JP2002162660A - Focus detecting method and apparatus for optical parts - Google Patents

Abstract

PROBLEM TO BE SOLVED: To detect the focal position of a focusing optical system with high accuracy by simple process steps and constitution. SOLUTION: A reference light unit 10 for leading out a reference laser beam L is parallel moved relative to an optical axis and a non-plane surface 142 is irradiated wit the reference laser beam L from the reference light unit 10. The reflected light La from the non-plane surface 142 is therefore made incident on an optical axis detecting unit 100. The position where the movement of the optical axis of the reflected light La is smallest when the optical axis detecting unit 100 moves in the optical axis direction is set as the focal position of the non-plane surface 142.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for detecting the focus of an optical component constituting a laser optical device.

[0002]

2. Description of the Related Art Usually, for example, a laser processing device, a laser measuring device, and the like are employed as laser optical devices using laser light. In this type of laser optical device, various types of optical components such as a lens system and a reflecting mirror are incorporated in order to guide a laser beam to a predetermined irradiation position. Further, the reflecting mirror has various forms such as a plane mirror, a parabolic mirror, and an elliptical mirror.

[0003] Therefore, when assembling a laser optical device, it is desired to accurately perform alignment adjustment such as layout adjustment of various optical parts and measurement of a focal position.
This is to ensure high-quality laser processing and high-precision laser measurement.

[0004]

In general, when measuring the focal position of a focusing optical system such as a parabolic mirror or an ellipsoidal mirror, the reflected light from the focusing optical system is actually irradiated onto a wall or the like. This is done by directly observing the state of light collection.

[0005] However, the focal position of the above-mentioned focal optical system fluctuates due to parallelism of incident light, layout, surface accuracy, and the like, making it difficult to ensure reproducibility of measurement. As a result, it has been pointed out that the focus position of the focus optical system cannot be accurately detected.

The present invention solves this kind of problem, and provides a focus detection method and apparatus for an optical component capable of detecting the focus position of a focus optical system with high accuracy by a simple process and configuration. The purpose is to do.

[0007]

According to the method and the apparatus for detecting the focus of an optical component according to the present invention, a reference light unit for deriving a reference laser beam having an optical axis set is translated or tilted with respect to the optical axis. At the same time, the reference laser light is applied from the reference light unit to a non-planar mirror, which is an optical component.

Next, the reflected light from the non-planar mirror irradiated with the reference laser light enters the optical axis detecting unit,
The optical axis detection unit is moved in an optical axis direction of the reference laser light. Then, by setting the position where the movement of the optical axis (light spot) of the reflected light detected by the optical axis detecting unit is the least, as the focal position of the non-planar mirror, the focal position can be set by a simple process and configuration. It is detected with high accuracy and efficiency.

Here, in the parabolic mirror, a reference laser beam is derived from the reference light unit while moving the reference light unit in parallel. The reference laser light is reflected by the parabolic mirror and introduced into the optical axis detection unit, and the optical axis detection unit is moved in the optical axis direction of the reference laser light. Then, the position where the movement of the optical axis of the reflected light detected by the optical axis detection unit is the least is set as the focal position of the parabolic mirror.

On the other hand, in the ellipsoidal mirror, a reference laser beam is irradiated on the ellipsoidal mirror while tilting the reference light unit, and the reflected light from the ellipsoidal mirror is introduced into the optical axis detecting unit, and The detection unit is moved in the optical axis direction. Then, the position where the movement of the optical axis position of the reflected light introduced into the optical axis detection unit is the least is measured as the focal position of the ellipsoidal mirror.

Further, the optical axis detecting unit is irradiated with a reference laser beam to make the optical axis measuring surface of the optical axis detecting unit coincide with the rotation axis of the optical axis detecting unit. In the direction of the optical axis, and the measurement position of the optical axis measurement surface is adjusted. For this reason, the optical axis measurement surface of the optical axis detection unit is accurately adjusted, and the optical axis measurement operation is performed with high accuracy.

Further, according to the present invention, the focal position of the parabolic mirror is automatically measured. That is, while irradiating the reference laser light to the parabolic mirror and introducing the reflected light to the optical axis detection unit, the optical axis measurement surface of the optical axis detection unit is rotated about an axis that intersects the optical axis, It is determined whether or not the optical axis position of the reflected light applied to the optical axis measurement surface changes. At this time, when the optical axis position fluctuates, the rotation center position of the optical axis detection unit is moved, and the optical axis measurement surface position is detected.

