JP2002167559A - Damming material and method for manufacturing sealed electronic part using this damming material - Google Patents

Damming material and method for manufacturing sealed electronic part using this damming material

Info

Publication number
JP2002167559A
JP2002167559A JP2000364657A JP2000364657A JP2002167559A JP 2002167559 A JP2002167559 A JP 2002167559A JP 2000364657 A JP2000364657 A JP 2000364657A JP 2000364657 A JP2000364657 A JP 2000364657A JP 2002167559 A JP2002167559 A JP 2002167559A
Authority
JP
Japan
Prior art keywords
sensitive adhesive
pressure
heat
curability
adhesive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000364657A
Other languages
Japanese (ja)
Other versions
JP4703842B2 (en
Inventor
Yukio Arimitsu
幸生 有満
Toshiyuki Oshima
俊幸 大島
Shuto Murata
秋桐 村田
Kazuyuki Kiuchi
一之 木内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to JP2000364657A priority Critical patent/JP4703842B2/en
Publication of JP2002167559A publication Critical patent/JP2002167559A/en
Application granted granted Critical
Publication of JP4703842B2 publication Critical patent/JP4703842B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Adhesive Tapes (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a damming material for retaining a flowable substance having curability in a specified space until curing which is constituted of a pressure-sensitive adhesive sheet and can firmly hold the flowable substance without leakage when the flowable. substance has fluidity, and simultaneously, is readily peelable after curing without damaging the adherend. SOLUTION: The damming material retains a flowable substance having curability in a specified space until curing, and is constituted of a heat peelable pressure-sensitive adhesive sheet having a thermally expansible pressure-sensitive adhesive layer containing thermally expansible fine spheres on at least one side of a base material. A cured product can be produced by introducing the flowable substance having curability into this specified space enclosed with this damming material then curing the above flowable substance having curability by a curing means, subsequently expanding the thermally expansible pressure- sensitive adhesive layer of the damming material by heating, and peeling the damming material.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、加熱剥離型粘着シ
ートで構成され、硬化性を有する流動性物質を硬化する
までの間所定の空間に留めておく堰材と、これを利用し
た硬化物の製造方法及び封止電子部品の製造方法に関す
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dam member which is composed of a heat-peelable pressure-sensitive adhesive sheet and which holds a fluid material having curability in a predetermined space until it is cured, and a cured material using the dam material. And a method of manufacturing a sealed electronic component.

【0002】[0002]

【従来の技術】従来、硬化物を製造する際、硬化性を有
する流動性物質を硬化するまでの間所定の空間に留める
堰材として、粘着シートを利用することが知られてい
る。この粘着シートを用いて、硬化性を有する流動性物
質が漏れない空間を作り、その後、硬化性を有する流動
性物質を注入し、熱や紫外線等の硬化手段によりその物
質を硬化させ、不要な粘着シートを剥がすことで、目的
とする形状をした硬化物を得ることができる。このよう
なダム用途の例として、電子部品の製造工程中の封止樹
脂の硬化工程等が挙げられる。
2. Description of the Related Art Conventionally, it has been known to use a pressure-sensitive adhesive sheet as a dam member for retaining a fluid material having curability in a predetermined space until it is cured when producing a cured product. Using this pressure-sensitive adhesive sheet, create a space in which the flowable substance having curability does not leak, then inject the flowable substance having curability, cure the substance by a curing means such as heat or ultraviolet light, and remove unnecessary substances. By peeling off the adhesive sheet, a cured product having a desired shape can be obtained. As an example of such a dam application, there is a curing step of a sealing resin in a manufacturing process of an electronic component.

【0003】しかしながら、従来の粘着シートを用いる
製造方法では、硬化性を有する流動性物質を硬化した場
合、被着体(周りの貼り付け部や硬化物)が粘着シート
としっかり接着してしまい、粘着シートを剥離すること
が困難であったり、剥離する際に被着体を破壊してしま
うことがある。
However, in the conventional manufacturing method using a pressure-sensitive adhesive sheet, when a fluid material having curability is cured, an adherend (surrounding portion or a cured product) adheres firmly to the pressure-sensitive adhesive sheet. It may be difficult to peel off the pressure-sensitive adhesive sheet, or the adherend may be destroyed when peeling off.

【0004】また、電子部品を樹脂で封止した封止電子
部品の製造工程において、部品の極小化に伴い、軽い応
力をも避けたいとの要求が高いが、従来の粘着シートで
は貼り付けた部分から剥がす際の応力が大きくなり、部
品の損傷の問題が生じていた。よって、封止電子部品の
製造工程において利用される粘着テープに対しては、剥
がす際の応力は小さく、しかし、硬化性を有する流動性
物質が硬化するまでは液を漏らさず、しっかりと貼り付
いていなければならないとの相反する要求がある。
[0004] In the manufacturing process of a sealed electronic component in which the electronic component is sealed with a resin, there is a high demand to avoid light stress as the component is miniaturized. The stress at the time of peeling from the part becomes large, causing a problem of damage to parts. Therefore, the adhesive tape used in the manufacturing process of sealed electronic components has a small stress when peeling, but does not leak liquid until the fluid substance having curability is cured, and adheres firmly. There are conflicting demands that they have to be.

