JP2002171776A5 - - Google Patents
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- Publication number
- JP2002171776A5 JP2002171776A5 JP2000369180A JP2000369180A JP2002171776A5 JP 2002171776 A5 JP2002171776 A5 JP 2002171776A5 JP 2000369180 A JP2000369180 A JP 2000369180A JP 2000369180 A JP2000369180 A JP 2000369180A JP 2002171776 A5 JP2002171776 A5 JP 2002171776A5
- Authority
- JP
- Japan
- Prior art keywords
- thermoelectric
- furnace
- industrial
- chamber
- water cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (7)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000369180A JP4178746B2 (en) | 2000-12-04 | 2000-12-04 | Industrial furnace thermoelectric generator |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000369180A JP4178746B2 (en) | 2000-12-04 | 2000-12-04 | Industrial furnace thermoelectric generator |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002171776A JP2002171776A (en) | 2002-06-14 |
JP2002171776A5 true JP2002171776A5 (en) | 2005-09-08 |
JP4178746B2 JP4178746B2 (en) | 2008-11-12 |
Family
ID=18839257
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000369180A Expired - Fee Related JP4178746B2 (en) | 2000-12-04 | 2000-12-04 | Industrial furnace thermoelectric generator |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4178746B2 (en) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005302851A (en) * | 2004-04-08 | 2005-10-27 | Tokyo Electron Ltd | Substrate mounting stand and heat treatment apparatus |
JP4751322B2 (en) | 2004-05-19 | 2011-08-17 | 財団法人電力中央研究所 | Thermoelectric conversion system and method for improving efficiency of thermoelectric conversion system |
JP5049461B2 (en) * | 2004-11-12 | 2012-10-17 | 光洋サーモシステム株式会社 | Heat treatment equipment |
JP4661235B2 (en) * | 2005-01-27 | 2011-03-30 | 株式会社Ihi | Thermoelectric converter |
JP4585892B2 (en) * | 2005-03-14 | 2010-11-24 | 光洋サーモシステム株式会社 | Thermoelectric conversion device and cooling device |
JP4808425B2 (en) * | 2005-03-22 | 2011-11-02 | 光洋サーモシステム株式会社 | Heat treatment equipment |
JP5087875B2 (en) * | 2006-07-31 | 2012-12-05 | 株式会社Ihi | Heat treatment equipment |
JP5733005B2 (en) * | 2011-05-02 | 2015-06-10 | 日産自動車株式会社 | Waste heat power generator |
JP5712791B2 (en) * | 2011-05-25 | 2015-05-07 | 日産自動車株式会社 | Waste heat power generator |
JP2013002764A (en) * | 2011-06-20 | 2013-01-07 | Nissan Motor Co Ltd | Controlled cooling furnace |
JP6246998B2 (en) * | 2011-07-27 | 2017-12-13 | Jfeスチール株式会社 | Thermoelectric power generation apparatus and thermoelectric power generation method |
JP5951438B2 (en) * | 2012-10-05 | 2016-07-13 | 光洋サーモシステム株式会社 | Heat treatment equipment |
JP2016127033A (en) * | 2014-12-26 | 2016-07-11 | 基弘 上野 | Thermal power generation device and thermal power generation method using the same, and thermal power generation system |
JP6802450B2 (en) * | 2017-01-10 | 2020-12-16 | テンソー電磁技術工業株式会社 | Absorption / heat dissipation semiconductor module, defroster and snow melting device |
JP7203623B2 (en) * | 2019-01-31 | 2023-01-13 | 東京エレクトロン株式会社 | Heat treatment equipment |
WO2023152162A1 (en) | 2022-02-09 | 2023-08-17 | Basf Se | Recovery of energy |
-
2000
- 2000-12-04 JP JP2000369180A patent/JP4178746B2/en not_active Expired - Fee Related
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