JP2002087805A - Ozone generating equipment - Google Patents

Ozone generating equipment

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Publication number
JP2002087805A
JP2002087805A JP2000281247A JP2000281247A JP2002087805A JP 2002087805 A JP2002087805 A JP 2002087805A JP 2000281247 A JP2000281247 A JP 2000281247A JP 2000281247 A JP2000281247 A JP 2000281247A JP 2002087805 A JP2002087805 A JP 2002087805A
Authority
JP
Japan
Prior art keywords
oxygen
ozone
gas
ozone generating
ozone generator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000281247A
Other languages
Japanese (ja)
Other versions
JP4157923B2 (en
Inventor
Koichi Hashimoto
孝一 橋本
Hisamichi Ishioka
久道 石岡
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fuji Electric Co Ltd
Original Assignee
Fuji Electric Co Ltd
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Filing date
Publication date
Application filed by Fuji Electric Co Ltd filed Critical Fuji Electric Co Ltd
Priority to JP2000281247A priority Critical patent/JP4157923B2/en
Publication of JP2002087805A publication Critical patent/JP2002087805A/en
Application granted granted Critical
Publication of JP4157923B2 publication Critical patent/JP4157923B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Oxygen, Ozone, And Oxides In General (AREA)

Abstract

PROBLEM TO BE SOLVED: To enable the maintenance of stable ozone concentration even in the long term operation by selecting the material of a gas duct piped between an oxygen equipment and an ozone generating device. SOLUTION: In the ozone generation device constituted so as to combine the oxygen equipment A with the silent discharge type ozone generating device B and to introduce high purity gaseous oxygen supplied from the oxygen equipment into the ozone generating device through the gas duct C, the gas duct C uses a pipe (a fluororesin pipe C-1) made of a non-metallic material such as a fluororesin, a vinyl resin, a polyamide based resin or one formed by coating the inside surface of a metallic pipe (a stainless steel pipe C-2) with a non-metallic material (a fluororesin C-3) and the decomposition of the generated zone due to the activated oxygen is suppressed by sending a trace quantity of gaseous nitrogen released from the gas duct with oxygen to the ozone generating device and reacting the activated oxygen generated in the ozone generating process by silent discharge with nitrogen.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】この発明は、上下水処理やパ
ルプ漂白処理などに用いる高濃度オゾンを得るオゾン発
生設備に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ozone generating apparatus for obtaining high-concentration ozone used for sewage treatment and pulp bleaching.

【0002】[0002]

【従来の技術】オゾン発生設備は、オゾンが持つ殺菌・
脱色・脱臭力を利用して上下水処理施設,パルプ漂白処
理施設などにおいて広く使用されている。次に、従来に
おけるオゾン発生設備を図3,図4で説明する。すなわ
ち、オゾン発生設備は図3のシステム図で示すように、
酸素設備Aとオゾン発生装置Bとを組合せ、両者の間に
ステンレス鋼管のガス導管Cを配管した構成になる。
2. Description of the Related Art Ozone generating equipment is used for sterilization and treatment of ozone.
It is widely used in water and sewage treatment facilities, pulp bleaching facilities, etc., utilizing the power of decolorization and deodorization. Next, a conventional ozone generation facility will be described with reference to FIGS. That is, as shown in the system diagram of FIG.
The oxygen facility A and the ozone generator B are combined, and a gas pipe C of a stainless steel pipe is provided between the two.

