JP2002134639A - Package for high freaquency electronic component and high freaquency electronic component using it - Google Patents

Package for high freaquency electronic component and high freaquency electronic component using it

Info

Publication number
JP2002134639A
JP2002134639A JP2000325908A JP2000325908A JP2002134639A JP 2002134639 A JP2002134639 A JP 2002134639A JP 2000325908 A JP2000325908 A JP 2000325908A JP 2000325908 A JP2000325908 A JP 2000325908A JP 2002134639 A JP2002134639 A JP 2002134639A
Authority
JP
Japan
Prior art keywords
electronic component
frequency electronic
substrate
ground electrode
electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000325908A
Other languages
Japanese (ja)
Inventor
Keiichi Ichikawa
敬一 市川
Kazuya Sayanagi
和也 佐柳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2000325908A priority Critical patent/JP2002134639A/en
Publication of JP2002134639A publication Critical patent/JP2002134639A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/161Cap
    • H01L2924/1615Shape
    • H01L2924/16152Cap comprising a cavity for hosting the device, e.g. U-shaped cap

Landscapes

  • Structures For Mounting Electric Components On Printed Circuit Boards (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a package for a high frequency electronic component where a negative influence to a circuit function due to the electric capacity between a lead electrode and a metal cap is suppressed. SOLUTION: A package 22 for the high frequency electronic component includes the substrate 24. In the substrate 24, on the one main surface, lands 26, 27 and a ground electrode 28 are formed, and on the other main surface, lead electrodes 30, 31 and a ground electrode 32 are formed. The ground electrode 28 has a width in the order of the thickness of a side surface portion of the metal cap 38, and is formed above the lead electrodes 30, 31. By means of a plurality of via holes 34 formed in the substrate 24, the land 26, the land 27, and the ground electrode 28 are electrically connected to the lead electrode 30, the lead electrode 31, and the ground electrode 32, respectively. The metal cap 38 is electrically and mechanically connected to the ground electrode 28 by adhesive so as to cover the lands 26, 27.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は高周波電子部品用
パッケージおよびそれを用いた高周波電子部品に関し、
特にたとえば半導体素子などの高周波電子部品素子を含
む高周波電子部品に用いられる高周波電子部品用パッケ
ージなどに関する。
The present invention relates to a high-frequency electronic component package and a high-frequency electronic component using the same.
In particular, the present invention relates to a package for a high-frequency electronic component used for a high-frequency electronic component including a high-frequency electronic component element such as a semiconductor element.

【0002】[0002]

【従来の技術】この発明の背景となる従来の高周波電子
部品の一例がたとえば特開平11−126841号公報
に開示されている。図11はこのような従来の高周波電
子部品の一例を示す図解図である。図11に示す高周波
電子部品1は高周波電子部品用パッケージ2を含む。高
周波電子部品用パッケージ2は基板3を含む。基板3の
一方主面には、2つのランド4が形成される。基板3の
他方主面には、2つの引出し電極5が形成される。基板
3には、2つのビアホール6が形成される。これらのビ
アホール6によって、2つのランド4が2つの引出し電
極5にそれぞれ電気的に接続される。また、基板3の側
面には、入出力端子として2つの側面電極7が形成され
る。これらの側面電極7は、2つの引出し電極5にそれ
ぞれ電気的に接続される。さらに、基板3の一方主面に
は、2つのランド4を覆うようにして、金属キャップ8
が接着剤で接着される。この高周波電子部品用パッケー
ジ2には、金属キャップ8の中であって基板3の一方主
面の中央に、高周波電子部品素子としての半導体素子
(増幅器)9が接着剤で接着される。また、半導体素子
9は、2つのランド4に2本のボンディングワイヤ10
でそれぞれ電気的に接続される。なお、この高周波電子
部品用パッケージ2には、基板3の他方主面に接地電極
11が形成されている。
2. Description of the Related Art An example of a conventional high-frequency electronic component as a background of the present invention is disclosed in, for example, Japanese Patent Application Laid-Open No. H11-126841. FIG. 11 is an illustrative view showing one example of such a conventional high-frequency electronic component. A high-frequency electronic component 1 shown in FIG. 11 includes a high-frequency electronic component package 2. The high-frequency electronic component package 2 includes a substrate 3. Two lands 4 are formed on one main surface of the substrate 3. Two extraction electrodes 5 are formed on the other main surface of the substrate 3. Two via holes 6 are formed in the substrate 3. These via holes 6 electrically connect the two lands 4 to the two extraction electrodes 5 respectively. Further, two side electrodes 7 are formed on the side surface of the substrate 3 as input / output terminals. These side electrodes 7 are electrically connected to the two extraction electrodes 5, respectively. Further, a metal cap 8 is provided on one main surface of the substrate 3 so as to cover the two lands 4.
Are bonded with an adhesive. A semiconductor element (amplifier) 9 as a high-frequency electronic component element is bonded to the high-frequency electronic component package 2 with an adhesive in the metal cap 8 and at the center of one main surface of the substrate 3. Further, the semiconductor element 9 has two bonding wires 10 on two lands 4.
Are electrically connected. In the high frequency electronic component package 2, a ground electrode 11 is formed on the other main surface of the substrate 3.

