JP2002075217A - Plasma display member, plasma display and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a plasma display that has high luminance and is stable in display action and its manufacturing method. SOLUTION: This manufacturing method of a plasma display has a process in which a sealing frit is applied and fired on a plasma display member which has a residual carbon content of 15 at % or less on the fluorescent layer surface after formation of plasma display and a member which has formed a fluorescent layer by applying and firing a fluorescent substance paste and/or a member which has formed plural electrodes for discharging, and then both members are sealed, and a process in which vacuum exhausting is made and a gas for discharging is sealed. After the fluorescent substance layer is formed on the members, ultraviolet rays are applied on the fluorescent layer in the atmosphere containing oxygen.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a member for a plasma display, a plasma display, and a method of manufacturing the same.

[0002]

2. Description of the Related Art In a plasma display, a plasma discharge is generated between electrodes for discharge in a discharge space provided between a member on which a plurality of electrodes for discharge are formed and a member on which a phosphor layer is formed. The display is performed by irradiating the fluorescent material provided in the discharge space with ultraviolet rays generated from the gas sealed in the discharge space. In an AC type plasma display, an MgO (magnesium oxide) film is often formed on a member on which a plurality of electrodes for discharge are formed in order to protect the electrodes and the dielectric layer from ion bombardment during discharge. . In addition, MgO is a metal oxide having a high secondary electron emission coefficient, and the use of MgO also has an advantage that the discharge starting voltage of the plasma display is reduced, so that driving is easy.

In a plasma display, since the surface of an MgO film or the surface of a phosphor layer is in contact with a discharge space,
These surface conditions greatly affect the discharge characteristics and light emission characteristics of the plasma display. The surface state of the MgO film is an important factor in stabilizing the display, drivability, long life, and the like, and the phosphor layer surface is sensitive to luminance characteristics.

MgO is susceptible to atmospheric components such as H ₂ O and CO _2, and Mg (OH) ₂ , Mg
CO _{3 and the} like are easily formed. Mg (O)
When H) ₂ and MgCO ₃ are formed, it is likely to occur a problem discharge voltage increases.

[0005] The phosphor layer is formed by applying a phosphor paste containing a phosphor powder and a resin component by a screen printing method or the like, and then baking it at about 500 ° C. If the firing temperature is too high, the phosphor powder tends to deteriorate (decrease in luminance), while if it is too low, the problem that the firing residue tends to remain tends to occur.

Conventionally, as a method of manufacturing a plasma display, a member formed with a plurality of electrodes for discharge and a member formed with a phosphor layer, which have been prepared in advance, are sealed with a sealing frit and heated to about 350 ° C. There is a method in which the inside of the sealed member, that is, the inside of the discharge space is evacuated to fill the discharge gas. The purpose of evacuating while heating is not only to discharge residual gas inside the discharge space,
The Mg (OH) ₂ and MgCO ₃ MgO layer surface is to modify the MgO.

[0007] It is difficult to modify the surface state of the MgO film only by evacuating while heating as described above.
JP-A-000-67989 discloses a method of irradiating a protective layer such as an MgO film with ultraviolet rays to perform surface modification.
Japanese Patent Application Laid-Open No. 000-57939 also discloses a method of plasma-treating a protective layer.

However, these techniques alone have not been sufficient in terms of the reliability of the display operation.

[0009]

The present inventors have considered that it is important to reduce the carbon component remaining on the phosphor layer surface.
That is, according to the conventional manufacturing method, the phosphor paste containing the phosphor powder and the resin component is applied between the partition walls for partitioning the cells by a screen printing method or the like, and then usually at 500 ° C.
Heat to a degree and bake. In the step of firing the phosphor layer,
Although the resin component is decomposed, burned and gasified and removed, if the firing temperature is too low, the carbon component is likely to remain without removing the resin component. Even if the firing temperature is increased, not only is it difficult to completely remove the carbon component present on the outermost surface of the phosphor layer, but also
It has been found that problems such as deterioration of the phosphor powder and reduction in luminance and chromaticity change are likely to occur.