【0003】ここで、酸素設備Aは液体酸素を入れたデ
ュワー瓶A-1と、液体酸素を気化させるエバポレータA
-2を備えており、液化酸素を気化して高純度の酸素ガス
(通常99.99%)に変える。そして、この酸素設備
Aで得た高純度の酸素ガス(原料ガス)をガス導管Cを
通じてオゾン発生装置Bに送り込み、該装置内の放電管
に流して無声放電によりオゾンを生成させる。なお、酸
素設備Aとして、前記した液体酸素設備の代わりに図示
のように酸素ボンベA-3をガス導管Cに接続し、酸素ボ
ンベA-3から高純度の酸素ガスを直接供給する場合もあ
る。
[0003] Here, the oxygen equipment A comprises a dewar bottle A-1 containing liquid oxygen and an evaporator A for vaporizing liquid oxygen.
-2, which converts liquefied oxygen into high-purity oxygen gas (usually 99.99%). Then, the high-purity oxygen gas (raw material gas) obtained in the oxygen facility A is sent to an ozone generator B through a gas conduit C, and is flowed through a discharge tube in the apparatus to generate ozone by silent discharge. As the oxygen equipment A, an oxygen cylinder A-3 may be connected to the gas conduit C as shown in the figure instead of the liquid oxygen equipment described above, and high-purity oxygen gas may be directly supplied from the oxygen cylinder A-3. .

【0004】次に、オゾン発生装置の一例を図4(a),
(b) に示す。なお、図示例のオゾン発生装置は、本発明
と同一出願人より先に特開平9−315803として提
案したものである。図において、1はオゾン発生装置の
本体胴部であり、その両端開口部はパッキン17を介し
て側板2,3で閉塞された構成になり、周面には原料ガ
ス入口7,オゾン化ガス出口8,および冷却水の入口
9,出口10が開口している。
Next, an example of an ozone generator is shown in FIG.
This is shown in (b). The ozone generator shown in the illustrated example has been proposed as Japanese Patent Application Laid-Open No. 9-315803 prior to the same applicant as the present invention. In the figure, reference numeral 1 denotes a main body of the ozone generator, the opening at both ends of which is closed by side plates 2 and 3 via a packing 17, and a raw material gas inlet 7 and an ozonized gas outlet on the peripheral surface. 8, and the cooling water inlet 9 and outlet 10 are open.

【0005】また、胴部1の内部には左右1対の仕切板
5,6が互いに間隔を設けられおり、この仕切板5,6
の間を貫通して多数本のオゾン発生管11が架設されて
いる。このオゾン発生管11は、接地電極としての円筒
状の金属管11aと、該金属管11aの内面側にライニ
ングによって形成されたガラス誘電体層11bと、誘電
体層11bを含む接地電極11の内側にほぼ一様なギャ
ップ長を持つ放電ギャップ12を隔てて対向する円筒形
の高電圧電極13とからなり、高電圧電極13はその端
部から引出したリード線14,およびブッシング15を
介して外部の高周波電源16に接続されている。
A pair of left and right partition plates 5 and 6 are provided inside the body 1 at intervals.
A large number of ozone generating tubes 11 are erected through the space. The ozone generating tube 11 has a cylindrical metal tube 11a as a ground electrode, a glass dielectric layer 11b formed by lining on the inner surface side of the metal tube 11a, and an inside of the ground electrode 11 including the dielectric layer 11b. And a cylindrical high voltage electrode 13 opposed to a discharge gap 12 having a substantially uniform gap length. The high voltage electrode 13 is externally connected via a lead wire 14 drawn out from its end and a bushing 15. Is connected to the high-frequency power supply 16 of FIG.

【0006】また、オゾン発生管11の金属管11aの
外周側には仕切板4,5との間にウオータジャケット4
が画成され、ここに冷却水循環ライン19から冷却水入
口9,出口10を通じて冷却水(イオン交換水)を流す
ようにしている。また、高電圧電極13に対しては、冷
却水循環ライン19に介装したマニホールド24から分
岐する導水パイプ24を電極管に接続して冷却水を流す
ようにしている。なお、20は冷却水の送水ポンプ、2
1は二次冷却水で冷却する熱交換器である。かかる構成
で、原料ガス入口8から送り込んだ原料ガス(酸素ガ
ス)は、オゾン発生管11の開口端から放電ギャップ1
2に流れ込んでオゾン化され、ガス出口8から流出す
る。
A water jacket 4 is provided between the ozone generating tube 11 and the partition plates 4 and 5 on the outer peripheral side of the metal tube 11a.
The cooling water (ion exchange water) is made to flow from the cooling water circulation line 19 through the cooling water inlet 9 and the outlet 10. For the high-voltage electrode 13, a water guide pipe 24 branching from a manifold 24 interposed in a cooling water circulation line 19 is connected to an electrode tube so that cooling water flows. In addition, 20 is a cooling water feed pump, 2
Reference numeral 1 denotes a heat exchanger for cooling with secondary cooling water. With this configuration, the source gas (oxygen gas) sent from the source gas inlet 8 is discharged from the discharge gap 1 through the opening end of the ozone generating tube 11.
2 and is ozonized and flows out of the gas outlet 8.

