JP2002090712A - Method for manufacturing liquid crystal display device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display device bringing about no influence on patterning accuracy of electrodes, wiring and elements formed on a transparent substrate due to heat or moisture in the liquid crystal display device using the transparent substrate made of a transparent resin. SOLUTION: A transparent electrode film consisting of ITO(indium tin oxide), etc., is laminated on a glass substrate 201 with sputtering, etc., and is patterned to form stripe-shaped electrodes 202. Thereon a gas barrier 203 composed of SiO2, etc., is laminated and successively thereon an acrylic or epoxy transparent resin layer to be made into the transparent substrate (plastics substrate) 204 is laminated. Subsequently a simple matrix substrate 20 is obtained by etching and removing the glass substrate 201 with an etchant (acid), for example a mixture of HF and HNO3 in 1:20 ratio.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing a liquid crystal display device.

[0002]

2. Description of the Related Art In recent years, liquid crystal display devices have been characterized by low power consumption, thinness and light weight.
It is used for display applications such as word processors, office automation terminal displays, and televisions. In particular, it is considered that a liquid crystal display device for a portable information terminal will be frequently used in the future. Liquid crystal display for portable information terminals 1
One is mobile phones, which are expected to grow to hundreds of millions in the past few years.

[0003] At present, mobile phones use a glass material as a substrate of a liquid crystal display panel, and display colors are black and white, and still images are mainly used. Therefore, if the substrate of the display panel is a plastic (resin) material,
For now it's a little. However, in the future, colorization,
It is expected that animation and weight reduction will progress, and it is expected that color animation-compatible liquid crystal display panels using plastic materials will be mass-produced.

FIG. 5 shows a conventional liquid crystal display device using a plastic material for a substrate. FIG.
FIG. 1 is a view showing a liquid crystal display device 10 disclosed in the prior art of Japanese Patent Application Laid-Open No. H10-209,878. The structure and manufacturing method will be described below.

[0005] As shown in FIG.
A pair of acrylic (or epoxy) sandwiching the liquid crystal 110
A plastic substrate 103 is provided. Each plastic
Both sides of stick substrate (thickness 0.1-0.5mm) 103
Then, by dip and baking, organosilane-based,
Organics such as acrylic, melamine or urethane
Hard coat (thickness 2 to 6 μm) 102 made of resin
104 are provided. The hard coat 1
04 on the liquid crystal side by sputtering evaporation. _XConsisting of
Undercoat (thickness 100 to 600 mm) 105,
An ITO electrode 106 made of tin-doped indium oxide is sequentially
Provided. On this liquid crystal side, a known method is used.
A top coat (upside protection) for protecting the ITO electrode 106
Protective film) 107 and an alignment film 108 for aligning the liquid crystal 110
Is provided. Incidentally, 109 seals the liquid crystal 110.
A sealing material 101 indicates a polarizing plate.

Japanese Patent Application Laid-Open No. 10-177187 discloses that a separation layer and a liquid crystal drive electrode are formed in this order on an original substrate (for example, a glass substrate), and a transfer body is formed thereon via an adhesive. A technique has been disclosed in which a plastic substrate is bonded, and then a laser is radiated from the back surface of the original substrate to cause separation in the separation layer and separate the original substrate (hereinafter, referred to as a transfer technology).

[0007]

As a liquid crystal display device using the above-mentioned plastic material as a substrate, a black-and-white display simple matrix type liquid crystal display device is currently mass-produced. However, plastic is easily expanded and contracted by moisture and heat, so that it is difficult to produce an accurate display device. That is, since the opposing plastic substrates have the same dimensions before bonding, it is necessary to use a difficult technique for controlling the amount of expansion and contraction in order to produce an accurate display device.

[0008] In the future, it is considered that the liquid crystal display device for portable telephones compatible with color moving images will become mainstream. As a liquid crystal display device for moving images, a liquid crystal display device using a two-terminal non-linear element or a three-terminal element as a switching element can be considered. In a liquid crystal display device using a two-terminal nonlinear element, a lower electrode and an upper electrode of a two-terminal nonlinear element are superposed on a pixel electrode, which is not available in a simple matrix liquid crystal display device. The technology which controls a high precision is needed. In a liquid crystal display device using a three-terminal element, a high-temperature process of 200 ° C. or more is generally performed in a manufacturing process. Therefore, since the substrate is greatly damaged by heat, it is impossible to form an element on a plastic substrate. In addition, the liquid crystal display device for color display has the same color filter layers (R (Red), G (Green),
B (Blue), BM (Black Matrix)) and pixel electrodes (IT
O). For this reason, a technique for controlling the amount of expansion and contraction of the substrate with high accuracy is required. The amount of expansion and contraction of the substrate described above varies greatly depending on the presence or absence of moisture, so that it is difficult to control it. A technique for controlling the expansion and contraction of the substrate has not yet been established.