【0003】[0003]

【発明が解決しようとする課題】図11に示す高周波電
子部品1では、引出し電極5と接地電極11との間に電
気容量C1 が生じるとともに、引出し電極5と金属キャ
ップ8との間に電気容量C2 が生じ、図12に等価回路
図を示すように、その電気容量C2 によって、側面電極
7間ないしは入出力端子間に帰還が生じ、半導体素子9
の高周波領域での動作が不安定になる。具体例として、
図11に示す構造の高周波電子部品用パッケージに半導
体素子(増幅器)およびフィルタを直列接続で搭載した
高周波電子部品の反射特性および利得特性を図13のグ
ラフおよび図14のグラフに示す。図13のグラフおよ
び図14のグラフに示すように、その高周波電子部品で
は、出力端の反射が大きく、利得が高くなっており、回
路動作が不安定であり、発振する可能性がある。
In the high frequency electronic component 1 shown in FIG. 11 [0006], with the capacitance C 1 is formed between the lead-out electrode 5 and the ground electrode 11, electricity between the extraction electrode 5 and the metal cap 8 capacitance C 2 is generated, as shown in the equivalent circuit diagram in FIG. 12, by the capacitance C 2, feedback occurs between between the side electrode 7 or input and output terminals, the semiconductor element 9
Operation in the high frequency range becomes unstable. As a specific example,
The graphs of FIGS. 13 and 14 show the reflection characteristics and gain characteristics of a high-frequency electronic component in which a semiconductor element (amplifier) and a filter are mounted in series on a high-frequency electronic component package having the structure shown in FIG. As shown in the graphs of FIG. 13 and FIG. 14, in the high-frequency electronic component, the reflection at the output end is large, the gain is high, the circuit operation is unstable, and oscillation may occur.

【0004】それゆえに、この発明の主たる目的は、引
出し電極と金属キャップとの間の電気容量による回路機
能への悪影響を抑制した高周波電子部品用パッケージを
提供することである。この発明の他の目的は、引出し電
極と金属キャップとの間の電気容量による回路機能への
悪影響を抑制した高周波電子部品用パッケージを用いた
高周波電子部品を提供することである。
[0004] Therefore, a main object of the present invention is to provide a high-frequency electronic component package in which an adverse effect on the circuit function due to the electric capacitance between the extraction electrode and the metal cap is suppressed. Another object of the present invention is to provide a high-frequency electronic component using a high-frequency electronic component package in which an adverse effect on a circuit function due to a capacitance between an extraction electrode and a metal cap is suppressed.

【0005】[0005]

【課題を解決するための手段】この発明にかかる高周波
電子部品用パッケージは、基板と、基板の一方主面に形
成されるランドと、基板の一方主面においてランドの周
囲に形成される接地電極と、基板において一方主面以外
に形成され、ランドに電気的に接続される引出し電極
と、引出し電極に電気的に接続される入出力端子と、接
地電極に電気的かつ機械的に接続される金属キャップと
を含む、高周波電子部品用パッケージである。この発明
にかかる高周波電子部品用パッケージでは、たとえば、
入出力端子の近傍において金属キャップが接地電極に電
気的に接続される。また、この発明にかかる高周波電子
部品用パッケージでは、基板は多層構造に形成され、引
出し電極は基板の内部に形成されてもよい。さらに、こ
の発明にかかる高周波電子部品用パッケージでは、接地
電極の表面に部分的に絶縁層が形成されてもよい。この
発明にかかる高周波電子部品は、この発明にかかる高周
波電子部品用パッケージと、基板の一方主面に接着さ
れ、ランドに電気的に接続される高周波電子部品素子と
を含む、高周波電子部品である。
A package for a high-frequency electronic component according to the present invention comprises a substrate, a land formed on one main surface of the substrate, and a ground electrode formed around the land on one main surface of the substrate. And an extraction electrode formed on the substrate other than the one main surface and electrically connected to the land, an input / output terminal electrically connected to the extraction electrode, and electrically and mechanically connected to the ground electrode. This is a package for a high-frequency electronic component including a metal cap. In the high-frequency electronic component package according to the present invention, for example,
A metal cap is electrically connected to the ground electrode near the input / output terminal. In the high-frequency electronic component package according to the present invention, the substrate may be formed in a multilayer structure, and the extraction electrode may be formed inside the substrate. Furthermore, in the high-frequency electronic component package according to the present invention, the insulating layer may be partially formed on the surface of the ground electrode. A high-frequency electronic component according to the present invention is a high-frequency electronic component including the high-frequency electronic component package according to the present invention and a high-frequency electronic component element adhered to one main surface of a substrate and electrically connected to a land. .

