JP2002181755A5 - - Google Patents

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Publication number
JP2002181755A5
JP2002181755A5 JP2001090239A JP2001090239A JP2002181755A5 JP 2002181755 A5 JP2002181755 A5 JP 2002181755A5 JP 2001090239 A JP2001090239 A JP 2001090239A JP 2001090239 A JP2001090239 A JP 2001090239A JP 2002181755 A5 JP2002181755 A5 JP 2002181755A5
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JP
Japan
Prior art keywords
group
sensor element
humidity sensor
thin film
element according
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Application number
JP2001090239A
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English (en)
Japanese (ja)
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JP3967886B2 (ja
JP2002181755A (ja
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Priority to JP2001090239A priority Critical patent/JP3967886B2/ja
Priority claimed from JP2001090239A external-priority patent/JP3967886B2/ja
Publication of JP2002181755A publication Critical patent/JP2002181755A/ja
Publication of JP2002181755A5 publication Critical patent/JP2002181755A5/ja
Application granted granted Critical
Publication of JP3967886B2 publication Critical patent/JP3967886B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001090239A 2000-03-31 2001-03-27 湿度センサ素子およびその製造方法 Expired - Lifetime JP3967886B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001090239A JP3967886B2 (ja) 2000-03-31 2001-03-27 湿度センサ素子およびその製造方法

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2000-98643 2000-03-31
JP2000098643 2000-03-31
JP2001090239A JP3967886B2 (ja) 2000-03-31 2001-03-27 湿度センサ素子およびその製造方法

Publications (3)

Publication Number Publication Date
JP2002181755A JP2002181755A (ja) 2002-06-26
JP2002181755A5 true JP2002181755A5 (https=) 2005-06-30
JP3967886B2 JP3967886B2 (ja) 2007-08-29

Family

ID=26589201

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001090239A Expired - Lifetime JP3967886B2 (ja) 2000-03-31 2001-03-27 湿度センサ素子およびその製造方法

Country Status (1)

Country Link
JP (1) JP3967886B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7883619B2 (en) 2007-11-13 2011-02-08 Access Business Group International Llc Water treatment system with moisture detector
CN101408522B (zh) * 2008-11-24 2011-12-21 浙江大学 具有超支化结构的高分子电阻型湿敏元件的制作方法

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