【0005】[0005]

【発明が解決しようとする課題】本発明の目的は、硬化
性を有する流動性物質を硬化するまでの間所定の空間に
留めておくための、粘着シートで構成されている堰材で
あって、流動性があるときは周りの貼り付け部から剥が
れず、液を漏らすことなくしっかりと保持することがで
き、且つ、硬化後には、硬化物や周りの貼り付け部(以
下、これらを単に「被着体」と称する場合がある)から
該粘着シートを剥がす際の応力が小さく、被着体を損傷
させることなく簡単に剥離することができる堰材、並び
に該堰材を用いた硬化物の製造方法及び封止電子部品の
製造方法を提供することにある。
SUMMARY OF THE INVENTION An object of the present invention is to provide a weir comprising an adhesive sheet for retaining a curable fluid substance in a predetermined space until it is cured. When it has fluidity, it does not peel off from the surrounding attached parts, can be held firmly without leaking liquid, and after curing, it hardens and the surrounding attached parts (hereinafter simply referred to as " A stress which is small when the pressure-sensitive adhesive sheet is peeled off from the "adherend", and which can be easily peeled without damaging the adherend, and a cured product using the dam. An object of the present invention is to provide a manufacturing method and a method for manufacturing a sealed electronic component.

【0006】[0006]

【課題を解決するための手段】本発明者らは上記目的を
達成するため鋭意検討した結果、熱膨張性微小球を含有
する熱膨張性粘着層を有する粘着シートを堰材(ダム
材;ダム用途に用いる部材)として使用すると、硬化物
が円滑に製造できるようになり、また、封止電子部品を
損傷なく製造できることを見出し、本発明を完成した。
Means for Solving the Problems The inventors of the present invention have conducted intensive studies to achieve the above object, and have found that an adhesive sheet having a heat-expandable adhesive layer containing heat-expandable microspheres is used as a dam material (dam material; dam). When used as a member for applications), it has been found that a cured product can be produced smoothly and that a sealed electronic component can be produced without damage, and the present invention has been completed.

【0007】すなわち、本発明は、硬化性を有する流動
性物質を硬化するまでの間所定の空間に留めておくため
の堰材であって、基材の少なくとも片方に熱膨張性微小
球を含有する熱膨張性粘着層を有する加熱剥離型粘着シ
ートで構成されている堰材を提供する。本発明は、ま
た、上記の堰材により仕切られた所定の空間へ、硬化性
を有する流動性物質を注入した後、硬化手段により前記
硬化性を有する流動性物質を硬化させ、次いで堰材の熱
膨張性粘着層を加熱により膨張させて堰材を剥離し、硬
化物を得ることを特徴とする硬化物の製造方法を提供す
る。
[0007] That is, the present invention relates to a dam member for retaining a curable fluid substance in a predetermined space until it is cured, wherein at least one of the base materials contains heat-expandable microspheres. The present invention provides a dam member composed of a heat-peelable pressure-sensitive adhesive sheet having a heat-expandable pressure-sensitive adhesive layer. The present invention also provides a method in which, after injecting a curable fluid substance into a predetermined space partitioned by the dam member, the curable fluid substance is cured by a curing unit, and then the dam member is cured. A method for producing a cured product, characterized in that a heat-expandable pressure-sensitive adhesive layer is expanded by heating to peel off a weir member to obtain a cured product.

【0008】また、本発明は、上記の堰材により仕切ら
れ、且つ電子部品が配置された所定の空間へ、硬化性を
有する流動性物質を注入した後、硬化手段により前記硬
化性を有する流動性物質を硬化させ、次いで堰材の熱膨
張性粘着層を加熱により膨張させて堰材を剥離し、硬化
物で封止された電子部品を得ることを特徴とする封止電
子部品の製造方法を提供する。
[0008] The present invention also provides a method in which a curable fluid material is injected into a predetermined space partitioned by the dam member and in which electronic components are arranged, and then the curable fluid is injected by a curing means. A method for producing an electronic component sealed with a cured product by curing an adhesive substance and then expanding the heat-expandable pressure-sensitive adhesive layer of the damper by heating to peel off the damper. I will provide a.

【0009】[0009]

【発明の実施の形態】以下に、本発明の実施の形態を、
必要に応じて図面を参照しつつ詳細に説明する。図1は
本発明の堰材(加熱剥離型粘着シート)の一例を示す概
略断面図であり、支持基材1の一方の面に、ゴム状有機
弾性層2を介して、熱膨張性粘着層3が設けられ、さら
にその上にセパレータ4が積層されている。なお、支持
基材1の片面にゴム状有機弾性層2と熱膨張性粘着層3
を有し、他面に普通の粘着剤層を有する粘着シートを用
いることもできる。
DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described below.
This will be described in detail with reference to the drawings as necessary. FIG. 1 is a schematic cross-sectional view showing an example of a dam member (heat-peelable pressure-sensitive adhesive sheet) of the present invention. A heat-expandable pressure-sensitive adhesive layer is provided on one surface of a support substrate 1 via a rubber-like organic elastic layer 2. 3 are provided, and a separator 4 is further laminated thereon. The rubbery organic elastic layer 2 and the heat-expandable adhesive layer 3
And a pressure-sensitive adhesive sheet having a normal pressure-sensitive adhesive layer on the other surface.