[0010] After the phosphor layer is formed, at least one of a member on which the phosphor layer is formed and a member on which a plurality of electrodes for discharge are formed is formed of a sealing paste obtained by mixing a low softening point glass frit and a resin component. Is applied by a screen printing method or a dispenser method. Thereafter, a baking step of heating the member to which the sealing paste has been applied and removing the resin component in the sealing paste is performed. A sealing step in which the member on which the fired sealing paste is formed and the member to be paired with each other are stacked and heated again, and the member on which the phosphor layer is formed and the member on which a plurality of electrodes for discharge are formed are bonded. I do.

Finally, a heating and exhausting step of evacuating while sealing the inside of the member to about 350 ° C. is performed.
The discharge gas is sealed to complete the plasma display.

In the baking step of the sealing paste, the resin component in the sealing paste is decomposed, burned, and gasified and removed as in the baking step of the phosphor layer. And the remaining gas components adhered to the surface of the phosphor layer when the temperature of the sealing paste was lowered in the firing step.

The carbon component attached to the surface of the phosphor layer in the baking step of the sealing paste remains on the surface of the phosphor layer without being removed in the subsequent sealing step or heating and exhausting step. Since the remaining carbon component absorbs the ultraviolet light generated by the plasma discharge, the amount of ultraviolet light incident on the phosphor itself is reduced,
This causes a decrease in brightness. In addition, charged particles of electrons and rare gases generated by reset discharge between a member having a plurality of electrodes for discharge and a member having a phosphor layer collide with the phosphor layer, so that the surface of the phosphor layer It is considered that the carbon component remaining in the gas gradually jumps into the discharge space. The carbon component that has jumped into the discharge space is ionized by the energy of the discharge during lighting of the plasma display, that is, during discharge,
Furthermore, it is accelerated by the driving voltage and collides with the MgO film on the front panel,
An altered layer such as MgCO ₃ is easily formed on the surface of the MgO film. Further, it is considered that these carbon components are adsorbed on the MgO film surface when the plasma display is not lit, that is, when no discharge is performed.

If a deteriorated layer is formed on the surface of the MgO film or a gas component other than the discharge gas is adsorbed, the discharge voltage increases, so that stable display operation cannot be performed.

The present invention has been made in view of the above-mentioned new problems in the prior art, and an object of the present invention is to form a phosphor layer having a small amount of residual carbon component on the surface, thereby achieving high luminance. And to provide a plasma display having a stable display operation and a method of manufacturing the same.

[0016]

That is, the present invention provides a member for a plasma display having a phosphor layer, wherein the residual carbon component on the surface of the phosphor layer after the plasma display is formed is 15 at% or less. For a plasma display.

Further, the present invention is a plasma display using the above-mentioned member for a plasma display.

Further, according to the present invention, after the sealing frit is applied to the member on which the phosphor layer is formed and / or the member on which a plurality of electrodes for discharge are formed and fired, the member on which the phosphor layer is formed is discharged. A step of sealing a member having a plurality of electrodes formed thereon, and a member for forming a sealed phosphor layer and a member having a plurality of electrodes formed for discharge are evacuated to discharge gas for discharge. What is claimed is: 1. A method for manufacturing a plasma display, comprising a step of encapsulating, wherein a phosphor layer is formed on a member, and then the phosphor layer is irradiated with ultraviolet rays in an atmosphere containing oxygen.

Further, in the method of manufacturing a plasma display according to the present invention, the atmosphere for irradiating the ultraviolet rays may be a vacuum-evacuated atmosphere inside the envelope and then introducing a gas containing oxygen having a predetermined impurity concentration or less. After applying and baking a sealing frit to the member on which the body layer is formed, and irradiating the phosphor layer with ultraviolet rays under the atmosphere, the member on which the phosphor layer is formed and discharge for discharging without releasing the atmosphere to the atmosphere. A step of sealing the member on which the plurality of electrodes are formed, and a step of evacuating the member on which the sealed phosphor layer is formed and the member on which the plurality of electrodes are formed for discharging and filling a gas for discharging; Is performed.

[0020]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below.

