JP2002076623A - Manufacturing method of ceramic wiring board - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method for appropriately crimping the area between the layers of a green sheet laminate while accurately retaining a product shape in the manufacture of a ceramic wiring board. SOLUTION: A cavity 11 is formed as a sheet side recessed section that is open at the uppermost layer of the green sheet laminate 20 where a plurality of ceramic green sheets (a first layer 16, a second layer 14, and a third layer 12) are laminated, and a flexible elastic member 2 where a constant projection pattern is formed on the surface is overlapped to the green sheet laminate 20 so that the side of the projection pattern is located at the side of the recessed pattern. Then, by pressing the green sheet laminate 20 in the lamination direction by the flexible elastic member 2, the green sheet laminate 20 is pinched by the flexible elastic member 2 and a tool 40, and at the same time an elastic member side projection 4 is forcibly deformed when the projection 4 that does not correspond to the sheet side recessed section (cavity 11) is generated for allowing the elastic member side projection 4 to enter the cavity 11, thus crimping the area between the layers of the green sheet laminate 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method for manufacturing a ceramic wiring board.

[0002]

2. Description of the Related Art A ceramic wiring board having a ceramic laminated structure is manufactured, for example, as follows. First, a cavity is formed in a ceramic green sheet of alumina or the like, and a metallized ink containing tungsten, molybdenum or the like as a main component is screen-printed. Next, such ceramic green sheets are laminated, and they are pressed by applying a compressive force in the thickness direction, and then fired.

As described above, the pressing of ceramic green sheets is generally performed by applying a compressive force to the laminate in the thickness direction to press the layers between the layers. The crimping is completed successfully until
In addition, there has been a demand for a method in which deformation of a product is effectively prevented when a compressive force is applied or when the compressive force is released, and a shape of a laminated body after pressure bonding is maintained with high accuracy.

[0004]

SUMMARY OF THE INVENTION An object of the present invention is to provide a method of manufacturing a ceramic wiring board, which is capable of satisfactorily pressing between layers of a green sheet laminate while maintaining a product shape with high precision. Is to do.

[0005]

Means for Solving the Problems and Action / Effect In order to solve the above-mentioned problems, the present invention relates to a sheet formed by laminating and pressing a plurality of ceramic green sheets and forming one or more sheets on the uppermost layer. The method includes a pressure bonding step of manufacturing a green sheet laminate (hereinafter, also simply referred to as a laminate) having side recesses. In the pressure bonding step, one or more elastic member-side protrusions are formed on the green sheet laminate by the sheet side recesses. A flexible elastic member formed on the surface in a shape different from the shape of the above is overlapped so that the side of the elastic member side convex portion is located on the side where the sheet side convex portion is opened, and further, the green sheet laminate is formed by the flexible elastic member. The method for manufacturing a ceramic wiring board is characterized in that the layers of the green sheet laminate are pressure-bonded by pressing the layers in the stacking direction.

As described above, if the flexible elastic member having the elastic member-side convex portion is used for pressure bonding, the elastic member-side convex portion is opened to the uppermost layer of the laminate, and the sheet-side concave portion (hereinafter also referred to as a cavity). ). That is, when a flexible elastic member having a flat contact surface is used, the amount of deformation of the contact surface of the flexible elastic member due to the entry of the flexible elastic member into the sheet-side concave portion becomes excessively large. Although the amount of pressurization must be increased, according to the above method, even if the elastic member-side convex portion is not forcibly deformed, a part of the elastic member-side convex portion can enter the sheet-side concave portion.