In order to solve these problems, it is considered that a transfer technique as disclosed in the above-mentioned Japanese Patent Application Laid-Open No. H10-177187 is effective. However, in Japanese Patent Application Laid-Open No. Hei 10-177187, irradiating a substrate with a laser has an effect on the characteristics of an element formed on the substrate. In addition, in order to perform laser irradiation, the original substrate on which the separation layer and the liquid crystal drive electrode are formed needs to be transparent. For this reason, materials that can be used as the substrate are limited. In addition, since laser irradiation conditions are not established in the step of separating the separation layer, there is a problem that separation is not performed well and the yield rate is low.

An object of the present invention is to provide a liquid crystal display device using a transparent substrate made of a transparent resin, in which the accuracy of patterns of electrodes, wirings, elements, color filters and the like formed on the transparent substrate is affected by heat and moisture. The object of the present invention is to provide a method for manufacturing a liquid crystal display device.

[0011]

According to the present invention, there is provided a liquid crystal layer and a pair of transparent substrates opposed to each other with the liquid crystal layer interposed therebetween. In a method for manufacturing a liquid crystal display device having an electrode layer to which a voltage is applied for driving, a first step of forming an electrode layer on a first substrate, and forming a transparent resin layer to be a transparent substrate on the electrode layer A method for manufacturing a liquid crystal display device, comprising a second step and a third step of removing the first substrate by etching.

According to the present invention, even if the transparent resin layer serving as the transparent substrate has the property of expanding and contracting with respect to moisture and heat, the first substrate does not expand and contract with respect to moisture and heat. With the characteristics, the pattern of the electrode layer can be patterned with high accuracy, and the accuracy of the superposition of the electrode layers can be improved in the step of bonding the opposing transparent substrates.

Since the first substrate is removed by etching, it can be easily removed, and either a transparent substrate or an opaque substrate may be used. For this reason, the selection range of the material used for the first substrate is increased, so that a less expensive material can be used.

According to the present invention, there is provided a liquid crystal layer and a pair of transparent substrates disposed to face each other with the liquid crystal layer interposed therebetween. Wiring for applying a voltage to each pixel electrode, and 2
A method for manufacturing a liquid crystal display device having a terminal non-linear element and a stripe-shaped counter electrode on the liquid crystal layer side surface of the other substrate, wherein a pixel electrode is provided on the first substrate and a voltage is applied to each pixel electrode. A first step of forming a wiring and a two-terminal nonlinear element, a second step of forming a transparent resin layer to be a transparent substrate on the pixel electrode, the wiring and the two-terminal nonlinear element, and removing the first substrate by etching And a third step of manufacturing the liquid crystal display device.

According to the present invention, even if the transparent resin layer serving as the transparent substrate has the property of expanding and contracting with respect to moisture and heat, the first substrate does not expand and contract with respect to moisture and heat. With the characteristics, the pattern of the pixel electrode, the wiring, and the pattern of the two-terminal nonlinear element can be patterned with high accuracy, and the accuracy of the superposition of the pixel electrodes can be improved in the step of bonding the opposing transparent substrates.

Further, since the first substrate is removed by etching, it can be easily removed, and either a transparent substrate or an opaque substrate may be used. For this reason, the selection range of the material used for the first substrate is increased, so that a less expensive material can be used.

The present invention also includes a liquid crystal layer and a pair of transparent substrates opposed to each other with the liquid crystal layer interposed therebetween. One of the pair of transparent substrates has a pixel electrode on a surface of the liquid crystal layer side. Wiring for applying a voltage to each pixel electrode and 3
In a method for manufacturing a liquid crystal display device having a terminal element and a counter electrode on the surface of the other substrate on the liquid crystal layer side, a pixel electrode on a first substrate, a wiring for applying a voltage to each pixel electrode, and 3 A first step of forming a terminal element, a second step of forming a transparent resin layer to be a transparent substrate on the pixel electrode, the wiring and the three-terminal element, and a third step of removing the first substrate by etching. A method for manufacturing a liquid crystal display device, comprising:

According to the present invention, even if the transparent resin layer has the property of expanding and contracting with respect to moisture and heat, the first substrate may have the property of not expanding and contracting with respect to moisture and heat. In addition, the pattern of the pixel electrode, the wiring, and the pattern of the three-terminal element can be patterned with high accuracy, and the accuracy of the superposition of the pixel electrodes can be improved in the step of bonding the opposing transparent substrates.

