JP2000214387A - Measuring microscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simultaneously confirm the image of an object to be measured and the parameter of the displacing amount of a table by displaying the detected relative moving and displacing amount on a liquid crystal display board inserted in the optical axis of an observation optical system. SOLUTION: The liquid crystal display board 1 is arranged at a position where light branched from a branching prism 55 is formed into an intermediate image. The display board 1 is an LCD panel or the like, and a displacement detection means and a storage means in which the CAD data of a reticle is stored are connected to a display control means connected to the display board 1. The display control means includes a computer executing a data display program (data display function), and the output value of the displacement detection means is read according to the data display program and displayed on a parameter display area in the display board 1. Therefore, the parameter of the displacement amount of the table 51 is reflected on an observer's eye together with the image of the object to be measured, so that an observer confirms the displacement amount of the table 51 without releasing the eye from an ocular severally even when he (she) operates the table 51 while looking in the ocular 58.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring microscope, and more particularly, to a measuring microscope capable of measuring the size and shape of a minute object without contact.

[0002]

2. Description of the Related Art FIG. 4 shows a conventional example. In the figure, the device under test 50 is placed on a table 51. The objective lens 52, the half mirror 53, the imaging lens 54, the branch prism 55,
The CD cameras 56 are arranged in this order at a predetermined distance from each other. An eyepiece reticle 57 on which a cross reticle is marked and an eyepiece lens 58 are arranged in this order at a predetermined distance in the emission direction of the split light among the light incident on the splitting prism 55. . Light from a light source 59 is incident on the half mirror 53, and the light reflected here passes through the objective lens 52 and irradiates the device under test 50.

The light reflected from the object 50 and the table 51 passes through an objective lens 52 and a half mirror 53, further passes through an imaging lens 54 and a branching prism 55, and forms an intermediate image at the position of a CCD camera 56. tie.
The light split by the splitting prism 55 forms an intermediate image at the position of the eyepiece reticle 57. Therefore,
A cross reticle 61 and an image 62 of the object 50 shown in FIG.

Here, the table 51 shown in FIG.
Relative moving means 63 is provided. Relative moving means 63
Supports the table 51 so as to be movable in XY directions perpendicular to the optical axis direction of the objective lens 52 and in a Z direction perpendicular thereto. Further, the relative moving means 63 supports the table 51 so as to be pivotable about an axis parallel to the Z direction. This turning angle is θ.

The amount of displacement of the table 51 by the relative moving means 63 is displayed on an external display 65 after being detected by a displacement detecting means 64 as shown in FIG. The displacement detecting means 64 includes an optical linear encoder as a linear displacement detector for detecting the amount of displacement of the table 51 in the XYZ directions, and a rotary encoder as an angle detector for detecting the turning angle θ of the table 51. The displacement amount detected by each encoder, that is, the displacement amount in each of the XYZ directions of the table is calculated by the XYZ counter 64a.
Is counted by the θ counter 64b and displayed on the external display 65.

Accordingly, when the table 51 on which the object 50 is placed is moved in the X and Y directions, the fixed object reticle cross line is positioned within the visual range of the eyepiece 58 shown in FIG. As the image 62 is moved, the amount of movement is displayed on the external display 65. For this reason, as shown in FIG. 7, when the reticle crosshair is relatively moved from one end of the image 62 of the object to the other end, the value of the object Dimensions can be measured. In addition, by writing a sample-shaped reticle of the DUT 50 on the eyepiece reticle 57 instead of, or together with, the reticle cross-hair, a comparative observation of the sample-shaped reticle and the image of the DUT is performed. Is also possible.

[0007]

However, in the above-described conventional example, it is necessary to operate the table 51 at an optimum position while looking through the eyepiece lens 58. During this time, the measured values displayed on the external display 65 are displayed. Could not be confirmed, which was inconvenient. Further, when performing a comparative observation between an image of an object to be measured and a sample-shaped reticle, it is necessary to replace the reticle according to the type of the object to be measured or the magnification of the objective lens, and the replacement operation is troublesome.

