JP2002169122A5 - - Google Patents
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- Publication number
- JP2002169122A5 JP2002169122A5 JP2000365854A JP2000365854A JP2002169122A5 JP 2002169122 A5 JP2002169122 A5 JP 2002169122A5 JP 2000365854 A JP2000365854 A JP 2000365854A JP 2000365854 A JP2000365854 A JP 2000365854A JP 2002169122 A5 JP2002169122 A5 JP 2002169122A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000365854A JP4723719B2 (ja) | 2000-11-30 | 2000-11-30 | ガルバノミラー装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000365854A JP4723719B2 (ja) | 2000-11-30 | 2000-11-30 | ガルバノミラー装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002169122A JP2002169122A (ja) | 2002-06-14 |
| JP2002169122A5 true JP2002169122A5 (ja) | 2008-01-31 |
| JP4723719B2 JP4723719B2 (ja) | 2011-07-13 |
Family
ID=18836554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000365854A Expired - Fee Related JP4723719B2 (ja) | 2000-11-30 | 2000-11-30 | ガルバノミラー装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4723719B2 (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4681829B2 (ja) * | 2004-06-16 | 2011-05-11 | オリンパス株式会社 | ガルバノミラー |
| EP1923985A4 (en) | 2005-09-07 | 2016-09-21 | Alps Electric Co Ltd | ACTUATOR AND HOLOGRAPHIC DEVICE USING THE SAME |
| JP2007222203A (ja) * | 2006-02-21 | 2007-09-06 | Sumida Corporation | ミラー駆動機構およびこのミラー駆動機構を具備する撮像装置 |
| WO2014119200A1 (ja) * | 2013-01-31 | 2014-08-07 | ギガフォトン株式会社 | ミラー装置 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5914801A (en) * | 1996-09-27 | 1999-06-22 | Mcnc | Microelectromechanical devices including rotating plates and related methods |
| JPH11133343A (ja) * | 1997-10-31 | 1999-05-21 | Asahi Optical Co Ltd | ガルバノミラー |
| JPH11142772A (ja) * | 1997-11-08 | 1999-05-28 | Asahi Optical Co Ltd | ガルバノミラー |
| JP3510789B2 (ja) * | 1998-04-14 | 2004-03-29 | ペンタックス株式会社 | ガルバノミラーの保持構造 |
| JP3552601B2 (ja) * | 1998-11-16 | 2004-08-11 | 日本ビクター株式会社 | 光偏向子及びこれを用いた表示装置 |
| JP2001075042A (ja) * | 1999-09-01 | 2001-03-23 | Victor Co Of Japan Ltd | 光偏向器 |
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2000
- 2000-11-30 JP JP2000365854A patent/JP4723719B2/ja not_active Expired - Fee Related