In the case where a flexible elastic member having a flat contact surface is used, a part of the flexible elastic member filled in the cavity at the time of pressing is elastic when the compressed state is released. A free state is established by the return force. If the amount of return is excessive, the inside of the cavity is excessively depressurized, and as a result, buckling may occur. For example, as shown in FIG. 14, when an elastic material having a flat contact surface is used for crimping,
Most of the cavity 11 becomes a void when it comes into contact with the uppermost layer of the laminate, so the flexible elastic member 101 must be deformed so as to fill the void. In addition, before the flexible elastic member 101 enters the cavity 11, the opening of the cavity 11 is in a state of being tightly sealed. Further, even if the flexible elastic member 101 enters the cavity as shown in FIG. 14 (b), the elastic return of the flexible elastic member 101 is large when the pressure is released. 14C becomes excessive, buckling occurs as shown in FIG. 14C, and there is a possibility that the product becomes defective. Also, when using an elastic member whose contact surface has a shape that matches the shape of the cavity in advance, similarly to the above, the decompression state becomes excessive, buckling may occur, and there is a possibility that a product defect may occur. Was.

On the other hand, if the elastic member-side convex portion is made to enter the cavity as described above, the forced elastic deformation of the flexible elastic member is restored to such an extent that the opening of the cavity is opened after the compression, and the elastic member side still remains. A part of the protrusion occupies the space in the cavity. Also, since the shape of the elastic member and the cavity are not the same,
There is a gap between the two. Therefore, the degree of decompression is extremely small as compared with the above flat surface shape, or buckling can be prevented since decompression hardly occurs, which contributes to providing high-accuracy products and improving yield. Also, since the shape of the cavity differs depending on the product type, when the elastic member side convex portion uses a flexible elastic member that matches the shape of the cavity, many types of jigs are required as many as the product types. According to the manufacturing method of the invention, one kind of jig can be used for many kinds. Because of such versatility, the jig can be manufactured at a reduced cost.

When the green sheet laminate is pressed in the laminating direction by the flexible elastic member, the green sheet is forcedly deformed so that the elastic member-side convex portion enters the sheet-side concave portion. The layers of the laminate can be pressed together.

[0010] In addition, the covering plate having a through-hole having a smaller area than each of the sheet-side recesses is formed at a position corresponding to each of the sheet-side recesses so that the inner peripheral edge of the opening of each of the sheet-side recesses is not exposed in the through-hole. By covering the uppermost layer surface of the green sheet laminate with a flexible elastic member over the cover plate and pressing, the elastic member-side convex portion enters the sheet-side concave portion through the through hole of the cover plate. I can do it.

As described above, by covering the uppermost layer surface portion with the cover plate, it is possible to cover a position on the uppermost layer surface portion where pressing by the flexible elastic member is not desired. For example, when a through hole or the like (for example, castellation) other than the cavity is formed in the uppermost layer surface portion of the sheet, the flexible elastic member enters the through hole or the like by pressure contact, and the laminate ( For example, the vicinity of the through-hole) is deformed and the shape accuracy is reduced. On the other hand, if the cover plate covers a position where pressure contact is not desired, such deformation can be prevented, and the uppermost surface of the sheet serving as the contact surface can be effectively protected. Furthermore, the cover plate covers the uppermost surface of the green sheet laminate so that the inner peripheral edge of the opening of each sheet-side recess is not exposed in the through-hole, so that the flexible elastic member enters the sheet-side recess. The concentration of pressure on the inner peripheral edge of the opening by the flexible elastic member can be prevented, and the shape of the inner peripheral edge of the opening can be maintained with high accuracy. Further, it is possible to prevent the corner of the cover plate from hitting the vicinity of the cavity, thereby preventing the green sheet from being damaged or deformed.

As the elastic material in the present invention, a soft elastic material such as rubber and elastomer can be used, and among them, silicone rubber can be particularly preferably used. According to this, the elastic member-side convex portion smoothly enters the cavity due to excellent flexibility, and is extremely functional because it has both durability and chemical resistance.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiments of the present invention will be described with reference to embodiments shown in the drawings. FIG. 1 is a plan view showing an example of a green sheet laminate to be subjected to the production method of the present invention. First, the state before the pressure bonding step of the laminate will be described with reference to FIGS. 1 and 2. The green sheet laminate 20 is formed by laminating a plurality of (three in this embodiment) ceramic green sheets. Further, a plurality of wiring board manufacturing units (hereinafter, also referred to as wiring board units) 15 (parts surrounded by a thick black frame in FIG. 1) in which the work boards 10 are collectively arranged in an integrated manner (eight in FIG. 1). One) is formed in a form that includes. 2A, the work substrates 10 are formed in a predetermined arrangement as shown in FIG. 2A, and a plurality of wiring substrate manufacturing units 15 are integrated as shown in FIG. The green sheet laminate 20 is formed in the shape.