An object of the present invention is to improve the disadvantages of the prior art and, in particular, to provide a measuring microscope capable of simultaneously confirming an image of an object to be measured and a parameter such as a displacement amount of a table. . Another object of the present invention is to provide a measuring microscope which does not require a reticle exchange operation when performing a comparative observation between an image of an object to be measured and a sample-shaped reticle.

[0009]

A measuring microscope according to the present invention comprises:
To achieve the above object, the following configuration is adopted. According to the first aspect of the present invention, there is provided a table on which an object to be measured is placed, an observation optical system having an objective lens and an eyepiece facing the table, and a relative movement for relatively moving the observation optical system and the table. Means, a liquid crystal display panel inserted in the optical path of the observation optical system, and a displacement detection means for detecting the amount of relative movement displacement by the relative movement means. Display control means for displaying the amount of relative movement displacement on the liquid crystal display panel. According to the invention,
In the observation optical system, the image of the object to be measured and the display of the amount of relative movement displacement on the liquid crystal display panel are simultaneously reflected on the eyes of the observer via the eyepiece, so that the table is moved while looking through the eyepiece. At the same time, the displacement can be confirmed.

According to a second aspect of the present invention, in the measuring microscope according to the first aspect, the display control means displays a reticle cross line on the liquid crystal display panel. According to the present invention, since the conventional eyepiece reticle with a crosshair is not required, it is economical.

According to a third aspect of the present invention, in the measuring microscope according to the first aspect, there is provided storage means for storing the shape data of the object to be measured, and the display control means reads out from the storage means. The shape data is displayed on the liquid crystal display panel at a predetermined magnification. According to the present invention, it is not necessary to use a conventional eyepiece reticle in which a sample shape of an object to be measured is described, and various shape data can be displayed on a liquid crystal display panel by selecting shape data to be read from a storage unit. This eliminates the troublesome work of replacing the eyepiece reticle according to the magnification of the objective lens and the shape of the object to be measured as in the related art.

According to a fourth aspect of the present invention, in the measuring microscope according to the first aspect, the relative moving means moves the table in X and Y directions orthogonal to each other with respect to an optical axis of the observation optical system. Movably in a Z-direction perpendicular to the Z-direction, and supported so as to be pivotable about an axis parallel to the Z-direction.
A linear displacement detector for detecting an amount of displacement in a direction, and an angle detector for detecting a turning angle θ of the table, wherein the display control means detects XYZ detected by each of the displacement detectors.
It is characterized by displaying the amount of displacement in the direction and the turning angle θ. According to the present invention, since the image of the object to be measured and the displacement amounts of the table in the XYZ and θ directions are simultaneously reflected in the eyes of the observer, the user operates the table while looking through the eyepiece.
At the same time, the displacement of the table can be confirmed.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the present invention will be described below with reference to FIG.
A description will be given based on FIG. In these descriptions, the same parts as those in the conventional example are denoted by the same reference numerals, and redundant description will be omitted. In the present embodiment, as shown in FIG. 1, a liquid crystal display panel 1 is used instead of the conventional eyepiece reticle 57.
Is provided. That is, the liquid crystal display panel 1 is disposed at a position where the light branched from the branching prism 55 connects the intermediate image. Each part of the liquid crystal display panel 1 is transparent in a non-display state and opaque in a display state.

The liquid crystal display panel 1 is an LCD panel or the like, and is connected to a display control means 2 as shown in FIG. The display control means 2 includes a displacement detection means 64 which is the same as the conventional one, and a storage means 3 which stores CAD data of the reticle.
And are connected. The CAD data includes reticle crosshair data and shape data of the device under test.