Next, the reference light unit is translated and the optical axis measurement surface of the optical axis detection unit is rotated as necessary, so that the optical axis position of the reference laser light applied to the optical axis measurement surface is changed. A determination is made whether it fluctuates. When the optical axis position fluctuates, the focal position is determined by moving the optical axis detection unit in the optical axis direction, and the automatic measurement of the focal length is performed.

Further, in the present invention, a reference light unit for deriving the reference laser light as collimated light is used,
The collimated light is applied to the non-planar mirror, and the reflected light is introduced into the optical axis detection unit. Accordingly, only the optical axis detection unit needs to be moved, and the focus detection operation of the non-planar mirror can be efficiently performed with simpler steps.

[0015]

FIG. 1 is a perspective view of a reference light unit 10 constituting a focus detection device for an optical component according to a first embodiment of the present invention, and FIG.
0 is a side view, and FIG. 3 is a plan view of the reference light unit 10.

The reference light unit 10 has a function of irradiating a reference laser light L used for measurement of various optical parts and the like, and a laser light unit 14 incorporating a laser oscillator 12 such as a He-Ne laser. A rotation mechanism 18 for rotating the laser light unit 14 around an optical axis with respect to a support cylinder 16, and an optical axis of the reference laser light L derived from the laser light unit 14 to the reference light unit 10.
And a light center adjusting mechanism 20 for making the rotation center coincide with the rotation center.

The reference light unit 10 includes a unit base 24 fixed on a measurement base 22. The support cylinder 16 is mounted on the unit base 24 via a left-right slide mechanism 26 and a vertical slide mechanism 28. The left and right slide mechanism 26 has a guide rail 30 provided on the unit base 24 in the direction of arrow B perpendicular to the optical axis direction (direction of arrow A).
A slide base 32 that can move forward and backward in the direction of arrow B is disposed at 0. A first micrometer 34 is fixed on the unit base 24 in the horizontal direction, and a rod 36 of the first micrometer 34 is fixed to the slide base 32.

A column 38 is provided on the slide base 32, and a pair of guide rails 40 constituting the vertical slide mechanism 28 are fixed vertically to the inner surface of the column 38. A pair of guide portions 42 are provided on both sides of the support cylinder 16 so as to be movable up and down by engaging with the guide rails 40, and a second micrometer 44 is provided vertically above the one end of the column 38 in a vertically downward direction. Be attached.
A rod 46 projecting downward from the second micrometer 44
Are fixed to the support cylinder 16.

A rotary cylinder 50 is rotatably supported in the support cylinder 16 via a pair of bearings 48 constituting the rotation mechanism 18, and the laser oscillator 12 is accommodated in the rotary cylinder 50. . The holding members 52 are attached to both ends of the laser oscillator 12, and the small-diameter portions 54 of the holding members 52 are inserted into the rotary cylinder 50.

The optical center adjusting mechanism 20 has three adjusting screws 56 which are screwed into the both ends of the rotary cylinder 50 at equal angular intervals, respectively, and the tip of the adjusting screw 56 is a small diameter portion of the holding member 52. The contact with 54 causes the optical axis of the laser oscillator 12 to be tilted and adjusted.

As shown in FIGS. 2 and 3, the reference light unit 10 has a tilting mechanism that can tilt and fix the reference light unit 10 in a direction (arrow B direction) crossing the optical axis direction (arrow A direction). 58. The tilting mechanism 58 includes knock pins 60a and 60b provided on the measurement base 22. The knock pin 60a fits into a hole 62 formed at the tip of the unit base 24 in the direction of arrow A, while the knock pin 60b is The unit base 24 is selectively fitted into three holes 64a, 64b, and 64c provided on the rear end side in the arrow A direction.

As shown in FIG. 2, the laser light unit 14
A beam diameter enlarging means 66 for enlarging the beam diameter of the reference laser beam L is detachably provided on the tip side of the laser beam.
The beam diameter expanding means 66 is, for example, 0.8 mm in diameter.
And converts the reference laser light L into parallel light (collimated light) having a diameter of 25 mm. The filter unit 68 includes a combination of various types of pinhole assemblies and focusing lenses, and a lens including a lens set for a beam expander. And a unit 69.

FIG. 4 shows an optical axis (light spot) of the reference laser light L emitted from the reference light unit 10 and constituting a focus detection device.
FIG. 5 is a perspective view of the optical axis detection unit 100 for detecting a position, and FIG. 5 is a side view of the optical axis detection unit 100.

