JP2002171152A5 - - Google Patents

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Publication number
JP2002171152A5
JP2002171152A5 JP2000368937A JP2000368937A JP2002171152A5 JP 2002171152 A5 JP2002171152 A5 JP 2002171152A5 JP 2000368937 A JP2000368937 A JP 2000368937A JP 2000368937 A JP2000368937 A JP 2000368937A JP 2002171152 A5 JP2002171152 A5 JP 2002171152A5
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JP
Japan
Prior art keywords
lid
base
end portion
tip
vicinity
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Application number
JP2000368937A
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English (en)
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JP2002171152A (ja
JP3937722B2 (ja
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Priority to JP2000368937A priority Critical patent/JP3937722B2/ja
Priority claimed from JP2000368937A external-priority patent/JP3937722B2/ja
Publication of JP2002171152A publication Critical patent/JP2002171152A/ja
Publication of JP2002171152A5 publication Critical patent/JP2002171152A5/ja
Application granted granted Critical
Publication of JP3937722B2 publication Critical patent/JP3937722B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

【００５０】
図３は、図１の圧電振動子１０の蓋体１４を除去して、ベース１２内を露出した概略平面図である。図示されているように、ベース１２に蓋体１４を被せたときの凸部２１の位置は、圧電振動素子１３の先端部よりも接合箇所である一端部１３ａに近い位置であって、好ましくは、励振電極１３ｃの先端部付近に位置するように設けられ、貫通孔２１ａの位置も励振電極１３ｃの先端部付近になるようにされる。
JP2000368937A 2000-12-04 2000-12-04 圧電デバイス Expired - Fee Related JP3937722B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000368937A JP3937722B2 (ja) 2000-12-04 2000-12-04 圧電デバイス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000368937A JP3937722B2 (ja) 2000-12-04 2000-12-04 圧電デバイス

Publications (3)

Publication Number Publication Date
JP2002171152A JP2002171152A (ja) 2002-06-14
JP2002171152A5 true JP2002171152A5 (ja) 2005-02-24
JP3937722B2 JP3937722B2 (ja) 2007-06-27

Family

ID=18839058

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000368937A Expired - Fee Related JP3937722B2 (ja) 2000-12-04 2000-12-04 圧電デバイス

Country Status (1)

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JP (1) JP3937722B2 (ja)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6924429B2 (en) 2001-08-17 2005-08-02 Citizen Watch Co., Ltd. Electronic device and production method therefor
JP2006145610A (ja) * 2004-11-16 2006-06-08 Shinko Electric Ind Co Ltd 光学部品収納用パッケージ
JP5170405B2 (ja) * 2008-03-25 2013-03-27 セイコーエプソン株式会社 圧電振動子の製造方法
JP5476964B2 (ja) 2009-12-09 2014-04-23 セイコーエプソン株式会社 振動子、発振器、ジャイロ及び電子機器
JP5912510B2 (ja) 2011-01-17 2016-04-27 日本電波工業株式会社 外力検出方法及び外力検出装置
TWI484149B (zh) 2011-01-17 2015-05-11 Nihon Dempa Kogyo Co 外力檢測裝置及外力檢測感測器
JP5494994B2 (ja) * 2012-12-27 2014-05-21 セイコーエプソン株式会社 振動子の製造方法

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