Further, since the first substrate is removed by etching, it can be easily removed. Further, not only a transparent substrate but also an opaque substrate may be used. For this reason, the selection range of the material used for the first substrate is increased, and a less expensive material can be used.

Further, the present invention has a liquid crystal layer and a pair of transparent substrates opposed to each other with the liquid crystal layer interposed therebetween, and a voltage for driving the liquid crystal layer on each of the opposed surfaces of the transparent substrates. In the method for manufacturing a liquid crystal display device having an electrode layer for applying
A first step of forming an electrode layer and a color filter on a first substrate, a second step of forming a transparent resin layer to be a transparent substrate on the color filter, and a third step of removing the first substrate by etching And a method for manufacturing a liquid crystal display device.

According to the present invention, even if the transparent resin layer has the property of expanding and contracting with respect to moisture and heat, if the first substrate does not expand and contract with respect to moisture and heat, The pattern of the electrode layer and the color filter layer can be patterned with high precision, and the accuracy of the lamination of the electrode layer and the color filter layer in the step of bonding the opposing transparent substrates is improved.

Further, since the first substrate is removed by etching, it can be easily removed, and either a transparent substrate or an opaque substrate may be used. For this reason, the selection range of the material used for the first substrate is increased, so that a less expensive material can be used.

In the present invention, the first substrate is removed through a plurality of removing steps.

For example, when the first substrate is etched only with an etchant (acid) having a high etching rate,
After the etching of the first substrate, the electrodes, wirings, elements, color filters, and the like formed over the first substrate are damaged. In addition, when the first substrate is etched only with an etchant having a low etching rate, the electrodes, wirings, elements, color filters, and the like formed on the first substrate are not damaged after the etching of the first substrate, but the processing is performed. The time gets longer.

According to the present invention, for example, the first step is performed in both the step of etching the first substrate using an etchant having a high etching rate and the step of etching the first substrate using an etchant having a low etching rate. Etch the substrate. Thus, by removing the first substrate through a plurality of removal steps, damage to electrodes, wirings, elements, color filters, and the like formed on the first substrate due to etching is almost eliminated, and processing time is reduced. Does not become long.

[0026]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A liquid crystal display device manufactured by a method of manufacturing a liquid crystal display device according to the present invention is a liquid crystal display device having a liquid crystal sandwiched between a pair of substrates similar to the liquid crystal display device 1 shown in FIG. is there.

The method of manufacturing each substrate will be described below. (Embodiment 1) FIGS. 1A and 1B show an embodiment of the present invention.
This will be described with reference to FIG.

FIGS. 1 (a), 1 (b) and 1 (c)
Is the simple matrix substrate 20 in one embodiment of the present invention.
FIG. 1A is a diagram for explaining a manufacturing method of FIG.
1B is a cross-sectional view illustrating a manufacturing process of the simple matrix substrate 20, FIG. 1B is a plan view of the simple matrix substrate 20, and FIG. 1C is a cross-sectional line II of FIG. It is sectional drawing seen from.

First, as shown in FIG. 1A, a transparent electrode film made of ITO or the like is laminated on a glass substrate 201 as a first substrate by a sputtering method or the like, and is patterned to form a striped electrode. 202 is formed.
Next, for example, S
A gas barrier 203 made of iO ₂ or the like is laminated, and an acrylic or epoxy transparent resin layer serving as a transparent substrate (plastic substrate) 204 is laminated thereon.

Thereafter, the glass substrate 201 is
FIG. 1 shows that HF and HNO ₃ are removed by etching with an etchant (acid) mixed at a ratio of 1:20.
A simple matrix substrate 20 as shown in FIG.

Conventionally, when patterning an electrode layer on a plastic substrate, the pattern precision is not good because the substrate expands and contracts due to water absorption, dehydration and the like on the plastic substrate. Since the process is performed on the glass substrate 201, the pattern accuracy of the electrode layer formed on the plastic substrate is improved.

