JP2002158343A - Radiation detection device and manufacturing method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a radiation detection device whose area is stably and inexpensively enlarged by using a compound semiconductor material being a stable material and which realizes a uniform large area characteristic, especially the large area of not less than 40 cm×40 cm is realized and to provide the manufacturing method. SOLUTION: The radiation detection device is provided with a plurality of GaAs substrates 2 converting radiations into charges and a TFT substrate 1 accumulating and transferring the charge. A plurality of the GaAs substitutes 2 are formed on the TFT substrate 1 and a pixel and the end face of the GaAs substrate 2 adjacent to the TFT substrate 1 are collectively and electrically connected to the same corresponding pixel of the TFT substrate 1 through conductive adhesive 24.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a radiation detecting apparatus for detecting radiation such as X-rays and .gamma.-rays and a method of manufacturing the same. The present invention relates to a radiation detection device applied to a device and a method for manufacturing the same.

[0002]

2. Description of the Related Art Conventionally, as a radiation detection device for detecting radiation such as X-rays and γ-rays, the radiation is converted into visible light,
There is an indirect radiation detection device that detects the converted light with a photoelectric conversion element (for example, a PIN photodiode) using an a-Si thin film. The reason that this type of indirect radiation detector is used is that TF
There is an advantage that a large-screen radiation detection apparatus can be stably produced by a combination of a background in which the area of a T (Thin Film Transistor) and a sensor can be increased, and a conventionally used GOS phosphor. That's why.

Recently, in response to the demand for higher sensitivity,
There is a situation in which a radiation detection device using a CsI phosphor instead of a GOS phosphor has been developed. The reason why a radiation detection device using a CsI phosphor has been developed is that a conventional GOS phosphor is formed by forming GOS particles in a sheet shape using an organic resin or the like, whereas a CsI phosphor has a columnar crystal structure. This is because they can be manufactured by directly forming them on the sensor substrate, or by bonding those formed on the substrate.

In a CsI phosphor, light emitted inside propagates through a columnar crystal, and as a result, light scattering is reduced, and a structure that can be formed with a thick film is presumed to be able to achieve high sensitivity. Have been. FIG. 14 is a diagram schematically showing the light emission intensity and the light scattering degree.

[0005] As described above, the indirect radiation detection apparatus is stably manufactured and used, but it cannot be said that the characteristics, for example, the sensitivity are sufficient. For example, to increase the sensitivity, it is necessary to simply increase the thickness of the phosphor.
As shown in FIG. 4, at the same time, the scattered light also increases, the spatial resolution decreases, and in some cases, light absorption in the phosphor causes a decrease in sensitivity. Therefore, the film thickness is set by optimizing the sensitivity and the resolution. this is,
To put it simply, it is impossible to make the film thicker due to optical loss and scattering.

[0006] Therefore, in order to further increase the sensitivity, for example, SPIE Vol. 2708 As described in P511 to P522, a direct radiation detection device using an a-Se film has been developed. The direct-type radiation detection device is a device in which an a-Se semiconductor thin film that directly converts radiation into an electric signal is formed and connected directly to a TFT substrate.
The direct radiation detection device has no optical loss as compared with the indirect radiation detection device, and since the generated charges are drawn out by the electric field, the film thickness can be made sufficiently large. Therefore, it is considered that a more sensitive detection device can be realized by employing a direct radiation detection device.

[0007]

However, the above-described prior art has the following problems. Current,
The a-Se semiconductor thin film, which has attracted the most attention as a direct type material, lacks material environmental safety and has essential problems such as structural change at high temperatures. Furthermore, since it is necessary to apply a high voltage, it is considered that some kind of device needs to be implemented in order to realize the radiation detection device.
As a result, there is a possibility that the cost may be increased, the size may be increased, and the handling may be complicated.

In such a situation, a compound semiconductor having excellent environmental safety has been researched and developed as a direct radiation detecting material for an a-Se semiconductor thin film. For example, as described in Sensor Technology, October 1986, pp. 93-98, CdTe, GaAs, and the like have attracted attention as radiation sensor materials. Generally, this kind of material has an ionization energy of about several eV, and the above-mentioned 50-e
There is a feature that it is one digit smaller than V. That is, it can be said that the sensitivity is simply improved by 10 times.