【0007】なお、ガス出口8の下流には図示しない排
気バルブが装着されており、この排気バルブの弁開度を
調整することによって、オゾン発生装置の胴内における
酸素を含む原料ガスはその圧力が例えば0.18MPa
程度に調節されている。このような圧力に調整された酸
素ガスを流した状態で、オゾン発生管11の金属管(接
地電極)11aと高電圧電極13との間に高周波電源1
6から供給された高周波電圧を印加すると無声放電が発
生し、高純度の酸素ガスがオゾン化されて高濃度のオゾ
ンが生成することは周知の通りである。
An exhaust valve (not shown) is mounted downstream of the gas outlet 8, and by adjusting the opening degree of the exhaust valve, the raw material gas containing oxygen in the body of the ozone generator is compressed to the pressure. Is, for example, 0.18MPa
It has been adjusted to a degree. With the oxygen gas adjusted to such a pressure flowing, a high-frequency power source 1 is connected between the metal tube (ground electrode) 11 a of the ozone generating tube 11 and the high-voltage electrode 13.
It is well known that when the high frequency voltage supplied from 6 is applied, a silent discharge is generated, and high-purity oxygen gas is ozonized to generate high-concentration ozone.

【0008】[0008]

【発明が解決しようとする課題】ところで、前述した従
来のオゾン発生設備では、原料ガスとして純度99.9
9%レベルの液体酸素を気化した酸素ガスを使用して長
時間連続して運転すると、運転時間の経過とともにオゾ
ン発生装置で生成するオゾンの濃度が徐々に低下すると
いった問題がある。この現象は原料ガスである酸素純度
が高くなると顕著に現れる。しかも、オゾン発生設備の
稼働中にオゾン濃度が低下すると、オゾンの持つ殺菌,
脱色,脱臭能力が弱まって需要先の上下水処理,パルプ
漂白処理などに支障を来すことになる。
By the way, in the above-mentioned conventional ozone generating equipment, the purity of the raw material gas is 99.9.
If the operation is continuously performed for a long time using the oxygen gas obtained by evaporating the liquid oxygen at the 9% level, there is a problem that the concentration of ozone generated by the ozone generator gradually decreases as the operation time elapses. This phenomenon appears remarkably when the oxygen purity of the source gas increases. Moreover, if the ozone concentration decreases during the operation of the ozone generating equipment, the ozone sterilization,
The ability to decolorize and deodorize is weakened, which impairs water and sewage treatment and pulp bleaching at the destination.

【0009】そこで、発明者等は前記現象の原因を究明
したところ、その原因には次記のことが関与しているこ
とが判明した。すなわち、無声放電方式でオゾンを生成
すると、次式(1)〜(3)で表すように反応性の高い活性
酸素(式(1)のO2 * , 式(2) のO* )が生じる。 O2 + e → e + O2 * …………(1) O2 * + e→ e + O + O* …………(2) O + O2 + M→ O3 + M …………(3)
[0009] Then, when the inventors investigated the cause of the above phenomenon, it was found that the following was involved in the cause. That is, when generating the ozone silent discharge method, (O 2 * of the formula (1), O * of the formula (2)) the following equation (1) to highly reactive active oxygen as indicated by (3) occurs . O 2 + e → e + O 2 * ... (1) O 2 * + e → e + O + O * ... (2) O + O 2 + M → O 3 + M ... … (3)

