JPH08171859A - High vacuum exhausting method - Google Patents

Abstract

PURPOSE: To exhaust remaining gas in a vacuum panel for an electron emission- type display element at a low temperature, at a high speed, and at a high vacuum by exhausting it while radiating electromagnetic waves to be selectively absorbed by the remaining gas to the panel inner surface. CONSTITUTION: A vacuum panel 101 is connected to a pump 102 through a connecting part 103. Exhausting is started by opening an exhaust valve 104. Ultraviolet visible rays to be selectively absorbed by remaining gas is radiated to the inner surface of the panel 101 by using an ultraviolet visible ray radiating means 108. The specified remaining gas in the panel absorbs the ultraviolet visible ray, is excited, and selectively separated and exhausted from the inner front surface of the panel 101. In this case, the panel 101 may be heated to the suitable temperature by using a heating means 105. When a vacuum gauge 106 displays the desired the degree of vacuum, the vacuum panel 101 is vacuum- sealed by using a sealing means 107.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a high vacuum evacuation method for a panel used for manufacturing a vacuum panel for an electron emission type display device, and in particular, it selectively exhausts a specific residual gas in the panel at a high speed. High vacuum exhaust method.

[0002]

2. Description of the Related Art In a manufacturing process of an electron emission type display device which requires a high degree of vacuum, an exhaust method for obtaining a high vacuum in a short time is very important. Among them, H ₂ O, CO,
Residual gases containing oxygen atoms such as CO ₂ and O ₂ are harmful to shorten the operating life of the electron source, and exhausting these gases is particularly important.

As a conventional method for exhausting the inside of a vacuum panel for an electron emission type display device, the entire vacuum panel is heated by using an electric furnace, a heater or the like to desorb residual gas released from the inner surface of the vacuum panel. A method of exhausting while promoting it was adopted. A conventional method of evacuating the inside of the panel will be described with reference to FIG. In FIG. 2, 201 is a vacuum panel,
202 is a pump, 203 is a connecting part, 204 is an exhaust valve, 205 is a heating means, 206 is a vacuum gauge, and 207 is a sealing means.

First, the vacuum panel 201 is connected to the pump 202 via the connecting portion 203. Then, the exhaust valve 20
Open 4 to start exhausting. Meanwhile, in order to promote desorption of the gas attached to the inner surface of the vacuum panel 201, the heating means 20
5 is used to heat the vacuum panel 201 to an appropriate temperature.
After that, when the vacuum gauge 206 shows a desired degree of vacuum, the operation is completed by vacuum-sealing the vacuum panel 201 using the sealing means 207.

[0005]

However, in the above-described conventional exhaust method, since the entire vacuum panel is heated, the material existing in the vacuum panel and the heat resistant temperature of the element are heated to the lowest temperature or higher. Therefore, it was difficult to obtain a high vacuum at a high speed.

[0006]

SUMMARY OF THE INVENTION The object of the present invention is to solve the problems of the prior art, to selectively excite a specific residual gas to promote desorption of the residual gas from the inner surface of the panel, and at low temperature. It is to provide an exhaust method capable of obtaining a high vacuum at high speed.

[0007]

In order to achieve the above object, the present invention irradiates an electromagnetic wave selectively absorbed by a residual gas in a vacuum panel for an electron emission type display device into the panel, and A high-vacuum exhausting method of residual gas in a panel, characterized by exhausting, wherein the electromagnetic wave is ultraviolet light, the residual gas is H ₂ O,
The ultraviolet light contains an ultraviolet light component having a wavelength shorter than 170 nm, the electromagnetic wave is infrared light, the residual gas is H ₂ O, and the infrared light has a wavelength of 2.7 μm.
To 3.3 μm of infrared light component, the electromagnetic wave is microwave, and the residual gas is H ₂
O and the microwave has a frequency of 15 GHz to 30
Including that the frequency component of GHz is included.

Further, the present invention is characterized in that, while heating the vacuum panel for an electron emission type display device, the inside of the panel is evacuated while irradiating the inside of the panel with electromagnetic waves selectively absorbed by the residual gas in the panel. This is a high vacuum evacuation method for residual gas in the panel.

[0009]

According to the present invention, the residual gas is selectively excited and desorbed by irradiating the inner surface of the vacuum panel with an electromagnetic wave that is selectively absorbed by the residual gas, and preferably by evacuating while heating. Therefore, the inside of the panel is evacuated at high speed at a relatively low temperature. In particular, ultraviolet light that excites electronic states,
This is particularly effective when infrared light that excites the vibrational state and microwaves that excite the rotational state are absorbed resonantly.

The present invention will be described in detail below with reference to the drawings.

