JP2002185005A5 - - Google Patents
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- Publication number
- JP2002185005A5 JP2002185005A5 JP2000382104A JP2000382104A JP2002185005A5 JP 2002185005 A5 JP2002185005 A5 JP 2002185005A5 JP 2000382104 A JP2000382104 A JP 2000382104A JP 2000382104 A JP2000382104 A JP 2000382104A JP 2002185005 A5 JP2002185005 A5 JP 2002185005A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000382104A JP2002185005A (ja) | 2000-12-15 | 2000-12-15 | 混成ｔｆｔアレー基板とその製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000382104A JP2002185005A (ja) | 2000-12-15 | 2000-12-15 | 混成ｔｆｔアレー基板とその製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002185005A JP2002185005A (ja) | 2002-06-28 |
| JP2002185005A5 true JP2002185005A5 (enExample) | 2008-02-21 |
Family
ID=18849992
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000382104A Pending JP2002185005A (ja) | 2000-12-15 | 2000-12-15 | 混成ｔｆｔアレー基板とその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002185005A (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5025057B2 (ja) * | 2001-05-10 | 2012-09-12 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
| KR101058176B1 (ko) | 2004-03-25 | 2011-08-22 | 가부시키가이샤 한도오따이 에네루기 켄큐쇼 | 박막 트랜지스터의 제조 방법 |
| JP4713192B2 (ja) * | 2004-03-25 | 2011-06-29 | 株式会社半導体エネルギー研究所 | 薄膜トランジスタの作製方法 |
| KR100732858B1 (ko) | 2005-05-13 | 2007-06-27 | 삼성에스디아이 주식회사 | 다결정질 박막의 현장 성장방법 |
| FR2890236B1 (fr) | 2005-08-30 | 2007-11-30 | Commissariat Energie Atomique | Procede de fabrication de circuits en couches minces en silicium amorphe et polycristallin |
| KR101293566B1 (ko) | 2007-01-11 | 2013-08-06 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
| JP2013149953A (ja) * | 2011-12-20 | 2013-08-01 | Semiconductor Energy Lab Co Ltd | 半導体装置及び半導体装置の作製方法 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2880322B2 (ja) * | 1991-05-24 | 1999-04-05 | キヤノン株式会社 | 堆積膜の形成方法 |
| JPH0738110A (ja) * | 1993-07-21 | 1995-02-07 | Toshiba Corp | 半導体装置の製造方法 |
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2000
- 2000-12-15 JP JP2000382104A patent/JP2002185005A/ja active Pending