As shown in FIG. 2B, the work board 10 provided in the wiring board manufacturing unit 15 has a cavity 11 as a sheet-side concave portion opened to the uppermost layer side. The cavity 11 has an uppermost layer hole 11a (also referred to as a third layer hole 11a) penetrating the uppermost layer 12 and a second layer 14 as a bonding pad layer, as shown in the AA sectional view of FIG. The penetrating second layer holes 11 b are formed at positions corresponding to each other, and the first layer 16 is formed in the cavity 1.
1 forms the bottom. The number of layers is not limited to this, and may be an appropriate number (for example, 2 to 6 layers).

Further, at a predetermined position of the ceramic of each layer,
Via holes for wiring are formed, and the via holes in each layer are filled with via conductors by screen printing of a conductive paste such as molybdenum or tungsten.
Furthermore, a wiring pattern is screen-printed on the upper surface of each ceramic layer with a metal conductive paste.

Incidentally, such a green sheet laminate 2
For example, a green sheet mainly composed of alumina ceramic or the like is manufactured by a doctor blade method or the like, and the green sheet is cut into a predetermined size. Hole is punched at a predetermined position. In addition, tungsten (W) or molybdenum (Mo)
By filling a metallized ink mainly containing a high melting point metal such as the above, a via is formed to penetrate the ceramic green sheet in the vertical direction. On the surface of the ceramic green sheet, the same metallized ink as described above is printed in a predetermined pattern by screen printing to form a metallized layer. Then, a third layer hole 11a and a second layer hole 11b which are to be sheet-side recesses are formed at predetermined positions of the ceramic green sheets, and the ceramic green sheets are stacked to form a green sheet laminate 20.
Get. The green sheet laminate 20 is temporarily bonded in a state where a bonding solvent is applied between the layers.
Then, the layers of the green sheet laminate 20 are pressure-bonded in a pressure-bonding step described below.

First, an outline of the pressure bonding step will be described. A plurality of ceramic green sheets (first layer 16, second layer 1)
4. Green sheet laminate 2 on which third layer 12) is laminated
The cavity 11 is formed as described above as a sheet-side concave portion that is opened in the uppermost layer of No. 0. The green sheet laminate 20 to be obtained is one in which a different concave portion pattern is formed depending on the type of ceramic wiring board. It is.
Then, in the pressing step, a flexible elastic member having a fixed convex pattern formed on the surface thereof is formed on a plurality of green sheet laminates having different concave patterns (see FIG. 4:
4A and 4B show a perspective view and a plan view of an example of the soft elastic member. ) Are overlapped so that the convex pattern side is located on the concave pattern side. FIG. 6 shows a state in which these are superimposed.

By pressing the green sheet laminate 20 in the laminating direction with such a flexible elastic member 2, the elastic member-side convex portion 4 formed in a shape different from the sheet-side concave portion (cavity 11) is forcibly applied. The layers of the green sheet laminate 20 are pressure-bonded while deforming so that the elastic member-side protrusions 4 enter the cavities 11. In this crimping, the laminate 20 is narrowed by the soft elastic member 2 and the jig 40 as shown in FIG. For example, this narrow pressure can be performed by pulling the flexible elastic member 2 toward the jig 40 by so-called vacuuming or the like. Further, the jig 40 is provided with a heater (not shown) so as to heat the laminated body 20, and performs thermocompression bonding by heating the heater in addition to the above-described narrow pressure.