Further, as an example of research and development using this kind of compound semiconductor, there is an X-ray sensor in which a 6 cm ² CdTe compound semiconductor sensor is connected to a CMOS readout circuit with In bumps (1997 / SPIE Vo).
l. 3032 P513-P519). Furthermore, Cd
A 10 mm × 77 mm size sensor having a configuration in which a Te sensor is electrically connected to an a-Si TFT array with a conductive resin has been announced (see AM-LCD'99Amp2-2).

As described above, various compound semiconductor sensors have been realized at present, but the compound semiconductor substrate is about 4 inches at the maximum as being put to practical use. Therefore, as a compound semiconductor sensor, 40 cm × 40 cm
However, there has been a problem that a technique for realizing a large area having such a size has not yet been achieved, and its application range has been limited.

An object of the present invention is to realize a large area stably and at low cost by using a compound semiconductor material which is a stable material, and to achieve a uniform large area characteristic, particularly 40 cm × 40 cm.
It is an object of the present invention to provide a radiation detection apparatus realizing the above-described large area and a method of manufacturing the radiation detection apparatus.

[0012]

According to the present invention, there is provided a radiation detecting apparatus comprising: a plurality of sensor substrates for converting radiation into electric charges; and a TFT substrate for storing and transferring the electric charges. The pixel on the end face of the sensor substrate which is arranged on the TFT substrate and which is adjacent to the TFT substrate is electrically connected to the same pixel of the corresponding TFT substrate collectively.

The present invention also provides a plurality of sensor substrates for converting radiation into electric charges, and a TFT for storing and transferring the electric charges.
A manufacturing method of the radiation detection device including the substrate, wherein the plurality of sensor substrates are formed on the TFT substrate, and a pixel on an end surface of the sensor substrate adjacent to the TFT substrate is formed with a corresponding one of the TFT substrates. It is characterized by being electrically connected to the same pixel at once via a conductive adhesive.

The radiation detecting apparatus according to the present invention, as described with reference to FIG. 5, includes a plurality of sensor substrates (2) for converting radiation into electric charges, and a TFT for storing and transferring the electric charges.
In the radiation detection apparatus including the substrate (1), the plurality of sensor substrates are disposed on the TFT substrate, and a pixel on an end surface of the sensor substrate adjacent to the TFT substrate corresponds to the corresponding TFT substrate. Are electrically collectively connected to the same pixel via a conductive adhesive (24).

[Operation] In the radiation detecting apparatus of the present invention, a plurality of sensor substrates are arranged on a TFT substrate,
Pixels on the end face of the sensor substrate adjacent to the T substrate are collectively electrically connected to the same pixels on the corresponding TFT substrate. Therefore, a large-area radiation detection device can be realized.

In addition, pixels on the TFT substrate corresponding to pixels on adjacent portions of the plurality of sensor substrates are formed as dummy pixels and are applied with a constant potential. Therefore, a large-area radiation detection device can be realized.

Further, a plurality of sensor substrates are arranged so that the center of the TFT substrate and the center of the sensor substrate substantially coincide with each other.
That is, even if there is a line or a pixel to be output corrected, the line or the pixel is removed from the important area, so that a radiation detection method having high reliability can be obtained. The device can be realized.

Further, the end face of the sensor substrate adjacent to the TFT substrate is provided inside the pixel, that is, the electric field intensity distribution on the end face of the sensor substrate is made the same as in the sensor substrate. Therefore, it is possible to realize a radiation detection device in which the sensor substrate end surface is cut in the pixel.

[0019]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS First Embodiment Next, a first embodiment of the present invention will be described in detail with reference to the drawings.

(1) Description of Configuration In the first embodiment of the present invention, X
A case where a GaAs substrate is used as a direct conversion material will be described.

FIG. 1 is a schematic sectional view of one pixel in the radiation detecting apparatus according to the first embodiment. In FIG. 1, 1 is a TFT substrate, 2 is a GaAs substrate, 3 is a TFT, and 4 is a storage capacitor. Reference numerals 5 and 6 denote a common electrode and a charge collection electrode of the GaAs substrate 2, 7 denotes a conductive adhesive for electrically connecting the GaAs substrate 2 and the TFT substrate 1, and 8 denotes a bonding electrode connected to the TFT 3 and the storage capacitor 4. It is.