In FIG. 1, 101 is a vacuum panel, 102 is an exhaust pump, 103 is a connecting portion, 104 is an exhaust valve, 10
5 is a heating means, 106 is a vacuum gauge, 107 is a sealing means, 1
Reference numeral 08 is an electromagnetic wave supply means.

First, the vacuum panel 101 is connected to the pump 102 via the connecting portion 103. The exhaust valve 104 is opened to start exhausting. The inner surface of the vacuum panel 101 is irradiated with the electromagnetic waves selectively absorbed by the residual gas using the electromagnetic wave supply means 108. At this time, the heating means 105 may be used to heat the vacuum panel 101 to an appropriate temperature. The heating temperature varies depending on the element and panel material, but generally 80 to 4
The temperature is 00 ° C, preferably 100 to 250 ° C. Vacuum gauge 1
When 06 indicates a desired degree of vacuum, the vacuum panel 101 is vacuum-sealed using the sealing means 107.

The pump used in the present invention is preferably a turbo molecular pump, a cryopump, an ion pump, an ion sublimation pump, or the like, which has a large pumping speed in a high vacuum region. Electromagnetic waves are effective as long as residual gas can be selectively absorbed and promoted desorption, such as ultraviolet-visible light that excites electronic states, infrared light that excites vibrational states, and microwaves that excite rotational states. Particularly, when the residual gas is H ₂ O, the wavelength is 170 nm or less, particularly 100 to 160 n.
m ultraviolet light, wavelength 3 μm infrared light, frequency 20 GH
A microwave of about z is effective.

In the present invention, H ₂ O, CO, CO ₂ ,
Residual gas containing oxygen atoms such as O ₂ , CH ₄ , C ₂ H ₆ , C
_It can efficiently exhaust hydrocarbon-based residual gas such as ₃ H ₈ .

[Method Example 1] A method example 1 of the high vacuum evacuation method of the present invention will be described with reference to FIG. Reference numeral 101 is a vacuum panel, 102 is a pump, 103 is a connecting portion, 104 is an exhaust valve, 105 is a heating means, 106 is a vacuum gauge, 107 is a sealing means, and 108 is an electromagnetic wave supplying means. Using the means. First, the vacuum panel 101 is connected to the pump 102 via the connecting portion 103. The exhaust valve 104 is opened to start exhausting. The ultraviolet visible light irradiating means 108 is used to irradiate the inner surface of the vacuum panel 101 with the ultraviolet visible light selectively absorbed by the residual gas. The specific residual gas in the panel absorbs UV-visible light and its electronic state is excited,
It is selectively released from the inner surface of the vacuum panel 101 and exhausted. At this time, the vacuum panel 101 is heated using the heating means 105.
May be heated to a suitable temperature. When the vacuum gauge 106 shows a desired degree of vacuum, the vacuum panel 101 is vacuum-sealed by using the sealing means 107.

UV-visible light irradiation means used in the present invention
Is a residual gas that selectively absorbs, excites electronic states, and desorbs.
Hg lamp, Xe lamp, X
e-Hg lamp, D₂Lamp, metal halide lamp,
Lamps such as rare gas resonance line lamps and excimer lamps
Excimer laser, YAG laser, Ar⁺Laser, N₂
Can be used with lasers such as lasers and dye lasers
It For example, if the residual gas is H ₂In case of 0, it is 175 nm
Short wavelength ultraviolet light is suitable.

[Method Example 2] A method example 2 of the high vacuum evacuation method of the present invention will be described with reference to FIG.

101 is a vacuum panel, 102 is a pump, 1
Reference numeral 03 is a connecting portion, 104 is an exhaust valve, 105 is a heating means, 106 is a vacuum gauge, 107 is a sealing means, 108 is an electromagnetic wave supplying means, and specifically an infrared light irradiating means.

First, the vacuum panel 101 is connected to the pump 102 via the connecting portion 103. The exhaust valve 104 is opened to start exhausting, and the infrared light irradiating means is used to irradiate the inner surface of the vacuum panel 101 with the infrared light selectively absorbed by the residual gas. A specific residual gas in the panel absorbs infrared light to excite a vibration state, and is selectively desorbed from the inner surface of the vacuum panel 101 and exhausted. At this time, the heating means 105 may be used to heat the vacuum panel 101 to an appropriate temperature. When the vacuum gauge 106 shows a desired degree of vacuum, the vacuum panel 101 is vacuum-sealed by using the sealing means 107. The infrared light irradiating means used in the present invention may be a lamp such as a halogen lamp or a laser such as a CO ₂ laser as long as the residual gas can be selectively absorbed to excite a vibration state to promote desorption. But it can be used. For example, when the residual gas is H ₂ 0, infrared light having a wavelength of about 3 μm is suitable.