The member for a plasma display of the present invention comprises:
It is necessary that the residual carbon component on the phosphor layer surface after the plasma display is formed is 15 at% or less. 15a
When the content is not more than t%, the ultraviolet ray generated by the discharge is absorbed by the residual carbon component on the surface, and the amount of the ultraviolet ray incident on the phosphor itself does not decrease, so that a plasma display with high brightness can be finally manufactured. In addition, the reset discharge between the member on which the plurality of electrodes are formed for discharge and the member on which the phosphor layer is formed reduces the amount of carbon components sputtered or desorbed from the phosphor layer surface into the discharge space. The formation of the altered layer on the surface of the MgO film and the adsorption of gas to the surface of the MgO film other than the discharge gas during non-discharge are less likely to occur. Therefore, the display operation of the plasma display can be stably performed. More preferably, it is 8 at% or less.

On the other hand, when the residual carbon component on the phosphor layer surface is 15
When the content is more than at%, the ultraviolet ray generated by the discharge is absorbed by the residual carbon component, so that the amount of the ultraviolet ray incident on the phosphor itself is reduced, so that the luminance is significantly reduced. Furthermore, since many carbon components are sputtered or desorbed into the discharge space by the reset discharge, an altered layer is formed on the surface of the MgO film,
Gas is easily adsorbed on the O film surface. Therefore, there is a problem that the display operation of the plasma display cannot be performed stably.

Next, a method of manufacturing a plasma display according to the present invention will be described in order. FIG. 1 shows a schematic cross-sectional view of a plasma display panel manufactured using the following steps. For convenience, a member having a plurality of electrodes for discharge is partially described as a front plate, and a member having a phosphor layer is partially described as a rear plate.

(Member Production Step) First, regarding the member production step, a method for producing the front plate 1 will be described.

With respect to the glass substrate used for the front plate 1,
Although not particularly limited, generally, soda lime glass or glass obtained by annealing soda lime glass, or
High strain point glass (for example, Asahi Glass “PD-20”
0 ") etc. The size of the glass substrate is not particularly limited, and a glass substrate having a thickness of 1 to 5 mm can be used.

First, a plurality of electrodes for discharging are formed on a glass substrate. As the electrode forming method, for example, a transparent electrode such as tin oxide or ITO is screen-printed with silver, aluminum, copper, gold, nickel, or the like by a lift-off method, a photo-etching method, or a photolithography method using a photosensitive conductive paste. May be used to form a pattern.
Further, a bus electrode may be formed on the transparent electrode for the purpose of forming a lower resistance electrode. Here, a transparent dielectric layer may be formed by a screen printing method or the like on a glass substrate on which a plurality of electrodes for discharge are formed. Although the transparent dielectric material in that case is not particularly limited, PbO,
A dielectric material containing B ₂ O ₃ and SiO ₂ is applied.

It is also preferable to form an MgO film on a glass substrate on which a plurality of electrodes for discharge are formed for the purpose of protecting against ion bombardment due to discharge. As a forming method, an electron beam evaporation method, a plasma evaporation method, an ion beam assisted evaporation method, a reactive sputtering method of a Mg target, an ion beam sputtering method, a CVD method, or the like can be applied.

Next, a method for manufacturing the back plate 2 will be described.
The glass substrate used for the back plate 2 is the same as that described for the front plate 1.

On a glass substrate, an address electrode layer containing silver, aluminum, copper, gold, nickel, tin oxide, ITO, or the like is pattern-formed by screen printing or photolithography using a photosensitive conductive paste. Further, a dielectric layer may be provided on the address electrode layer for stabilizing discharge.

On the glass substrate on which the address electrode layer has been formed, partitions for partitioning cells are formed by a sandblast method, a mold transfer method, a photolithography method, or the like. The material of the partition used in the present invention and the shape of the partition are not particularly limited.

Further, a phosphor paste containing a phosphor powder and a resin is formed on a glass substrate on which an electrode layer and a partition layer are formed by a dispenser method, a screen printing method, or the like.
Further, a phosphor layer is applied by a photosensitive paste method using a paste to which a photosensitive component is added, and baked. The polymer and the solvent used for the phosphor paste are not particularly limited. Polymethyl methacrylate (PM
MA) and ethyl cellulose, and α-terpineol and benzyl alcohol as solvents. The phosphor material used in the present invention is not particularly limited.
For example, in red, Y ₂ O ₃ : Eu, YVO ₄ : Eu,
(Y, Gd) BO ₃ : Eu, Y ₂ O ₃ S: Eu, γ-Zn ₃
(PO ₄ ) ₂ : Mn. In green, Zn ₂ GeO ₂ : M
n, BaAl ₁₂ O ₁₉ : Mn, Zn ₂ SiO ₄ : Mn, La
PO ₄ : Tb, ZnS: Cu, Al, Zn ₂ SiO ₄ : M
n, As, (ZnCd) S: Cu, Al, ZnO: Zn,
YBO3: Tb and the like. For blue, Sr ₅ (PO ₄ )
₃ Cl: Eu, BaMgAl ₁₄ O ₂₃ : Eu, BaMgA
l ₁₀ O ₁₇ : Eu, BaMg ₂ Al ₁₄ O ₂₄ : Eu, Zn
S: Ag + red pigment, Y ₂ SiO ₃ : Ce and the like. In this way, the back plate 2 can be manufactured.