In this embodiment, as the surface shape of the flexible elastic member 2, as shown in the perspective view of FIG. 4A and the plan view of FIG. Is adopted in which a plurality of ridges 4 are arranged. The flexible elastic member 2 has a shape in which the ridge 4 and the plate 5 are integrated, and the ridge 4 protrudes from the plate 5. The cross-sectional shape of the ridge portion 4 can be formed so that the cross-sectional outline is substantially semicircular as shown in the main part cross-sectional view of FIG. 5, but the shape is not limited to this. The line shape can be variously selected, such as a substantially U-shape, an elliptical semicircle, a U-shape, and the like. Note that the maximum width W ₁ of the opening of the sheet-side concave portion (that is, the cavity 11) (see FIG. 2B).
And the ratio W ₁ / W ₂ of the maximum width W ₂ of the elastic member side convex portion is:
1 to 17 (preferably 1 to 15, more preferably 1 to
13), the size of the elastic member side convex portion (FIG. 5).
In (2), the size of the ridge 4) can be adjusted. The maximum width _{W 1} of the opening of the cavity 11, cavity 11
When two points having different positions on the inner peripheral edge of the opening are selected, this means a two-point interval at which the distance between the two points is maximized. In this embodiment, as shown in FIG. 2B or FIG. 10, a cavity opening formed in a substantially square shape (a predetermined radius is formed at four corners in this embodiment) in a diagonal direction. the width and the maximum width W ₁ of the opening of the sheet side recess.

Furthermore, the convex portion maximum width _{W 2} can be defined as follows. In other words, as shown in FIG. 4, when the elastic member-side convex portion has a convex ridge shape, it means the maximum width in the direction perpendicular to the projecting direction of the elastic member-side convex portion in a cross section perpendicular to the ridge direction. FIG. 5 shows a cross section perpendicular to the ridge direction. In FIG. 5, the maximum width in the vertical direction (the plate surface direction of the platy portion 5) with respect to the protruding direction of the protruding ridge portion 4 (the thickness direction of the platy portion 5). W ₂ has a protruding base end position of the ridge portion 4. In addition, the projecting direction of the elastic member-side convex portion means a direction perpendicular to a reference plane configured such that the base end of the elastic member-side convex portion is located on the surface. In the example of FIG. 5, the protruding ridges 4 protrude from the reference surface 50 indicated by the one-dot chain line as a base end. In other words, it can be expressed in the direction of the surface. 12 (a) to 12 (c) show modified examples of the ridges 4, but in any case, in the direction perpendicular to the direction in which the ridges 4 protrude (that is, in the plane direction of the reference plane). , The maximum width of the ridge 4 is W ₂ , and the height is H.
_{It is 2} . If the ratio W ₁ / W ₂ is 17 or more, the size of the elastic member side convex portion becomes too small, and a desired effect may not be obtained. Further, when it is 1 or less, the elastic member side convex portion is excessively large with respect to the opening of the cavity, and the outer surface shape of the elastic member convex portion is closer to a flat surface compared to the cavity size, and the flat surface shape The same disadvantages as those of the flexible elastic member may occur. Setting these values in the above range solves these problems. When the ratio is 1 to 15, the elastic member convex portions reach all corners in the cavity, which is a preferable range in which a sufficient pressing force is applied in the cavity. Further, when it is set to 1 to 13, the effect becomes extremely remarkable.

