JP2002174505A - Electronic chart projector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To solve the problem that the conventional chart measurement needs the replacement of a chart sheet corresponding to an object under measurement and takes labor for replacing and stocking or managing the chart sheet. SOLUTION: An electric display is superposed and installed on an image forming and indicating surface unit of a projector. It displays a chart on the display, corresponding to an object projected on the image forming and indicating surface unit, thereby superposing the image of the object on the chart displayed on the indicating surface unit so as to observe the image. The electric display is controlled by a personal computer to replace the object and a corresponding chart for the change of the magnification factor of the image under measurement, thereby saving labor for replacing works, etc.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chart projector used for measuring a chart used for determining whether or not the size of an object to be measured placed on a stage is acceptable.

[0002]

2. Description of the Related Art In a conventional chart measurement, a chart sheet on which a chart corresponding to an object to be measured is written is pasted on a screen of a projector or the like, and an image of the object to be measured displayed on the screen and drawn on the chart sheet. A pass / fail judgment of the measured object is made based on whether or not the image of the measured object is within the dimensional allowable range by comparing the measured image with a chart such as a ruled line indicating the allowable size range of the measured object. A typical configuration of such a projector is disclosed, for example, in FIG. 2 of JP-A-8-327313.

[0003]

In the conventional chart measurement, it is necessary to attach a chart sheet corresponding to an object to be measured on a screen of a projector or the like. In this operation, it is necessary to replace the chart sheet with a corresponding one each time the object to be measured is changed, which takes time and effort.

[0004] Further, even if only one object is measured, if the projection magnification of the object to be measured is set to be high in order to secure the judgment accuracy, a chart sheet corresponding to the desired accuracy is provided for each measurement position. They need to be replaced, which doubles the labor for replacement.

Another problem is the storage and management of a large number of chart sheets used for pass / fail determination, such as chart sheets corresponding to various objects to be measured and chart sheets for high magnification.

An object of the present invention is to provide a chart projector capable of easily exchanging a chart sheet corresponding to an object to be measured and facilitating storage and management of the chart sheet in view of the above problems. is there.

[0007]

In order to solve the above-mentioned problems, according to a first aspect of the present invention, there is provided an illumination unit for illuminating an object to be measured, and a projection lens system for projecting an image of the object to be measured by the illumination. Image forming display means for forming and displaying an image of the device under test projected from the projection lens, and a chart corresponding to the image of the device under test can be displayed. There is provided an electronic chart projector including an electric display device which enables visualization by being superimposed on an image of the object to be measured formed on an image display means.

According to a second aspect of the present invention, in the electronic chart projector according to the first aspect, the image display means includes a screen for forming an image projected from the projection lens system. An objective display device provides an electronic chart projector that extends along an image plane of the screen and is superimposed on the screen.

Further, according to a third aspect of the present invention, in the electronic chart projector according to the first or second aspect, the electric display device is detachably superimposed on the screen. Provide a projector.

According to a fourth aspect of the present invention, in the electronic chart projector according to the first aspect, the electrical display device includes an electrical display layer between a display surface, a back surface, and both surfaces,
An electronic chart projector is provided, wherein the image display means comprises a matte processing surface formed on one of the display surface and the rear surface of the electric display device.

According to a fifth aspect of the present invention, in the electronic chart projector according to any one of the first to fourth aspects, the electric display device is a liquid crystal display. Offer machine.

According to a sixth aspect of the present invention, in the electronic chart projector according to the first or second or third or fourth or fifth aspect, the electric display device has a control device for controlling display of the chart. An electronic chart projector characterized in that the control device has chart data corresponding to a plurality of devices under test, and the chart based on the chart data can be displayed on the electric display device. provide.

According to a seventh aspect of the present invention, in the electronic chart projector according to the first or second or third or fourth or fifth or sixth aspect, the electric display device is optically connected to the image display means. An electronic chart projector is provided, which is arranged at an equivalent position.

[0014]

Embodiments of the present invention will be described below in detail with reference to the drawings.

In FIG. 1, an object to be measured is placed on a test surface (1) of a projector, and is illuminated by a transmission illumination device (3) or a coaxial incident illumination device (5). The transmitted or reflected light from the measured object is enlarged by the projection lens (7),
The image is projected on the screen (13) through the small mirror (9) and the large mirror (11) and displayed as an image of the measured object. The focus adjustment of the display image on the screen (13) is achieved by the vertical movement of the test surface (1) and the vertical movement of the projection lens (7).
Accordingly, the present projector naturally has a mechanism for adjusting the vertical movement of the surface to be inspected (1) or the mechanism for adjusting the vertical movement of the projection lens (7). However, since these are not directly related to the present invention, description thereof will be omitted. Further, in the case of the present embodiment, the above-described coaxial illumination device (5) can irradiate the test surface (1) from directly above via a half mirror provided in the projection lens (7).

In the present embodiment, the screen (13)
Form an imaging display surface device having a sufficient area for observing an image of an object to be measured. On the display image observation side (15) of the screen (13), an electrical display device (17) capable of displaying a chart corresponding to the image of the DUT is provided at a position optically equivalent to the screen (13). Screen (13)
Are extended along the image display surface over the entire image display surface and are overlapped with each other.

The electric display device (17) displays a chart corresponding to the image of the device under test. The front and back surfaces are provided between a transparent substrate and the two substrates. For example, a liquid crystal display (LCD: L
liquid crystal display).

With this configuration, the image of the object to be measured projected on the screen (13) and the chart displayed inside the electric display device (17) are observed from the display image observation side (15). It is visible to a person as a superimposed image.