【0010】支持基材1は堰材の支持母体となるもの
で、一般にはプラスチックのフィルムやシートが用いら
れるが、例えば紙、布、不織布、金属箔、あるいはそれ
らのプラスチックラミネート体、プラスチック同士の積
層体などの適宜な薄葉体を用いうる。支持基材1の厚さ
は、一般には500μm以下、好ましくは1〜300μ
m、さらに好ましくは5〜250μm程度であるが、こ
れらに限定されない。
The support base material 1 is a support base material for the dam member. Generally, a plastic film or sheet is used. For example, paper, cloth, nonwoven fabric, metal foil, a plastic laminate thereof, An appropriate thin leaf such as a laminate can be used. The thickness of the supporting substrate 1 is generally 500 μm or less, preferably 1 to 300 μm.
m, more preferably about 5 to 250 μm, but is not limited thereto.

【0011】ゴム状有機弾性層2は、堰材を被着体に接
着する際にその表面が被着体の表面形状に良好に追従し
て大きい接着面積を提供する働きと、堰材を被着体から
剥離するために熱膨張性粘着層3を加熱して発泡及び/
または膨張させる際に堰材の面方向における発泡及び/
または膨張の拘束を少なくして熱膨張性粘着層3が三次
元的構造変化することによるうねり構造形成を助長する
働きをするものである。
The rubber-like organic elastic layer 2 has a function of providing a large bonding area by adhering the surface of the adherend to the surface of the adherend when the damper is adhered to the adherend. The heat-expandable pressure-sensitive adhesive layer 3 is heated and foamed and / or peeled off from the adherend.
Or, when expanding, foaming and / or
Alternatively, the expansion of the heat-expandable pressure-sensitive adhesive layer 3 is reduced by three-dimensionally changing the structure so as to promote the formation of an undulating structure.

【0012】ゴム状有機弾性層2は、ASTM D−2
240に基づくD型シュアーD型硬度が50以下、好ま
しくは40以下の天然ゴムや合成ゴム、又はゴム弾性を
有する合成樹脂により形成することができる。
The rubbery organic elastic layer 2 is made of ASTM D-2.
It can be formed of natural rubber or synthetic rubber having a D-type shear D-type hardness of 50 or less, preferably 40 or less, or a synthetic resin having rubber elasticity.

【0013】前記の合成ゴム又は合成樹脂としては、例
えば、ニトリル系、ジエン系、アクリル系などの合成ゴ
ム;ポリオレフィン系、ポリエステル系などの熱可塑性
エラストマー;エチレン−酢酸ビニル共重合体、ポリウ
レタン、ポリブタジエン、軟質ポリ塩化ビニルなどの、
ゴム弾性を有する合成樹脂などが挙げられる。なお、ポ
リ塩化ビニルなどのように本質的には硬質系ポリマーで
あっても、可塑剤や柔軟剤等の配合剤との組み合わせ
で、ゴム弾性をもたせたものも本発明では用いうる。
Examples of the synthetic rubber or synthetic resin include nitrile, diene, and acrylic synthetic rubbers; polyolefin and polyester thermoplastic elastomers; ethylene-vinyl acetate copolymer, polyurethane and polybutadiene. , Such as soft polyvinyl chloride,
Synthetic resins having rubber elasticity are exemplified. In the present invention, even a rigid polymer such as polyvinyl chloride, which has rubber elasticity in combination with a compounding agent such as a plasticizer or a softener, can be used in the present invention.

【0014】また、ゴム系や樹脂などの一般的に知られ
る感圧接着剤により形成することもできる。感圧接着剤
としては、ゴム系感圧接着剤、アクリル系感圧接着剤、
スチレン−共役ジエンブロック共重合体系感圧接着剤な
どの適宜なものを用いることができる。また、融点が約
200℃以下等の熱溶融性樹脂を配合してクリープ特性
を改良した感圧接着剤を用いることもできる。なお、感
圧接着剤は、架橋剤、粘着付与剤、可塑剤、充填剤、老
化防止剤などの適宜な添加剤を含んでいてもよい。
Further, it can be formed of a generally known pressure-sensitive adhesive such as rubber or resin. As pressure-sensitive adhesives, rubber-based pressure-sensitive adhesives, acrylic-based pressure-sensitive adhesives,
An appropriate material such as a styrene-conjugated diene block copolymer pressure-sensitive adhesive can be used. Further, a pressure-sensitive adhesive having improved creep characteristics by blending a heat-meltable resin having a melting point of about 200 ° C. or less can also be used. The pressure-sensitive adhesive may contain appropriate additives such as a crosslinking agent, a tackifier, a plasticizer, a filler, an antioxidant, and the like.