【0006】この発明にかかる高周波電子部品用パッケ
ージおよび高周波電子部品では、従来の高周波電子部品
用パッケージおよび高周波電子部品と同様に、引出し電
極と金属キャップとの間に電気容量が生じる場合があ
る。しかしながら、この発明にかかる高周波電子部品用
パッケージおよび高周波電子部品では、基板の一方主面
において引出し電極の上方に接地電極が形成され、この
接地電極上に金属キャップが搭載されこの接地電極と電
気的に接続されているので、そのような電気容量による
回路機能への悪影響が抑制される。
In the high-frequency electronic component package and the high-frequency electronic component according to the present invention, similarly to the conventional high-frequency electronic component package and the high-frequency electronic component, an electric capacity may be generated between the extraction electrode and the metal cap. However, in the high-frequency electronic component package and the high-frequency electronic component according to the present invention, a ground electrode is formed above the lead electrode on one main surface of the substrate, and a metal cap is mounted on the ground electrode to electrically connect the ground electrode. , The adverse effect on the circuit function due to such capacitance is suppressed.

【0007】この発明の上述の目的、その他の目的、特
徴および利点は、図面を参照して行う以下の発明の実施
の形態の詳細な説明から一層明らかとなろう。
The above and other objects, features and advantages of the present invention will become more apparent from the following detailed description of embodiments of the present invention with reference to the accompanying drawings.

【0008】[0008]

【発明の実施の形態】図1はこの発明にかかる高周波電
子部品の一例を示す分解斜視図であり、図2はその高周
波電子部品の図解図であり、図3はその高周波電子部品
の底面図である。図1に示す高周波電子部品20は高周
波電子部品用パッケージ22を含む。
FIG. 1 is an exploded perspective view showing an example of a high-frequency electronic component according to the present invention, FIG. 2 is an illustrative view of the high-frequency electronic component, and FIG. 3 is a bottom view of the high-frequency electronic component. It is. The high-frequency electronic component 20 shown in FIG. 1 includes a high-frequency electronic component package 22.

【0009】高周波電子部品用パッケージ22は、たと
えばアルミナからなる矩形板状の基板24を含む。
The high-frequency electronic component package 22 includes a rectangular plate-like substrate 24 made of, for example, alumina.

【0010】基板24の一方主面には、たとえば矩形状
の2つのランド26および2つのランド27が間隔を隔
てて形成される。さらに、基板24の一方主面には、そ
れらのランド26および27の周囲に、たとえば4角枠
状の接地電極28が形成される。接地電極28は、後述
の金属キャップ38の肉厚と同程度のたとえば0.30
mm〜0.45mmの幅で形成される。
On one main surface of the substrate 24, for example, two rectangular lands 26 and two lands 27 are formed at an interval. Further, on one main surface of substrate 24, for example, a square frame-shaped ground electrode 28 is formed around lands 26 and 27. The ground electrode 28 has a thickness of, for example, 0.30
mm to 0.45 mm.

【0011】基板24の他方主面には、2つのランド2
6および2つのランド27に対応する4つの部分から4
端部分にわたって、2つの引出し電極30および2つの
引出し電極31がそれぞれ形成される。さらに、基板2
4の他方主面には、引出し電極30および31から間隔
を隔てて引出し電極30および31の周囲に、接地電極
32が形成される。
On the other main surface of the substrate 24, two lands 2
4 from 4 parts corresponding to 6 and 2 lands 27
Two extraction electrodes 30 and two extraction electrodes 31 are respectively formed over the end portions. Further, the substrate 2
A ground electrode 32 is formed on the other main surface of the electrode 4 around the extraction electrodes 30 and 31 at an interval from the extraction electrodes 30 and 31.