The flexible elastic member can be similarly applied to other laminates having different concave patterns in the uppermost layer of the green sheet laminate. For example, the present invention can be applied to the laminate of FIG. 9 having a concave pattern different from that of the laminate of FIG. The laminate of FIG. 9 is the same as the laminate 20 of FIG.
And the whole are substantially the same size, and the size and number of the wiring board manufacturing units 15 and the size and number of the work boards are different from those in FIG. FIG. 10 shows the work substrate 10 of the laminate, but also in this case, the cavity 11 and the elastic member-side convex portion are set so as to be within the above range (that is, W ₁ / W ₂ is 1 to 17). Can be adjusted. In other words, even if the size is a flexible elastic member, W ₁
/ W ₂ can be applied to various cavities in the range of 1 to 17 (that is, to the green sheet laminate). As described above, a single flexible elastic member can be applied to various kinds of laminates, and the manufacturing method is extremely versatile. As the size, for example, the maximum width _{W 2} can be set to 3.37mm. As another example of the size of the flexible elastic member 2, as shown in FIG. 5, for example, the width W ₃ between the ridges is 1.22 mm, and the height H of the ridges 4 is H.
₂ 1.60 mm, a height _{H 1} including the convex portion of the flexible resilient member can with 8 mm (or 11 mm). The thickness of the flexible elastic member 2 can be set according to the thickness of the target laminate. Specifically, as shown in FIG. 6, when the flexible elastic member 2 is set on the laminate, the flexible elastic member 2 is set in accordance with the thickness of the laminate so that the upper surface of the flexible elastic member 2 projects from the jig 40. Thickness can be set.

In the above description, the projections on the elastic member side in the form of convex stripes have been described. However, as shown in FIG. The side convex portions may be dispersedly formed, for example, in a projection shape. In FIG. 13A, the surface of the flexible elastic member 2 is formed by dispersing a plurality of mountain-shaped protrusions 41 each having a gentle foot. The shape of the protrusion 41 as the elastic member-side protrusion is a hemisphere in FIG.
Various shapes can be applied as in the example of the gentle foot shape shown in FIG. The maximum width W ₂ in the case of the elastic member side protrusion employing such a dispersion form is defined as follows. That is, when the projections in the dispersed form are viewed in plan from the projecting side, the maximum diameter of the contour of the projections is defined as the maximum width W _2.
And In other words, the maximum width W ₂ is maximized distance between two points when selecting two different points in the contour. In the case where the projection 41 is hemispherical as shown in FIG. 13B, the outline in the plan view becomes the outer edge outline 43a of the base end surface 43 which is the base end of the projection 41. This definition is similarly applied to the projections shown in FIG. 13C or other shapes.

In the pressing step, FIG.
As shown in (a), the inner peripheral edge of the opening of each cavity 11 is not exposed in the through hole 29 by the cover plate 25 in which a through hole 29 having a smaller area than each cavity 11 is formed at a position corresponding to each cavity 11. Cover the uppermost layer surface of the green sheet laminate 20. The cover plate 25 can have substantially the same shape as the green sheet laminate 20 (FIG. 1), for example, as shown in FIG. 3, and further, the same number of through holes 29 as the work boards 10 are provided in the same arrangement as the work boards 10. be able to. Then, positioning holes for positioning are formed at positions corresponding to each other of the green sheet laminate 20 and the cover plate 21, and positioning can be performed by inserting a positioning member into the positioning holes. More specifically, as shown in FIG.
Are formed in a predetermined number (four at four corners in this embodiment). Further, as shown in FIG. 3, also in the covering plate 25, the covering plate side positioning holes 31 are overlapped with the laminated body side positioning holes 21 at the same positions. It is formed. The positioning of the green sheet laminate 20 and the cover plate 25 in the direction of the board surface is restricted by passing through the positioning holes 21 and 31 together with the shaft member.

In this position, the flexible elastic member 2 is placed over the cover plate 25 and pressed, so that the elastic member side convex portion (that is, the convex portion on the elastic member side as shown in FIGS. 7A to 7C). The protruding ridge portion 4) is caused to enter the sheet-side concave portion (that is, the cavity 11) through the through hole 29 of the cover plate 25. FIG. 7A schematically shows a state in which the ridges 4 are close enough to contact one surface of the cover plate 25, and FIG. 7B shows a state in which the ridges 4 close the opening of the cavity 11. FIG. 7 (c) shows a state in which the protrusion has advanced to such an extent that the ridge 4 almost fills the cavity 11. FIG. When the pressure by the flexible elastic member 2 is reduced after reaching FIG. 7C, the state returns to the same state as that of FIG. 7B again, and the flexible elastic member 2 is further separated from the state shown in FIG. ).