The optical axis detection unit 100 includes a measurement base 2
2 and a unit base 102 fixed on the unit base 102, and a first slide base 104 on the unit base 102.
Are arranged to be able to advance and retreat in the optical axis direction (the direction of arrow A) via the advance and retreat mechanism 105. An end of a first slide knob 106 that constitutes an advance / retreat mechanism 105 and is supported by the unit base 102 is fixed to the side of the first slide base 104. The first slide knob 106 is rotated to rotate the first slide knob 106. The first slide base 104 can move forward and backward in the direction of arrow A.

On the first slide base 104, there is provided a rotary base 110 constituting a rotary mechanism 108. The rotary base 110 is operated by operating a rotary knob 112 so as to intersect with the optical axis of the reference laser beam L. It is rotatable around an axis (vertical axis). On the rotating base 110,
The second slide base 114 is disposed so as to be able to advance and retreat in the direction of arrow A. An end of a second slide knob (measurement position adjusting mechanism) 116 is connected to the second slide base 114, and the second slide knob 116 is rotated by a small distance in the direction of arrow A by rotating the second slide knob 116.

An optical axis position detection sensor 118 is mounted on the second slide base 114, and the optical axis position detection sensor 1
A monitor 122 is connected to 18 (see FIG. 6). As will be described later, the position of the reference laser beam L introduced on the light spot (optical axis) measurement surface 120 of the optical axis position detection sensor 118 is displayed on the monitor 122 as a visible image.

Next, the operation of the focus detection device thus configured will be described below in relation to the focus detection method according to the first embodiment of the present invention.

First, the optical axis adjustment of the reference laser light L is performed so that the optical axis of the reference laser light L derived from the reference light unit 10 coincides with the rotation center of the reference light unit 10. Next, the optical axis alignment operation of the optical axis detection unit 100 is performed using the reference laser beam L with the optical axis set.

More specifically, as shown in FIG. 7, on the optical axis of the reference light unit 10, an optical axis detecting unit 100 is arranged corresponding to a predetermined position. Then, when the reference laser light L is derived from the reference light unit 10, the reference laser light L is applied to the light spot measurement surface 120 of the optical axis detection unit 100. In this state, while rotating the rotation base 110 constituting the rotation mechanism 108,
The second slide base 1 under the action of the slide knob 116
14 is moved back and forth in the optical axis direction.

Then, as shown in FIG.
The second slide base 114 is stopped at a position where the upper optical axis position P does not move. Thereby, the light spot measurement surface 120 and the rotation axis of the rotation mechanism 108 coincide with each other, and the light spot measurement surface 1
Twenty positions will be detected.

FIG. 8 is a perspective view of the position adjustment unit 140 to which the focus detection method according to the first embodiment of the present invention is applied, and FIG. 9 is a side view of the position adjustment unit 140. .

The position adjusting unit 140 includes a non-planar mirror (including a parabolic mirror and an elliptical mirror) 14 as an optical component.
2 is integrally mounted on a laser processing device, a laser measuring device, or the like, and has a function of adjusting the position and angle of the non-planar mirror 142 in advance.

The position adjustment unit 140 includes the measurement base 2
2, a unit base 144 is mounted on the unit base 144, and a support block 146 is provided on the unit base 144. On the support block 146, a first tilt member 150 that can be horizontally adjusted in angle via a first knob 148 is provided. The first knob 150 has a second knob 152.
A second tilting member 154 that can be tilted in the vertical direction is supported via the second tilting member 154, and the non-planar mirror 142 is mounted on the second tilting member 154.

Therefore, by using the reference light unit 10 and the light spot detection unit 100, when the non-planar mirror 142 is a parabolic mirror or an ellipsoidal mirror, focus is performed according to the following procedures. A position measurement is performed.

First, in the parabolic mirror, as shown in FIG. 10, the reference light unit 10 translates in the horizontal direction (the direction of arrow B) under the rotation of the first micrometer 34 constituting the left and right slide mechanism 26. Meanwhile, the reference laser light L is derived. On the other hand, the optical axis detection unit 100 arranged near the focal position of the non-planar mirror 142 operates the first slide base 104 under the rotation of the first slide knob 106.
Moves forward and backward in the direction of the optical axis S2. The reference laser light L derived from the reference light unit 10 is reflected by the non-planar mirror 142 and is reflected on the light spot measurement surface 12 constituting the optical axis detection unit 100.
It is irradiated to 0. At this time, the position where the movement of the optical axis is the least is measured as the focal position (distance) of the non-planar mirror 142.