[Method Example 3] A method example 3 of the high vacuum evacuation method of the present invention will be described with reference to FIG.

101 is a vacuum panel, 102 is a pump, 1
Reference numeral 03 is a connecting portion, 104 is an exhaust valve, 105 is a heating means, 106 is a vacuum gauge, 107 is a sealing means, and 108 is a microwave antenna as an electromagnetic wave supplying means.

First, the vacuum panel 101 is connected to the pump 102 via the connecting portion 103. The exhaust valve 104 is opened to start exhausting. Then, the microwave panel is used to irradiate the inner surface of the vacuum panel 101 with microwaves that are selectively absorbed by the residual gas. A specific residual gas in the panel absorbs microwaves to excite a rotational state, and is selectively desorbed from the inner surface of the vacuum panel 101 and exhausted. On this occasion,
The heating means 105 may be used to heat the vacuum panel 101 to an appropriate temperature. When the vacuum gauge 106 shows a desired degree of vacuum, the vacuum panel 101 is vacuum-sealed by using the sealing means 107. The microwave antenna used in the present invention is
If the residual gas can selectively absorb and excite the rotating state to promote desorption, an electromagnetic horn, parabolic antenna,
A slot antenna, a Ligitano coil, a helical antenna, etc. can be used. For example, when the residual gas is H ₂ O, a slot antenna that radiates a microwave having a frequency of about 20 GHz is suitable.

[0023]

The present invention will be described in more detail with reference to the following examples.

Example 1 Method 1 of the high vacuum evacuation method of the present invention was used for evacuation of an electron emission display panel (internal volume 0.2 L). As the pump 102, a turbo molecular pump-rotary pump exhaust system having an exhaust speed of 50 L / sec was used. The connecting portion 103 is the ICF 34 and the exhaust valve 1
Reference numeral 04 was an L-type all-metal valve, and heating means 105 was an electric furnace. As the vacuum gauge 106, a BA gauge was used. A ring-shaped gas burner was used as the sealing means 107. As the electromagnetic wave supplying means 108, an Xe resonance line lamp (147 nm bright line emission) which is an ultraviolet-visible irradiation means was used.

First, the panel 101 was connected to the pump 102 via the connecting portion 103. The exhaust valve 104 was opened to start exhausting. Next, the panel 101 was heated to 100 ° C. using the electric furnace 105, the Xe resonance line lamp (500 W) was turned on, and the panel 108 was irradiated with ultraviolet rays. After heating and irradiation for 2 hours and further evacuation for 1 hour, the BA gauge showed 5 × 10 ⁻⁸ Torr or less, so the panel 101 was vacuum-sealed using a burner.

(Comparative Example 1) Exhaust experiments were conducted by operating in the same manner as in Example 1 except that the Xe resonance line lamp was not irradiated. The ultimate vacuum was 3 × 10 ⁻⁷ Torr, which was insufficient.

Example 2 Method 1 of the high vacuum evacuation method of the present invention was used for evacuation of the electron emission display panel (internal volume 1.0 L). The pump 102 used was a cryopump-rotary pump exhaust system having an exhaust speed of 100 L / sec. The connecting portion 103 has a 1/4 inch. A VCR was used. The exhaust valve 104 was an L-type all-metal valve, and the heating means 105 was an electric furnace. As the vacuum gauge 106, a BA gauge was used. A ring-shaped gas burner was used as the sealing means 107. An F ₂ excimer lamp (157 nm band emission, 300 W) was used as an ultraviolet-visible irradiation means that is the electromagnetic wave supply means 108.

First, the panel 101 was connected to the pump 102 via the connecting portion 103. The exhaust valve 104 was opened to start exhausting. 150 panels 101 using an electric furnace
The panel was heated to 0 ° C., the F ₂ excimer lamp was turned on, and the panel was irradiated with ultraviolet rays. After heating and irradiating for 2 hours and exhausting for 1 hour, BA gauge was 3xlO ^-8 To.
Since rr or less was shown, the panel 101 was vacuum-sealed using a burner.

Example 3 Method 2 of the high vacuum evacuation method of the present invention was used for evacuation of the electron emission display panel (internal volume 0.2 L). As the pump 102, a turbo molecular pump-rotary pump exhaust system having an exhaust speed of 50 L / sec was used. The connecting portion 103 is the ICF 34 and the exhaust valve 1
Reference numeral 04 was an L-type all-metal valve, and heating means 105 was an electric furnace. A BA gauge was used as the vacuum gauge 106, and a ring-shaped gas burner was used as the sealing means 107. The infrared light irradiation means as the electromagnetic wave supply means 108 is a CO ₂ laser (1K
W) triple harmonic (3.2 μm emission) was used.