The GaAs substrate 2 is electrically connected to the upper portion of the TFT substrate 1 via a conductive adhesive 7. Ga
The As substrate 2 converts radiation into electric charges. TFT substrate 1
Includes a storage capacitor 4 for storing charges converted by the GaAs substrate 2, a TFT 1 for transferring charges, a drive wiring Vg (see FIG. 3) for the TFT 1, and a signal wiring Sig (see FIG. 3). . The GaAs substrate 2 is applied with a constant potential by the common electrode 5, and collects the charges generated according to the incident X-rays at the charge collecting electrode 6 according to the electric field.
Is stored in the storage capacity 4.

FIG. 2 is an equivalent circuit diagram of one pixel in the radiation detecting apparatus according to the first embodiment. In FIG. 2, S is G
aAs sensor part, R is one pixel of GaAs substrate 2 and TFT
A junction resistance with one pixel of the substrate 1, T is a TFT, and C is a storage capacitance. As shown, the charge generated in the GaAs sensor unit S is stored in the storage capacitor C, and is read out by turning on the TFT T.

FIG. 3 is an equivalent circuit diagram of 3.times.3 pixels of the TFT substrate in the radiation detecting device according to the first embodiment. FIG.
, Tij is a TFT, Cij is a storage capacitor, Rij
Is a junction electrode with the GaAs substrate, Vg1-3 are TFT drive wirings, Sig. Reference numerals 1 to 3 are signal wirings. Each storage capacity C
ij is stored in the TFT drive wirings vg1 to vg1.
3 sequentially turned on, and the signal wiring Sig. It is read from 1-3.

The radiation detecting apparatus according to the first embodiment has a structure in which a plurality of GaAs substrates are joined to a TFT substrate, and an example is shown in FIG.

FIG. 4 is a schematic plan view of the radiation detecting apparatus according to the first embodiment when four GaAs substrates are connected to a TFT substrate, for example. In FIG.
14 is a GaAs substrate and 15 is a TFT substrate. Also,
FIG. 5 is a schematic cross-sectional view taken along line AA of FIG.
FIG. 6 is a schematic plan view of the center B of FIG.

In FIG. 5, 1 is a TFT substrate, 2 is Ga
An As substrate. Reference numerals 5 and 6 denote a common electrode and a charge collecting electrode of the GaAs substrate 2, and 7 denotes a GaAs substrate 2 and a TFT substrate 1.
And 8, a bonding electrode connected to the TFT 3 and the storage capacitor 4. In the figure, P is a pixel pitch.

The charge collecting electrode 2 on the end face of the GaAs substrate 2
Pixels 1 and 22 are designed so that a signal of about 1/2 can be obtained. Pixels on the end face of the GaAs substrate 2 are collectively conductive with the bonding electrode 23 of the same pixel on the TFT substrate 1. They are electrically connected via an adhesive 24. In this case, the conductive adhesive 24 is bonded and electrically connected in such a manner as to wrap around the sensor substrate end face,
The connection between the sensor substrates and the connection with the TFT substrate can be more reliably achieved.

FIG. 7 is an equivalent circuit diagram of an end face pixel of the GaAs substrate 2 in the radiation detecting apparatus according to the first embodiment. 2
One sensor pixel is connected to one TFT pixel, and the obtained signal output is approximately the same as that of the pixel inside the GaAs substrate 2.

In FIG. 6, reference numeral 8 denotes a junction electrode of a TFT substrate, 11 to 14 denote a GaAs substrate (only the outline is shown in FIG. 6), and 7 denotes a conductive electrode for connecting the GaAs substrate to the TFT substrate. Adhesive. Also, TFT
The bonding electrode 31 at the center of the substrate is a GaAs substrate 11
To 14 are collective pixels, and the pixels at the ends of the respective GaAs substrates 11 to 14 are designed so that a signal of approximately 1/4 can be obtained.

FIG. 8 is an equivalent circuit diagram of an end pixel of the GaAs substrate 2 in the radiation detecting apparatus according to the first embodiment. Each signal of the pixel at the end of each GaAs substrate is the same TF
T pixel and the resulting signal output is approximately G
The output is the same as that of the pixel inside the aAs substrate.