【0010】しかも、オゾン発生装置を長時間連続して
運転すると、前記の活性酸素が電極表面に吸着され、こ
の活性酸素と放電により生じたオゾンが反応する。これ
により、次式(4) 〜(6) で表すようにオゾンは酸素分
子, あるいは酸素原子に分解され、これが原因でオゾン
発生装置から取り出すオゾンの濃度を低下させる。 O3 + O2 * → O + 2O2 …………(4) O3 + O* → O2 + 2O2 …………(5) O3 + O2 - → O3 - + O2 …………(6)
When the ozone generator is operated continuously for a long time, the active oxygen is adsorbed on the electrode surface, and the active oxygen reacts with ozone generated by the discharge. As a result, as shown by the following equations (4) to (6), ozone is decomposed into oxygen molecules or oxygen atoms, which lowers the concentration of ozone extracted from the ozone generator. O 3 + O 2 * → O + 2O 2 ............ (4) O 3 + O * → O 2 + 2O 2 ............ (5) O 3 + O 2 - → O 3 - + O 2 ... ............ (6)

【0011】一方、発明者等は前記したオゾンの濃度低
下,およびその対策に関する研究で、オゾン発生装置に
送り込む酸素ガスに微量な窒素ガス(または空気)を混
入することによりオゾン濃度の低下が防げることを見い
出し、特願平11−354650号として先に提案して
いる。すなわち、次式(7) 〜(8) のように酸素に微量の
窒素を混入してオゾン発生装置の電極間に送り込むこ
と、窒素分子が放電によって励起され、これが酸素分子
と反応して窒素酸化物(NOX )の一群が生じるととも
に、この窒素酸化物と活性酸素が反応する。
On the other hand, the present inventors have studied in the above-mentioned ozone concentration reduction and its countermeasures, and found that by mixing a small amount of nitrogen gas (or air) into the oxygen gas sent to the ozone generator, the ozone concentration can be prevented from being reduced. It has been found out and proposed as Japanese Patent Application No. 11-354650. That is, as shown in the following formulas (7) to (8), a small amount of nitrogen is mixed with oxygen and sent between the electrodes of the ozone generator, and the nitrogen molecules are excited by the discharge, which reacts with the oxygen molecules to oxidize the nitrogen. with a group of objects (NO X) occurs, the nitrogen oxides and the active oxygen react.

【0012】しかも 窒素酸化物と活性酸素はオゾンと
活性酸素との反応よりも早く反応して活性酸素を酸素分
子あるいは酸素原子に分解する。これにより式(9) 〜(1
0)で表すように、活性酸素はオゾンと反応する以前にN
X 反応し、その結果としてオゾンの活性酸素による分
解が抑制される。 N2 + e → 2N* + e …………(7) N* + O2 → NO + O …………(8) NO + O* → NO + O2 …………(9) NO + O2 * →NO2 + O …………(10)
Moreover, the nitrogen oxide and the active oxygen react faster than the reaction between the ozone and the active oxygen to decompose the active oxygen into oxygen molecules or oxygen atoms. This gives equations (9) to (1
As shown by (0), active oxygen becomes N before reacting with ozone.
And O X reaction, decomposition by active oxygen of the ozone is suppressed as a result. N 2 + e → 2N * + e ............ (7) N * + O 2 → NO + O ............ (8) NO + O * → NO + O 2 ............ (9) NO + O 2 * → NO 2 + O ............ (10)

【0013】また、発明者は前述のように酸素ガスへの
微量な窒素ガスの混入が活性酸素によるオゾン分解の抑
制に寄与することを基礎に、オゾン発生設備の原料ガス
配管系についてその材料を見直す研究を進めたところ、
図3における酸素設備Aとオゾン発生装置Bとを結ぶガ
ス導管Cの材質が、オゾン発生装置Bで生成したオゾン
濃度の低下に関わり合っていることが判った。
Further, based on the fact that the incorporation of a trace amount of nitrogen gas into oxygen gas as described above contributes to the suppression of ozone decomposition by active oxygen, the inventor of the present invention used the material for the raw material gas piping system of the ozone generation equipment. After reviewing the research,
It was found that the material of the gas conduit C connecting the oxygen facility A and the ozone generator B in FIG. 3 is related to the decrease in the concentration of ozone generated by the ozone generator B.