The liquid crystal display is completed by facing the surfaces of the two simple matrix substrates 20 manufactured by the above method on which the stripe-shaped electrodes 202 are formed, and sandwiching the liquid crystal between the substrates. Further, by combining with a simple matrix substrate 50 having a color filter according to a fourth embodiment described later, a liquid crystal display device capable of color display can be obtained.

(Embodiment 2) An embodiment of the present invention is shown in FIG.
This will be described with reference to (a), FIG. 2 (b) and FIG. 2 (c).

FIGS. 2 (a), 2 (b) and 2 (c)
FIG. 2 is a diagram for explaining a method of manufacturing an active matrix substrate 30 using a two-terminal nonlinear element according to one embodiment of the present invention. FIG. 2A is a cross-sectional view illustrating a manufacturing process of the active matrix substrate 30. And FIG. 2 (b)
Is a plan view of the active matrix substrate 30, and FIG. 2C is a cross-sectional view taken along the line II-II of FIG. 2B.

First, as shown in FIG. 2A, a tantalum film serving as a lower electrode 302 of a two-terminal nonlinear element is laminated on a glass substrate 301 as a first substrate to a thickness of 3000 ° by a sputtering method or the like. I do. Then, the wiring (signal line) 308 and the lower electrode 302 are formed by patterning into a predetermined shape by photolithography. Thereafter, the surface of the lower electrode 302 is anodized by anodic oxidation to form an insulating film 303 made of tantalum pentoxide having a thickness of 600 °.

Next, a titanium film to be the upper electrode 304 of the two-terminal non-linear element is laminated to a thickness of 4000 ° on the entire surface of the glass substrate 301 on which the lower electrode and the insulating film 303 are formed by sputtering or the like. Then, the titanium film is patterned into a predetermined shape by photolithography to form an upper electrode 304, thereby completing a two-terminal nonlinear element.

Then, a transparent electrode film made of ITO or the like is laminated on the upper electrode 304 and the glass substrate 301 by a sputtering method or the like, and this is patterned to form a pixel electrode 305. Next, a gas barrier 306 made of SiO ₂ or the like is laminated on the entire surface of the glass substrate 301 on which the two-terminal nonlinear element, the wiring, and the pixel electrode 305 are formed, and an acrylic or plastic substrate 307 is formed thereon as a transparent substrate (plastic substrate) 307. An epoxy-based transparent resin layer is laminated.

Thereafter, the glass substrate 301 is
FIG. 2 shows that HF and HNO ₃ are removed by etching with an etchant (acid) mixed at a ratio of 1:20.
An active matrix substrate 30 as shown in FIG.

Conventionally, when patterning pixel electrodes on a plastic substrate, the pattern accuracy and the overlay accuracy of each pattern were not good because the substrate expanded and contracted due to water absorption, dehydration and heat on the plastic substrate.
As described above, since the patterning of the lower electrode 302 and the upper electrode 304 of the two-terminal nonlinear element and the pixel electrode 302 is performed on the glass substrate 301, the pattern accuracy and the overlay accuracy are improved.

The active matrix substrate 30 manufactured by the above-described method is combined with a counter substrate having stripe-shaped counter electrodes formed by the same method as the simple matrix substrate 20 of the first embodiment. , The liquid crystal display device is completed. Further, as in a fourth embodiment described later, a color filter may be formed on the one substrate.

(Embodiment 3) An embodiment of the present invention is shown in FIG.
This will be described with reference to FIGS. 3 (a), 3 (b) and 3 (c).

FIGS. 3 (a), 3 (b) and 3 (c)
FIG. 3 is a diagram for explaining a method of manufacturing an active matrix substrate 40 using a three-terminal element according to one embodiment of the present invention. FIG. 3A is a cross-sectional view showing a manufacturing process of the active matrix substrate 40, and FIG.
Is a plan view of the active matrix substrate 40, and FIG. 3C is a cross-sectional view taken along line III-III in FIG. 1B.

First, as shown in FIG. 3A, a 3000 ° thick tantalum metal layer is formed on a glass substrate 401 as a first substrate by a sputtering method or the like.
Then, this tantalum metal layer is patterned into a predetermined shape by a photolithography method to form a gate bus wiring 411 and a gate bus wiring 41 as shown in FIG.
A gate electrode 402 branched from 1 is formed.