As described above, when the protruding ridges 4 serving as the elastic member-side convex portions are made to enter the cavity 11, the flexible elastic member is brought to such an extent that the opening of the cavity 11 is opened as shown in FIG. When the forced deformation of
Still, a part of the elastic member-side convex portion (projecting ridge portion 4) occupies the space in the cavity. Therefore, the degree of decompression is extremely small as compared with a flat surface shape as shown in FIG. 14 or a shape having a convex portion having the same shape as the cavity shape, or buckling can be prevented since decompression hardly occurs, and as a result, It contributes to providing high-precision products and improving yield.

As shown in FIG. 7 (c), the ridges 4 are elastically deformed so as to follow the inner surface of the concave portion of the cavity 11 serving as the concave portion on the sheet side so as to be substantially in close contact with the inner surface of the concave portion. As described above, when the elastic member-side convex portion is made to come into close contact with the inner surface of the concave portion, each layer is pressed evenly in the cavity 11 down to the details of each layer. For example,
The bottom first layer 16 is sufficiently pressed by the ridges 4,
Further, the ridges 4 reach the vicinity of the inner peripheral edge of the third layer hole 11a and the second layer 11b, and the portion that has entered the vicinity of the inner peripheral edge can block the leakage of the solvent applied between the layers into the cavity. . In addition, as a material of the cover plate 25, a material harder than the ceramic green sheets constituting the green sheet laminate, for example, a metal material such as stainless steel can be used, but is not limited thereto.

FIGS. 8A to 8C show an example in which a plurality of elastic member-side protrusions enter one cavity. According to this example, almost as in FIG.
A plurality of the ridges 4 as the elastic member side protrusions are formed in the cavity 1.
1, and from the separated state of FIG.
The state sequentially shifts to the state shown in FIG. 8C. At the time of pressure bonding, as shown in FIG. After the pressing, the pressurization by the soft elastic member 2 is released, so that FIG.
The state shown in FIG. 8C is again shifted to the state shown in FIG. At this time, since the shape of the cavity 11 and the shape of the portion to enter are not the same, a minute gap exists between the inner surface of the cavity and the surface of the flexible elastic member due to the unevenness of the elastic member side convex portion. Thereby, the surface of the flexible elastic member and the inner surface of the cavity are satisfactorily separated from each other (that is, the inner surface of the cavity does not come into close contact with the flexible elastic member and interlock with it). Further, when the pressurization is released, a small gap due to the unevenness of the surface of the flexible elastic member exists between the inner edge of the cavity opening and the entry side surface of the flexible elastic member, so that the air in the cavity is well ventilated, As shown in FIG. 8B, during or after the elastic return, the soft elastic member (particularly, the convex portion on the elastic member side) occupies the cavity to some extent, so that the pressure reduction in the cavity is suppressed. In addition, as shown in FIG. 8 and the like, the outer surface shape of the elastic member-side convex portion (the protruding ridge portion 4, the protruding portion 41, etc.) is formed by a horn-shaped portion such as a two-sided joint or a three-sided joint, also called a corner. (That is, it may be formed only by a curved surface). According to this, pressure concentration due to the corners does not occur, and damage to the grease sheet laminate (particularly in the cavity) can be effectively prevented.

The flexible elastic material used for the flexible elastic member is an Asker F-type hardness tester (manufactured by Kobunki Kiki Co., Ltd.).
Can be adjusted so that the F-scale value is greater than 50 ° and less than or equal to 90 ° (preferably greater than 60 ° and less than or equal to 90 °, more preferably greater than 70 ° and less than or equal to 90 °). If the angle exceeds 90 °, it is difficult for the elastic member-side protrusion to enter the cavity, and it is difficult to uniformly press the ceramic green sheet. On the other hand, if the angle is not more than 50 °, it is difficult to maintain the shape of the flexible elastic member or to favorably press the inside of the cavity. Adjustment to the above range solves these problems. When this range is set to be larger than 60 ° and equal to or smaller than 90 °, it is a preferable range in which the flexible elastic member can smoothly enter the cavity and good pressurization by the flexible elastic member can be performed. Further, when the angle is larger than 70 ° and equal to or smaller than 90 °, the effect becomes extremely remarkable.