As described above, when the GaAs substrate is disposed on the TFT substrate, the pixel at the edge of the GaAs substrate is
By connecting to the same connection electrode on the substrate, it is possible to read an image without a seam on the image or with simple correction.

In the first embodiment, the GaAs substrate is
Although the case where the substrate is arranged is taken as an example, of course, GaAs
There may be 16 or more substrates.

(2) Description of Operation Next, the operation of the first embodiment of the present invention will be described with reference to FIGS.
This will be described in detail with reference to FIGS.

The operation and effect of the radiation detecting apparatus of the first embodiment configured as described above, that is, a plurality of pixels on the end face or end of the sensor substrate are electrically connected to one pixel on the TFT substrate. The reason why the described structure enables high-quality images will be described.

When tiling a GaAs substrate, a margin for cutting the sensor substrate and a margin for bonding are required, and it is considered difficult to completely connect the GaAs substrates. Therefore, the present inventors set T
A configuration has been devised in which a TFT substrate and a sensor substrate in which the distance between pixels corresponding to the joint of the GaAs substrate of the FT substrate is widened and the sensor substrate are tiled.

FIG. 9 is a schematic sectional view showing a conventional structure of the radiation detecting apparatus proposed by the present inventors. In FIG. 9, reference numeral 101 denotes a pixel on an end surface or an end portion of the sensor substrate;
Is a space in consideration of the above-mentioned margin.

FIG. 10 is a schematic diagram showing the lines of electric force of the pixels at the end face or end of the sensor substrate at this time. The lines of electric force extend to the end surface or end of the sensor substrate, and the electric characteristics are
It exhibits characteristics different from those of pixels inside the GaAs substrate, and requires output correction. In other words, the image data of the pixel 101 on the end face or end of each sensor substrate and the space 102 described above, that is, the pixels of 2 pixels or more and 3 pixels or less are corrected, and the image quality becomes insufficient.

On the other hand, according to the basic configuration shown in FIG. 5, the unnecessary space 102 is not taken into account, and the distribution of the lines of electric force is uniform in the substrate except for the pixels on the end face or end of the GaAs substrate. .

FIG. 11 is a schematic diagram showing the lines of electric force of the pixels on the end face or end of the GaAs substrate at this time. In other words, by correcting only the pixels corresponding to the joints of the sensor substrate in some cases, it is possible to realize a radiation detection device with high image quality and substantially no joints.

[Second Embodiment] Next, a second embodiment of the present invention will be described in detail with reference to the drawings.

(1) Description of Configuration In the second embodiment of the present invention, a description will be given of a configuration in which pixels connected to the same connection electrode of the TFT substrate are connected to a fixed potential from pixels on the end face of the adjacent GaAs substrate. .

FIG. 12 is an equivalent circuit diagram of 3.times.3 pixels on the TFT substrate in the radiation detecting apparatus according to the second embodiment. In FIG. 12, Tij is a TFT, Cij is a storage capacitor, and Rij is
ij is a junction electrode with the GaAs substrate, Vg1-3 are TFTs
Drive wiring, Sig. Reference numerals 1 to 3 are signal wirings. In the second embodiment, the TFT drive wiring Vg2 and the signal wiring Sig. 2
Is fixed at a constant potential, and the end face pixels of the GaAs substrate are connected to the same connection electrode. The connection method between the GaAs substrate and the TFT substrate is performed in the same manner as the method shown in FIGS. 5 and 6 of the first embodiment.

(2) Description of Operation Next, the operation of the second embodiment of the present invention will be described in detail with reference to FIGS.

In the second embodiment, in particular, the pixel pitch is 1
In the case of a fine pitch of not more than 00 μ, it is difficult to design such that the pixel at the end or the end face of the GaAs substrate has approximately １ ／ output or 出力 output. At this time, even if the electrical connection is made in the same manner as in the first embodiment, the obtained output is greatly reduced as compared with the internal pixels of the GaAs substrate. So, TFT
It is also possible to deal with this by setting the connection electrode of the target pixel on the substrate to a constant potential.

As described above, FIG. 11 is a schematic diagram of electric lines of force having a structure in which a charge collecting electrode is arranged on the GaAs end face.
Numeral 0 is a schematic diagram of lines of electric force having a structure in which no charge collecting electrode is arranged on the end face of the GaAs substrate. Thus, GaAs
The presence of the charge collecting electrode on the end surface ensures the continuity of the end surface of the GaAs substrate.