Here, the display control means 2 includes a computer that executes a data display program (data display function). The data display program includes the displacement detecting means 6
4, the output values of the XYZ counter 64a and the θ counter 64b are read and displayed in the parameter display area 4 in the liquid crystal display panel 1. The data display program stores a predetermined C from the storage unit 3 in response to an external selection input (not shown).
Select the AD data and display the reticle crosshair 5 on the LCD panel 1.
And the sample shapes 6 and 7 of the measured object edited to a predetermined magnification.

For this reason, the parameters of the amount of displacement of the table 51 are also shown to the observer's eyes together with the image 62 of the object to be measured, and even if the table 51 is operated while looking into the eyepiece 58, , The displacement amount of the table 51 can be checked at the same time. Also,
By changing the display data on the liquid crystal display panel 1,
The optimum sample shape of the DUT 62 can be displayed without the conventional eyepiece reticle replacement work.

Next, another embodiment of the present invention will be described with reference to FIG. In the description of the drawing, the same parts as those in the conventional example and the previous embodiment are denoted by the same reference numerals, and redundant description will be omitted. In the present embodiment, the table 51
The objective lens 52, the half mirror 53,
The imaging lens 54, the second half mirror 12, and the CCD camera 56 are arranged in this order at a predetermined interval from each other. In the traveling direction of the light reflected by the second half mirror 12, the liquid crystal display panel 11 and the mirror 13 are arranged in this order. Further, a relay lens 14 and an eyepiece 58 are arranged in this order in the traveling direction of the light reflected by the mirror 13.

The light emitted from the light source 59 is reflected by the half mirror 53, passes through the objective lens 52, and passes through the object 5
Illuminate 0. The reflected light from the device under test 50 and the table 51 is transmitted through the objective lens 52 and the half mirror 53, and further formed on the imaging lens 54 and the second half mirror 1.
2 to form an intermediate image at the position of the CCD camera 56. The light reflected by the second half mirror 12 is
The light enters the liquid crystal display panel 11.

In the present embodiment, the liquid crystal display panel 11
As shown in FIG. 2, it is connected to the display control means 2 as in the previous embodiment. Therefore, in addition to the displacement amount of the image 62 of the device under test and the table 51, a reticle cross line and sample shapes 6 and 7 of the device under test appear on the screen in accordance with an external selection input. These images are reflected by mirror 13 and relay lens 14 and eyepiece 5
It appears to the observer through 8. Therefore, in this embodiment, the same effects as those of the previous embodiment can be obtained.

According to each of the embodiments described above, the table 51 on which the object 50 is placed, the observation optical system having the objective lens 52 and the eyepiece 58 facing the table 51, and the observation optical system Relative movement means 63 for relatively moving the table 51;
And the liquid crystal display plates 1 and 11 inserted in the optical path of the observation optical system, and the relative movement displacement amount XYZθ detected by the displacement detection means 64. LCD panel 1,1
1 is provided with a display control means 2 for displaying an image 62 on the object to be measured and the liquid crystal display panels 1 and 1 in the observation optical system.
1 and the display of the relative displacement XYZθ are reflected simultaneously to the eyes of the observer via the eyepiece 58,
While moving the table 51 while looking through the eyepiece lens 58, the displacement amount XYZθ can be confirmed at the same time.

The display control means 2 comprises a liquid crystal display panel 1,
Since the reticle crosshairs are displayed on the display 11, the conventional eyepiece reticle 57 with the crosshairs is not required, and can be economically constructed.

The display control means 2 has a data display function of displaying the shape data read from the storage means 3 storing the shape data of the device under test 50 on the liquid crystal display panels 1 and 11 at a predetermined magnification. Therefore, the conventional eyepiece reticle 57 in which the sample shape of the DUT 50 is described becomes unnecessary. Moreover, since various shape data can be displayed on the liquid crystal display panels 1 and 11 by selecting shape data to be read from the storage means 3, the magnification of the objective lens 52 and the shape of the DUT 50 can be changed as in the conventional case. The troublesome work of replacing the eyepiece reticle 57 accordingly is released.

