JP2002184047A - Film-forming apparatus and film-forming method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a film-forming apparatus and a film-forming method where a film can be formed, while the film thickness is being controlled. SOLUTION: The film-forming apparatus is provided with a turntable 1 and a film-forming fixture 2 placed on a substrate 3 which is placed on the turntable 1, and a cover layer 4A is formed on the optical disk substrate 3, by rotating the turntable 1 in a state with UV-curing resin 4 being supplied, so as to come into contact with the periphery of the film-forming fixture 2.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a film forming apparatus and a film forming method capable of forming a film while controlling the film thickness.

[0002]

2. Description of the Related Art As a method of forming a cover layer for covering the surface of an optical disk, a method using a spin coater is known. After a UV curable resin is dropped on an optical disk substrate placed on a rotary table, the rotary table is rotated. By rotating the optical disk substrate at a high speed, the ultraviolet curable resin is spread over the entire surface of the optical disk substrate. This method is advantageous in terms of manufacturing cost because the resin shaken off by the spin coater can be reused.

[0003]

However, an opening is formed in the center of the optical disk substrate, and a uniform cover is formed due to the positional relationship between the position where the ultraviolet curable resin is supplied and the position where the cover layer is formed. There is a problem that it is difficult to form a layer. That is, when the ultraviolet curable resin is dropped on the inner peripheral portion of the substrate and the resin is shaken off by high-speed rotation,
There is a problem that the thickness distribution of the ultraviolet curable resin is large at the inner peripheral portion and thinner at the outer peripheral portion. Further, if the resin drop position is to be moved further inward to make the film thickness uniform, there is a problem that the resin leaked through the opening of the optical disk substrate contaminates the turntable.

An object of the present invention is to provide a film forming apparatus and a film forming method capable of forming a film while controlling the film thickness.

[0005]

A film forming apparatus according to the present invention comprises: a rotating means (1) for rotating a substrate (3); a film forming jig (2) mounted on the substrate (3); By rotating the rotating means (1) while supplying the film forming liquid (4) so as to contact the outer periphery of the film forming jig (2), the substrate (3)
A film (4A) is formed thereon.

According to this film forming apparatus, the rotating means is rotated while the film forming liquid is supplied so as to be in contact with the outer periphery of the film forming jig placed on the substrate. It is possible to control the difference in the closer film thickness, and for example, to obtain a uniform film thickness over the whole.

The film forming jig (2) has a substantially cylindrical shape (2), a substantially conical shape (22), and a substantially frustoconical shape (21, 2).
Any of 3) may be used.

In the film forming method of the present invention, a step of mounting a film forming jig (2) on a substrate (3) and a step of forming a film forming liquid (4) so as to be in contact with the outer periphery of the film forming jig (2). And a step of rotating the substrate (3).

According to this film forming method, the rotating means is rotated in a state where the film forming liquid is supplied so as to be in contact with the outer periphery of the film forming jig placed on the substrate. It is possible to control the difference in the closer film thickness, and for example, to obtain a uniform film thickness over the whole.

[0010] To facilitate understanding of the present invention, reference numerals in the accompanying drawings are appended in parentheses, but the present invention is not limited to the illustrated embodiment.

[0011]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment Hereinafter, a first embodiment of a film forming apparatus of the present invention will be described with reference to FIGS. FIG. 1A is a cross-sectional view illustrating a film forming apparatus according to the first embodiment, and FIG.
2A is a partially enlarged view, FIG. 2A is a plan view showing a ring viewed from above in FIG. 1, and FIG. 2B is BB in FIG. 2A.
It is a line sectional view.

As shown in FIGS. 1 and 2, a film forming apparatus 100 according to a first embodiment includes a turntable 1 of a spin coater on which an optical disk substrate 3 is mounted, and a ring mounted on the optical disk substrate 3. 2 is provided. The rotation axis 1A of the turntable 1 has an outer diameter slightly smaller than the inner diameter of the opening 3a formed at the center of the optical disc substrate 3. The ring 2 has a cylindrical shape, and the inner diameter of the opening 2 a formed at the center of the ring 2 is slightly larger than the outer diameter of the rotation shaft 1 </ b> A of the turntable 1. Ring 2
Can be manufactured using a metal such as aluminum or stainless steel (SUS), or various resins such as an acrylic resin, a delrin, a polycarbonate resin, a polypropylene resin, and a polyethylene resin.

