JP2002087836A - Method of machining brittle non-metallic material - Google Patents
Method of machining brittle non-metallic materialInfo
- Publication number
- JP2002087836A JP2002087836A JP2000278938A JP2000278938A JP2002087836A JP 2002087836 A JP2002087836 A JP 2002087836A JP 2000278938 A JP2000278938 A JP 2000278938A JP 2000278938 A JP2000278938 A JP 2000278938A JP 2002087836 A JP2002087836 A JP 2002087836A
- Authority
- JP
- Japan
- Prior art keywords
- crack
- substrate
- metallic material
- brittle
- solar cell
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B33/00—Severing cooled glass
- C03B33/02—Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
- C03B33/04—Cutting or splitting in curves, especially for making spectacle lenses
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Photovoltaic Devices (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、ガラス等の脆性非
金属材料の加工、分断の方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for processing and cutting brittle nonmetallic materials such as glass.
【0002】[0002]
【従来の技術】従来より、脆性非金属材料であるガラス
基板上に形成された太陽電池装置が利用されて、このよ
うな太陽電池装置を腕時計の文字盤として円形板状に加
工しても利用されている。2. Description of the Related Art Conventionally, a solar cell device formed on a glass substrate which is a brittle non-metallic material has been used, and such a solar cell device is used even when processed into a circular plate shape as a dial of a wristwatch. Have been.
【0003】このような円形板状の太陽電池装置にガラ
スを分断加工するには、まず、図4(a)に示すよう
に、矩形状大型ガラス基板21上に、複数の太陽電池装
置22が形成される。ここで、腕時計の文字盤に利用さ
れる太陽電池装置は、略20〜40mm程度の直径であ
り、このような小面積の円形状を、ガラスカッター等に
よりスクライブ線を形成し、その後、手作業等により力
を加えて、スクライブ線に沿って分断することは、困難
であった。In order to cut glass into such a circular plate-shaped solar cell device, first, as shown in FIG. 4A, a plurality of solar cell devices 22 are formed on a large rectangular glass substrate 21. It is formed. Here, the solar cell device used for the dial of the wristwatch has a diameter of about 20 to 40 mm, and a circular shape having such a small area is formed with a scribe line by a glass cutter or the like. It has been difficult to apply a force or the like to cut along the scribe line.
【0004】そこで、次の工程を採用していた。図4
(a)に示すように、矩形大型ガラス基板21の外周辺
と平行に、スクライブ線23を形成し、図4(b)に示
すように、円形太陽電池装置22より大面積である矩形
中間体24に、一旦、分断する。その後、円形太陽電池
装置22の外周線状の形状を有する型を、超音波振動を
加えながら矩形中間体24表面に押圧することにより、
ガラス基板材料を分断し、図4(c)に示す円形太陽電
池装置22を完成させていた。Therefore, the following steps have been adopted. FIG.
As shown in FIG. 4A, a scribe line 23 is formed in parallel with the outer periphery of the rectangular large-sized glass substrate 21, and a rectangular intermediate body having a larger area than the circular solar cell device 22 as shown in FIG. At 24, it is divided once. Thereafter, by pressing a mold having a shape of an outer peripheral line of the circular solar cell device 22 onto the surface of the rectangular intermediate body 24 while applying ultrasonic vibration,
The glass substrate material was cut, and the circular solar cell device 22 shown in FIG. 4C was completed.
【0005】[0005]
【発明が解決しようとする課題】このように、従来にお
いて、ガラス基板等の脆性非金属材料の加工、分断方法
では、円形の太陽電池装置を完成するのに、手間とコス
トを要するものであった。As described above, in the conventional method of processing and cutting a brittle nonmetallic material such as a glass substrate, it takes time and cost to complete a circular solar cell device. Was.
【0006】本発明はこのような問題点を解決するため
に成されたものであり、所望の形状に容易に加工、分断
できる脆性非金属材料の加工方法を提供することを目的
とする。The present invention has been made in order to solve such problems, and an object of the present invention is to provide a method for processing a brittle nonmetallic material which can be easily processed and cut into a desired shape.
