JP2002163996A - Manufacturing method of gyrotron device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable shortening of aging time and a stable and a stable long pulse actuation of a gyrotron device. SOLUTION: By making evacuation by a vacuum pump 22 while inputting a high frequency into a gyrotron tube main body 1 from high frequency generator 21, 23 when the gyrotron device is manufactured, outgas generated from a tube inner wall surface and parts surface in the tube in actuating is reduced beforehand. By this, a period required for aging of the gyrotron device is shortened, and the gyrotron device enabled to output an actuating pulse of a long pulse width is provided.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a millimeter-wave mode converter and a method for manufacturing a gyrotron device including the same.

[0002]

2. Description of the Related Art As means for heating plasma in nuclear fusion and the like, a method using, for example, an electromagnetic wave in a millimeter wave band is known. Note that a high-power gyrotron device is expected as an oscillation source for oscillating an electromagnetic wave in the millimeter wave band.

As shown in FIG. 3, a gyrotron device 1
At 00, the hollow swirling electron beam 2 generated by the magnetron type electron gun 3 provided in the gyrotron tube main body 1 and accelerated toward the collector 5 enters the cavity 7 through the beam tunnel 6. Is done.

[0004] The cavity 7 is a cavity resonator that interacts with the electron beam 2 generated by the electron gun 3 to generate a quasi-optical millimeter-wave or microwave electromagnetic wave 8. Is converted into a parallel beam by the radiator 9 and the reflector 10 of the mode converter 11, reflected by the output mirror 12 toward the output window 14 of the output waveguide 13, and led out of the gyrotron device. Is done.

The used electron beam is swept by the sweep coil 4 and captured by the collector 5. Further, impurity gas generated during operation in the gyrotron tube main body is removed by an ion pump (not shown). Note that reference numerals 15a and 15b in the figure represent magnetic field generating devices such as electromagnets.

Prior to operating the gyrotron device 100 in a long pulse operation or a steady operation, deterioration of the degree of vacuum and malfunction of the gyrotron tube due to outgas generated in the gyrotron tube main body during operation of the gyrotron device. In order to prevent it from becoming stable, the operation pulse width was changed from the order of seconds to the order of minutes, and further to the order of time.
It is necessary to perform a depletion operation called aging, in which the outgas is gradually depleted while gradually increasing the pulse width.

[0007] For outgassing, an electron beam is applied to the collector 5.
There is an outgas generated by hitting or heating the surface of the tube, and an outgas generated by hitting or heating the inner wall surface or the component surface of the oscillating high frequency with the oscillated high frequency. In aging under normal operating conditions, outgassing due to the electron beam is dominant initially, but outgassing due to high frequency becomes dominant as the operating pulse width becomes longer.

[0008]

The operating pulse width of the gyrotron device has been increased from the order of seconds to the order of minutes, and further to the order of time, so that the time required for aging is extremely long. There is a problem that the cost for the steady operation increases.

As a measure to reduce outgas when manufacturing a gyrotron device, a gyrotron tube main body is heated by an electric furnace or the like at the time of evacuation to release gas from the inner wall surface or the component surface of the tube main body. Although there is baking in which gas is exhausted by a vacuum pump, the operating pulse width has been increased to a time order and a long pulse width today. Therefore, even if baking is performed, it is difficult to reduce outgassing. In the conventional aging method in which the outgas in the gyrotron tube main body after the sealing is cut off is absorbed by the ion pump, the outgas must be gradually absorbed and absorbed by the ion pump. It may take several months, and there is a demand for reducing outgas from the inside of the gyrotron device as much as possible before cutting off the exhaust pipe of the pipe body.

An object of the present invention is to manufacture a gyrotron device capable of shortening the aging time and stably obtaining an operation pulse having a long pulse width.

[0011]

SUMMARY OF THE INVENTION The present invention provides a method for manufacturing a gyrotron device, which comprises evacuating a gyrotron tube body while inputting a high-frequency wave from the outside to the inside of the gyrotron device so that the inner surface of the tube and the gyrotron device can be operated. A method for manufacturing a gyrotron device, characterized in that outgas generated from a surface of a pipe part is reduced in a relatively short time in advance.

[0012]

Embodiments of the present invention will be described below in detail with reference to the drawings.

[Embodiment 1] An embodiment of the present invention will be described below with reference to FIG. FIG. 1 shows a first embodiment of the present invention.
It is a lineblock diagram of an Example of a. Note that the configuration of the gyrotron device itself is the same as that described in the section of the related art, and a detailed description thereof will be omitted.

As shown in FIG. 1, during aging of the tube main body 1 of the gyrotron device being manufactured, a high frequency generated by a separately prepared high frequency generator 21 is output to the gyrotron tube main body 1 to be aged. Window 14
The vacuum pump 2 provided on the electron gun 3 side while irradiating the components of the high frequency path such as the exit mirror 12, the reflector 10, and the radiator 9 from the gyrotron tube body
Evacuate in step 2. Reference numeral 17 in the figure denotes an ion pump, which is not operated in this exhaust step. In addition, the high frequency generator 21 may be another gyrotron device that has been subjected to aging and is capable of steady operation.

The high frequency input into the tube main body from the output window 14 of the gyrotron tube main body 1 to be aged is output from the output window 14, the exit mirror 12, the reflector 10, or the gyro 9 represented by the radiator 9. By hitting or heating the surface of the inner part of the tron tube or the inner wall surface,
An impurity gas, which is a source of outgas generated during operation of the gyrotron device, is released.

