JP2002171152A5 - - Google Patents

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Publication number
JP2002171152A5
JP2002171152A5 JP2000368937A JP2000368937A JP2002171152A5 JP 2002171152 A5 JP2002171152 A5 JP 2002171152A5 JP 2000368937 A JP2000368937 A JP 2000368937A JP 2000368937 A JP2000368937 A JP 2000368937A JP 2002171152 A5 JP2002171152 A5 JP 2002171152A5
Authority
JP
Japan
Prior art keywords
lid
base
end portion
tip
vicinity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000368937A
Other languages
English (en)
Japanese (ja)
Other versions
JP2002171152A (ja
JP3937722B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000368937A priority Critical patent/JP3937722B2/ja
Priority claimed from JP2000368937A external-priority patent/JP3937722B2/ja
Publication of JP2002171152A publication Critical patent/JP2002171152A/ja
Publication of JP2002171152A5 publication Critical patent/JP2002171152A5/ja
Application granted granted Critical
Publication of JP3937722B2 publication Critical patent/JP3937722B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000368937A 2000-12-04 2000-12-04 圧電デバイス Expired - Fee Related JP3937722B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000368937A JP3937722B2 (ja) 2000-12-04 2000-12-04 圧電デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000368937A JP3937722B2 (ja) 2000-12-04 2000-12-04 圧電デバイス

Publications (3)

Publication Number Publication Date
JP2002171152A JP2002171152A (ja) 2002-06-14
JP2002171152A5 true JP2002171152A5 (https=) 2005-02-24
JP3937722B2 JP3937722B2 (ja) 2007-06-27

Family

ID=18839058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000368937A Expired - Fee Related JP3937722B2 (ja) 2000-12-04 2000-12-04 圧電デバイス

Country Status (1)

Country Link
JP (1) JP3937722B2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040031680A (ko) 2001-08-17 2004-04-13 시티즌 워치 콤파니, 리미티드 전자 장치 및 그 제조 방법
JP2006145610A (ja) * 2004-11-16 2006-06-08 Shinko Electric Ind Co Ltd 光学部品収納用パッケージ
JP5170405B2 (ja) * 2008-03-25 2013-03-27 セイコーエプソン株式会社 圧電振動子の製造方法
JP5476964B2 (ja) 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
TWI484149B (zh) 2011-01-17 2015-05-11 日本電波工業股份有限公司 外力檢測裝置及外力檢測感測器
JP5912510B2 (ja) * 2011-01-17 2016-04-27 日本電波工業株式会社 外力検出方法及び外力検出装置
JP5494994B2 (ja) * 2012-12-27 2014-05-21 セイコーエプソン株式会社 振動子の製造方法

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