【0014】すなわち、ガス導管Cが従来より一般に使
われているステンレス鋼のチューブであると、オゾン発
生装置Bで生成しオゾンの濃度が運転時間の経過ととも
低下するが、このステンレス鋼のチューブを別な材質で
作られたチューブに置き換えて実験を行ったところ、ガ
ス導管の材質によっては長時間連続運転してもオゾン濃
度が殆ど低下しないことを見い出した。
That is, if the gas conduit C is a conventionally used stainless steel tube, the concentration of ozone generated by the ozone generator B decreases with the elapse of operation time. Was replaced with a tube made of another material, and it was found that, depending on the material of the gas conduit, the ozone concentration hardly decreased even after continuous operation for a long time.

【0015】そこで、本発明は、前記の研究で得た知見
を基に、酸素設備とオゾン発生装置とを結ぶガス導管の
材質を適正に選定し、オゾン発生装置を長時間継続して
運転した場合でも運転初期に得られるオゾン濃度を安定
よく維持できるようにしたオゾン発生装置を提供するこ
とを目的とする。
In view of the above, the present invention is based on the findings obtained in the above-mentioned research, properly selecting the material of the gas conduit connecting the oxygen equipment and the ozone generator, and operating the ozone generator continuously for a long time. An object of the present invention is to provide an ozone generator capable of stably maintaining an ozone concentration obtained in an early stage of operation even in such a case.

【0016】[0016]

【課題を解決するための手段】上記目的を達成するため
に、本発明によれば、酸素設備と無声放電方式のオゾン
発生装置を組合せ、酸素設備から供給される高純度の酸
素ガスをオゾン発生装置に導いてオゾン化するオゾン発
生設備であり、酸素設備の酸素供給口とオゾン発生装置
のガス入口との間にガス導管を配管し、該ガス導管を通
じて酸素ガスをオゾン発生装置に供給するようにしたも
のにおいて、 (1) 前記ガス導管を非金属材料の管とする(請求項
1)。 (2) 前記のガス導管を金属管としてその内面を非金属材
料で被覆する(請求項2)。 (3) 前項(1),(2) において、ガス導管の非金属材料にフ
ッ素系樹脂,ビニール樹脂,ポリアミド系樹脂のいずれ
かを使用する(請求項3)。
According to the present invention, in order to attain the above object, according to the present invention, a high-purity oxygen gas supplied from an oxygen facility is generated by combining an oxygen facility with a silent discharge type ozone generator. Ozone generation equipment for introducing the device to ozone, wherein a gas conduit is provided between an oxygen supply port of the oxygen equipment and a gas inlet of the ozone generator, and oxygen gas is supplied to the ozone generator through the gas conduit. (1) The gas conduit is a tube made of a nonmetallic material (claim 1). (2) Using the gas conduit as a metal tube and coating the inner surface with a non-metallic material (claim 2). (3) In the above items (1) and (2), any one of a fluorine resin, a vinyl resin, and a polyamide resin is used as the nonmetallic material of the gas conduit (claim 3).

【0017】上記のようにガス導管に、フッ素系樹脂,
ビニール樹脂,あるいはポリアミド系樹脂などの非金属
材料で作られた管、もしくは金属管の内面を前記材料で
被覆したものを採用することにより、オゾン発生装置を
長時間連続運転してもオゾン濃度は初期運転時の濃度を
安定に維持することが実験結果から確認されている。
As described above, a fluorine resin,
By using a tube made of a non-metallic material such as vinyl resin or polyamide resin or a metal tube whose inner surface is coated with the above material, the ozone concentration can be maintained even if the ozone generator is continuously operated for a long time. It has been confirmed from experimental results that the concentration during the initial operation is maintained stably.