Next, 4000 plasma CVD methods are used.
An insulating film made of silicon nitride (SiN _x ) having a thickness of Å is laminated on the gate bus wiring 411 and the gate electrode 402 and patterned to form a gate insulating film 403. Next, an a-Si layer having a thickness of 1000
And a semiconductor layer 404 is formed by patterning. Next, molybdenum metal having a thickness of 2000 ° is stacked on the semiconductor layer 404 and the gate insulating film 403 by a sputtering method, and is patterned to form a source electrode 405, a drain electrode 406, and a source bus wiring 4.
Then, a three-terminal element (TFT) is completed. Next, a transparent electrode film made of ITO or the like is laminated by a sputtering method or the like, and this is patterned to form a pixel electrode 4.
07 is formed.

Next, the three-terminal element, wiring and pixel electrode 4
07, a gas barrier 408 made of, for example, SiO ₂ is laminated on the entire surface of the glass substrate 401 on which
An acrylic or epoxy-based transparent resin layer serving as a transparent substrate (plastic substrate) 409 is laminated thereon.

Thereafter, the glass substrate 401 is
F and HNO ₃ are mixed at a ratio of 1:20 and removed by etching with an etchant (acid) or the like to obtain an active matrix substrate 40 as shown in FIG.

Conventionally, when patterning pixel electrodes, wirings, and elements on a plastic substrate, the pattern accuracy and overlay accuracy of each pattern were poor because the substrate expanded and contracted due to water absorption, dehydration, heat, and the like on the plastic substrate. . Further, when forming a three-terminal element, there is a high-temperature process in the manufacturing process,
Although there was a problem that the plastic substrate itself was deteriorated by heat, patterning of each pattern was performed on the glass substrate as described above, so that pattern accuracy and overlap were improved.

The liquid crystal display device is completed by combining the active matrix substrate 40 manufactured by the above method and a counter substrate having a counter electrode formed on the entire surface of the substrate and sandwiching liquid crystal between the substrates. Further, as in a fourth embodiment described later, a color filter may be formed on one substrate.

(Embodiment 4) An embodiment of the present invention is shown in FIG.
This will be described with reference to (a), FIG. 4 (b) and FIG. 4 (c).

FIGS. 4 (a), 4 (b) and 4 (c)
FIG. 4A is a diagram for explaining a method of manufacturing a simple matrix substrate 50 having a color filter according to an embodiment of the present invention, and FIG. 4A is a cross-sectional view illustrating a manufacturing process of the simple matrix substrate 50; FIG. 4B is a plan view of the simple matrix substrate 50, and FIG. 4C is a plan view of FIG.
FIG. 4 is a cross-sectional view taken along line IV-IV of FIG.

First, as shown in FIG. 4A, a transparent electrode film made of ITO or the like is laminated on a glass substrate 501 as a first substrate by a sputtering method or the like, and is patterned to form a stripe-shaped electrode. Form 502.
Next, red, green, and blue color filters 503, 504, and 505 are formed on the stripe-shaped electrodes 502. The method of forming the color filter includes, for example, a pigment dispersion method, a dyeing method, a printing method, and an electrodeposition method. In particular, when the electrodeposition method is used, there is an advantage that the electrodeposition electrode and the liquid crystal driving electrode can be shared. Next, a gas barrier 50 made of, for example, SiO ₂ is laminated on the color filter.
6 and a transparent substrate (plastic substrate) 5
An acrylic or epoxy-based transparent resin layer which becomes 07 is laminated.

Thereafter, the glass substrate 501 is
HF and HNO ₃ are removed by etching with an etchant (acid) or the like mixed at a ratio of 1:20 to obtain a simple matrix substrate 50 as shown in FIG.

Conventionally, when patterning an electrode layer on a plastic substrate, the pattern accuracy was not good because the substrate expanded and contracted due to water absorption and dehydration on the plastic substrate. However, as described above, the stripe-shaped electrode 502 and the color filter Since patterning of 503, 504 and 505 is performed on the glass substrate 501, the pattern accuracy is improved.

The simple matrix substrate 5 manufactured by the above method
0 and the simple matrix substrate 20 of the first embodiment are combined, and liquid crystal is sandwiched between the substrates to complete a liquid crystal display device capable of color display.

