a specific measurement substance such as chlorophenols and chlorobenzenes, and a specific measurement such as hydrogen bromide and sulfuric acid simultaneously measured by the mass spectrometer in addition to the specific measurement substance. Substances other than substances, SOX, NOX, measured by an analyzer other than the mass spectrometer
Substances such as hydrogen chloride, carbon monoxide, carbon dioxide, oxygen, moisture, etc., and the temperature, gas temperature, gas pressure, gas flow rate of the electric precipitator provided in the plant, the amount of removing agent and water vapor to be injected into the process, An exhaust gas measurement and monitoring system comprising a plant operation variable. 4. The exhaust gas measurement / monitoring system according to claim 2, wherein the (specific specific space or reference space) and (monitoring data)
Are hydrocarbon substances from the mass spectrometer, and substances other than the specific measurement substances, such as hydrogen bromide and sulfuric acid, which are simultaneously measured by the mass spectrometer, in addition to the specific measurement substances, SOX, NOX, measured by analyzer
Substances such as hydrogen chloride, carbon monoxide, carbon dioxide, oxygen, moisture, etc. An exhaust gas measurement / monitoring system comprising a plant operation variable and disclosing a measurement value of a specific substance such as chlorophenols or chlorobenzenes from the mass spectrometer alone. 5. The exhaust gas measurement / monitoring system according to claim 2, wherein the (specific specific space or reference space) and (monitoring data)
Sets the measured values of the hydrocarbon-based substance from the mass spectrometer and the specific substances such as chlorophenols and chlorobenzenes from the mass spectrometer at a value within the range of the amount of the process generated; Substances other than the specific measurement substances such as hydrogen bromide and sulfuric acid which are simultaneously measured by the mass spectrometer in addition to the substances, and SOX, NOX,
Substances such as hydrogen chloride, carbon monoxide, carbon dioxide, oxygen, moisture, etc., and the temperature, gas temperature, gas pressure, gas flow rate of the electric precipitator provided in the plant, the amount of the removing agent and water vapor supplied to the process, An exhaust gas measurement / monitoring system comprising a plant operation variable and disclosing a measurement value of a specific substance such as chlorophenols or chlorobenzenes from the mass spectrometer, alone in the calibration. 6. The exhaust gas measurement / monitoring system according to claim 2, wherein the mass spectrometer has a needle electrode for ionizing the exhaust gas at substantially atmospheric pressure, and the needle electrode has at least a negative voltage or a positive voltage. A supply means 1 capable of applying a voltage and a supply means 2 for switching an ion acceleration voltage applied to each electrode or lens system from negative to positive are provided. Each supply means corrects a hydrocarbon-based substance in the exhaust gas. An exhaust gas measurement / monitoring system characterized by ionizing or negatively ionizing substances such as chlorophenols, chlorobenzenes, hydrogen bromide, and sulfuric acid. 7. The exhaust gas measuring / monitoring system according to claim 2, wherein in the piping route provided for introducing the exhaust gas into the mass spectrometer, the exhaust gas other than the mass spectrometer is provided in the piping route. SOX, NOX, hydrogen chloride, carbon monoxide,
An exhaust gas measurement / monitoring system characterized by comprising an introduction pipe to an analyzer for measuring carbon dioxide, oxygen, moisture and the like. 8. The exhaust gas measuring / monitoring system according to claim 2, wherein a pipe route provided for introducing the exhaust gas into the mass spectrometer and SOX, N in the exhaust gas other than the mass spectrometer.
An exhaust gas measurement / monitoring system characterized in that it is separated from an introduction pipe route to an analyzer provided for measuring OX, hydrogen chloride, carbon monoxide, carbon dioxide, oxygen, moisture and the like. 9. The exhaust gas measurement / monitoring system according to claim 2, wherein a mass spectrometer for analyzing the exhaust gas and SO in the exhaust gas are provided.
An analyzer provided for measuring X, NOX, hydrogen chloride, carbon monoxide, carbon dioxide, oxygen, moisture, etc., and a sensor group or the sensor group for measuring process variables such as temperature, pressure, and flow rate of the plant The management device that collectively manages the data of the plant and the device that manages the information of the plant operation variables such as the amount of the dust collector and the amount of the input agent such as steam provided in the plant are electrically connected by a communication cable or an RS232C cable or the like. An exhaust gas measurement / monitoring system characterized by being connected. 10. The exhaust gas measuring / monitoring system according to claim 2, wherein the calculating means calculates a value of the exhaust gas based on multidimensional information of the exhaust gas.