【0007】[0007]
【課題を解決するための手段】本発明の主要な構成は、
板状脆性非金属材料基板において、表面から内部に至る
亀裂を連続して形成する脆性非金属材料加工方法であっ
て、前記基板に、間隔をおいて配置される複数の所望形
状の亀裂外周線を形成すると共に、隣接する前記所望形
状の間において隣接する両前記外周線に至る線状の亀裂
と、前記基板の外周から、該外周に近接する所望形状の
前記亀裂外周線に至る線状の亀裂とを形成することであ
る。The main constitution of the present invention is as follows.
A brittle non-metallic material processing method for continuously forming a crack extending from a surface to an inside in a plate-shaped brittle non-metallic material substrate, wherein the substrate has a plurality of crack peripheral lines having a desired shape arranged at intervals. And a linear crack extending from the outer periphery of the substrate to a linear crack extending from the outer periphery of the substrate to the crack outer peripheral line having a desired shape close to the outer periphery. Is to form cracks.
【0008】また、板状脆性非金属材料基板において、
表面から内部に至る亀裂を連続して形成する脆性非金属
材料加工方法であって、隣接する所望形状の亀裂外周線
を接して形成することである。[0008] In a plate-shaped brittle nonmetallic substrate,
A brittle nonmetallic material processing method for continuously forming a crack extending from the surface to the inside, wherein the crack is formed in contact with adjacent crack outer peripheral lines having a desired shape.
【0009】[0009]
【発明の実施の形態】以下に本発明の第1実施例を、図
1を用いて詳細に説明する。図1において、まず、板状
脆性非金属材料基板である大型ガラス基板1上に、外形
が略円形である太陽電池装置2を、間隔をおいて形成す
る。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a first embodiment of the present invention will be described in detail with reference to FIG. In FIG. 1, first, a solar cell device 2 having a substantially circular outer shape is formed at intervals on a large-sized glass substrate 1 which is a plate-shaped brittle nonmetallic material substrate.
【0010】このような円形の太陽電池装置2は、実開
昭63−115239号に開示されるようなものが利用
できる。ガラス基板1上より、透明電極層/アモルファ
スシリコン層/金属電極層からなり、中心角が略90度
の4つの隣接した扇型太陽電池素子を、外周部で電気接
続する構造で、太陽電池素子の裏面上は保護膜で覆われ
た構造である。As such a circular solar cell device 2, one disclosed in Japanese Utility Model Laid-Open No. 63-115239 can be used. A structure in which four adjacent fan-shaped solar cell elements composed of a transparent electrode layer / amorphous silicon layer / metal electrode layer and having a central angle of about 90 degrees are electrically connected at the outer periphery from the glass substrate 1. Has a structure covered with a protective film.
【0011】次に、CO2レーザを利用して、ガラス基
板1において、表面から内部に至る亀裂を連続して形成
する。このような加工方法は、例えば、特表平8−50
9947号に開示されており、ガラス基板1の表面に、
CO2レーザのビームスポットを照射しつつ、空気また
は/及び水からなる冷媒を当て、ガラス基板1を移動さ
せ、連続した亀裂を形成するものである。Next, cracks from the surface to the inside are continuously formed in the glass substrate 1 using a CO 2 laser. Such a processing method is disclosed in, for example, Japanese Patent Application Laid-Open No. Hei 8-50.
No. 9947, on the surface of the glass substrate 1,
While irradiating a beam spot of a CO 2 laser, a coolant made of air or / and water is applied to move the glass substrate 1 to form a continuous crack.
【0012】そして、図1(a)に示すように、円形太
陽電池装置2の円形外周に、上述の方法を用いて、連続
した亀裂からなる亀裂外周線3を形成する。続いて、基
板1の外周から、CO2レーザを直線的に走査しつつ、
太陽電池装置2上においては、CO2レーザのビームス
ポットを遮断することにより、基板1の外周から近接す
る亀裂外周線3に至る線状の亀裂4aと、隣接する亀裂
外周線間に線状の亀裂5bとを、形成する。同様に、亀
裂4b、5b、亀裂4c、5cを形成する。Then, as shown in FIG. 1A, a crack outer peripheral line 3 composed of continuous cracks is formed on the circular outer periphery of the circular solar cell device 2 by using the above-described method. Subsequently, while linearly scanning the CO 2 laser from the outer periphery of the substrate 1,
On the solar cell device 2, by blocking the beam spot of the CO 2 laser, a linear crack 4 a extending from the outer periphery of the substrate 1 to the adjacent crack outer line 3 and a linear crack 4 a between the adjacent crack outer lines. A crack 5b is formed. Similarly, cracks 4b and 5b and cracks 4c and 5c are formed.