Next, a procedure for forming a cover layer on the optical disk substrate 3 using the film forming apparatus 100 will be described. As shown in FIG. 1, an optical disk substrate 3 is mounted on a turntable 1 and a ring 2 is mounted on the optical disk substrate 3. At this time, the opening 3a of the optical disk substrate 3 and the opening 2a of the ring 2 are both engaged with the rotation shaft 1A of the turntable 1. Next, the ultraviolet curable resin 4 is dropped from the supply pipe 4a so as to be in contact with the outer peripheral surface 2b of the ring 2. At this time, as shown in FIG. 1B, the ultraviolet curable resin 4 is attached to the outer peripheral surface 2b to a position t higher than the thickness a of the cover layer 4A to be finally formed. Therefore, in order to control the film thickness to be uniform,
The thickness d of the ring 2 must not be smaller than the thickness a of the cover layer 4A to be formed.

Subsequently, the turntable 1 is rotated at a high speed to shake off the excess ultraviolet curable resin 4, thereby forming a film of the ultraviolet curable resin 4 on the surface of the optical disk substrate 3. Thereafter, the ultraviolet curable resin 4 is cured by irradiating the film of the ultraviolet curable resin 4 with ultraviolet rays, and the cover layer 4A is formed.
Is formed. The ultraviolet curable resin 4 shaken off by the rotation of the turntable 1 may be collected and reused.

FIG. 3A is a graph showing the average film thickness of the cover layer formed by using the film forming apparatus of the first embodiment, and FIG. 3B is a cross section of the optical disk substrate showing the cover layer. FIG. 3A shows the thickness of the cover layer 4A shown in FIG. 3B, and the horizontal axis shows the distance (radius) from the center of the optical disc substrate 3.

As the film forming conditions, the turntable 1 was rotated at 700 rpm for 60 seconds after the ultraviolet curable resin 4 was dropped.

As is apparent from comparison with a comparative example described later, in the first embodiment, there is no remarkable difference in the film thickness between the inner periphery and the outer periphery of the optical disk substrate 3. A more uniform film thickness is obtained.

-Comparative Example- The first embodiment does not use the ring 2 of the first embodiment.
FIG. 12 shows the average film thickness when the ultraviolet curable resin is supplied to the same position as that of the embodiment and the same film forming conditions are employed.
Shown in

As shown in FIG. 12, in the comparative example, the film thickness is small at the inner peripheral portion of the optical disk substrate, and is large at the outer peripheral portion, so that a uniform film thickness cannot be obtained over the entire substrate.

Second Embodiment Hereinafter, referring to FIGS. 4 to 6, a second embodiment of the film forming apparatus of the present invention will be described.
An embodiment will be described. FIG. 4 is a cross-sectional view showing a film forming apparatus according to the second embodiment, FIG. 5A is a plan view showing a ring viewed from above in FIG. 4, and FIG. 5B is VB in FIG.
FIG. 4 is a sectional view taken along line VB. The same elements as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In the film forming apparatus 200 of the second embodiment, a ring 21 is used instead of the ring 2 of the first embodiment. As shown in FIGS. 4 and 5, the ring 21 has a substantially frustoconical shape, and the inner diameter of the opening 21 a formed at the center of the ring 21 is slightly larger than the outer diameter of the rotation shaft 1 </ b> A of the turntable 1. ing. The outer peripheral surface 21 b of the ring 21 is formed obliquely so that the cross-sectional area increases toward the surface in contact with the optical disk substrate 3. The ring 21 is made of metal such as aluminum or stainless steel (SUS), acrylic resin, delrin, polycarbonate resin,
It can be manufactured using various resins such as a polypropylene resin and a polyethylene resin.

When a cover layer is formed on the optical disk substrate 3 using the film forming apparatus 200, the ultraviolet curable resin 4 is dropped so as to be in contact with the outer peripheral surface 21b of the ring 21. Other steps and conditions relating to the rotation of the turntable 1 are the same as in the first embodiment. Further, the ultraviolet curable resin 4 is made to adhere to the outer peripheral surface 21b to a position higher than the thickness of the finally formed cover layer. Therefore,
To control the film thickness to be uniform, the ring 21
Must not be thinner than the cover layer to be formed.