An exhaust gas measurement / monitoring system comprising: a calculation function 1 for creating the property (a specific eigenspace or a reference space); and wherein the calculation means is provided inside the mass spectrometer. 11. The exhaust gas measurement / monitoring system according to claim 10, wherein the calculation function 1 collects data for creating a space (reference space) of the eigenmode of the exhaust gas in the following procedure: The number of data is at least the number of elements of the various data groups, and (2) the data of item (1) of the exhaust gas is normalized for each of the elements by an average value and a standard deviation, and (3) ) From the data of the above item (2),
A two-dimensional correlation matrix determined only by the number of the respective elements is created, and this matrix (data group) is further processed to obtain Mahalanobis distances of the matrix, and the distribution state determined by these distances (the The average value is 0 and its standard deviation is about 1)
An exhaust gas measurement / monitoring system, wherein the exhaust gas is used as a reference space for the exhaust gas. 12. The exhaust gas measuring / monitoring system according to claim 2, wherein the calculating means measures and measures the exhaust gas by the property (specific specific space or reference space) and daily plant operation.
The mass spectrometer readings collected for monitoring and SOX
Comparison between measured values from analyzers such as a total meter, NOX meter and hydrogen chloride meter, observation data group (monitoring data) consisting of information on plant operation variables, and the above-mentioned properties (specific eigenspace or reference space) An exhaust gas measurement / monitoring system comprising a calculating means 2 for distinguishing the properties of the observation data group (monitoring data) and calculating main elements thereof. 13. The exhaust gas measurement / monitoring system according to claim 12, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. The exhaust gas measurement / monitoring system is characterized in that, if it belongs to, the property of the exhaust gas is diagnosed as having no change, and maintenance / continuation of the process variable is disclosed. 14. The exhaust gas measurement / monitoring system according to claim 12, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If the distance does not belong to, and if the degree of isolation of the distance can be determined by the measured value, the value is used as the signal level value, and the parameters of the measured value and the information are increased or decreased, and only the parameter having a large contribution rate is determined. An exhaust gas measurement / monitoring system having a calculation function for calculating as a characteristic element, wherein the characteristic element is disclosed. 15. The exhaust gas measurement / monitoring system according to claim 12 or 14, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If it does not belong to the data group, the degree of isolation of the distance is categorized into at least one or more exhaust gas properties according to the properties of the exhaust gas, the degree of isolation is quantified and identified, and the quantified data is disclosed. An exhaust gas measurement and monitoring system characterized by: 16. The exhaust gas measurement / monitoring system according to claim 12, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If it does not belong to the standard and if the degree of isolation of the distance cannot be determined from the measured value but it is clear that the distance does not fall within the reference space, use the two-level category of using or not using each parameter. An exhaust gas measurement / monitoring system having a calculation function of calculating only a parameter having a large contribution rate of its effectiveness as a characteristic element with respect to the isolation distance of each parameter, and disclosing the characteristic element. 17. The exhaust gas measurement / monitoring system according to claim 12, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If it does not belong to the data group, and it is clear that the degree of isolation of the distance does not fall within the reference space, each parameter is used to calculate a feature element by principal component analysis,
Exhaust gas measurement characterized by disclosing the characteristic elements
Monitoring system. 18. The exhaust gas measuring / monitoring system according to claim 12, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If it does not belong to the data group, and the degree of separation of the distance can be determined from the measured value, and if the characteristic element clearly appears, the properties of the exhaust gas and the characteristic element are disclosed, and information for operating the process variable An exhaust gas measurement / monitoring system characterized by the following. 19. The exhaust gas measurement / monitoring system according to claim 12, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If it does not belong to, and if it is clear that the degree of isolation of the distance is not in the reference space, calculate each parameter to the feature element by principal component analysis,
Exhaust gas measurement characterized by disclosing the characteristic elements
Monitoring system. 20. The exhaust gas measurement / monitoring system according to claim 12 or 19, wherein a Mahalanobis distance between the “reference space” and the observation data group (monitoring data) is compared, and the distance is determined when the reference space is created. If it does not belong to the data group and if the degree of isolation of the distance cannot be determined from the measured value but it is clear that it does not fall within the reference space, and if its characteristic elements appear clearly, the properties of the exhaust gas An exhaust gas measurement / monitoring system characterized by disclosing the above-mentioned characteristic elements and information for manipulating process variables.