【0013】以上の工程の後、亀裂が形成された基板1
を、外周からの亀裂4aの両側に力を加えて分断するこ
とで、左上コーナー近傍の太陽電池装置2を分断し、図
1(b)に示す太陽電池装置2が完成する。続いて、こ
れと連続する亀裂5aの両側に力を加えることにより太
陽電池装置2を分離することができ、同様にして、亀裂
5a、4aに接続された太陽電池装置2を、次々と、容
易に分離することができる。After the above steps, the cracked substrate 1
Is divided by applying force to both sides of a crack 4a from the outer periphery, thereby dividing the solar cell device 2 near the upper left corner, and the solar cell device 2 shown in FIG. 1B is completed. Subsequently, the solar cell device 2 can be separated by applying a force to both sides of the continuous crack 5a. Similarly, the solar cell devices 2 connected to the cracks 5a, 4a can be easily and successively removed. Can be separated.
【0014】そして、同様にして、亀裂4b、5b、亀
裂4c、5c・・・に接続された太陽電池装置2を容易
に分離することができる。また、第1実施例において
は、上述の従来例と比較して、矩形状中間体に分離する
必要がなく、太陽電池装置2とならない基板1の捨て部
分を少なくすることができるので、基板1の単位面積あ
たりより取れる太陽電池装置2の数が増加している。In the same manner, the solar cell devices 2 connected to the cracks 4b, 5b, 4c, 5c,... Can be easily separated. Further, in the first embodiment, compared to the above-described conventional example, it is not necessary to separate the rectangular intermediate body, and the discarded portion of the substrate 1 that does not become the solar cell device 2 can be reduced. The number of solar cell devices 2 that can be obtained per unit area is increasing.
【0015】また、太陽電池装置2の分離をより容易に
するために、図2に示すように、追加の直線状の横方向
亀裂10、10・・・、直線状の縦方向亀裂11、11
・・・を、形成することも可能である。Further, as shown in FIG. 2, additional straight lateral cracks 10, 10,..., Straight longitudinal cracks 11, 11, as shown in FIG.
... can also be formed.
【0016】次に、本発明の第2実施例を、図3を用い
て説明する。上記の第1実施例と同等の構造について
は、同符号を用い、説明を省略する。基板1上に、外形
が略円形である太陽電池装置2が、隣接する太陽電池装
置2と外周が接するように形成する。そして、円形太陽
電池装置2の円形外周に、CO2レーザを利用して、連
続した亀裂からなる亀裂外周線3を、隣接する太陽電池
装置2の亀裂外周線3と接するようにして、形成する。
また、基板1の外周側に位置する太陽電池装置2の亀裂
外周線3は、基板1の外周と接するように形成される。Next, a second embodiment of the present invention will be described with reference to FIG. The same structures as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted. A solar cell device 2 having a substantially circular outer shape is formed on a substrate 1 such that the outer periphery of the solar cell device 2 is in contact with an adjacent solar cell device 2. Then, on the circular outer periphery of the circular solar cell device 2, a crack outer peripheral line 3 composed of continuous cracks is formed using a CO 2 laser so as to be in contact with the crack outer peripheral line 3 of the adjacent solar cell device 2. .
Further, the crack outer peripheral line 3 of the solar cell device 2 located on the outer peripheral side of the substrate 1 is formed so as to be in contact with the outer peripheral of the substrate 1.