【0012】基板24には、複数のビアホール34が形
成される。これらのビアホール34によって、2つのラ
ンド26が2つの引出し電極30にそれぞれ電気的に接
続され、2つのランド27が2つの引出し電極31にそ
れぞれ電気的に接続され、接地電極28が接地電極32
に電気的に接続される。
A plurality of via holes 34 are formed in the substrate 24. These via holes 34 electrically connect the two lands 26 to the two extraction electrodes 30, respectively, electrically connect the two lands 27 to the two extraction electrodes 31, and connect the ground electrode 28 to the ground electrode 32.
Is electrically connected to

【0013】基板24の側面には、複数の側面電極36
が形成される。これらの側面電極36のうちの2つのも
のは、入出力端子として2つの引出し電極30にそれぞ
れ電気的に接続され、これらの側面電極36のうちの他
の2つのものは、電源用端子として2つの引出し電極3
1にそれぞれ電気的に接続され、これらの側面電極36
のうちの残りのものは、接地端子として接地電極32に
電気的に接続される。
A plurality of side electrodes 36 are provided on the side of the substrate 24.
Is formed. Two of these side electrodes 36 are electrically connected to the two extraction electrodes 30 as input / output terminals, respectively, and the other two of these side electrodes 36 are used as power supply terminals. Extraction electrodes 3
1 are electrically connected to the side electrodes 36, respectively.
The rest are electrically connected to the ground electrode 32 as ground terminals.

【0014】基板24の一方主面には、たとえば肉厚
0.15mmの金属キャップ38が、4つのランド26
および27などを覆うようにして、接地電極28に導電
性接着剤などの導電材で電気的に接続されかつ樹脂接着
剤で機械的に接続される。この場合、金属キャップ38
は、接地電極28の接地用のビアホール34が形成され
ている部分およびその周辺部分40において導電性接着
剤などの導電材で接着されることによって接地され、接
地電極28のその他の部分において樹脂接着剤で接着さ
れる。
On one main surface of the substrate 24, for example, a metal cap 38 having a thickness of 0.15 mm is provided with four lands 26.
Are electrically connected to the ground electrode 28 with a conductive material such as a conductive adhesive, and are mechanically connected with a resin adhesive so as to cover the ground electrode 27 and the like. In this case, the metal cap 38
Is grounded by bonding with a conductive material such as a conductive adhesive at a portion of the ground electrode 28 where the via hole 34 for grounding is formed and a peripheral portion 40 thereof, and is resin-bonded at other portions of the ground electrode 28. Adhesive.

【0015】この高周波電子部品用パッケージ22に
は、金属キャップ38の中であって基板24の一方主面
の中央に、高周波電子部品素子としての半導体素子(増
幅器)42が接着剤で接着される。また、半導体素子4
2は、2つのランド26および1つのランド27にボン
ディングワイヤ44でそれぞれ電気的に接続される。
A semiconductor device (amplifier) 42 as a high-frequency electronic component element is bonded to the high-frequency electronic component package 22 with an adhesive in the center of one main surface of the substrate 24 in the metal cap 38. . In addition, the semiconductor element 4
2 is electrically connected to two lands 26 and one land 27 by bonding wires 44, respectively.

【0016】図1に示す高周波電子部品20では、図1
1に示す従来の高周波電子部品1と同様に、引出し電極
30と接地電極32との間に電気容量C3 が生じるとと
もに、引出し電極30と接地電極28との間に電気容量
4 が生じ、引出し電極30と金属キャップ38との間
に電気容量C5 が生じる。しかしながら、この高周波電
子部品20では、基板24の一方主面において引出し電
極30の上方に接地電極28が形成され、この接地電極
28上に金属キャップ38が搭載され接地電極28と電
気的に接続されているので、図4に等価回路図を示すよ
うに、そのような電気容量C5 による回路機能への悪影
響が抑制される。すなわち、その電気容量C5 が極端に
小さくなるため、側面電極36間ないしは入出力端子間
に帰還が生じにくく、半導体素子42の高周波領域での
動作が安定になる。具体例として、図1に示す構造の高
周波電子部品用パッケージに半導体素子(増幅器)およ
びフィルタを直列接続で搭載した高周波電子部品の反射
特性および利得特性を図5のグラフおよび図6のグラフ
に示す。図5のグラフおよび図6のグラフに示すよう
に、その高周波電子部品では、出力端の反射が小さく、
利得の異常はみられず、しかも、回路動作が安定してお
り、発振する可能性は低い。
In the high-frequency electronic component 20 shown in FIG.
1, a capacitance C 3 is generated between the extraction electrode 30 and the ground electrode 32, and a capacitance C 4 is generated between the extraction electrode 30 and the ground electrode 28. electric capacity C 5 between the extraction electrode 30 and the metal cap 38 occurs. However, in the high-frequency electronic component 20, a ground electrode 28 is formed above the extraction electrode 30 on one main surface of the substrate 24, and a metal cap 38 is mounted on the ground electrode 28 and is electrically connected to the ground electrode 28. since it has, as an equivalent circuit diagram in FIG. 4, adverse effects on such electrical capacitance C 5 by the circuit function is suppressed. That is, since the capacitance C 5 is extremely small, the feedback hardly occurs between the between the side electrode 36 or input-output terminal, operating in a high frequency range of the semiconductor element 42 is stabilized. As a specific example, the graphs of FIGS. 5 and 6 show the reflection characteristics and gain characteristics of a high-frequency electronic component in which a semiconductor element (amplifier) and a filter are mounted in series on a high-frequency electronic component package having the structure shown in FIG. . As shown in the graphs of FIG. 5 and FIG. 6, in the high-frequency electronic component, the reflection at the output end is small,
No abnormal gain is observed, the circuit operation is stable, and the possibility of oscillation is low.