【0018】すなわち、ガス導管の非金属材料に吸着さ
れている窒素ガスが微量ずつ放出してガス導管を通流す
る高純度の酸素ガス中に混入し、後段のオゾン発生装置
に送り込まれ、これにより先記した提案(特願平11−
354650)と同様に窒素分子が放電により励起し、
酸素分子と反応して窒素酸化物が生じるとともに、この
窒素酸化物と活性酸素とが反応して活性酸素を酸素分子
あるいは酸素原子に分解し、オゾンの活性酸素による分
解が抑制されるものと推測される。
That is, the nitrogen gas adsorbed on the non-metallic material in the gas conduit is released little by little, mixed into the high-purity oxygen gas flowing through the gas conduit, and sent to the ozone generator at the subsequent stage. (Japanese Patent Application Hei 11-
As in 354650), nitrogen molecules are excited by discharge,
It is presumed that nitrogen oxides are generated by reacting with oxygen molecules, and the nitrogen oxides and active oxygen react to decompose active oxygen into oxygen molecules or oxygen atoms, thereby suppressing the decomposition of ozone by active oxygen. Is done.

【0019】[0019]

【発明の実施の形態】以下、本発明の実施の形態を図1
(a) 〜(c) の実施例に基づいて説明する。なお、実施例
の図中で図3に対応する部材には同じ符号を付してその
説明は省略する。すなわち、実施例のオゾン発生設備は
基本的に図3と同様であるが、酸素設備Aの酸素供給口
とオゾン発生装置Bのガス導入口との間に配管したガス
導管Cについて、図1(b) に示す実施例ではガス導管C
に非金属材料であるフッ素樹脂管C-1を採用している。
FIG. 1 is a block diagram showing an embodiment of the present invention.
A description will be given based on the examples (a) to (c). In the drawings of the embodiment, members corresponding to those in FIG. That is, the ozone generation equipment of the embodiment is basically the same as that of FIG. b) In the embodiment shown in FIG.
Uses a non-metallic fluororesin tube C-1.

【0020】ここで、図1(a) におけるガス導管Cに、
フッ素樹脂管C-1を採用した場合と、その比較例として
図3(b) に示したステンレス鋼管を採用した場合とにつ
いて、発明者が行った実験の結果を図2に示す。図2は
オゾン発生装置Bの放電時間(運転時間)とオゾン発生
装置の出口側で計測した生成オゾンの濃度との推移を表
している。なお、フッ素樹脂管C-1は、肉厚約1mm,
外径6〜10mmのチューブを採用した。
Here, the gas conduit C in FIG.
FIG. 2 shows the results of experiments conducted by the inventor when the fluororesin tube C-1 was used and when the stainless steel tube shown in FIG. 3B was used as a comparative example. FIG. 2 shows the transition of the discharge time (operation time) of the ozone generator B and the concentration of the generated ozone measured at the outlet of the ozone generator. The fluororesin tube C-1 has a thickness of about 1 mm,
A tube having an outer diameter of 6 to 10 mm was employed.

【0021】この特性図から明らかなように 、ガス導
管Cにステンレス鋼管を採用した場合には運転時間の経
過とともにオゾン濃度が低下している(運転初期では2
00g/Nm3であったオゾン濃度が運転時間4時間半
を経過した後には、100g/Nm3程度に低下してい
る)のに対して、ガス導管Cにフッ素樹脂管C-1を採用
した場合にはオゾン濃度の低下が殆ど見られず、運転初
期に得られたオゾン濃度をそのまま安定よく維持してい
ることが判る。
As is clear from this characteristic diagram, when a stainless steel pipe is used for the gas conduit C, the ozone concentration decreases with the lapse of operation time (in the early stage of operation, the ozone concentration decreases by 2%).
After 200 g / Nm 3 a was the ozone concentration has elapsed operating time 4.5 hours, to the reduced are) to about 100 g / Nm 3, was adopted fluororesin tube C-1 to the gas conduit C In this case, almost no decrease in ozone concentration was observed, indicating that the ozone concentration obtained in the early stage of operation was maintained stably as it was.