In order to improve the brightness of the plasma display and the reliability of the display operation, it is important to form a phosphor layer with a small amount of carbon component remaining on the phosphor layer surface after the plasma display is formed. For this purpose, it is necessary to apply a phosphor paste containing a phosphor powder and a resin component, and then irradiate the phosphor layer with ultraviolet rays in an atmosphere containing oxygen after firing.

As shown in FIG. 2, by irradiating the phosphor layer with ultraviolet rays in an atmosphere containing oxygen, the residual carbon components that could not be removed during firing can be removed. That is, the oxygen O ₂ present in the atmosphere due to the ultraviolet rays becomes ozone O ₃ . The generated ozone O ₃ is decomposed into oxygen O ₂ and excited oxygen atoms O. Since the excited oxygen atoms have a very strong oxidizing power, they oxidize the residual carbon component on the phosphor layer surface, and cause CO or CO
It can be degassed into ₂ and so on. The atmosphere containing oxygen refers to not only a simple oxygen gas but also a mixed gas of oxygen and a rare gas such as neon or argon, or a gas stable against ultraviolet rays such as nitrogen. The method of generating ultraviolet light is not particularly limited, but a mercury lamp, a Xe lamp,
A deuterium lamp, a dielectric barrier discharge excimer lamp, or the like can be used.

By irradiating the phosphor layer with ultraviolet rays in an atmosphere containing oxygen, a phosphor layer having a small amount of carbon component remaining on the surface can be formed. A high-luminance plasma display that is not absorbed by the remaining components can be manufactured. In addition, the reset discharge between the front plate electrode and the back plate electrode reduces the amount of carbon components sputtered or desorbed from the phosphor layer surface into the discharge space. Gas adsorption to the surface of the MgO film other than the discharge gas hardly occurs. Therefore, the display operation of the plasma display can be stably performed.

When the phosphor layer was not irradiated with ultraviolet rays,
Since the carbon component on the surface cannot be completely removed by firing at the time of forming the phosphor layer, the carbon component remains on the phosphor layer surface after the plasma display is formed, and the brightness decreases and the discharge voltage increases, that is, the display operation is not performed. Problems such as instability tend to occur.

The method for manufacturing a plasma display of the present invention relates to the reduction of residual components on the surface of the phosphor layer.
It is preferable to irradiate an ultraviolet ray having a maximum peak near nm. By irradiating with ultraviolet light having a maximum peak at around 172 nm, excited oxygen atoms can be efficiently generated, and furthermore, the bond of the remaining carbon component can be directly cut off by ultraviolet light, so that the surface of the phosphor layer can be efficiently left. Carbon component can be removed. In order to irradiate an ultraviolet ray having a maximum peak near 172 nm, a dielectric barrier discharge excimer lamp filled with Xe gas (for example, UER2 manufactured by Ushio Inc.)
0-172) can be used. When the ultraviolet ray having the maximum peak near 172 nm is not irradiated, the amount of excited oxygen atoms is small, so that it tends to be difficult to efficiently remove the carbon component on the phosphor layer surface.

In the present invention, the time for irradiating the ultraviolet rays is not particularly limited, but may be about 10 minutes to 1 hour. The pressure and the oxygen concentration of the atmosphere are not particularly limited, but can be appropriately adjusted depending on the amount and the state of the carbon component remaining on the phosphor layer surface after firing. Further, the substrate to be irradiated may be heated to about 150 ° C. in order to promote the desorption of the residual carbon component.

Thus, the back plate 2 can be manufactured.