【0017】また、図1に示す高周波電子部品20で
は、金属キャップ38内の半導体素子42を含む回路に
対するシールド性を保つことができる。
Further, in the high-frequency electronic component 20 shown in FIG. 1, it is possible to maintain a shielding property for a circuit including the semiconductor element 42 in the metal cap 38.

【0018】図7はこの発明にかかる高周波電子部品の
他の例を示す要部平面図解図である。図7に示す高周波
電子部品20は、図1に示す高周波電子部品20と比べ
て、接地電極28が部分的に除去され複数に分割され、
各接地電極28がビアホール34によって接地電極32
に電気的に接続される。ただし、引出し電極30の上方
には、接地電極28が形成されている。また、金属キャ
ップ38は、接地電極28および基板24の表面に接着
される。通常、基板24上のランド26、27や接地電
極28には、ボンディングワイヤ用に金メッキ処理がさ
れる。そのような場合、図1に示す高周波電子部品20
では、接地電極28上の金メッキ層と接着剤との接合強
度が弱い場合がある。それに対して、図7に示す高周波
電子部品20では、接地電極28が部分的に除去されて
いるので、金属キャップ38を金メッキ層に接着する部
分が縮小され、金属キャップ38の接着強度を向上させ
ることができる。なお、図7に示す高周波電子部品20
でも、図1に示す高周波電子部品20と同様の作用効果
を奏する。
FIG. 7 is a schematic plan view showing another example of the high-frequency electronic component according to the present invention. The high-frequency electronic component 20 shown in FIG. 7 is divided into a plurality of parts, in which the ground electrode 28 is partially removed, as compared with the high-frequency electronic component 20 shown in FIG.
Each ground electrode 28 is connected to a ground electrode 32 by a via hole 34.
Is electrically connected to However, a ground electrode 28 is formed above the extraction electrode 30. The metal cap 38 is adhered to the ground electrode 28 and the surface of the substrate 24. Usually, the lands 26 and 27 and the ground electrode 28 on the substrate 24 are plated with gold for bonding wires. In such a case, the high-frequency electronic component 20 shown in FIG.
In this case, the bonding strength between the gold plating layer on the ground electrode 28 and the adhesive may be weak. On the other hand, in the high-frequency electronic component 20 shown in FIG. 7, since the ground electrode 28 is partially removed, the portion where the metal cap 38 is bonded to the gold plating layer is reduced, and the bonding strength of the metal cap 38 is improved. be able to. The high-frequency electronic component 20 shown in FIG.
However, the same operation and effect as those of the high-frequency electronic component 20 shown in FIG.

【0019】図8はこの発明にかかる高周波電子部品の
さらに他の例を示す図解図である。図8に示す高周波電
子部品20は、図1に示す高周波電子部品20と比べ
て、基板24が2層構造に形成され、2つの引出し電極
30が基板24の内部に形成されている。図8に示す高
周波電子部品20では、図1に示す高周波電子部品20
と比べて、引出し電極30が基板24の内部に形成され
ているので、信号の伝送特性がこの高周波電子部品20
をはんだ付けする実装基板(プリント基板)の誘電率や
表面実装時の部品の高さなどの影響を受けにくくなると
いう別の作用効果も奏する。
FIG. 8 is an illustrative view showing still another example of the high-frequency electronic component according to the present invention. The high-frequency electronic component 20 shown in FIG. 8 is different from the high-frequency electronic component 20 shown in FIG. 1 in that the substrate 24 has a two-layer structure, and two extraction electrodes 30 are formed inside the substrate 24. The high-frequency electronic component 20 shown in FIG.
Since the extraction electrode 30 is formed inside the substrate 24, the signal transmission characteristics
Another effect is that it is less affected by the dielectric constant of the mounting substrate (printed circuit board) to which the semiconductor device is to be soldered and the height of the components during surface mounting.