【0022】なお、図示実施例ではガス導管Cとしてフ
ッ素樹脂管を示したが、ほかにビニール樹脂、あるいは
ポリアミド系樹脂などの高分子材料で作られたものを採
用しても同等な効果が得られることが実験で確認されて
いる。また、図1(c)はガス導管Cの別な実施例を示す
ものであり、この実施例ではステンレス鋼管C-2の内周
面を肉厚1mm程度のフッ素樹脂C-3で被覆している。
この実施例においても、図1(b)のフッ素樹脂管C-1と
同様な効果の得られることが実験で確認されている。
In the illustrated embodiment, a fluorine resin pipe is shown as the gas conduit C. However, the same effect can be obtained by using a pipe made of a polymer material such as vinyl resin or polyamide resin. Has been confirmed in experiments. FIG. 1C shows another embodiment of the gas conduit C. In this embodiment, the inner peripheral surface of a stainless steel pipe C-2 is covered with a fluororesin C-3 having a thickness of about 1 mm. I have.
Also in this embodiment, it has been experimentally confirmed that the same effects as those of the fluororesin tube C-1 in FIG. 1B can be obtained.

【0023】なお、ステンレス鋼管C-2の内面を被覆す
る非金属材料には、フッ素樹脂のほかに、ビニール樹
脂、あるいはポリアミド系樹脂を採用しても同等な効果
が得られる。この実施例は規模の大きなオゾン発生設備
でその配管系にも十分な機械的強度が必要な場合に有効
である。なお、オゾン発生装置Bの出口側配管の材質
は、オゾン濃度の安定性に影響しないことが実験で確認
されている。
The same effect can be obtained by using a vinyl resin or a polyamide resin in addition to the fluororesin as the nonmetallic material for coating the inner surface of the stainless steel pipe C-2. This embodiment is effective when a large-scale ozone generating facility requires sufficient mechanical strength for its piping system. It has been confirmed by experiments that the material of the outlet pipe of the ozone generator B does not affect the stability of the ozone concentration.

【発明の効果】以上述べたように、本発明によれば、酸
素設備と後段の無声放電式のオゾン発生装置との間に配
管した酸素ガス供給用のガス導管に、従来のステンレス
鋼管に代えてフッ素樹脂,あるいはビニール樹脂、ポリ
アミド系樹脂の非金属材料で作られた管、もしくは鋼管
の内面を前記と同じ非金属材料で覆った管を採用するこ
とにより、オゾン発生装置のオゾン生成過程で放電によ
り生成した活性酸素によるオゾン分解を抑制できて、長
時間連続運転した場合でも安定した濃度のオゾンガスを
得ることができる。
As described above, according to the present invention, a gas pipe for supplying oxygen gas which is piped between an oxygen facility and a silent discharge type ozone generator at the subsequent stage is replaced with a conventional stainless steel pipe. By using a tube made of a non-metallic material such as fluororesin, vinyl resin, or polyamide resin, or a tube in which the inner surface of a steel tube is covered with the same non-metallic material as above, the ozone generation process of the ozone generator can Ozone decomposition due to active oxygen generated by the discharge can be suppressed, and a stable concentration of ozone gas can be obtained even after a long continuous operation.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施例によるオゾン発生設備を示し、
(a)はシステム図、(b),(c)はそれぞれ本発明の請求項
1,2に対応するガス導管の断面拡大図
FIG. 1 shows an ozone generation facility according to an embodiment of the present invention,
(a) is a system diagram, (b), (c) is a cross-sectional enlarged view of a gas conduit corresponding to claims 1 and 2 of the present invention, respectively

【図2】オゾン発生装置の実験データを基に本発明と従
来例とを対比して表したオゾン濃度と放電時間との関係
を表す特性図
FIG. 2 is a characteristic diagram showing a relationship between an ozone concentration and a discharge time in comparison between the present invention and a conventional example based on experimental data of an ozone generator.