(Embodiment 5) In the step of etching the glass substrates 201, 301, 401, and 501 of the embodiments 1 to 4, for example, etching is performed only with an etchant (acid) having a high etching rate. In this case, after the etching of the glass substrate, the stripe-shaped electrodes and pixel electrodes 202, 305, 407, and 502 and the gas barrier 2
03, 306, 408, and 506 are etched, and the possibility of damaging them is increased. On the other hand, when etching is performed only with an etchant (acid) having a low etching rate, the possibility of causing damage is reduced, but the processing time is increased.

Therefore, in order to reduce the possibility of causing damage and shorten the processing time, an etchant having a high etching rate (for example, HF and HNO ₃ : Etching with an acid mixed at a ratio of 20) and the rest with an etchant having a low etching rate (for example, HF and NH ₄ F in a ratio of 1:
(Acid mixed at a ratio of 10). As described above, by performing the process of etching and removing the glass substrate as a plurality of processes in which the components of the etchant are changed, damage to the stripe-shaped electrodes and pixel electrodes and the gas barrier is almost eliminated, and the processing time is increased. It will not be.

As described above, according to the present invention, patterning of electrodes, wirings, elements, color filters, and the like is performed on a glass substrate, and a transparent resin layer serving as a transparent substrate is formed thereon. Since the glass substrate is removed by etching, pattern accuracy is not affected by moisture or heat.

Further, the above-mentioned Japanese Patent Application Laid-Open No. 10-177187.
In the transfer technology disclosed in Japanese Patent Application Laid-Open Publication No. H10-157, the laser irradiation conditions have not been established, and peeling often does not succeed. However, in the present invention, since the glass substrate itself is removed by etching,
The glass substrate can be easily removed.

Further, in the present invention, since the first substrate is removed by etching, the substrate used as the first substrate does not have to be a transparent substrate such as glass, and may be an opaque substrate. . As a result, the selection range of the substrate is increased, and a less expensive material can be used.

[0060]

According to the present invention, even if the transparent resin layer serving as the transparent substrate has the property of expanding and contracting with respect to moisture and heat, the first substrate expands with respect to moisture and heat. If the characteristics do not shrink, the pattern of the electrode layer can be patterned with high accuracy, and the accuracy of overlapping the electrode layers in the step of bonding the opposing transparent substrates is improved.

According to the present invention, even if the transparent resin layer serving as the transparent substrate has the property of expanding and contracting with respect to moisture and heat, the first substrate expands and contracts with respect to moisture and heat. If not, the pattern of the pixel electrode, the wiring, and the pattern of the two-terminal nonlinear element can be patterned with high accuracy, and the accuracy of the superposition of the pixel electrodes in the step of bonding the opposing transparent substrates is improved.

According to the present invention, even if the transparent resin layer has the property of expanding and contracting with respect to moisture and heat, the first substrate does not have the property of expanding and contracting with respect to moisture and heat. For example, the pattern of the pixel electrode, the wiring, and the pattern of the three-terminal element can be patterned with high accuracy, and the accuracy of the superposition of the pixel electrodes can be improved in the step of bonding the opposing transparent substrates.

According to the present invention, even if the transparent resin layer has the property of expanding and contracting with respect to moisture, heat, etc., the first
If the substrate does not expand and contract with moisture, heat, etc., the pattern of the electrode layer and the color filter can be patterned with high precision. The alignment accuracy is improved.

Further, according to the present invention, by removing the first substrate through a plurality of removal steps, damage to the electrodes, color filters, elements, etc. formed on the first substrate due to etching is almost eliminated. Further, the processing time does not increase.

Since the first substrate is removed by etching, either a transparent substrate or an opaque substrate may be used. For this reason, the selection range of the material used for the first substrate is increased, so that a less expensive material can be used.

[Brief description of the drawings]

1A is a cross-sectional view illustrating a process of manufacturing a simple matrix substrate 20, FIG. 1B is a plan view of the simple matrix substrate 20, and FIG. 1 (b)
FIG. 2 is a cross-sectional view taken along line II of FIG.

FIG. 1A shows an active matrix substrate 30;
1B is a cross-sectional view showing the manufacturing process of FIG. 1, and FIG. 1B is a plan view of the active matrix substrate 30 and FIG.
FIG. 2 is a cross-sectional view taken along line II-II in FIG.

FIG. 3A shows an active matrix substrate 40;
FIG. 3B is a cross-sectional view showing the manufacturing process of FIG. 3, and FIG. 3B is a plan view of the active matrix substrate 40, and FIG.
FIG. 3 is a cross-sectional view taken along the line III-III in FIG.