【0020】図9はこの発明にかかる高周波電子部品の
さらに他の例を示す図解図である。図9に示す高周波電
子部品20は、図1に示す高周波電子部品20と比べ
て、接地電極28の表面において、ビアホール34が形
成されている部分とその周辺部分40とを除く部分に、
すなわち、金属キャップ38を接地する個所以外に、絶
縁材からなる絶縁層46が形成されている。図9に示す
高周波電子部品20では、図1に示す高周波電子部品2
0と比べて、接地電極28の表面全面に金メッキが施さ
れていたとしても、金属キャップ38を金メッキ層に直
接接着する部分が縮小され、金属キャップ38の接着強
度を向上することができるという別の作用効果も奏す
る。
FIG. 9 is an illustrative view showing still another example of the high-frequency electronic component according to the present invention. The high-frequency electronic component 20 shown in FIG. 9 is different from the high-frequency electronic component 20 shown in FIG. 1 in that the portion of the surface of the ground electrode 28 except for the portion where the via hole 34 is formed and its peripheral portion 40 is provided.
That is, an insulating layer 46 made of an insulating material is formed at a place other than the place where the metal cap 38 is grounded. The high-frequency electronic component 20 shown in FIG.
Compared to 0, even if the entire surface of the ground electrode 28 is gold-plated, the portion where the metal cap 38 is directly bonded to the gold plating layer is reduced, and the bonding strength of the metal cap 38 can be improved. It also has the function and effect.

【0021】図10はこの発明にかかる高周波電子部品
のさらに他の例を示す図解図である。図10に示す高周
波電子部品20は、図1に示す高周波電子部品20と比
べて、側面電極36が形成される代わりに、引出し電極
30、31および接地電極32の表面に、入出力端子、
電源用端子および接地端子として複数のボール状電極4
8が形成される。図10に示す高周波電子部品20は、
図1に示す高周波電子部品20と比べて、側面電極36
をボール状電極48に変えることによって、小型化を図
ることもできるという別の作用効果も奏する。
FIG. 10 is an illustrative view showing still another example of the high-frequency electronic component according to the present invention. The high-frequency electronic component 20 shown in FIG. 10 is different from the high-frequency electronic component 20 shown in FIG. 1 in that instead of forming the side electrode 36, input / output terminals,
A plurality of ball-shaped electrodes 4 as a power supply terminal and a ground terminal
8 are formed. The high-frequency electronic component 20 shown in FIG.
Compared to the high-frequency electronic component 20 shown in FIG.
By changing to the ball-shaped electrode 48, another operation and effect that the size can be reduced can be obtained.

【0022】なお、上述の各高周波電子部品20では基
板24が1層または2層構造に形成されているが、基板
24は1層または2層構造に限らず3層以上の多層構造
に形成されてもよい。
In each of the high-frequency electronic components 20 described above, the substrate 24 is formed in a one-layer or two-layer structure. However, the substrate 24 is not limited to a one-layer or two-layer structure, but is formed in a three-layer or more multilayer structure. You may.

【0023】さらに、基板24、ランド26、27およ
び接地電極28などの形状も任意に変更されてもよい。
Further, the shapes of the substrate 24, the lands 26 and 27, and the ground electrode 28 may be arbitrarily changed.

【0024】また、金属キャップ38の接着部分に樹脂
接着剤を用いない形態としては、主として次の2つの形
態があるが、それぞれ次のような問題点がある。 1.ろう材、はんだ材で接合 接合温度が高く、熱に弱い半導体素子を含む場合には不
向きである。 2.溶接による接合 高周波電子部品用パッケージの上面に特定の金属(金属
キャップの材質と相性のよい金属)によるシームリング
を設ける必要があり、製造コストが高価であり、低価格
化に対応できない。それに対して、比較的低温で硬化
し、量産性がよく、低コストである樹脂接着剤が用いら
れると、高周波電子部品にとって有利である。
There are mainly two types of modes in which a resin adhesive is not used for the bonding portion of the metal cap 38, but each has the following problems. 1. Joining with brazing or soldering materials Not suitable for semiconductor devices that have a high joining temperature and are vulnerable to heat. 2. Joining by welding It is necessary to provide a seam ring made of a specific metal (a metal compatible with the material of the metal cap) on the upper surface of the high-frequency electronic component package, so that the manufacturing cost is high and it is not possible to cope with a reduction in price. On the other hand, if a resin adhesive that cures at a relatively low temperature, has good mass productivity, and is inexpensive is used, it is advantageous for high-frequency electronic components.