Further, since the reticle is arranged at the intermediate image position enlarged by the objective lens, an enlarged reticle pattern of a component to be inspected is prepared, and high-accuracy measurement with an alignment error suppressed can be performed.

The relative moving means 63 is provided on the table 51.
Are movably supported in the X and Y directions orthogonal to each other with respect to the optical axis of the observation optical system and in the Z direction orthogonal thereto, and are rotatably supported about the X axis.
4 comprises a linear displacement detector for detecting the amount of displacement of the table 51 in the XYZ directions, and an angle detector for detecting the turning angle θ of the table, and the display control means 2 detects the displacement detected by each displacement detector. Since the displacement in the XYZ directions and the turning angle θ are displayed, the image 62 of the DUT 50 and the X
The displacement amounts in the YZ and θ directions are reflected simultaneously to the observer's eyes, and the displacement amount XYZθ of the table 51 can be confirmed while operating the table 51 while looking through the eyepiece lens 58.

The present invention is not limited to the configuration described in the above embodiment, but includes modifications as long as the object of the present invention can be achieved. For example, in the above embodiment, the turning angle θ of the table is obtained. However, instead of turning the table 51, the eyepiece may be rotated, and the turning angle θ at that time may be obtained and displayed. . In addition, a total reflection mirror may be provided instead of the second half mirror 12.

[0026]

As described above, according to the measuring microscope of the present invention, in the observation optical system, the image of the object to be measured and the display of the relative displacement on the liquid crystal display panel are displayed by the observer through the eyepiece. This is reflected in the eyes at the same time, which can be expected to have the effect that the displacement can be checked at the same time while moving the table while looking through the eyepiece.

[Brief description of the drawings]

FIG. 1 is a configuration diagram showing one embodiment of the present invention.

FIG. 2 is a block diagram of a control system of the liquid crystal display panel shown in FIG.

FIG. 3 is a configuration diagram showing another embodiment of the present invention.

FIG. 4 is a configuration diagram of a conventional example.

FIG. 5 is a view showing a state seen from the eyepiece of FIG. 4;

6 is a block diagram of a display system for displaying a displacement amount of the table in FIG.

FIG. 7 is a diagram illustrating an operation of a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1, 11 Liquid crystal display panel 2 Display control means 3 Storage means 5 Reticle cross hair 6, 7 Shape data of an object to be measured 50 Object to be measured 51 Table 52 Objective lens 58 Eyepiece 63 Relative moving means 64 Displacement detecting means

Claims (4)

[Claims] 1. A table on which an object to be measured is placed, an observation optical system having an objective lens and an eyepiece opposed to the table, relative movement means for relatively moving the observation optical system and the table, In a measuring microscope provided with a displacement detecting means for detecting a relative moving displacement amount by a relative moving means, a liquid crystal display panel inserted in an optical path of the observation optical system, and a relative moving displacement amount detected by the displacement detecting means And a display control means for displaying on the liquid crystal display panel. 2. The measuring microscope according to claim 1, wherein the display control means displays a reticle cross line on the liquid crystal display panel. 3. The measuring microscope according to claim 1, further comprising storage means for storing the shape data of the object to be measured, wherein the display control means converts the shape data read from the storage means at a predetermined magnification. A measuring microscope characterized by displaying on the liquid crystal display panel. 4. The measuring microscope according to claim 1, wherein the relative moving means moves the table in X and Y directions orthogonal to each other with respect to an optical axis of the observation optical system and in a Z direction orthogonal thereto. And a pivotable support centering on an axis parallel to the Z direction, wherein the displacement detecting means comprises: a linear displacement detector for detecting an amount of displacement of the table in the XYZ directions; and a turning angle of the table. an angle detector for detecting θ, wherein the display control means detects the X detected by each of the displacement detectors.
A measurement microscope for displaying a displacement amount in the YZ direction and a turning angle θ.