An output window 1 is provided in the gyrotron tube main body.
The high frequency input from 4 can intensively strike or heat the wall surface of the component of the main beam path of the high frequency output during operation of the gyrotron tube main body to be aged, thereby releasing gas.

By evacuating the impurity gas by the vacuum pump 22, outgas generated during operation can be reduced before the pipe body is cut off.

The frequency (or frequency band) of the high-frequency power input from the high-frequency generator 21 to the gyrotron tube main body 1 to be aged depends on the operating frequency (or frequency band) of the gyrotron device to which the tube main body is mounted. The frequency may be the same or different, but is preferably a frequency (or frequency band) that matches the frequency characteristics of the output window 14.

When a high frequency is input from a high frequency generator 21 provided outside and degassing is performed, heating and baking using an electric furnace or the like can be performed at the same time, thereby obtaining a better degassing effect. Can be

[Embodiment 2] Next, a second embodiment of the present invention will be described with reference to FIG. As shown in FIG. 2, during aging of the gyrotron tube main body 1 during manufacture, the high-frequency power generated by the separately prepared high-frequency generator 23 is output to the output mirror 12 or the reflector of the gyrotron device 1 to be aged. A vacuum pump provided on the electron gun 3 side while inputting into the gyrotron tube main body from one or a plurality of high frequency input ports 16 provided at a predetermined position near the collector 5 in the tube main body near the 10. Evacuation is performed at 22.

The output window 14 of the tube main body 1 is sealed at the open end of the output waveguide 13 with a conductive lid 13a so that an input high frequency wave does not undesirably leak outside through this window. Keep it. In addition, the high frequency generator 23 used here may be a relatively simple and inexpensive high frequency generator which is usually available.

Each of the one or more high frequency input ports 16 is provided with a vacuum hermetic window which matches the frequency (or frequency band) of the high frequency generator 23 to be introduced into the tube main body from there. It goes without saying that, after the aging is completed, each is sealed with a lid made of, for example, a conductor, or the input port structure is preliminarily sealed and cut, and the sealing is cut after the aging is completed.

In this manner, the surface of the gyrotron tube component is hit or heated by the high frequency input into the tube main body from the output window 14 or the high frequency input port 16 of the gyrotron tube main body 1 to be aged. An impurity gas that is a source of outgas generated during operation of the gyrotron device can be sufficiently released in advance.

Further, since the impurity gas in the pipe is exhausted by the vacuum pump 22 before the exhaust pipe of the pipe main body is sealed off,
Outgas that may be generated during operation of the gyrotron device can be sufficiently reduced in advance.

The frequency (or frequency band) of the high-frequency wave introduced from the high-frequency generator to the gyrotron tube main body to be aged is the same as the frequency (or frequency band) during operation of the gyrotron device, as described above. It is not always necessary, and a cheaper high-frequency generator can be used. In addition, by optimizing the number, position, and direction of the input ports, it is possible to intensively discharge gas to components that easily generate impurity gas or have high gas adsorption, including insulating ceramics and the like.

When degassing is performed by inputting high frequency waves from the high frequency generator to the gyrotron tube main body, heating and baking with an electric furnace or the like are performed at the same time, whereby a higher degassing effect can be obtained.

Furthermore, it is also possible to simultaneously carry out the first embodiment and the second embodiment described above, whereby a higher degassing effect can be obtained.

[0028]

As described above, according to the present invention, when manufacturing a gyrotron device capable of outputting an operation pulse having a long pulse width, an impurity gas which is a factor of generating outgas during steady operation is removed. Efficient degassing in a short period of time allows for sufficient reduction of outgassing from the pipe inner wall surface and pipe component surfaces during operation, and significantly reduces the time required for aging in gyrotron devices. it can.

[Brief description of the drawings]

FIG. 1 is a schematic diagram showing a first embodiment of the present invention.

FIG. 2 is a schematic view showing a second embodiment of the present invention.

FIG. 3 is a schematic diagram showing a gyrotron device to which an embodiment of the present invention is applied.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Gyrotron apparatus, 9 ... Radiator, 10 ... Reflector, 12 ... Output mirror, 13 ... Output waveguide, 14 ... Output window, 16 ... Input Port 21 21 High frequency generator (gyrotron device capable of steady operation) 23 High frequency generator (simple high frequency source) 22 Vacuum pump

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Keiji Sakamoto 801-1, Mukoyama, Naka-machi, Naka-machi, Naka-gun, Ibaraki Pref. No. 1 Toshiba Nasu Electronic Tube Factory (72) Inventor Tsuyoshi Kariya 1385-1 Higashiyama, Shimoishikami, Otawara-shi, Tochigi Prefecture F-term (reference) 5C029 RR04

Claims (4)

[Claims] 1. A method of manufacturing a gyrotron device, comprising: evacuating a gyrotron tube body while applying high-frequency waves from outside the gyrotron tube body to the inside of the gyrotron device so that the gyrotron device operates. A method for manufacturing a gyrotron device, characterized by reducing outgas generated from a component surface. 2. The method for manufacturing a gyrotron device according to claim 1, wherein said gyrotron tube main body includes a mode converter. 3. The method for manufacturing a gyrotron device according to claim 1, wherein a high-frequency output window of said gyrotron tube body also functions as said high-frequency input port. 4. The gyrotron tube main body further comprises one or more high frequency input ports separately from the high frequency output window, and the one or more high frequency input ports from outside the tube main body. 2. The method for manufacturing a gyrotron device according to claim 1, wherein a high frequency is introduced into the tube main body through a tube.