【図3】従来におけるオゾン発生設備を示し、(a)はシ
ステム図、(b)は(a)図におけるガス導管の断面拡大図
FIG. 3 shows a conventional ozone generation facility, in which (a) is a system diagram and (b) is an enlarged cross-sectional view of a gas pipe in (a).

【図4】図3の設備に採用されるオゾン発生装置を示
し、(a)は装置全体の断面図、(b)は(a)図における高電
圧電極部の断面図
4 shows an ozone generator used in the equipment of FIG. 3, (a) is a cross-sectional view of the entire apparatus, and (b) is a cross-sectional view of a high-voltage electrode portion in FIG.

【符号の説明】[Explanation of symbols]

A酸素設備 Bオゾン発生装置 Cガス導管 C-1フッ素樹脂管 C-2ステンレス鋼管 C-3フッ素樹脂(被覆層) A oxygen equipment B ozone generator C gas conduit C-1 fluororesin pipe C-2 stainless steel pipe C-3 fluororesin (coating layer)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】酸素設備と無声放電方式のオゾン発生装置
を組合せ、酸素設備から供給される高純度の酸素ガスを
オゾン発生装置に導いてオゾン化するオゾン発生設備で
あり、酸素設備の酸素供給口とオゾン発生装置のガス入
口との間にガス導管を配管し、該ガス導管を通じて酸素
ガスをオゾン発生装置に供給するようにしたものにおい
て、前記ガス導管を非金属材料の管としたことを特徴と
するオゾン発生設備。
1. An ozone generating apparatus that combines an oxygen facility and a silent discharge type ozone generator to guide high-purity oxygen gas supplied from the oxygen facility to the ozone generator to ozonize the oxygen equipment. A gas pipe is provided between the mouth and the gas inlet of the ozone generator, and the oxygen pipe is supplied to the ozone generator through the gas pipe. Characterized ozone generation equipment.
【請求項2】酸素設備と無声放電方式のオゾン発生装置
を組合せ、酸素設備から供給される高純度の酸素ガスを
オゾン発生装置に導いてオゾン化するオゾン発生設備で
あり、酸素設備の酸素供給口とオゾン発生装置のガス入
口との間にガス導管を配管し、該ガス導管を通じて酸素
ガスをオゾン発生装置に供給するようにしたものにおい
て、前記のガス導管を金属管としてその内面を非金属材
料で被覆したことを特徴とするオゾン発生設備。
2. An ozone generating apparatus which combines an oxygen facility and a silent discharge type ozone generator and guides high-purity oxygen gas supplied from the oxygen facility to the ozone generator to ozonize the oxygen facility. A gas pipe is provided between the mouth and the gas inlet of the ozone generator, and the oxygen gas is supplied to the ozone generator through the gas pipe. Ozone generating equipment characterized by being coated with a material.
【請求項3】請求項1,または2記載のオゾン発生設備
において、ガス導管の非金属材料が、フッ素系樹脂,ビ
ニール樹脂,ポリアミド系樹脂のいずれかであることを
特徴とするオゾン発生設備。
3. The ozone generating equipment according to claim 1, wherein the non-metallic material of the gas conduit is any one of a fluorine resin, a vinyl resin and a polyamide resin.
JP2000281247A 2000-09-18 2000-09-18 Ozone generation equipment Expired - Fee Related JP4157923B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000281247A JP4157923B2 (en) 2000-09-18 2000-09-18 Ozone generation equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000281247A JP4157923B2 (en) 2000-09-18 2000-09-18 Ozone generation equipment

Publications (2)

Publication Number Publication Date
JP2002087805A true JP2002087805A (en) 2002-03-27
JP4157923B2 JP4157923B2 (en) 2008-10-01

Family

ID=18765935

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000281247A Expired - Fee Related JP4157923B2 (en) 2000-09-18 2000-09-18 Ozone generation equipment

Country Status (1)

Country Link
JP (1) JP4157923B2 (en)

Also Published As

Publication number Publication date
JP4157923B2 (en) 2008-10-01

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