FIG. 6 is a graph showing the average thickness of the cover layer formed using the film forming apparatus of the second embodiment. 6, the vertical axis indicates the thickness of the cover layer, and the horizontal axis indicates the distance (radius) from the center of the optical disc substrate 3.

As is clear from comparison with the above comparative example,
In the second embodiment, there is no remarkable difference in the film thickness between the inner periphery and the outer periphery of the optical disk substrate 3, and a more uniform film thickness is obtained over the entire substrate 3.

Third Embodiment Hereinafter, a third embodiment of the film forming apparatus of the present invention will be described with reference to FIGS. 7 and 8. FIG. 7 is a cross-sectional view showing a film forming apparatus according to the third embodiment, FIG. 8A is a plan view showing a film forming jig viewed from above in FIG. 7, and FIG.
FIG. 8 is a sectional view taken along line VIIIB-VIIIB of FIG. The same elements as those in the second embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In the film forming apparatus 300 of the third embodiment, a film forming jig 22 is used instead of the ring 21 of the second embodiment. As shown in FIGS. 4 and 5, the film forming jig 2
2 has a substantially conical shape having an apex 22c, and the inner diameter of the hole 22a formed at the center of the film forming jig 22 is slightly larger than the outer diameter of the rotary shaft 1A of the turntable 1. The outer peripheral surface 22b of the film forming jig 22 is
A surface 22 d corresponding to the bottom surface of the cone is in contact with the surface of the optical disk substrate 3. The film forming jig 22 is made of metal such as aluminum or stainless steel (SUS), or acrylic resin, delrin, polycarbonate resin, polypropylene resin,
It can be manufactured using various resins such as a polyethylene resin.

When a cover layer is formed on the optical disk substrate 3 using the film forming apparatus 300, the ultraviolet curable resin 4 is dropped so as to be in contact with the outer peripheral surface 22b of the film forming jig 22.
At this time, since the film forming jig 22 has a substantially conical shape, the ultraviolet curable resin 4 dropped on the outer peripheral surface 22b drops to a position in contact with the optical disc substrate 3 along the outer peripheral surface 22b, so that the resin 4 is dropped. The position may be moved inward from the second embodiment.

The other steps and the conditions relating to the rotation of the turntable 1 are the same as those in the second embodiment, so that the same results as in the second embodiment can be obtained.

Fourth Embodiment Hereinafter, a fourth embodiment of the film forming apparatus of the present invention will be described with reference to FIGS. 9 is a cross-sectional view showing a film forming apparatus according to the fourth embodiment, FIG. 10A is a plan view showing a ring viewed from above FIG. 9, and FIG.
FIG. 3A is a sectional view taken along line XB-XB of FIG. The same elements as those in the first embodiment are denoted by the same reference numerals, and description thereof will be omitted.

In the film forming apparatus 400 of the fourth embodiment, a ring 23 is used instead of the ring 2 of the first embodiment. As shown in FIGS. 9 and 10, the ring 23 has a substantially frustoconical shape, and the inner diameter of the opening 23a formed at the center of the ring 23 is slightly larger than the outer diameter of the rotation shaft 1A of the turntable 1. ing. The outer peripheral surface 23 b of the ring 23 is formed obliquely so that the cross-sectional area decreases toward the surface in contact with the optical disk substrate 3. Ring 23
Can be manufactured using a metal such as aluminum or stainless steel (SUS), or various resins such as an acrylic resin, a delrin, a polycarbonate resin, a polypropylene resin, and a polyethylene resin.

When a cover layer is formed on the optical disk substrate 3 using the film forming apparatus 400, the ultraviolet curable resin 4 is dropped so as to be in contact with the outer peripheral surface 23b of the ring 23. Other steps and conditions relating to the rotation of the turntable 1 are the same as in the first embodiment. Further, the ultraviolet curable resin 4 is made to adhere to the outer peripheral surface 23b to a position higher than the thickness of the finally formed cover layer. Therefore,
In order to control the film thickness to be uniform, the ring 23
Must not be thinner than the cover layer to be formed.