On the other hand, in the ellipsoidal mirror, as shown in FIG. 11, the reference light unit 10 emits the reference laser beam L while being tilted in the horizontal direction, and the optical axis detection unit 1
00 moves back and forth along the optical axis S2. Then, the position where the movement of the optical axis detected by the light spot measuring surface 120 of the optical axis detection unit 100 is the least is measured as the focal position (distance) of the ellipsoidal mirror.

In the parabolic mirror, as shown in FIG. 12, a beam diameter expanding means 66 is mounted on the reference light unit 10, and the focal position of the non-planar mirror 142 can be measured using the collimated light L1. .

In the reference light unit 10, the reference laser light L derived from the laser light unit 14 is converted into collimated light L1 via the beam diameter expanding means 66, and the collimated light L1 is reflected by the non-planar mirror 142. The light is irradiated on the light spot measurement surface 120 constituting the optical axis detection unit 100. Here, the optical axis detection unit 100 moves forward and backward in the direction of the optical axis S2, and the position where the area of the light spot on the light spot measurement surface 120 is the smallest is measured as the focal position of the non-planar mirror 142. Therefore, there is no need to move the reference light unit 10, and the focus position of the parabolic mirror can be quickly measured by a simple process.

FIG. 13 is a perspective view of a reference light unit 160 constituting a focus detection device according to a second embodiment of the present invention. FIG. 14 is a perspective view of an optical axis detection unit 170 constituting the focus detection device. It is a perspective view.

The reference light unit 160 includes a left and right slide mechanism 1 for automatically moving the laser light unit 14 forward and backward in the direction of arrow B perpendicular to the optical axis direction (direction of arrow A).
62. The left and right slide mechanism 162 includes a rotary drive source, for example, a motor 164.
A ball screw 166 connected to the drive shaft is screwed into the column 38. The vertical slide mechanism 28 can be automated similarly to the left and right slide mechanism 162.

As shown in FIG. 14, the optical axis detection unit 1
Reference numeral 70 denotes the first slide base 104 in the optical axis direction (arrow A).
172), and a rotation mechanism 174 that can automatically rotate the rotation base 110.
And the second slide base 11 on the rotation base 110
4 is provided with a minute advance / retreat mechanism 176 that can automatically advance / retreat in the direction of arrow A.

The reciprocating mechanism 172 is connected to the unit base 102.
And a ball screw 180 connected to the first motor 178 is screwed to the first slide base 104. The rotation mechanism 174 includes a second motor 182 fixed on the first slide base 104, and the ball screw 18 connected to the second motor 182.
4 is screwed into the rotation base 110. Micro advance / retreat mechanism 176
Has a third motor 186 fixed to the rotation base 110, and a ball screw 188 connected to the third motor 186 is screwed to the second slide base 114.

A method for automatically measuring the focal point of the non-planar mirror 142 as a parabolic mirror as shown in FIG. 15 will be described below with reference to the flowchart shown in FIG.

In the reference light unit 160, the adjustment of the reference laser light L derived from the reference light unit 160 is performed in advance (step S1 in FIG. 16). Therefore,
The reference light unit 10 emits the reference laser light L, and the optical axis detection unit 170 is automatically swung about the vertical axis under the action of the second motor 182 constituting the rotation mechanism 174 (step S2). ).

In this state, it is determined whether or not the optical axis position of the reflected light La incident on the light spot measuring surface 120 constituting the optical axis detecting unit 170 changes (step S3).
When the optical axis position fluctuates, the process proceeds to step S4, in which the third motor 186 constituting the minute advance / retreat mechanism 176 is driven, and the light spot measurement surface 120 is automatically moved along the optical axis S2.

When the optical axis position does not change, the light spot measurement surface 120 and the rotation axis of the rotating mechanism 174 coincide with each other, and the position of the light spot measurement surface 120 is detected. Next, proceeding to step S5, the light spot measurement surface 120
Is stored, the reference light unit 160 is automatically translated in a direction intersecting the optical axis S1 under the action of the motor 164 constituting the left and right slide mechanism 162 (step S6). Here, when the optical axis position measured by the optical axis detection unit 170 fluctuates (N in step S7)
O), proceeding to step S8, the optical axis detecting unit 17
0 is moved in the front-back direction along the optical axis S2. On the other hand, when the optical axis position does not change, the process proceeds to step S9, where the stored position is determined as the focal position, and the focal length is automatically measured.