(Sealing Step) A step (sealing step) of sealing the front plate and the back plate using a glass frit for sealing will be described.

The glass frit material for sealing used in the present invention is not particularly limited. For example, a composite frit composed of a low melting point glass containing PbO, B ₂ O _{3 and the} like and a ceramic filler, PbO, ZnO, B _A crystalline frit made of ₂ O ₃ or the like can be preferably used. Each composition can be appropriately selected depending on the coefficient of thermal expansion of the glass substrate to be used, the maximum processing temperature in the process after sealing, and the like.

As a method of applying the sealing paste at a predetermined position between the front plate and the back plate, the sealing glass frit can be made into a paste and applied to one or both of the back plate and the front plate. The polymer and the solvent used for the sealing paste are not particularly limited. For example,
Polymethyl methacrylate (PMM)
An acrylic resin such as A) and α-terpineol as a solvent. As a coating method, for example, a screen printing method, a dispenser method, or the like can be used.

Next, the member to which the sealing paste has been applied is fired in order to remove the resin, solvent, and the like in the applied sealing paste. The firing temperature and the holding time can be appropriately selected depending on the resin and the solvent to be used. However, it is preferable to hold the resin at a temperature at which the resin is debindered for a certain period of time, and then further raise the temperature within a range where the sealing paste does not show fluidity.

Further, the member on which the sealing paste has been applied and fired is bonded to a member to be paired with the member, and the front plate and the rear plate are sealed by maintaining the temperature at or above the softening point of the glass frit for a certain time. The sealing temperature and the holding time can be appropriately set depending on the material of the glass frit.

The method for manufacturing a plasma display of the present invention relates to the reduction of the residual carbon component on the phosphor layer surface.
After applying and baking the sealing frit to the member on which the phosphor layer is formed, it is preferable to irradiate the phosphor layer with ultraviolet rays in an atmosphere containing oxygen. When the phosphor layer is irradiated with ultraviolet rays in an atmosphere containing oxygen before the application and firing of the sealing frit, the carbon component remaining on the phosphor layer surface is compared with the case where the ultraviolet rays are similarly irradiated after application and firing of the sealing frit. Tend to be many. This is presumably because the carbon component adhered to the surface of the phosphor layer during the application and firing of the sealing frit. That is, when the sealing frit is fired, the resin component in the sealing frit paste is decomposed, burned, and gasified, and is considered to have reattached to the surface of the phosphor layer when the temperature was lowered.

For the purpose of preventing contamination of the phosphor layer surface from which residual carbon components have been removed by irradiating ultraviolet rays in an atmosphere containing oxygen, a plasma display may be manufactured as follows. The atmosphere for irradiating ultraviolet rays is a gas in which oxygen containing a predetermined impurity concentration or less is introduced after evacuation of the inside of the envelope, and a sealing frit is applied and fired on the member on which the phosphor layer is formed. Irradiating the phosphor layer with ultraviolet light in the atmosphere, and then sealing the member having the phosphor layer formed thereon and the member having the plurality of electrodes formed thereon for discharge without exposing the atmosphere to the atmosphere; and A step of evacuating the inside of the member on which the attached phosphor layer is formed and the member on which a plurality of electrodes for discharge are formed and filling a gas for discharge is performed. Details will be described with reference to FIG. The fired phosphor layer-formed substrate is placed in an ultraviolet irradiation zone, evacuated (for example, to 10 ⁻³ Pa or less), and a gas containing oxygen having a predetermined impurity concentration or less is introduced. UV light is applied to remove residual carbon components on the phosphor layer surface. Next, it is conveyed to a sealing zone without opening to the atmosphere, and a predetermined sealing step is performed to seal the front plate and the back plate. Further, the front plate and the back plate sealed in the heating exhaust / discharge gas filling zone are transported, and a predetermined heating exhaust / discharge gas filling step is performed to produce a plasma display.

The gas containing oxygen means not only a simple gas of oxygen but also a rare gas such as neon or argon, or a gas mixture of oxygen and a gas stable against ultraviolet rays such as nitrogen. Below the predetermined impurity concentration, other than the above gas (for example, methane)
Is about 0.1% or less. When exposed to the atmosphere after ultraviolet irradiation, the organic substance gas floating in the air and the organic matter generated by taking out and transporting the substrate adhere to the phosphor layer, so the surface of the phosphor layer after the plasma display is formed , A carbon component remains, which tends to cause a problem such as a decrease in luminance and an increase in discharge voltage, that is, an unstable display operation.