【0015】感圧接着剤としては、より具体的に例え
ば、天然ゴムや合成ゴムをベースポリマーとしたゴム系
感圧接着剤;メチル基、エチル基、プロピル基、ブチル
基、2−エチルヘキシル基、イソオクチル基、イソノニ
ル基、イソデシル基、ドデシル基、ラウリル基、トリデ
シル基、ペンタデシル基、ヘキサデシル基、ヘプタデシ
ル基、オクタデシル基、ノナデシル基、エイコシル基、
などの炭素数が20以下のアルキル基を有するアクリル
酸ないしメタクリル酸等のアクリル酸系アルキルエステ
ル、アクリル酸、メタクリル酸、イコタン酸、アクリル
酸ヒドロキシエチル、メタクリル酸ヒドロキシエチル、
アクリル酸ヒドロキシプロピル、メタクリル酸ヒドロキ
シプロピル、N−メチロールアクリルアミド、アクリロ
ニトリル、メタクリロニトリル、アクリル酸グリシジ
ル、メタクリル酸グリシジル、酢酸ビニル、スチレン、
イソプレン、ブタジエン、イソブチレン、ビニルエーテ
ルなどを主成分とするアクリル系ポリマーをベースポリ
マーとするアクリル系感圧接着剤などが挙げられる。
More specifically, examples of the pressure-sensitive adhesive include a rubber-based pressure-sensitive adhesive using a natural rubber or a synthetic rubber as a base polymer; a methyl group, an ethyl group, a propyl group, a butyl group, a 2-ethylhexyl group; Isooctyl group, isononyl group, isodecyl group, dodecyl group, lauryl group, tridecyl group, pentadecyl group, hexadecyl group, heptadecyl group, octadecyl group, nonadecyl group, eicosyl group,
Acrylic acid-based alkyl esters such as acrylic acid or methacrylic acid having an alkyl group having 20 or less carbon atoms, such as acrylic acid, methacrylic acid, icotanic acid, hydroxyethyl acrylate, hydroxyethyl methacrylate,
Hydroxypropyl acrylate, hydroxypropyl methacrylate, N-methylolacrylamide, acrylonitrile, methacrylonitrile, glycidyl acrylate, glycidyl methacrylate, vinyl acetate, styrene,
Acrylic pressure-sensitive adhesives containing an acrylic polymer having isoprene, butadiene, isobutylene, vinyl ether or the like as a main component as a base polymer may be used.

【0016】熱膨張性粘着層3は、少なくとも、粘着性
を付与するための粘着剤と、熱膨張性を付与するための
熱膨張性微小球(マイクロカプセル)とを含んでいる。
そのため、硬化性を有する流動性物質が硬化した後、熱
膨張性粘着層3を加熱して、熱膨張性微小球を発泡及び
/又は膨張処理することにより、熱膨張性粘着層3と被
着体との接着面積を減少させて、粘着シートを容易に剥
離することができる。なお、マイクロカプセル化してい
ない発泡剤では、良好な剥離性を安定して発現させるこ
とができない。
The heat-expandable pressure-sensitive adhesive layer 3 contains at least a pressure-sensitive adhesive for imparting adhesiveness and heat-expandable microspheres (microcapsules) for imparting thermal expansivity.
Therefore, after the fluid material having curability is cured, the heat-expandable pressure-sensitive adhesive layer 3 is heated to expand and / or expand the heat-expandable microspheres so that the heat-expandable pressure-sensitive adhesive layer 3 adheres to the heat-expandable pressure-sensitive adhesive layer 3. The pressure-sensitive adhesive sheet can be easily peeled off by reducing the bonding area with the body. It should be noted that a foaming agent that is not microencapsulated cannot stably exhibit good releasability.

【0017】熱膨張性微小球としては、例えば、イソブ
タン、プロパン、ペンタンなどの、加熱により容易にガ
ス化して膨張する物質を、弾性を有する殻内に内包させ
た微小球であればよい。前記殻は、熱溶融性物質や熱膨
張により破壊する物質で形成される場合が多い。前記殻
を形成する物質として、例えば、塩化ビニリデン−アク
リロニトリル共重合体、ポリビニルアルコール、ポリビ
ニルブチラール、ポリメチルメタクリレート、ポリアク
リロニトリル、ポリ塩化ビニリデン、ポリスルホンなど
が挙げられる。熱膨張性微小球は、慣用の方法、例え
ば、コアセルベーション法、界面重合法などにより製造
できる。なお、熱膨張性微小球には、例えば、マツモト
マイクロスフェア[商品名、松本油脂製薬(株)製]な
どの市販品もある。
The heat-expandable microspheres may be microspheres in which a substance that easily gasifies and expands by heating, such as isobutane, propane, and pentane, is contained in an elastic shell. The shell is often formed of a heat-meltable substance or a substance that breaks due to thermal expansion. Examples of the material forming the shell include a vinylidene chloride-acrylonitrile copolymer, polyvinyl alcohol, polyvinyl butyral, polymethyl methacrylate, polyacrylonitrile, polyvinylidene chloride, and polysulfone. The heat-expandable microspheres can be produced by a conventional method, for example, a coacervation method, an interfacial polymerization method, or the like. In addition, there is a commercially available product such as Matsumoto Microsphere (trade name, manufactured by Matsumoto Yushi Seiyaku Co., Ltd.) as the thermally expandable microsphere.

【0018】加熱処理により熱膨張性粘着層の接着力を
効率よく低下させるため、体積膨張率が5倍以上、特に
10倍以上となるまで破裂しない適度な強度を有する熱
膨張性微小球が好ましい。
In order to efficiently reduce the adhesive force of the heat-expandable pressure-sensitive adhesive layer by heat treatment, heat-expandable microspheres having an appropriate strength that does not burst until the volume expansion rate becomes 5 times or more, especially 10 times or more are preferable. .

【0019】熱膨張性微小球の配合量は、粘着層の膨張
倍率や接着力の低下性などに応じて適宜設定しうるが、
一般には熱膨張性粘着層3を形成するベースポリマー1
00重量部に対して、例えば1〜150重量部、好まし
くは10〜130重量部、さらに好ましくは25〜10
0重量部である。
The blending amount of the heat-expandable microspheres can be appropriately set according to the expansion ratio of the pressure-sensitive adhesive layer and the property of lowering the adhesive strength.
Generally, the base polymer 1 forming the heat-expandable adhesive layer 3
For example, 1 to 150 parts by weight, preferably 10 to 130 parts by weight, and more preferably 25 to 10 parts by weight with respect to 00 parts by weight.
0 parts by weight.