【0017】以上の工程の後、亀裂が形成された基板1
を、基板1の外周と接する亀裂外周線3の両側に、力を
加えることにより、太陽電池装置2を容易に分断し、続
いて、この外周側の亀裂外周線3と接する亀裂外周線3
に従って、次々と、太陽電池装置2を容易に分断するこ
とができる。また、本第2実施例は、円形太陽電池装置
2が接して隣接配置されていることより、第1実施例よ
りも、基板1の単位面積あたりより取れる太陽電池装置
2の数が増加している。After the above steps, the cracked substrate 1
The solar cell device 2 is easily separated by applying a force to both sides of the crack outer peripheral line 3 contacting the outer periphery of the substrate 1, and subsequently, the crack outer peripheral line 3 contacting the outer peripheral side crack outer peripheral line 3
Accordingly, the solar cell device 2 can be easily divided one after another. Further, in the second embodiment, since the circular solar cell devices 2 are disposed in contact with and adjacent to each other, the number of solar cell devices 2 that can be obtained per unit area of the substrate 1 is increased as compared with the first embodiment. I have.
【0018】以上の実施例においては、所望の形状とし
て、円形形状の太陽電池装置を利用しているが、このよ
うな形状以外にも、本発明は利用できる。また、本発明
が利用できる脆性非金属材料としては、ガラス以外に、
石英、セラミック等にも応用できる。In the above embodiment, a circular solar cell device is used as a desired shape, but the present invention can be used in other shapes. In addition, as a brittle nonmetallic material that can be used in the present invention, in addition to glass,
It can be applied to quartz, ceramic, etc.
【0019】[0019]
【発明の効果】本発明は、板状脆性非金属材料基板にお
いて、隣接する所望形状の間の線状の亀裂、接して隣接
する所望形状における亀裂外周線、基板の外周から所望
形状に至る亀裂により、容易に、所望形状を分断するこ
とができる。According to the present invention, there is provided a plate-shaped brittle non-metallic material substrate having a linear crack between adjacent desired shapes, a crack peripheral line in contact with and adjacent to a desired shape, and a crack extending from the outer periphery of the substrate to a desired shape. Thereby, the desired shape can be easily divided.
【図1】本発明の第1実施例を示す図であり、(a)は
基板状態の平面図、(b)は分断した状態の太陽電池装
置の平面図である。FIGS. 1A and 1B are diagrams showing a first embodiment of the present invention, wherein FIG. 1A is a plan view of a substrate state, and FIG. 1B is a plan view of a separated solar cell device.
【図2】本発明の第1実施例の追加例を示す平面図であ
る。FIG. 2 is a plan view showing an additional example of the first embodiment of the present invention.
【図3】本発明の第2実施例を示す平面図である。FIG. 3 is a plan view showing a second embodiment of the present invention.
【図4】従来例を示す図であり、(a)は基板状態の平
面図、(b)は中間体の平面図、(c)は分断した状態
の太陽電池装置の平面図である。4A and 4B are diagrams showing a conventional example, in which FIG. 4A is a plan view of a substrate state, FIG. 4B is a plan view of an intermediate body, and FIG. 4C is a plan view of a split solar cell device.
1 基板 2 太陽電池装置 3 亀裂外周線 4、5 亀裂 DESCRIPTION OF SYMBOLS 1 Substrate 2 Solar cell device 3 Crack peripheral line 4, 5 Crack
フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) G04B 19/06 B23K 101:40 B23K 101:40 H01L 31/04 M (72)発明者 野村 敏宏 大阪府守口市京阪本通2丁目5番5号 三 洋電機株式会社内 Fターム(参考) 4E068 AD01 CA04 DA09 DA14 DB13 4G015 FA03 FA04 FA06 FB01 FC02 FC05 5F051 AA05 BA04 CB28 GA03 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (Reference) G04B 19/06 B23K 101: 40 B23K 101: 40 H01L 31/04 M (72) Inventor Toshihiro Nomura Keihanmoto, Moriguchi-shi, Osaka 2-5-5, Sanyo Electric Co., Ltd. F-term (reference) 4E068 AD01 CA04 DA09 DA14 DB13 4G015 FA03 FA04 FA06 FB01 FC02 FC05 5F051 AA05 BA04 CB28 GA03
Claims (8)
から内部に至る亀裂を連続して形成する脆性非金属材料
加工方法であって、 前記基板に、間隔をおいて配置される複数の所望形状の
亀裂外周線を形成すると共に、 隣接する前記所望形状の間において隣接する両前記外周
線に至る線状の亀裂と、前記基板の外周から、該外周に
近接する所望形状の前記亀裂外周線に至る線状の亀裂と
を形成することを特徴とする脆性非金属材料加工方法。1. A brittle non-metallic material processing method for continuously forming a crack extending from a surface to an inside of a plate-like brittle non-metallic material substrate, the method comprising: A linear crack extending from the outer periphery of the substrate to the crack outer periphery having a desired shape and adjacent to the outer periphery of the substrate, while forming a crack outer periphery having a shape; A brittle non-metallic material processing method, comprising forming a linear crack leading to a crack.