(Vacuum Evacuation / Discharge Gas Enclosing Step) The step of evacuating the inside of the sealed front plate and back plate to fill the discharge gas will be described. The insides of the sealed front plate and back plate are evacuated, and when the pressure reaches about 10 ^-2 Pa, heating of the sealed front plate and back plate is started. The heating temperature is not particularly limited as long as the sealing frit does not show fluidity, and is usually 200 when a MgO film is formed on the front plate.
~ 380 ° C is preferable. In addition, the holding time is not particularly limited, and the holding time becomes longer when a large-sized plasma display is used, but is about 10 hours or less for a plasma display of about 42 inches.

After performing a predetermined heating while evacuating, the front and back plates sealed to around room temperature are cooled while continuing the evacuation, and the discharge gas is sealed to a predetermined pressure.

Finally, the driving circuit is mounted to complete the plasma display.

[0050]

The present invention will be specifically described below with reference to examples. However, the present invention is not limited to this. (Measurement Method) (1) The measurement of the residual carbon component on the phosphor layer surface was performed using X-ray photoelectron spectroscopy (XPS). As the X-ray source, single crystal K-rays of Al were used. Measurement area is 300 × 3
The shape was an ellipse of 00 μm. The sample decomposes the plasma display in a nitrogen atmosphere so that the phosphor layer does not peel off,
A piece cut to an appropriate size was used.

(Example 1) A plasma display was manufactured in the following procedure.

An address electrode pattern was formed on a "PD-200" glass substrate manufactured by Asahi Glass Co., Ltd. by a photolithography method using a photosensitive silver paste, followed by firing. A dielectric layer having a thickness of 20 μm was formed on the glass substrate on which the address electrodes were formed by a screen printing method. Thereafter, a partition pattern was formed by a photolithography method using a photosensitive partition paste. Next, a phosphor layer was formed by a dispenser method. The phosphor paste was kneaded using a three-roll roll at a phosphor powder: polymer = 5: 1 weight ratio. The phosphor powder is red: (Y, Gd, Eu) BO
₃ , green: (Zn, Mn) ₂ SiO ₄ , blue: (Ba, Eu)
MgAl ₁₀ O ₁₇ was used. Ethyl cellulose dissolved in benzyl alcohol was used as the polymer.
The phosphor layer is fired in air at a rate of 4 ° C./min at 500 ° C.
And kept at that temperature for 30 minutes before cooling to room temperature. Next, a wavelength of 172 n was applied to the fired phosphor layer.
Ultraviolet light having a maximum peak near m was irradiated in the air for 30 minutes. The UV light source is an excimer lamp (Ushio's UE
R20H-172) was used. In order to efficiently contact the phosphor layer with ozone O ₃ and excited oxygen atoms O generated by ultraviolet rays, ultraviolet rays were irradiated in a stainless steel container to obtain a member having the phosphor layer formed thereon.

Similarly, on a “PD-200” glass substrate,
After forming an ITO electrode by a photoetching method, a bus electrode pattern was formed by a photolithography method using a photosensitive silver paste. Thereafter, a transparent dielectric layer was formed with a thickness of 30 μm by a screen printing method.
Further, an MgO film having a thickness of 500 nm was formed by an electron beam evaporation method to obtain a member having a plurality of electrodes for discharge.

Next, the sealing paste was applied to the member having the phosphor layer formed thereon by using a dispenser method. Glass frit is a composite system composed of PbO, B ₂ O ₃ and a ceramic filler, and has a softening point of 410 ° C. The solvent used was α-terpineol, and the polymer used was PMMA.
The member to which the sealing frit was applied was held at 380 ° C. for 15 minutes and then at 430 ° C. for 15 minutes, thereby firing the sealing paste.

These members are arranged so that the address electrode of the member on which the phosphor layer is formed and the bus electrode of the member on which a plurality of electrodes for discharge are formed are parallel to each other. Was added. 450 ° C for sealing
For 15 minutes. The temperature was raised and lowered at a rate of 5 ° C./min. At the time of sealing these members, a glass pipe was provided on the member side on which the phosphor layer was formed.