FIG. 11 is a graph showing the thickness of a cover layer formed using the film forming apparatus of the fourth embodiment. The vertical axis in FIG. 11 indicates the thickness of the cover layer, and the horizontal axis indicates the distance (radius) from the center of the optical disc substrate 3.

As is clear from comparison with the above comparative example,
In the second embodiment, there is no remarkable difference in the film thickness between the inner periphery and the outer periphery of the optical disk substrate 3, and a more uniform film thickness is obtained over the entire substrate 3.

The present invention is not limited to the above-described embodiment. Instead of the rotary table, a rotating means for rotating by sucking the substrate surface from above the substrate may be used.

In addition to controlling the film thickness to be uniform, for example, the inner peripheral surface of the substrate may be controlled to be thicker than other portions.

A thermosetting resin may be used instead of the ultraviolet curable resin.

The outer peripheral surface of the film forming jig may be a curved surface, that is, the film forming jig may have a substantially cylindrical shape, a substantially conical shape, a substantially truncated cone shape, or a substantially hemispherical shape.

[Brief description of the drawings]

FIG. 1 is a diagram illustrating a film forming apparatus according to a first embodiment;
(A) is a sectional view showing a film forming apparatus of the first embodiment,
(B) is a partially enlarged sectional view of (a).

FIGS. 2A and 2B are diagrams showing a ring, wherein FIG. 2A is a plan view showing the ring as viewed from above in FIG. 1, and FIG.

3A and 3B are diagrams illustrating formed cover layers, in which FIG. 3A is a diagram illustrating as a graph the average film thickness of the cover layers formed using the film forming apparatus of the first embodiment, and FIG. Sectional drawing which shows a cover layer.

FIG. 4 is a cross-sectional view illustrating a film forming apparatus according to a second embodiment.

5A and 5B are views showing a ring, FIG. 5A is a plan view showing the ring as viewed from above in FIG. 4, and FIG. 5B is a view showing VB-V in FIG.
It is a B sectional view.

FIG. 6 is a graph showing an average film thickness of a cover layer formed using the film forming apparatus of the second embodiment.

FIG. 7 is a sectional view showing a film forming apparatus according to a third embodiment.

8A and 8B are diagrams showing a film forming jig, wherein FIG. 8A is a plan view showing the film forming jig viewed from above in FIG. 7, and FIG.
B-VIIIB sectional drawing.

FIG. 9 is a sectional view showing a film forming apparatus according to a fourth embodiment.

10A and 10B are views showing a ring, FIG. 10A is a plan view showing a film forming jig viewed from above in FIG. 9, and FIG.
-XB line sectional drawing.

FIG. 11 is a graph showing the thickness of a cover layer formed by using the film forming apparatus according to the fourth embodiment;

FIG. 12 is a graph showing the thickness of a cover layer in a comparative example.

[Explanation of symbols]

 Reference Signs List 1 rotary table 1A rotating shaft 2 ring (film forming jig) 2b outer peripheral surface 3 optical disk substrate (substrate) 3a opening 4 ultraviolet curable resin (film forming liquid) 4A cover layer (film) 21 ring (film forming jig) 21b outer periphery Surface 22 Film forming jig 22b Outer surface 22d Surface (bottom surface) 23 Ring (film forming jig) 23b Outer surface

 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Keiji Suga Inventor 6-1-1, Fujimi, Tsurugashima-shi, Saitama F-term in Pioneer Corporation R & D Center (Reference) 5D121 AA04 EE22 EE24 EE29 GG02

Claims (5)

[Claims] A rotating means for rotating the substrate; and a film forming jig mounted on the substrate, wherein the film forming liquid is supplied in contact with an outer periphery of the film forming jig. A film forming apparatus, wherein a film is formed on the substrate by rotating a rotating means. 2. The film forming apparatus according to claim 1, wherein the film forming jig has a substantially cylindrical shape. 3. The film forming apparatus according to claim 1, wherein the film forming jig has a substantially conical shape. 4. The film forming apparatus according to claim 1, wherein the film forming jig has a substantially truncated cone shape. 5. A method comprising: mounting a film forming jig on a substrate; supplying a film forming liquid so as to be in contact with an outer periphery of the film forming jig; and rotating the substrate. A film forming method characterized by the above-mentioned.