Further, a flexible elastic material such as rubber or elastomer can be used as the flexible elastic member in the present invention.
Among them, silicone rubber can be particularly preferably used.
According to this silicon rubber, the elastic member has excellent flexibility, so that the elastic member-side convex portion can smoothly enter the cavity, and has durability (for example, deterioration resistance against repeated use) and chemical resistance (for example, a laminate). It is extremely functional because it also has resistance to a bonding solvent interposed between layers.

The flexible elastic member is divided into a cavity covering region for covering the cavity and a positioning region including the positioning hole 9 used for positioning and the vicinity thereof.
The hardness of these regions can be adjusted so as to be different from each other, specifically, so that the hardness of the positioning region is higher than the hardness of the cavity covering region. For example, in FIG. 4B, the vicinity of the long side of the flexible elastic member 2 which is formed in a substantially rectangular shape when viewed in a plan view is set as the positioning region 7, and the other inside is set as the cavity covering region. . Since the positioning hole 9 is inserted through the positioning shaft-shaped member, the inner surface of the hole is easily eroded, and a hardness is required in the vicinity of the positioning hole 9 such that the erosion is not excessive. For this purpose, for example, the hardness of the positioning region 7 is set to the above F
It is preferable to adjust the scale so that it is larger than 90 ° and equal to or smaller than 150 °. The positioning hole 9 is the hole 2
1 and 31 are provided so as to overlap, and are penetrated therewith by the positioning member. In the above embodiment,
Although one multi-cavity wiring board is put in the jig 40 and crimped, the present invention is not limited to this. For example, a plurality of multi-cavity wiring boards may be set, or a plurality of wiring board units may be set and crimped.

The green sheet laminate 20 is press-bonded in such a press-bonding step, and the green sheet laminate 20 after the press-bonding is baked into a predetermined size (for example, each of the wiring board manufacturing units 15 (FIG. 1)). Disconnect. In addition, various inspection processes are provided in association with the crimping process or various processes before and after the crimping process.

The embodiment of the present invention has been described above.
The present invention is not limited to this, and is not limited to the language described in each claim unless it departs from the scope described in each claim, and extends to a range that can be easily replaced by those skilled in the art, and It is possible to appropriately add improvements based on the knowledge that those skilled in the art normally have. For example, the material of the ceramic green sheet is not limited to alumina, and various ceramics such as aluminum nitride, silicon nitride, glass ceramic, and zirconium, or a mixture thereof can be used. Further, as a material, a low-temperature fired ceramic may be used, for example, BaO—Al ₂ O ₃ —Si
O ₂ based _{materials, CaO-Al 2 O 3 -SiO} 2 based materials, C
_{aO-Al 2 O 3 -SiO 2} -B 2 O 3 based mixture of the glass powder and the _Al 2 _{O 3} powder, _{MgO-Al 2} O 3 -S
iO ₂ -B ₂ O ₃ based mixture of the glass powder and the _Al 2 _{O 3} powder, or glass powder and the Al of _SiO 2 _-B 2 _{O 3} based
_A ceramic that can be fired at 800 to 1000 ° C., such as a mixture with ₂ O ₃ powder, may be used.

When a glass-ceramic material comprising a low-melting glass component and a filler material such as ceramic is used, for example, the low-melting glass component may be cordierite, mullite, anode site, cellian, spinel, carnite, willemite. , Dolomite, petalite, ozumilite and its substituted dielectrics are glass components capable of precipitating at least one kind of crystal phase, and the filler material is cristobalite, quartz, corundum (α)
Alumina) and the like.