FIG. 17 is a flowchart for implementing another focus detection method for automatically measuring the focus of the non-planar mirror 142 which is a parabolic mirror. The flowchart shown in FIG. 17 is basically the same as the flowchart shown in FIG. 16, and will be schematically described below.

First, steps S1a to S5a are performed to store the position of the optical axis measurement surface of the non-planar mirror 142, and then the process proceeds to step S6a. In this step S6a,
The reference light unit 10 emits the reference laser light L while the reference light unit 10 moves parallel to the optical axis S1. On the other hand, in the optical axis detection unit 170, the light spot measurement surface 120 is automatically rotated via the rotation mechanism 174 (step S7a).
It is determined whether or not the optical axis position of the reflected light La irradiated to 0 fluctuates (step S8a).

When the optical axis position changes, the process proceeds to step S9a, and the optical axis detection unit 170 automatically moves in the front-rear direction along the optical axis S2. When it is determined that the optical axis position does not change, the process proceeds to step S10a, and the focus position is determined. As a result, the focal point of the non-planar mirror 142 is automatically measured.

[0050]

According to the method and apparatus for detecting the focus of an optical component according to the present invention, a reference laser beam having an optical axis set is applied to the optical component, and the reflected light from the optical component is applied to the optical axis detection unit. This enables the focus detection work of various optical components to be performed with high accuracy.

Furthermore, it is only necessary to use the reference light unit and the optical axis detection unit, and the focus detection and adjustment work of various optical parts can be performed with high accuracy and efficiency with a simple process and structure.

[Brief description of the drawings]

FIG. 1 is a perspective view of a reference light unit included in a focus detection device according to an embodiment of the present invention.

FIG. 2 is a side view of the reference light unit.

FIG. 3 is a plan view of the reference light unit.

FIG. 4 is an explanatory perspective view of an optical axis detection unit constituting the optical axis detection device.

FIG. 5 is an explanatory side view of the optical axis detection unit.

FIG. 6 is an explanatory diagram of a display screen of a monitor constituting the optical axis detection unit.

FIG. 7 is a plan view illustrating an adjustment operation of the optical axis detection unit.

FIG. 8 is an explanatory perspective view of a position adjustment unit.

FIG. 9 is a side view of the position adjustment unit.

FIG. 10 is an explanatory diagram when detecting the focal position of a parabolic mirror.

FIG. 11 is an explanatory diagram for detecting a focal position of an ellipsoidal mirror.

FIG. 12 is an explanatory diagram when detecting the focal position of the parabolic mirror using collimated light.

FIG. 13 is a schematic perspective view of a reference light unit included in a focus detection device according to a second embodiment of the present invention.

FIG. 14 is an explanatory perspective view of an optical axis detection unit included in the focus detection device according to the second embodiment.

FIG. 15 is an explanatory diagram when a focus position of a parabolic mirror is detected using the focus detection device according to the second embodiment.

FIG. 16 is a flowchart for automatically measuring the focal position of the parabolic mirror in the second embodiment.

FIG. 17 is another flowchart for automatically measuring the focal position of the parabolic mirror in the second embodiment.

[Explanation of symbols]

10, 160: Reference light unit 12: Laser oscillator 14: Laser light unit 18: Rotating mechanism 20: Optical center adjusting mechanism 26, 162: Left / right sliding mechanism 28: Vertical sliding mechanism 58: Tilting mechanism 66: Beam diameter expanding means 100 170 ...
Optical axis detection unit 104, 114 ... Slide base 105, 172 ...
Reciprocating mechanism 108, 174 Rotating mechanism 110 Rotating base 118 Optical axis position detection sensor 120 Light spot measuring surface 122 Monitor 140 Position adjusting unit 142 Non-planar mirror L Reference laser beam L1 Collimated light

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H011 EA01 EA13 2H043 AB02 AB08 AB09 AB11 AB32 2H051 BB31 CB12 CB27 5F072 AA01 KK05 KK30 YY20

Claims (9)