から内部に至る亀裂を連続して形成する脆性非金属材料
加工方法であって、 前記基板に、間隔をおいて配置される複数の所望形状の
亀裂外周線を形成すると共に、隣接する前記所望形状の
間において隣接する両前記外周線に至る線状の亀裂を形
成することを特徴とする脆性非金属材料加工方法。2. A brittle non-metallic material processing method for continuously forming a crack extending from the surface to the inside in a plate-like brittle non-metallic material substrate, the method comprising: A method for processing a brittle nonmetallic material, comprising: forming a crack outer peripheral line having a shape; and forming a linear crack extending between adjacent adjacent outer peripheral lines between adjacent desired shapes.
から内部に至る亀裂を連続して形成する脆性非金属材料
加工方法であって、 前記基板において所望形状の亀裂外周線を形成すると共
に、 前記基板の外周から前記外周線に至る線状の亀裂を形成
することを特徴とする脆性非金属材料加工方法。3. A brittle non-metallic material processing method for continuously forming a crack extending from the surface to the inside in a plate-like brittle non-metallic material substrate, wherein a crack-shaped peripheral line having a desired shape is formed on the substrate. A method for processing a brittle nonmetallic material, comprising forming a linear crack extending from the outer periphery of the substrate to the outer peripheral line.
から内部に至る亀裂を連続して形成する脆性非金属材料
加工方法であって、 隣接する所望形状の亀裂外周線を接して形成することを
特徴とする脆性非金属材料加工方法。4. A brittle non-metallic material processing method for continuously forming a crack extending from a surface to an inside of a plate-shaped brittle non-metallic material substrate, wherein adjacent crack peripheral lines having a desired shape are formed in contact with each other. A method for processing a brittle nonmetallic material, comprising:
太陽電池装置が形成されていることを特徴とする請求項
1、2、3又は4の脆性非金属材料加工方法。5. Within the desired shape of the substrate,
5. The method for processing a brittle nonmetallic material according to claim 1, wherein a solar cell device is formed.
ことを特徴とする請求項1、2、3又は4の脆性非金属
材料基板の加工方法。6. The method for processing a brittle non-metallic material substrate according to claim 1, wherein the brittle non-metallic material substrate is glass.
特徴とする請求項1、2、3又は4の脆性非金属材料基
板の加工方法。7. The method for processing a brittle non-metallic material substrate according to claim 1, wherein the substrate is divided by the crack.
することを特徴とする請求項1、2、3又は4の脆性非
金属材料基板の加工方法。8. The method for processing a brittle nonmetallic material substrate according to claim 1, wherein the desired shape has at least a curved portion.
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Cited By (13)
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---|---|---|---|---|
WO2005113212A1 (en) * | 2004-05-20 | 2005-12-01 | Mitsuboshi Diamond Industrial Co., Ltd. | Motherboard cutting method, motherboard scribing apparatus, program and recording medium |
WO2009084398A1 (en) * | 2007-12-27 | 2009-07-09 | Mitsuboshi Diamond Industrial Co., Ltd. | Method for forming cracks on substrate made of brittle material |
US7785336B2 (en) | 2006-08-01 | 2010-08-31 | Abbott Medical Optics Inc. | Vacuum sense control for phaco pulse shaping |
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