First, the panel 101 was connected to the pump 102 via the connecting portion 103. The exhaust valve 104 was opened to start exhausting. Panel 101 at 100 ° C using an electric furnace
Then, the panel was irradiated with infrared rays by oscillating a CO ₂ laser. 2 hours of heating, irradiation is performed, after continued for another hour exhaust, since BA gauge showed the following 4xl0 ^over 8 Torr, vacuum sealing panel 101 using a burner.

Example 4 Method 3 of the high vacuum evacuation method of the present invention was used for evacuation of an electron emission display panel (internal volume 0.2 L). As the pump 102, a turbo molecular pump-rotary pump exhaust system having an exhaust speed of 30 L / sec was used. ICF34 was used for the connection part 103. The exhaust valve 104 was an L-type all-metal valve, and the heating means 105 was an electric furnace.

A BA gauge was used as the vacuum gauge 106. or,
A ring-shaped gas burner was used as the sealing means 107. A linear multi-slot antenna that radiates a 20 GHz microwave was used as the electromagnetic wave supply means 108. First panel 1
01 was connected to the pump 102 via the connecting portion 103.
The exhaust valve 104 was opened to start exhausting. The panel 101 was heated to 100 ° C. using an electric furnace, and the linear slot antenna was used to microwave the panel (output 2
00W) was emitted.

Heat and radiate for 2 hours, and exhaust at 1:00
After continuing for a while, BA gauge is 3x10 ^-8Torr Shown below
Panel 101 was vacuum sealed using burner 109.
I stopped.

Example 5 Method 3 of the high vacuum evacuation method of the present invention was used for evacuation of the electron emission display panel (1.0 L). The pump 102 used was a cryopump-rotary pump exhaust system having an exhaust speed of 100 L / sec. The connecting portion 103 has a 1/4 inch. A VCR was used.
The exhaust valve 104 was an L-type all-metal valve, and the heating means 105 was an electric furnace. Vacuum gauge 106 is BA
A gauge and a ring-shaped gas burner were used as the sealing means 107. The microwave antenna used as the electromagnetic wave supply means 108 is an electromagnetic horn that radiates a microwave of 20 GHz.

First, the panel 101 was connected to the pump 102 via the connecting portion 103. The exhaust valve 104 was opened to start exhausting. Panel 101 was heated to 100 ° C. in an electric furnace, and a microwave (output 200 W) was radiated to the panel using an electromagnetic horn. After heating and radiating for 2 hours and exhausting for 1 hour, BA gauge is 5xlO.
^-8 Torr Since it showed below, panel 1 was used with a burner.
01 was vacuum sealed.

[0036]

As described above, by radiating the electromagnetic waves selectively absorbed by the residual gas while irradiating the inner surface of the panel, the high-vacuum exhaust can be achieved at a lower temperature and a higher speed. In particular, ultraviolet light that excites electronic states,
This is effective because infrared light that excites the vibrational state and microwaves that excite the rotational state are resonantly absorbed.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an exhaust device for explaining a high vacuum exhaust method of the present invention.

FIG. 2 is a configuration diagram of an exhaust device for explaining a conventional exhaust method.

[Explanation of symbols]

 101 Vacuum Panel 102 Exhaust Pump 103 Connection Part 104 Exhaust Valve 105 Heating Means 106 Vacuum Gauge 107 Sealing Means 108 Electromagnetic Wave Supply Means

Claims (8)

[Claims] 1. A high vacuum of residual gas in a panel, characterized in that the panel is radiated with electromagnetic waves selectively absorbed by the residual gas in the vacuum panel for an electron emission display device and the inside of the panel is evacuated. Exhaust method. 2. The high vacuum exhaust method according to claim 1, wherein the electromagnetic wave is ultraviolet light. 3. The residual gas is H ₂ O, and the ultraviolet light contains an ultraviolet light component having a wavelength shorter than 170 nm.
High-vacuum exhaust method described in. 4. The high vacuum evacuation method according to claim 1, wherein the electromagnetic wave is infrared light. 5. The high vacuum evacuation method according to claim 4, wherein the residual gas is H ₂ O, and the infrared light contains an infrared light component having a wavelength of 2.7 μm to 3.3 μm. 6. The electromagnetic wave is a microwave.
High-vacuum exhaust method described in. 7. The high vacuum evacuation method according to claim 6, wherein the residual gas is H ₂ O, and the microwave contains a frequency component having a frequency of 15 GHz to 30 GHz. 8. An inside of a panel characterized by irradiating the inside of the panel with an electromagnetic wave selectively absorbed by a residual gas inside the panel while heating the vacuum panel for an electron emission type display device, and exhausting the inside of the panel. High vacuum evacuation method for residual gas.