The material which is the main component of the metallized ink, that is, the conductor paste is not limited to Mo and W, but may be A
g, Ag / Pd, Ag / Pt, Au, Cu, or the like, or a mixture obtained by kneading a conductive material mainly containing a mixture thereof into a paste with a predetermined solvent, Ag powder, Cu powder, Au powder, etc. A conductive paste containing a low melting point glass frit and an organic vehicle as a main component may be used. Further, the production method of the present invention is a so-called PGA
It can be used for various wiring boards including molds and leadless chip carriers.

[Brief description of the drawings]

FIG. 1 is a plan view showing an example of a green sheet laminate.

FIG. 2 is a plan view illustrating an example of a wiring board manufacturing unit, a plan view illustrating an example of a work board, and a cross-sectional view taken along line AA.

FIG. 3 is a plan view showing an example of a cover plate.

FIG. 4 is a perspective view and a plan view showing an example of a flexible elastic member.

FIG. 5 is an explanatory diagram for explaining a main part shape of a flexible elastic member.

FIG. 6 is an explanatory view conceptually illustrating the configuration of a laminate, a cover plate, a jig, and a flexible elastic member in a pressure bonding step.

FIG. 7 is an explanatory diagram for explaining the approach of the elastic member-side protrusion into the cavity.

FIG. 8 is an explanatory view showing another example of FIG. 7;

FIG. 9 is a plan view showing another example of the green sheet laminate.

FIG. 10 is a plan view showing an example of a work substrate of the green sheet laminate of FIG. 8;

FIG. 11 is a plan view showing an example of a cover plate corresponding to the green sheet laminate of FIG. 8;

FIG. 12 is an explanatory view showing a modification of the elastic member-side convex portion.

FIG. 13 is an explanatory view showing an example of a flexible elastic member having dispersed projections.

FIG. 14 is an explanatory view of a case where a soft elastic member whose crimping side is formed on a flat surface is used.

[Explanation of symbols]

 2 Flexible elastic member 4 Projected ridge (elastic member side convex portion) 11 Cavity (sheet side concave portion) 12 Third layer (top layer) 20 Green sheet laminated body 25 Coating plate 41 Projection portion (elastic member side convex portion)

Claims (6)

[Claims] 1. A pressure bonding step of stacking and pressing a plurality of ceramic green sheets to produce a green sheet laminate in which at least one or more sheet-side recesses formed in an uppermost layer are opened, For the green sheet laminate, one or more elastic member-side protrusions are formed on the surface in a shape different from the shape of the sheet-side recesses, a flexible elastic member,
The green sheet stacking is performed by overlapping the elastic member side convex portion so that the side of the sheet side concave portion is opened, and pressing the green sheet laminate in the stacking direction by the flexible elastic member. A method for manufacturing a ceramic wiring board, comprising: crimping between layers of a body. 2. When the grease sheet laminate is pressed in the laminating direction by the flexible elastic member, the elastic member-side convex portion is forcibly deformed so that the elastic member-side convex portion enters the sheet-side concave portion. 2. The method for manufacturing a ceramic wiring board according to claim 1, wherein the layers of the green sheet laminate are pressure-bonded. 3. The method for manufacturing a ceramic wiring board according to claim 1, wherein the elastic member-side convex portions are formed in a dispersed form on the surface of the flexible elastic member. 4. The method for manufacturing a ceramic wiring board according to claim 1, wherein the elastic member-side convex portion includes a plurality of convex portions arranged in a convex shape. 5. A maximum width W _{1 of} an opening of the concave portion on the sheet side.
When the ratio _W between the maximum width _{W 2} of the elastic member side protrusion 1 / _{W 2}
5. The method for manufacturing a ceramic wiring board according to claim 1, wherein the value is adjusted to fall within a range of 1 to 17. 5. 6. The ceramic according to claim 1, wherein the elastic member-side convex portion is elastically deformed so as to follow an inner surface of the concave portion of the sheet-side concave portion so as to be substantially in close contact with the inner surface of the concave portion. Manufacturing method of wiring board.