JP2002169122A5 - - Google Patents

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Publication number
JP2002169122A5
JP2002169122A5 JP2000365854A JP2000365854A JP2002169122A5 JP 2002169122 A5 JP2002169122 A5 JP 2002169122A5 JP 2000365854 A JP2000365854 A JP 2000365854A JP 2000365854 A JP2000365854 A JP 2000365854A JP 2002169122 A5 JP2002169122 A5 JP 2002169122A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000365854A
Other languages
Japanese (ja)
Other versions
JP4723719B2 (ja
JP2002169122A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000365854A priority Critical patent/JP4723719B2/ja
Priority claimed from JP2000365854A external-priority patent/JP4723719B2/ja
Publication of JP2002169122A publication Critical patent/JP2002169122A/ja
Publication of JP2002169122A5 publication Critical patent/JP2002169122A5/ja
Application granted granted Critical
Publication of JP4723719B2 publication Critical patent/JP4723719B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000365854A 2000-11-30 2000-11-30 ガルバノミラー装置 Expired - Fee Related JP4723719B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000365854A JP4723719B2 (ja) 2000-11-30 2000-11-30 ガルバノミラー装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000365854A JP4723719B2 (ja) 2000-11-30 2000-11-30 ガルバノミラー装置

Publications (3)

Publication Number Publication Date
JP2002169122A JP2002169122A (ja) 2002-06-14
JP2002169122A5 true JP2002169122A5 (cg-RX-API-DMAC10.html) 2008-01-31
JP4723719B2 JP4723719B2 (ja) 2011-07-13

Family

ID=18836554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000365854A Expired - Fee Related JP4723719B2 (ja) 2000-11-30 2000-11-30 ガルバノミラー装置

Country Status (1)

Country Link
JP (1) JP4723719B2 (cg-RX-API-DMAC10.html)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4681829B2 (ja) * 2004-06-16 2011-05-11 オリンパス株式会社 ガルバノミラー
EP1923985A4 (en) 2005-09-07 2016-09-21 Alps Electric Co Ltd ACTUATOR AND HOLOGRAPHIC DEVICE USING THE SAME
JP2007222203A (ja) * 2006-02-21 2007-09-06 Sumida Corporation ミラー駆動機構およびこのミラー駆動機構を具備する撮像装置
WO2014119200A1 (ja) * 2013-01-31 2014-08-07 ギガフォトン株式会社 ミラー装置

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5914801A (en) * 1996-09-27 1999-06-22 Mcnc Microelectromechanical devices including rotating plates and related methods
JPH11133343A (ja) * 1997-10-31 1999-05-21 Asahi Optical Co Ltd ガルバノミラー
JPH11142772A (ja) * 1997-11-08 1999-05-28 Asahi Optical Co Ltd ガルバノミラー
JP3510789B2 (ja) * 1998-04-14 2004-03-29 ペンタックス株式会社 ガルバノミラーの保持構造
JP3552601B2 (ja) * 1998-11-16 2004-08-11 日本ビクター株式会社 光偏向子及びこれを用いた表示装置
JP2001075042A (ja) * 1999-09-01 2001-03-23 Victor Co Of Japan Ltd 光偏向器

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