That is, a constant potential is applied to the junction electrode of the TFT substrate corresponding to the edge or the end surface of the GaAs substrate, and the pixels in the first column on the edge or the end surface of the GaAs substrate are set as dummy pixels. Accordingly, it is possible to suppress the influence of the pixels in the second column from the end face, and it is possible to obtain a sensor having high uniformity of characteristics.

[Third Embodiment] Next, a third embodiment of the present invention will be described in detail with reference to the drawings.

(1) Description of Configuration In the third embodiment of the present invention, a case where the arrangement of GaAs substrates is different will be described. In the third embodiment, the center of the GaAs substrate is aligned with the center of the TFT substrate. In other words, the GaAs substrate 4 is connected to one junction electrode of the TFT substrate.
The configuration in which the edge pixels of the substrate are connected is particularly excluded from the important region. In the third embodiment, particularly, the central portion is considered as an important region.

FIG. 13 is a schematic plan view of the radiation detecting apparatus according to the third embodiment. In FIG. 13, 41 to 47 are G
An aAs substrate 15 is a TFT substrate.

(2) Description of Operation Next, the operation of the third embodiment of the present invention will be described in detail with reference to FIG.

In the third embodiment, the arrangement of the GaAs substrate 41 is shifted to the center of the TFT substrate 15 to form the GaAs substrate 41, so that the lines or pixels to be output corrected can be removed from the most important region. That is, even if there are lines or pixels to be output-corrected, a highly reliable radiation detection apparatus can be realized by removing the lines or pixels from the important region.

[0053]

As described above, according to the present invention, a plurality of sensor substrates are arranged on a TFT substrate,
Since the pixels on the end face of the sensor substrate adjacent to the FT substrate are collectively electrically connected to the same pixels on the corresponding TFT substrate via a conductive adhesive, a large-area radiation detection device can be realized. it can. That is, in the case of increasing the area of a substrate having a limited size such as a compound semiconductor substrate, a seamless radiation detection device can be realized by connecting pixels at the joints of the sensor substrate to the same connection electrode.

Further, since the pixels of the TFT substrate corresponding to the pixels in the adjacent portions of the plurality of sensor substrates are formed as dummy pixels and are applied with a constant potential, a large-area radiation detecting device can be realized. That is, it is possible to realize a radiation detection device capable of eliminating an output abnormality due to an influence from a sensor end face even in a sensor having a fine pixel pitch.

Further, the plurality of sensor substrates are arranged so that the center of the TFT substrate and the center of the sensor substrate substantially coincide with each other.
That is, even if there is a line or a pixel to be output corrected, the line or the pixel is removed from the important area, so that a radiation detection method having high reliability can be obtained. The device can be realized.

Further, the end face of the sensor substrate adjacent to the TFT substrate is provided inside the pixel, that is, in order to make the electric field intensity distribution of the end face of the sensor substrate similar to that in the sensor substrate, the end face of the sensor substrate is cut in the pixel. Radiation detection device can be realized.

[Brief description of the drawings]

FIG. 1 is a schematic sectional view of one pixel of a radiation detecting apparatus according to a first embodiment of the present invention.

FIG. 2 is an equivalent circuit diagram of one pixel of the radiation detecting apparatus according to the first embodiment of the present invention.

FIG. 3 is a TF of the radiation detection apparatus according to the first embodiment of the present invention.
FIG. 3 is an equivalent circuit diagram of a 3 × 3 pixel on a T substrate.

FIG. 4 is a view showing Ga in the radiation detecting apparatus according to the first embodiment of the present invention;
FIG. 4 is a schematic plan view when an As substrate is connected to a TFT substrate.

FIG. 5 is a schematic sectional view taken along line AA of FIG. 4;

FIG. 6 is a schematic plan view of a portion B in FIG. 4;

FIG. 7 is an equivalent circuit diagram of an end face pixel of the radiation detecting apparatus according to the first embodiment of the present invention.

FIG. 8 is an equivalent circuit diagram of an end pixel of the radiation detecting apparatus according to the first embodiment of the present invention.

FIG. 9 is a schematic cross-sectional view of one pixel of a conventional radiation detection device.