【0020】熱膨張性粘着層3を形成する粘着剤として
は、加熱時に熱膨張性微小球の発泡及び/又は膨張を許
容するゴム系材料や樹脂等をベースとする慣用乃至公知
の感圧接着剤、好ましくは熱膨張性微小球の発泡及び/
又は膨張を可及的に拘束しないようなものが用いられ
る。このような感圧接着剤としては、例えば、前記ゴム
状有機弾性層において例示した感圧接着剤が挙げられ
る。なお熱膨張性粘着層は、加熱前には被着体に強固に
接着するが、加熱処理後に接着力が低下するという特徴
を持つ感圧接着剤を有するものが好ましい。具体的に
は、動的弾性率が常温から150℃において5千〜10
0万Paの範囲にあるポリマーをベースとした感圧接着
剤である。
The pressure-sensitive adhesive forming the heat-expandable pressure-sensitive adhesive layer 3 is a conventional or known pressure-sensitive adhesive based on a rubber-based material or resin that permits the expansion and / or expansion of the heat-expandable microspheres when heated. And / or foaming of the agent, preferably the heat-expandable microspheres.
Alternatively, a material that does not restrict expansion as much as possible is used. Examples of such a pressure-sensitive adhesive include the pressure-sensitive adhesives exemplified in the rubber-like organic elastic layer. The heat-expandable pressure-sensitive adhesive layer preferably has a pressure-sensitive adhesive which has a characteristic of firmly adhering to the adherend before heating but having a reduced adhesive strength after heat treatment. Specifically, the dynamic elastic modulus is 5,000 to 10 at normal temperature to 150 ° C.
It is a pressure-sensitive adhesive based on a polymer in the range of 10,000 Pa.

【0021】熱膨張性粘着層3及びゴム状有機弾性層2
の厚さは、それぞれ5〜300μm、好ましくは20〜
150μmを用いる。但し、熱膨張性粘着層3の厚さ
は、含有する熱膨張性微小球の最大粒径よりも厚い方が
好ましい。厚さが薄いと熱膨張性微小球の凹凸により表
面平滑性が損なわれ、加熱前接着力が低下する。また、
必要以上に厚いと熱膨張性粘着層3の発泡後に凝集破壊
が起こり、被着体に糊残りが発生する場合がある。ゴム
状有機弾性層2の厚みが薄いと、加熱発泡後の3次元的
構造変化をとることができず、剥離性が悪化する。
Thermally expandable adhesive layer 3 and rubbery organic elastic layer 2
Each has a thickness of 5 to 300 μm, preferably 20 to 300 μm.
150 μm is used. However, the thickness of the heat-expandable pressure-sensitive adhesive layer 3 is preferably larger than the maximum particle size of the heat-expandable microspheres contained therein. If the thickness is small, the surface smoothness is impaired due to the unevenness of the heat-expandable microspheres, and the adhesive strength before heating is reduced. Also,
If it is thicker than necessary, cohesive failure may occur after foaming of the heat-expandable pressure-sensitive adhesive layer 3, and adhesive residue may be left on the adherend. When the thickness of the rubber-like organic elastic layer 2 is small, the three-dimensional structure cannot be changed after heating and foaming, and the releasability deteriorates.

【0022】本発明では、セパレータ4としては、慣用
の剥離紙などを使用できる。セパレータ4は熱膨張性粘
着層3の保護材として用いられ、粘着シートを被着体に
貼着する際に剥がされる。セパレータ4は必ずしも設け
なくてもよい。
In the present invention, as the separator 4, a conventional release paper or the like can be used. The separator 4 is used as a protective material for the heat-expandable pressure-sensitive adhesive layer 3 and is peeled off when the pressure-sensitive adhesive sheet is adhered to the adherend. The separator 4 does not necessarily have to be provided.

【0023】硬化性を有する流動性物質は、例えば封止
電子部品の製造工程における封止樹脂等となるもので、
具体的には、熱硬化性シリコーン樹脂、熱硬化性エポキ
シ樹脂などの熱硬化性樹脂、UV硬化性シリコーン樹脂
等のUV硬化性樹脂、水分硬化型樹脂、アニオン硬化型
樹脂、カチオン硬化型樹脂等が用いられるが、これに限
定はされない。
The fluid material having curability serves as, for example, a sealing resin in a manufacturing process of a sealing electronic component.
Specifically, thermosetting resins such as thermosetting silicone resins and thermosetting epoxy resins, UV curable resins such as UV curable silicone resins, moisture curable resins, anionic curable resins, cation curable resins, etc. , But is not limited thereto.