【0025】[0025]

【発明の効果】この発明によれば、引出し電極と金属キ
ャップとの間の電気容量による回路機能への悪影響を抑
制した高周波電子部品用パッケージが得られる。さら
に、この発明によれば、引出し電極と金属キャップとの
間の電気容量による回路機能への悪影響を抑制した高周
波電子部品用パッケージを用いた高周波電子部品が得ら
れる。
According to the present invention, it is possible to obtain a high-frequency electronic component package in which an adverse effect on the circuit function due to the electric capacitance between the extraction electrode and the metal cap is suppressed. Further, according to the present invention, it is possible to obtain a high-frequency electronic component using a high-frequency electronic component package in which an adverse effect on a circuit function due to a capacitance between an extraction electrode and a metal cap is suppressed.

【図面の簡単な説明】[Brief description of the drawings]

【図1】この発明にかかる高周波電子部品の一例を示す
分解斜視図である。
FIG. 1 is an exploded perspective view showing an example of a high-frequency electronic component according to the present invention.

【図2】図1に示す高周波電子部品の図解図である。FIG. 2 is an illustrative view of the high-frequency electronic component shown in FIG. 1;

【図3】図1に示す高周波電子部品の底面図である。FIG. 3 is a bottom view of the high-frequency electronic component shown in FIG.

【図4】図1に示す高周波電子部品の等価回路図であ
る。
FIG. 4 is an equivalent circuit diagram of the high-frequency electronic component shown in FIG.

【図5】図1に示す構造の高周波電子部品用パッケージ
に半導体素子(増幅器)およびフィルタを直列接続で搭
載した高周波電子部品の反射特性を示すグラフである。
FIG. 5 is a graph showing reflection characteristics of a high-frequency electronic component in which a semiconductor element (amplifier) and a filter are mounted in series on the high-frequency electronic component package having the structure shown in FIG.

【図6】図1に示す構造の高周波電子部品用パッケージ
に半導体素子(増幅器)およびフィルタを直列接続で搭
載した高周波電子部品の利得特性を示すグラフである。
6 is a graph showing a gain characteristic of a high-frequency electronic component in which a semiconductor element (amplifier) and a filter are mounted in series on a high-frequency electronic component package having the structure shown in FIG.

【図7】この発明にかかる高周波電子部品の他の例を示
す要部平面図解図である。
FIG. 7 is an illustrative plan view of a relevant part showing another example of the high-frequency electronic component according to the present invention.

【図8】この発明にかかる高周波電子部品のさらに他の
例を示す図解図である。
FIG. 8 is an illustrative view showing still another example of the high-frequency electronic component according to the present invention;

【図9】この発明にかかる高周波電子部品のさらに他の
例を示す図解図である。
FIG. 9 is an illustrative view showing still another example of the high-frequency electronic component according to the present invention;

【図10】この発明にかかる高周波電子部品のさらに他
の例を示す図解図である。
FIG. 10 is an illustrative view showing still another example of the high-frequency electronic component according to the present invention;

【図11】従来の高周波電子部品の一例を示す図解図で
ある。
FIG. 11 is an illustrative view showing one example of a conventional high-frequency electronic component;

【図12】図11に示す高周波電子部品の等価回路図で
ある。
FIG. 12 is an equivalent circuit diagram of the high-frequency electronic component shown in FIG.

【図13】図11に示す構造の高周波電子部品用パッケ
ージに半導体素子(増幅器)およびフィルタを直列接続
で搭載した高周波電子部品の反射特性を示すグラフであ
る。
13 is a graph showing reflection characteristics of a high-frequency electronic component in which a semiconductor element (amplifier) and a filter are mounted in series on a high-frequency electronic component package having the structure shown in FIG.

【図14】図11に示す構造の高周波電子部品用パッケ
ージに半導体素子(増幅器)およびフィルタを直列接続
で搭載した高周波電子部品の利得特性を示すグラフであ
る。
14 is a graph showing gain characteristics of a high-frequency electronic component in which a semiconductor element (amplifier) and a filter are mounted in series on a high-frequency electronic component package having the structure shown in FIG.