FIG. 10 is a schematic diagram showing lines of electric force of pixels on the end face or end of the GaAs substrate of the radiation detection devices according to the first and second embodiments of the present invention.

FIG. 11 is a schematic diagram showing lines of electric force of pixels on the end face or end of the GaAs substrate of the radiation detection devices according to the first and second embodiments of the present invention.

FIG. 12 shows T of the radiation detection apparatus according to the second embodiment of the present invention.
FIG. 3 is an equivalent circuit diagram of a 3 × 3 pixel of the FT substrate.

FIG. 13 is a schematic plan view of a radiation detection device according to a third embodiment of the present invention.

FIG. 14 is an explanatory diagram showing the relationship between the light emission intensity and the light scattering degree.

[Explanation of symbols]

 Reference Signs List 1 TFT substrate 2 GaAs substrate 3 TFT 4 Storage capacitor 24 Conductive adhesive

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification code FI Theme coat ゛ (Reference) H04N 5/32 H01L 31/00 A F term (Reference) 2G088 EE01 EE30 FF02 FF04 GG21 JJ05 JJ09 JJ33 JJ37 LL12 4M118 AA01 AA10 AB01 BA05 BA19 CA14 CB02 EA20 FB03 FB09 FB13 FB16 GA10 HA26 HA29 5C024 AX11 AX16 CX41 CY47 5F088 AB07 BA20 BB03 BB07 EA04 EA08 JA09 KA03 LA07

Claims (12)

[Claims] 1. A radiation detecting apparatus comprising: a plurality of sensor substrates for converting radiation into electric charges; and a TFT substrate for storing and transferring the electric charges, wherein the plurality of sensor substrates are disposed on the TFT substrate. In addition, the radiation detection apparatus is characterized in that pixels on the end surface of the sensor substrate adjacent to the TFT substrate are collectively electrically connected to the same pixel on the corresponding TFT substrate. 2. The collective electrical connection between a pixel on an end face of the sensor substrate adjacent to the TFT substrate and a corresponding pixel on the TFT substrate, the conductive adhesive being provided between the adjacent sensor substrates. 2. The radiation detection apparatus according to claim 1, wherein the connection is made by filling the space. 3. The pixel according to claim 1, wherein pixels on the TFT substrate corresponding to pixels on adjacent portions of the plurality of sensor substrates are formed as dummy pixels and are applied with a constant potential. Radiation detector. 4. The radiation detecting apparatus according to claim 1, wherein the plurality of sensor substrates are arranged such that a center of the TFT substrate substantially coincides with a center of the sensor substrate. 5. The radiation detection apparatus according to claim 1, wherein an end surface of the sensor substrate adjacent to the TFT substrate exists inside a pixel. 6. The radiation detection apparatus according to claim 1, wherein the radiation direct conversion material forming the sensor substrate is a compound semiconductor material such as GaAs. 7. A method of manufacturing a radiation detection device comprising: a plurality of sensor substrates for converting radiation into electric charges; and a TFT substrate for storing and transferring the electric charges, wherein the plurality of sensor substrates are disposed on the TFT substrate. Forming a pixel on an end face of the sensor substrate adjacent to the TFT substrate and electrically connecting the pixel to the same pixel on the corresponding TFT substrate via a conductive adhesive at a time. Device manufacturing method. 8. The collective electrical connection between a pixel on an end face of the sensor substrate adjacent to the TFT substrate and a corresponding pixel on the TFT substrate, and a conductive adhesive between the adjacent sensor substrates. The method for manufacturing a radiation detection apparatus according to claim 7, wherein the method is performed by filling. 9. The radiation detection apparatus according to claim 7, wherein pixels on the TFT substrate corresponding to pixels on adjacent portions of the plurality of sensor substrates are formed as dummy pixels and are applied to a constant potential. Manufacturing method. 10. The method according to claim 10, wherein the plurality of sensor substrates are connected to the TFT.
8. The method according to claim 7, wherein the center of the substrate and the center of the sensor substrate are substantially aligned. 11. The method according to claim 7, wherein an end surface of the sensor substrate adjacent to the TFT substrate is provided inside the pixel. 12. The method according to claim 7, wherein a compound semiconductor material such as GaAs is used as the radiation direct conversion material forming the sensor substrate.