【0024】次に、硬化物の製造方法を順を追って説明
する。まず、上記本発明の堰材を用いて、硬化性を有す
る流動性物質を留めておくための空間を作る。この空間
は堰材のみで仕切られていてもよく、また最終的に硬化
物と一体化する部材と堰材とで形成されていても良い。
例えば、最終的に硬化物と一体化する筒状部材の開口部
の片側又は両側を堰材で塞ぐことにより、前記空間を形
成することができる。尚、筒状部材の開口部の両側を堰
材で塞ぐ場合には、硬化性を有する流動性物質の注入口
を設けておく。次いで、堰材で仕切られた空間へ硬化性
を有する流動性物質を注入する。注入は、流動性物質を
注入するときの慣用の方法、例えば流下方式、ポンプに
よる供給方式等により行うことができる。その後、前記
硬化性を有する流動性物質を、熱や放射線等の硬化手段
により硬化させ、不要となった堰材を加熱により剥離し
て、目的の硬化物が得られる。
Next, a method for producing a cured product will be described step by step. First, a space for retaining a fluid material having curability is created by using the dam material of the present invention. This space may be partitioned only by the weir member, or may be formed by a member and a weir member that are finally integrated with the cured product.
For example, the space can be formed by closing one or both sides of the opening of the tubular member that is finally integrated with the cured product with a dam. In the case where both sides of the opening of the tubular member are closed with the dam material, an inlet for a fluid substance having curability is provided. Next, a fluid material having curability is injected into the space partitioned by the weir material. The injection can be performed by a conventional method for injecting a fluid substance, for example, a flow-down method, a supply method using a pump, or the like. Thereafter, the fluid substance having curability is cured by a curing means such as heat or radiation, and unnecessary dams are peeled off by heating to obtain a desired cured product.

【0025】本発明の堰材を、被着体より容易に剥離で
きるようにするための加熱処理条件は、被着体の表面状
態や熱膨張性微小球の種類等による接着面積の減少性、
基材や被着体の耐熱性や加熱方法等の条件により適宜設
定できる。一般的な加熱処理条件は、温度90〜250
℃で、10〜300秒間(ホットプレート等)または1
〜30分間(熱風乾燥器等)である。上記加熱条件で、
通例、粘着層の熱膨張性微小球が膨張及び/又は発泡し
て粘着層が膨張変形し、接着力が低下ないし喪失する。
なお、加熱処理は使用目的に応じて適宜な段階で行うこ
とができる。また、加熱源としては、赤外線ランプや加
熱水を用いることができる場合もある。なお、堰材とし
ては、例えば、リバアルファ[商品名、日東電工(株)
製]及びリバクリーン[商品名、日東電工(株)製]等
の加熱剥離型粘着シートを用いることもできる。
The heat treatment conditions for allowing the barrier material of the present invention to be easily peeled off from the adherend include the following: the surface condition of the adherend, the type of the heat-expandable microspheres, etc.
It can be set as appropriate depending on conditions such as the heat resistance of the substrate and the adherend and the heating method. General heat treatment conditions are temperature 90-250.
At 10 ° C for 10 to 300 seconds (hot plate etc.) or 1
~ 30 minutes (hot air dryer etc.). Under the above heating conditions,
Usually, the heat-expandable microspheres of the pressure-sensitive adhesive layer expand and / or foam, and the pressure-sensitive adhesive layer expands and deforms, and the adhesive strength is reduced or lost.
Note that the heat treatment can be performed at an appropriate stage depending on the purpose of use. In some cases, an infrared lamp or heated water can be used as a heating source. The weir material may be, for example, Riva Alpha [trade name, Nitto Denko Corporation]
Heat-peelable pressure-sensitive adhesive sheets, such as those manufactured by Nippon Electric Co., Ltd.) and Riverclean [trade name, manufactured by Nitto Denko Corporation].

【0026】この硬化物の製造方法によれば、堰材とし
て、熱膨張性微小球を含有する熱膨張性粘着層を有する
加熱剥離型粘着シートを用いるため、硬化性を有する流
動性物質が流動性のあるときは液を漏らすことなくしっ
かりと保持することができ、硬化後は、加熱をすること
により堰材の熱膨張性粘着層が膨張し、簡単に剥離でき
るとともに、剥離の際の応力を小さくできるため、被着
体への損傷を防止又は抑制することができる。
According to the method for producing a cured product, since the heat-peelable pressure-sensitive adhesive sheet having the heat-expandable pressure-sensitive adhesive layer containing the heat-expandable microspheres is used as the dam member, the flowable material having curability flows. When there is a property, it can be held firmly without leaking liquid, and after curing, the heat-expandable adhesive layer of the weir expands by heating, and it can be easily peeled, and the stress at the time of peeling Can be reduced, so that damage to the adherend can be prevented or suppressed.

【0027】本発明の封止電子部品の製造方法は、上記
の硬化物の製造方法の1適用例である。本発明の封止電
子部品の製造法では、まず、上記本発明の堰材により仕
切られ、且つ、電子部品が配置された所定の空間へ、硬
化性を有する流動性物質を注入する。電子部品としては
特に限定されず、例えば、半導体、回路、各種プリント
基板、各種マスク、リードフレームなどを使用できる。
前記空間は堰材のみで仕切られていてもよく、また電子
部品の一部(例えば基板など)と堰材とで形成されてい
ても良い。硬化性を有する流動性物質の注入やその後の
流動性物質の硬化、堰材の加熱による剥離は前記と同様
にして行うことができる。こうして得られる封止電子部
品は、電子部品の全体又は一部が硬化物により封止され
ている。
The method for producing a sealed electronic component according to the present invention is an application example of the above-mentioned method for producing a cured product. In the manufacturing method of the sealed electronic component of the present invention, first, a fluid material having curability is injected into a predetermined space partitioned by the dam member of the present invention and in which the electronic component is arranged. The electronic components are not particularly limited, and for example, semiconductors, circuits, various printed boards, various masks, lead frames, and the like can be used.
The space may be partitioned only by the dam material, or may be formed by a part of the electronic component (for example, a substrate) and the dam material. The injection of the fluid material having curability, the subsequent curing of the fluid material, and the peeling of the dam member by heating can be performed in the same manner as described above. In the sealed electronic component thus obtained, the whole or a part of the electronic component is sealed with the cured product.