【符号の説明】 20 高周波電子部品 22 高周波電子部品用パッケージ 24 基板 26、27 ランド 28 接地電極 30、31 引出し電極 32 接地電極 34 ビアホール 36 側面電極(入出力端子、接地端子) 38 金属キャップ 40 周辺部分 42 半導体素子 44、45 ボンディングワイヤ 46 絶縁層 48 ボール状電極(入出力端子、接地端子)[Description of Signs] 20 High-frequency electronic component 22 High-frequency electronic component package 24 Substrate 26, 27 Land 28 Ground electrode 30, 31 Leader electrode 32 Ground electrode 34 Via hole 36 Side electrode (input / output terminal, ground terminal) 38 Metal cap 40 Peripheral Part 42 Semiconductor element 44, 45 Bonding wire 46 Insulating layer 48 Ball-shaped electrode (input / output terminal, ground terminal)

Claims (5)

【特許請求の範囲】[Claims] 【請求項1】 基板、 前記基板の一方主面に形成されるランド、 前記基板の一方主面において前記ランドの周囲に形成さ
れる接地電極、 前記基板において一方主面以外に形成され、前記ランド
に電気的に接続される引出し電極、 前記引出し電極に電気的に接続される入出力端子、およ
び前記接地電極に電気的かつ機械的に接続される金属キ
ャップを含む、高周波電子部品用パッケージ。
A substrate, a land formed on one main surface of the substrate, a ground electrode formed around the land on one main surface of the substrate, and a land formed on the substrate other than the one main surface. A lead electrode electrically connected to the lead electrode; an input / output terminal electrically connected to the lead electrode; and a metal cap electrically and mechanically connected to the ground electrode.
【請求項2】 前記入出力端子の近傍において前記金属
キャップが前記接地電極に電気的に接続される、請求項
1に記載の高周波電子部品用パッケージ。
2. The high-frequency electronic component package according to claim 1, wherein the metal cap is electrically connected to the ground electrode near the input / output terminal.
【請求項3】 前記基板は多層構造に形成され、 前記引出し電極は前記基板の内部に形成される、請求項
1または請求項2に記載の電子部品用パッケージ。
3. The electronic component package according to claim 1, wherein the substrate is formed in a multilayer structure, and the lead electrode is formed inside the substrate.
【請求項4】 前記接地電極の表面に部分的に絶縁層が
形成される、請求項1ないし請求項3のいずれかに記載
の高周波電子部品用パッケージ。
4. The high-frequency electronic component package according to claim 1, wherein an insulating layer is partially formed on a surface of the ground electrode.
【請求項5】 請求項1ないし請求項4のいずれかに記
載の高周波電子部品用パッケージ、および前記基板の一
方主面に接着され、前記ランドに電気的に接続される高
周波電子部品素子を含む、高周波電子部品。
5. The high-frequency electronic component package according to claim 1, further comprising: a high-frequency electronic component element adhered to one main surface of the substrate and electrically connected to the land. , High frequency electronic components.
JP2000325908A 2000-10-25 2000-10-25 Package for high freaquency electronic component and high freaquency electronic component using it Pending JP2002134639A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
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Publication Number Publication Date
JP2002134639A true JP2002134639A (en) 2002-05-10

Family

ID=18803196

Family Applications (1)

Application Number Title Priority Date Filing Date
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Country Link
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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006511071A (en) * 2002-12-20 2006-03-30 テールズ Microwave package with surface mounting and corresponding mounting body with multilayer circuit
WO2010001503A1 (en) 2008-07-01 2010-01-07 オムロン株式会社 Electronic component
JP2010129967A (en) * 2008-12-01 2010-06-10 Alps Electric Co Ltd Electronic circuit module
KR100986470B1 (en) 2003-06-27 2010-10-08 엘지이노텍 주식회사 Ceramic Package
WO2011013508A1 (en) * 2009-07-28 2011-02-03 株式会社 村田製作所 Electronic component

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006511071A (en) * 2002-12-20 2006-03-30 テールズ Microwave package with surface mounting and corresponding mounting body with multilayer circuit
KR100986470B1 (en) 2003-06-27 2010-10-08 엘지이노텍 주식회사 Ceramic Package
WO2010001503A1 (en) 2008-07-01 2010-01-07 オムロン株式会社 Electronic component
JP2010016030A (en) * 2008-07-01 2010-01-21 Omron Corp Electronic component
KR101101562B1 (en) * 2008-07-01 2012-01-02 오므론 가부시키가이샤 Electronic component
US8314485B2 (en) 2008-07-01 2012-11-20 Omron Corporation Electronic component
JP2010129967A (en) * 2008-12-01 2010-06-10 Alps Electric Co Ltd Electronic circuit module
WO2011013508A1 (en) * 2009-07-28 2011-02-03 株式会社 村田製作所 Electronic component
CN102473687A (en) * 2009-07-28 2012-05-23 株式会社村田制作所 Electronic component
JP5527623B2 (en) * 2009-07-28 2014-06-18 株式会社村田製作所 Electronic components
US8791369B2 (en) 2009-07-28 2014-07-29 Murata Manufacturing Co., Ltd. Electronic component
CN102473687B (en) * 2009-07-28 2015-05-20 株式会社村田制作所 Electronic component

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