JP2002170863A5 - - Google Patents

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Publication number
JP2002170863A5
JP2002170863A5 JP2000364357A JP2000364357A JP2002170863A5 JP 2002170863 A5 JP2002170863 A5 JP 2002170863A5 JP 2000364357 A JP2000364357 A JP 2000364357A JP 2000364357 A JP2000364357 A JP 2000364357A JP 2002170863 A5 JP2002170863 A5 JP 2002170863A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000364357A
Other languages
Japanese (ja)
Other versions
JP4444486B2 (ja
JP2002170863A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000364357A priority Critical patent/JP4444486B2/ja
Priority claimed from JP2000364357A external-priority patent/JP4444486B2/ja
Publication of JP2002170863A publication Critical patent/JP2002170863A/ja
Publication of JP2002170863A5 publication Critical patent/JP2002170863A5/ja
Application granted granted Critical
Publication of JP4444486B2 publication Critical patent/JP4444486B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000364357A 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法 Expired - Fee Related JP4444486B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000364357A JP4444486B2 (ja) 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000364357A JP4444486B2 (ja) 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法

Publications (3)

Publication Number Publication Date
JP2002170863A JP2002170863A (ja) 2002-06-14
JP2002170863A5 true JP2002170863A5 (enExample) 2007-11-08
JP4444486B2 JP4444486B2 (ja) 2010-03-31

Family

ID=18835318

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000364357A Expired - Fee Related JP4444486B2 (ja) 2000-11-30 2000-11-30 半導体ウェハの周縁微小領域におけるマーク読取方法

Country Status (1)

Country Link
JP (1) JP4444486B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7479764B2 (ja) * 2020-08-07 2024-05-09 株式会社ディスコ 切削装置

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