【0028】本発明の封止電子部品の製造方法によれ
ば、上記加熱剥離型粘着シートを堰材として用いるの
で、硬化性を有する流動性物質に流動性があるときは液
を漏らすことなくしっかりと保持し、熱膨張性粘着層を
加熱により膨張させて被着体から堰材を剥離することに
より、剥離時の応力が小さく抑えられ、電子部品への損
傷なく封止電子部品を製造することができる。
According to the method for producing a sealed electronic component of the present invention, since the above-mentioned heat-peelable pressure-sensitive adhesive sheet is used as a dam, when the curable fluid substance has fluidity, it can be securely leaked without liquid. By keeping the heat-expandable pressure-sensitive adhesive layer expanded by heating and peeling the damping material from the adherend, the stress at the time of peeling can be kept small, and the sealed electronic component can be manufactured without damaging the electronic component. Can be.

【0029】[0029]

【発明の効果】本発明によれば、熱膨張性微小球を含有
する熱膨張性粘着層を有する粘着シートを、封止電子部
品の製造時の硬化性を有する流動性物質の堰材として利
用するため、硬化性のある流動する物質が硬化するまで
液を漏らすことなくしっかりと保持することができると
共に、硬化後は加熱という簡単な手段で粘着層の粘着性
を著しく低下できるので、被着体から該粘着シートを剥
がす際は応力が小さく、硬化物や周りの被着体を損傷さ
せることなく簡単に剥離することができる。そのため、
硬化物が円滑に製造できるようになり、また、封止電子
部品を損傷なく製造できる。
According to the present invention, a pressure-sensitive adhesive sheet having a heat-expandable pressure-sensitive adhesive layer containing heat-expandable microspheres is used as a damping material for a curable flowable substance in the production of a sealed electronic component. As a result, it is possible to hold firmly without leaking liquid until the hardening and flowing substance is hardened, and after hardening, the adhesiveness of the adhesive layer can be significantly reduced by simple means of heating. When the pressure-sensitive adhesive sheet is peeled from the body, the pressure-sensitive adhesive sheet has a small stress and can be easily peeled without damaging the cured product or the surrounding adherend. for that reason,
The cured product can be manufactured smoothly, and the sealed electronic component can be manufactured without damage.

【0030】[0030]

【実施例】実施例1 アクリル酸エチル−アクリル酸2−エチルヘキシル−ア
クリル酸(50重量部−50重量部−5重量部)共重合
体系感圧接着剤100重量部に対し、イソシアナート系
架橋剤3重量部、ロジン系粘着付与樹脂2.5重量部、
熱膨張性微小球(商品名「マツモトマイクロスフェアF
−50D」、松本油脂製薬(株)製)30重量部を含む
トルエン溶液を、乾燥後の厚さが35μmとなるよう
に、厚さ50μmのポリエステルフィルム(商品名「ル
ミラーS10」、東レ(株)製)に塗布して、堰材を作
製した。厚さ100μmの銅箔に1cm2の穴を開け、
その穴の一方を塞ぐように片面に該堰材を貼り、熱硬化
性のある一液型シリコーン樹脂を前記穴の他の面に穴を
すべて覆うように垂らし、80℃雰囲気下5時間加熱し
硬化させて、サンプルを作製した。
Example 1 Ethyl acrylate-2-ethylhexyl acrylate-acrylic acid (50 parts by weight to 50 parts by weight to 5 parts by weight) copolymer isocyanate-based crosslinking agent based on 100 parts by weight of a pressure-sensitive adhesive. 3 parts by weight, rosin-based tackifying resin 2.5 parts by weight,
Thermal expansion microspheres (trade name "Matsumoto Microsphere F"
-50D "(manufactured by Matsumoto Yushi Pharmaceutical Co., Ltd.) in a 50 μm-thick polyester film (trade name“ Lumirror S10 ”, manufactured by Toray Industries, Inc.) so that the thickness after drying becomes 35 μm. )) To produce a dam material. Drill a hole of 1cm 2 in a copper foil of 100μm thickness,
The dam material is attached to one side of the hole so as to cover one of the holes, and a thermosetting one-component silicone resin is dripped on the other surface of the hole so as to cover all the holes, and heated at 80 ° C. for 5 hours in an atmosphere. After curing, a sample was prepared.

【0031】比較例1 実施例より、堰材として、熱膨張性微小球を除いた粘着
シートを用いてサンプルを作製した。 評価試験 作製したサンプルを130℃雰囲気下5分間加熱して冷
却後、堰材と銅箔界面への樹脂の侵入の有無、堰材(幅
20mmの粘着シート)を剥離したときの最大荷重、及
び、剥離後の銅箔の変形の有無を目視で確認した。これ
らの結果は表1に示した。
Comparative Example 1 From the example, a sample was prepared using a pressure-sensitive adhesive sheet from which heat-expandable microspheres had been removed as a dam member. Evaluation Test The prepared sample was heated and cooled in an atmosphere of 130 ° C. for 5 minutes, after which the resin entered the interface between the dam and the copper foil, the maximum load when the dam (adhesive sheet having a width of 20 mm) was peeled off, and The presence or absence of deformation of the copper foil after peeling was visually checked. These results are shown in Table 1.