Although the screen (13) and the electric display device (17) may be integrally formed from the beginning, in this embodiment, the screen (13) is formed integrally with the projector body (not shown). The electrical display device (17) is configured to be attachable and detachable.

The electric display device (17) includes a drive circuit (19) for controlling display of the electric display device (17) and a personal computer (21) for storing and managing chart data and controlling the drive circuit (19). ) Is connected, and the drive circuit (19) and the personal computer (2) are connected.
1) and constitute a control device. The chart corresponding to the image of the device under test is called from the personal computer (21) by inputting information about the device under test into the personal computer (21), and is displayed as a chart on the electric display device (17).

As described above, in the first embodiment,
The electric display device (17) is provided at a position optically substantially equivalent to the screen (13) along the image display surface of the screen (13), and is superposed on the screen (13). Therefore, the operator of the chart measurement, which is the observer, compares the display image of the DUT displayed on the screen (13) and the chart displayed on the electric display device (17) as a superimposed image, and compares them. Then, it is possible to determine whether or not the size of the measured object is acceptable.

In the case of the present embodiment, the electric display device (17) has a separate structure and is attached to the screen (13).
Since it is detachable, the conventional projector can be used as the electronic chart projector of the present invention by being superimposed and mounted on the screen of the conventional projector.

Next, a second embodiment of the present invention will be described in detail with reference to FIG.

FIG. 2 is a diagram showing a configuration of an electronic chart projector according to a second embodiment of the present invention.

In the second embodiment, since the method of projecting the image of the object to be measured by the projector and the main components are the same as those in the first embodiment, the same components as those shown in FIG. In the following, portions different from the first embodiment will be described.

The main difference between the second embodiment and the first embodiment is that the screen (13) in the first embodiment is different from the second embodiment.
In this embodiment, the electronic display device (28) is integrated with the electric display device (28).

In the second embodiment, the electric display device (28) for displaying a chart corresponding to the image of the device under test is provided by the first display device (28).
This is a structure having an electric display layer between the display surface, the back surface, and both surfaces as in the embodiment. Either the display surface or the back surface of the electrical display device (28) is processed into a mat to form an image display surface device. It is configured so that it can be observed.

The electric display device (28) has a liquid crystal display (LCD: Liquid C) as in the first embodiment.
crystal display) can be used.

Since the distance between the chart display surface of the electric display device (28) and the display surface of the device to be measured is the distance between the back surface, which is the matte processing surface, and the electric display layer, the observation position is shifted. Even at the time (for example, when obliquely observing), there is almost no deviation between the display image of the measured object and the chart, and the observation error can be reduced and the determination accuracy can be improved.

Other than the above, the configuration is the same as that of the first embodiment, and the description is omitted.

The electric display devices (17) and (28) according to the first and second embodiments are composed of a liquid crystal display (LC).
It is also possible to use another display device having the same function as D).

In the first and second embodiments, the display of a plurality of chart data can be controlled by the personal computer (21). The work equivalent to replacement is not required, shortening the inspection time and improving the efficiency of the judgment work. In addition, since the chart data can be stored and managed by a personal computer, the chart data can be stored and managed more easily than the conventional drawing base. Becomes

Furthermore, since the chart data can be converted into an electronic file, the data can be easily replaced, searched and stored by a personal computer (21), and the CAD (Computer Aided Dede) can be used.
sign), the CAD data can be immediately converted to chart data, the chart creation period can be shortened, the chart can be modified quickly, etc.
Chart creation costs and period can be reduced.

[0034]

As described above, according to the present invention,
The chart corresponding to the image of the device under test is controlled using a computer connected to the electrical display device, eliminating the need for conventional chart sheet replacement work, increasing the efficiency of inspection work and storing chart data.・ Easy management.

[Brief description of the drawings]

FIG. 1 is a configuration diagram of an electronic chart projector according to a first embodiment of the present invention.

FIG. 2 is a configuration diagram of an electronic chart projector according to a second embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Surface to be inspected 3 ... Transmission illuminating device (DIA: Diametrical illuminating device) 5 ... Coaxial epi-illumination device (EPI: Episcopi)
c Illumination device) 7 Projection lens 9 Small mirror 11 Large mirror 13 Screen 15 Viewing direction 17 Electric display (LCD: Liquid C)
crystal display) 19: drive circuit 21: personal computer

Claims (7)

[Claims] An illumination unit configured to illuminate an object to be measured; a projection lens system configured to project an image of the object to be measured by the illumination; and an image formed by displaying an image of the object measured from the projection lens system. Image display means, and a chart corresponding to the image of the device under test can be displayed, and the displayed chart can be visually superimposed on the image of the device under test formed on the image display device. An electronic chart projector, comprising: an electric display device. 2. The image display means includes a screen for forming an image projected from the projection lens system, and the electric display device extends along an image plane of the screen. 2. The electronic chart projector according to claim 1, wherein the projector is superimposed on a screen. 3. The electronic chart projector according to claim 1, wherein the electric display device is detachably superimposed on the screen. 4. The electric display device comprises an electric display layer between a display surface, a back surface, and both surfaces, and the image display means comprises:
2. The electronic chart projector according to claim 1, wherein the electronic chart projector comprises a matted surface formed on one of the display surface and the back surface of the electric display device. 5. The electronic chart projector according to claim 1, wherein the electric display device is a liquid crystal display. 6. The electric display device has a control device for controlling display of the chart, the control device has chart data corresponding to a plurality of devices under test, and is based on the chart data. 2. The chart according to claim 1, wherein the chart can be displayed on the electronic display device.
Or the electronic chart projector according to 2 or 3 or 4 or 5. 7. The electronic device according to claim 1, wherein the electric display device is disposed at a position optically equivalent to the image display means. Chart projector.