[Claims] 1. A method for detecting a focus of an optical component constituting a laser optical apparatus, comprising: translating or tilting a reference light unit for deriving a reference laser beam having an optical axis set with respect to the optical axis. Irradiating the reference laser light from the reference light unit to a non-planar mirror that is an optical component; and causing the reflected light from the non-planar mirror irradiated with the reference laser light to enter an optical axis detection unit; Moving the optical axis detection unit in the optical axis direction of the reference laser light, and setting the position where the movement of the optical axis of the reflected light detected by the optical axis detection unit is the least, as the focal position of the non-planar mirror; A focus detection method for an optical component, comprising: 2. A focus detecting method according to claim 1, wherein said reference laser beam is irradiated on a parabolic mirror which is said non-planar mirror, and reflected light from said parabolic mirror is introduced into said optical axis detecting unit. And a step of rotating an optical axis measurement surface of the optical axis detection unit around an axis intersecting the optical axis of the reference laser beam. 3. The focus detecting method according to claim 1, wherein said reference laser beam is irradiated on a parabolic mirror which is said non-planar mirror, and reflected light from said parabolic mirror is introduced into an optical axis detecting unit. Rotating the optical axis measurement surface of the optical axis detection unit around an axis that intersects the optical axis of the reference laser light, and the optical axis position of the reference laser light applied to the optical axis measurement surface varies Determining whether or not to perform, when the optical axis position of the reference laser light changes, moving the rotation center position of the optical axis detection unit; and when the optical axis position does not change, Translating the reference light unit, determining whether or not the optical axis position of the reference laser light applied to the optical axis measurement surface changes; and When the optical axis position fluctuates, Moving the optical axis detection unit in the optical axis direction, and setting the position of the optical axis measurement surface where the optical axis position of the reference laser light does not change as the focal position of the parabolic mirror, A focus detection method for an optical component, comprising: 4. A focus detecting method according to claim 1, wherein said reference laser beam is applied to a parabolic mirror which is said non-planar mirror, and reflected light from said parabolic mirror is introduced into an optical axis detecting unit. Rotating the optical axis measurement surface of the optical axis detection unit around an axis that intersects the optical axis of the reference laser light, and the optical axis position of the reference laser light applied to the optical axis measurement surface varies Determining whether or not to perform, when the optical axis position of the reference laser light changes, moving the rotation center position of the optical axis detection unit; and when the optical axis position does not change, While translating the reference light unit, the optical axis measurement surface of the optical axis detection unit is rotated around an axis that intersects the optical axis of the reference laser light, and the reference laser light is irradiated on the optical axis measurement surface. Whether the optical axis position fluctuates Judging, and when the optical axis position of the reference laser light fluctuates due to the parallel movement of the reference optical unit and the rotation of the optical axis measurement surface, moving the optical axis detection unit in the optical axis direction. Setting the position of the optical axis measurement surface where the optical axis position of the reference laser light does not change as the focal position of the parabolic mirror. 5. A focus detection method for an optical component constituting a laser optical apparatus, comprising: providing a reference light unit for deriving, as collimated light, a reference laser beam having an optical axis set; Irradiating the non-planar mirror with the collimated light, and applying the reflected light from the non-planar mirror irradiated with the collimated light to an optical axis detection unit; and Moving the optical axis of the reflected light detected by the optical axis detection unit in the optical axis direction, and setting a position where the optical axis of the reflected light is least moved as the focal position of the non-planar optical component. Focus detection method for optical parts. 6. The focus detection method according to claim 1, wherein the step of irradiating the reference laser beam to the optical axis detection unit includes the step of: applying an optical axis measurement surface of the optical axis detection unit to the optical axis detection unit. A step of matching with the rotation axis of, and moving the optical axis measurement surface in the optical axis direction of the reference laser light,
Adjusting the measurement position of the optical axis measurement surface. 7. A focus detection device for an optical component constituting a laser optical device, comprising: a reference light unit for deriving a reference laser beam having an optical axis set; And an optical axis detection unit for detecting an optical axis position of the reflected light, wherein the optical axis detection unit has an advance / retreat mechanism that can advance / retreat in the optical axis direction of the reference laser light. A focus detection device for an optical component, comprising: 8. The focus detecting device according to claim 7, wherein the optical axis detecting unit is configured to detect an optical axis position of the reflected light; An optical component, comprising: a rotation mechanism that rotates around an axis that intersects the axis; and a measurement position adjustment mechanism that advances and retreats the optical axis measurement surface in the optical axis direction with respect to the optical axis of the reference laser light. Focus detection device. 9. The focus detecting device according to claim 7, wherein the reference light unit includes a beam diameter expanding means for expanding a beam diameter of the reference laser light so as to derive the reference laser light as collimated light. A focus detection device for an optical component.