FIG. 4A is a cross-sectional view showing a manufacturing process of a simple matrix substrate 50 having a color filter.
4B is a plan view of the simple matrix substrate 50, and FIG. 4C is a cross-sectional view taken along the line IV-IV of FIG. 4B.

FIG. 5 is a cross-sectional view of a conventional liquid crystal display device 10 using a general plastic material as a substrate.

[Explanation of symbols]

Reference Signs List 10 liquid crystal display device 20, 50 simple matrix substrate 30, 40 active matrix substrate 101 polarizing plate 103, 204, 307, 409, 507 transparent substrate (plastic substrate) 102, 104 hard coat 105 undercoat 106 ITO electrode 107 topcoat 108 orientation Film 109 Sealant 110 Liquid crystal 201, 301, 401, 501 Glass substrate 202, 502 Striped electrode 305, 407 Pixel electrode 203, 306, 408, 506 Gas barrier 302 Lower electrode 303 Insulating film 304 Upper electrode 308 Signal wiring 402 Gate electrode 403 Gate insulating film 404 Semiconductor layer 405 Source electrode 406 Drain electrode 410 Source bus wiring 411 Gate bus wiring 503, 504, 505 Color filter

 ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 2H088 FA05 FA10 FA16 FA18 FA28 FA29 FA30 HA08 KA01 MA16 2H090 HA02 JA16 JB03 JC07 JC14 JC18 JD09 JD13 JD18 LA01 LA04 5C094 AA05 AA42 AA43 BA03 BA04 BA43 CA02 EA03 EB03 FB12 GB01 5F110 AA17 BB01 CC05 CC07 DD01 EE04 EE44 FF03 FF30 GG02 GG15 GG25 GG45 HK04 HK07 HK21 HK33 NN23 NN72 QQ16 5G435 AA17 BB12 CC09 CC12 GG12 HH02 KK05

Claims (5)

[Claims] 1. A liquid crystal layer, and a pair of transparent substrates disposed to face each other with the liquid crystal layer interposed therebetween, and a voltage is applied to each of the opposing surfaces of the transparent substrates to drive the liquid crystal layer. In a method for manufacturing a liquid crystal display device having an electrode layer, a first step of forming an electrode layer on a first substrate, a second step of forming a transparent resin layer to be a transparent substrate on the electrode layer, And a third step of removing the first substrate. 2. A liquid crystal layer, and a pair of transparent substrates disposed to face each other with the liquid crystal layer interposed therebetween. A pixel electrode and a pixel electrode are formed on a surface of one of the pair of transparent substrates on the liquid crystal layer side. In a method for manufacturing a liquid crystal display device having a wiring for applying a voltage to an electrode and a two-terminal non-linear element, and a stripe-shaped counter electrode on a surface of the other substrate on a liquid crystal layer side, a pixel electrode is provided on a first substrate And a first line forming a wiring for applying a voltage to each pixel electrode and a two-terminal nonlinear element.
A liquid crystal, comprising: a step of forming a transparent resin layer to be a transparent substrate on the pixel electrode, the wiring, and the two-terminal nonlinear element; and a third step of removing the first substrate by etching. A method for manufacturing a display device. 3. A liquid crystal layer, and a pair of transparent substrates disposed so as to face each other with the liquid crystal layer interposed therebetween. In a method for manufacturing a liquid crystal display device having a wiring for applying a voltage to an electrode and a three-terminal element and having a counter electrode on a surface of a liquid crystal layer on the other substrate, a pixel electrode and a pixel are provided on a first substrate. A first step of forming a wiring and a three-terminal element for applying a voltage to the electrode; a second step of forming a transparent resin layer serving as a transparent substrate on the pixel electrode, the wiring and the three-terminal element; And a third step of removing the first substrate. 4. A liquid crystal layer and a pair of transparent substrates opposed to each other with the liquid crystal layer interposed therebetween, and a voltage is applied to each of the opposing surfaces of the transparent substrates to drive the liquid crystal layer. A method of manufacturing a liquid crystal display device having an electrode layer and a color filter on one substrate, a first step of forming an electrode layer and a color filter on a first substrate, and a transparent resin layer to be a transparent substrate A method of manufacturing a liquid crystal display device, comprising: a second step of forming a first substrate on a color filter; and a third step of removing the first substrate by etching. 5. The method according to claim 1, wherein the first substrate is removed through a plurality of removing steps.