The inside of the sealed member was evacuated through a glass pipe. After the degree of vacuum inside the sealed member reached 1 × 10 ⁻³ Pa or less, heating was performed at 350 ° C. for 5 hours while evacuating as it was. After evacuation, the heating was stopped and the temperature was cooled to room temperature, and then a discharge gas of Xe5% -Ne gas was sealed up to 66.5 kPa. The glass pipe was blown off using an electric heater, and finally, a drive circuit was mounted to produce a plasma display having 640 × 480 display pixels.

The white peak luminance of this plasma display was 350 cd / m ² . When a staggered pattern was displayed in a 10 × 10 cm square area in the center of the plasma display, the number of cells whose display operation was not stable was seven. It is preferable that the number of cells in which the display operation is not stable is small, and it is desirable that the number is 10 or less, and more preferably 5 or less. That is, the display operation of the plasma display manufactured in this example was good.

The residual carbon component on the surface of the phosphor layer of the plasma display manufactured under the same conditions was 13.8 at%.

Example 2 The phosphor paste had a molecular weight of 10
Using a PMMA solution of 10,000, and setting the firing temperature of the phosphor layer to 460.
A plasma display was manufactured in the same manner as in Example 1 except that the temperature was changed to ° C.

The white peak luminance of this plasma display was 357 cd / m ² . When a staggered lattice pattern was displayed in a 10 × 10 cm square area at the center of the plasma display, the number of cells whose display operation was unstable was seven. That is, the display operation of the plasma display produced in this example was good.

The residual carbon component on the surface of the phosphor layer of the plasma display manufactured under the same conditions was 12.9 at%.

Example 3 A plasma display was manufactured in the same manner as in Example 1 except that the phosphor layer was irradiated with ultraviolet rays after applying and firing the sealing paste without applying ultraviolet rays immediately after the phosphor layer was formed. did.

The white peak luminance of this plasma display was 360 cd / m ² . When a staggered pattern was displayed in a 10 × 10 cm square area in the center of the plasma display, the number of cells whose display operation was not stable was six. That is, the display operation of the plasma display produced in this example was good.

The residual carbon component on the phosphor layer surface of the plasma display manufactured under the same conditions was 7.2 at%.

(Example 4) Immediately after the formation of the phosphor layer, ultraviolet rays were not irradiated, and the fired phosphor layer and the fired sealing paste were formed in an envelope as shown in FIG. After arranging the back plate and evacuating to 10 ⁻³ Pa,
UV irradiation is performed in an atmosphere in which 10% O ₂ -Ar gas is introduced up to 50 kPa, and after the atmosphere is opened to the atmosphere, the member on which the phosphor layer is formed and the member on which a plurality of electrodes for discharge are formed are sealed. A plasma display was produced in the same manner as in Example 1 except that the plasma display was worn.

The white peak luminance of this plasma display was 357 cd / m ² . When a staggered pattern was displayed in a 10 × 10 cm square area in the center of the plasma display, the number of cells whose display operation was not stable was four. That is, the display operation of the plasma display produced in this example was good.

The residual carbon component on the surface of the phosphor layer of the plasma display manufactured under the same conditions was 7.6 at%.

Embodiment 5 After irradiation with ultraviolet rays, the member on which the phosphor layer is formed and the member on which a plurality of electrodes for discharge are formed are sealed without opening to the atmosphere, and a heating / exhausting / discharging gas sealing step is performed. A plasma display was produced in the same manner as in Example 4 except for the above.

The white peak luminance of this plasma display was 372 cd / m ² . When a staggered pattern was displayed in a 10 × 10 cm square area at the center of the plasma display, the number of cells whose display operation was not stable was three. That is, the display operation of the plasma display produced in this example was good.

The residual carbon component on the surface of the phosphor layer of the plasma display manufactured under the same conditions was 5.3 at%.

(Comparative Example 1) A plasma display was manufactured in the same manner as in Example 1 except that ultraviolet irradiation was not performed.

The white peak luminance of this plasma display was 337 cd / m ² . When a staggered pattern was displayed in a 10 × 10 cm square area in the center of the plasma display, the number of cells whose display operation was not stable was thirteen. That is, the display operation of the plasma display manufactured in this example was not good.