【表1】 [Table 1]

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の堰材の一例を示す概略断面図である。FIG. 1 is a schematic sectional view showing an example of a weir member of the present invention.

【符号の説明】[Explanation of symbols]

1 支持基材 2 ゴム状有機弾性層 3 熱膨張性粘着層 4 セパレータ DESCRIPTION OF SYMBOLS 1 Support base material 2 Rubbery organic elastic layer 3 Thermal expansion adhesive layer 4 Separator

───────────────────────────────────────────────────── フロントページの続き (72)発明者 村田 秋桐 大阪府茨木市下穂積一丁目1番2号 日東 電工株式会社内 (72)発明者 木内 一之 大阪府茨木市下穂積一丁目1番2号 日東 電工株式会社内 Fターム(参考) 4J004 AA05 AA07 AA10 AB01 CA01 CA02 CA08 CB01 CB02 CC02 CC03 CD04 FA10 5F061 AA01 CA01 CB13 DE03  ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Murata Akiri 1-2-1, Shimohozumi, Ibaraki-shi, Osaka Nitto Denko Corporation (72) Inventor Kazuyuki Kiuchi 1-1-1, Shimohozumi, Ibaraki-shi, Osaka No. 2 Nitto Denko Corporation F term (reference) 4J004 AA05 AA07 AA10 AB01 CA01 CA02 CA08 CB01 CB02 CC02 CC03 CD04 FA10 5F061 AA01 CA01 CB13 DE03

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 硬化性を有する流動性物質を硬化するま
での間、所定の空間に留めておくための堰材であって、
基材の少なくとも片方に熱膨張性微小球を含有する熱膨
張性粘着層を有する加熱剥離型粘着シートで構成されて
いる堰材。
1. A weir member for retaining a curable fluid substance in a predetermined space until it is cured,
A dam member comprising a heat-peelable pressure-sensitive adhesive sheet having a heat-expandable pressure-sensitive adhesive layer containing heat-expandable microspheres on at least one of the substrates.
【請求項2】 請求項1記載の堰材により仕切られた所
定の空間へ、硬化性を有する流動性物質を注入した後、
硬化手段により前記硬化性を有する流動性物質を硬化さ
せ、次いで堰材の熱膨張性粘着層を加熱により膨張させ
て堰材を剥離し、硬化物を得ることを特徴とする硬化物
の製造方法。
2. After a fluid material having curability is injected into a predetermined space partitioned by the dam member according to claim 1,
A method for producing a cured product, comprising: curing the fluid substance having curability by a curing means, and then expanding the heat-expandable pressure-sensitive adhesive layer of the weir by heating to release the weir, thereby obtaining a cured product. .
【請求項3】 請求項1記載の堰材により仕切られ、且
つ電子部品が配置された所定の空間へ、硬化性を有する
流動性物質を注入した後、硬化手段により前記硬化性を
有する流動性物質を硬化させ、次いで堰材の熱膨張性粘
着層を加熱により膨張させて堰材を剥離し、硬化物で封
止された電子部品を得ることを特徴とする封止電子部品
の製造方法。
3. A fluid material having curability is injected into a predetermined space partitioned by the dam member according to claim 1 and in which electronic components are arranged, and then the fluidity having curability is injected by curing means. A method for manufacturing a sealed electronic component, comprising: curing a substance; and then expanding the heat-expandable pressure-sensitive adhesive layer of the dam by heating to release the dam, thereby obtaining an electronic component sealed with a cured product.
JP2000364657A 2000-11-30 2000-11-30 Weir material and manufacturing method of sealed electronic component using the weir material Expired - Lifetime JP4703842B2 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4588022B2 (en) * 2004-03-11 2010-11-24 日東電工株式会社 Heat-peelable pressure-sensitive adhesive sheet and method for processing an adherend using the heat-peelable pressure-sensitive adhesive sheet

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JPH02274783A (en) * 1989-04-14 1990-11-08 Nitto Denko Corp Self-adhesive composition and self-adhesive tape or sheet
JPH0729927A (en) * 1993-07-07 1995-01-31 Hitachi Ltd Manufacture of semiconductor integrated circuit device
JP3418106B2 (en) * 1996-12-04 2003-06-16 新光電気工業株式会社 Semiconductor device and manufacturing method thereof
JP3847904B2 (en) * 1997-06-13 2006-11-22 日東電工株式会社 Method for manufacturing adhesive sheet and cut piece
JPH11334785A (en) * 1998-05-25 1999-12-07 Nitto Denko Corp Adhesive tape for electronic parts carrier, and carrying, method and mounting method of electronic parts

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Publication number Priority date Publication date Assignee Title
JP2000294580A (en) * 1999-04-12 2000-10-20 Nitto Denko Corp Resin sealing method of semiconductor chip and adhesive tape for sticking of lead frame, etc.

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4588022B2 (en) * 2004-03-11 2010-11-24 日東電工株式会社 Heat-peelable pressure-sensitive adhesive sheet and method for processing an adherend using the heat-peelable pressure-sensitive adhesive sheet

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