The residual carbon component on the surface of the phosphor layer of the plasma display manufactured under the same conditions was 22.5 at%.

(Comparative Example 2) The firing temperature of the phosphor layer was 550
° C, and a plasma display was produced in the same manner as in Example 1 except that ultraviolet irradiation was not performed.

The white peak luminance of this plasma display was 320 cd / m ² . When a staggered lattice pattern was displayed in a 10 × 10 cm square area at the center of the plasma display, the number of cells whose display operation was not stable was 14 cells. That is, the display operation of the plasma display manufactured in this example was not good.

The residual carbon component on the surface of the phosphor layer of the plasma display manufactured under the same conditions was 19.7 at%.

FIG. 4 shows a part of the manufacturing steps of Examples 1 to 3 and Comparative Examples 1 and 2.

The carbon components remaining on the phosphor layer surface in Examples 1 to 5 and Comparative Examples 1 and 2, the number of cells whose display operation was not stable when a houndstooth pattern was displayed on the manufactured plasma display, and Table 1 shows the luminance of the plasma display.

[0079]

[Table 1]

[0080]

According to the present invention, a phosphor layer having a small amount of residual carbon component on the surface can be formed, and a plasma display with high luminance and stable display operation can be manufactured.

[Brief description of the drawings]

FIG. 1 is a schematic cross-sectional view of a discharge type display for explaining an embodiment of the present invention.

FIG. 2 is a schematic view of an apparatus for irradiating ultraviolet rays for explaining an embodiment of the present invention.

FIG. 3 is a diagram illustrating irradiation of ultraviolet light for explaining an embodiment of the present invention;
Schematic diagram of a device for sealing, evacuating and filling discharge gas.

FIG. 4 is a manufacturing process diagram of a plasma display for explaining Examples 1 to 3 of the present invention and Comparative Examples 1 and 2.

[Explanation of symbols]

1: Member having a plurality of electrodes for discharge (front panel) 2: Member having a phosphor layer (back panel) 3, 4: Glass substrate 5: Address electrode 6: Dielectric 7: Partition wall 8: Fluorescence Body 9: Transparent electrode 10: Bus electrode 11: Transparent dielectric 12: MgO film 13: Glass frit for sealing 14: Ultraviolet lamp 15: Atmosphere containing oxygen 16: Container 17: Ultraviolet irradiation zone 18: Sealing zone 19: Heating / discharging / discharging gas filling zone 20, 22: vacuum pump 21: gas containing oxygen 23: discharge gas 24: heater

Claims (6)

[Claims] 1. A member for a plasma display having a phosphor layer, wherein the residual carbon component on the surface of the phosphor layer after the plasma display is formed is 15 at% or less. 2. A plasma display using the member for a plasma display according to claim 1. 3. A member on which a phosphor layer is formed and / or a member on which a plurality of electrodes for discharge are formed, a sealing frit is applied and fired, and the member on which the phosphor layer is formed and the plurality of electrodes for discharge are formed. A step of sealing the member having the electrodes formed thereon, and a step of evacuating the inside of the member having the plurality of electrodes formed thereon for forming the sealed phosphor layer and a plurality of electrodes for discharging and filling a gas for discharging. A method for manufacturing a plasma display, comprising: forming a phosphor layer on a member; and irradiating the phosphor layer with ultraviolet rays in an atmosphere containing oxygen. 4. The plasma display according to claim 3, wherein the sealing frit is applied and baked on the member on which the phosphor layer is formed, and then the phosphor layer is irradiated with ultraviolet rays in an atmosphere containing oxygen. Production method. 5. The method according to claim 3, wherein the ultraviolet light to be irradiated has a maximum peak at a wavelength near 172 nm. 6. An atmosphere for irradiating an ultraviolet ray, wherein the envelope is evacuated and then a gas containing oxygen having a predetermined impurity concentration or less is introduced. Is applied and baked, and the phosphor layer is irradiated with ultraviolet rays in the atmosphere, and then the member having the phosphor layer formed thereon and the member having the plurality of electrodes formed thereon for discharge are sealed without opening the atmosphere to the atmosphere. And a step of vacuum-evacuating the inside of the member on which the sealed phosphor layer is formed and the member on which a plurality of electrodes are formed for discharge and enclosing a gas for discharge. Production method.