JP2002070940A - Vibration resistant mount - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibration resistant mount that uses a coil spring of a large degree of compression and causes no lateral dislocation. SOLUTION: The vibration resistant mount has an elastic body 1 and guides 2. The elastic body 1 is supported at both ends by a first cover 3 and a second cover 4. The guides 2 limit the displacement of the elastic body 1 only to vertical displacement to prevent deflection in the directions other than the vertical, and each has a pressure part 12 and a support part 13. The pressure part 12 and the support part 13 are formed in opposition to such portions of the first cover 3 and the second cover 4 so as to be relatively displaceable according to the expansion and compression of the elastic body 1. Either of the pressure part 12 and the support part 13 is a viscoelastic body E, and both of them come in contact with each other to effectively damp horizontal micro vibration.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an anti-vibration mount for preventing vibration of a machine or a structure.

[0002]

2. Description of the Related Art Conventionally, a combination of a coil spring and an oil damper, an anti-vibration rubber, and the like have been generally used as an anti-vibration mount for a machine or a structure, but a circuit pattern of an electronic device used for a computer or a communication device has been conventionally used. It is highly necessary to prevent the effects of self-excited vibration and external vibration in devices that require accuracy of 1 μm or less, such as an IC exposure machine that forms a pattern and a three-dimensional measuring device that reads a circuit pattern.
The performance of an anti-vibration device that attenuates vibration transmitted from the floor to equipment is an important factor that affects the performance of a machine.

As an anti-vibration mount suitable for such a purpose, an anti-vibration device using a combination of an elastic body and a visco-elastic body has been developed. This apparatus uses a combination of an elastic body (coil spring) 21 and a columnar viscoelastic body (epoxy resin) 22 as shown in FIG.
Into the coil spring 21, and both ends of the viscoelastic body 22,
The flange 23 is attached to both ends of the coil spring 21, and the elastic center in the load direction acting on the composite of the elastic body 21 and the viscoelastic body 22 is included in the viscoelastic body side, and both are integrally tightened with the screw 24. is there.

[0004] If this device is used for vibration-proof support of a machine or a structure, a large damping property can be obtained against external forces applied in the horizontal direction (lateral direction) and the vertical direction (vertical direction). See JP-A-63-30628).

[0005]

By the way, in the above-mentioned anti-vibration mount, in order to improve the anti-vibration performance with respect to an external force applied in the vertical direction, that is, to lower the resonance frequency of the anti-vibration mount, a load applied to the anti-vibration mount is reduced. The spring is selected to maximize the deflection of the coil spring, but if the spring is selected to maximize the amount of compression of the coil spring due to the applied load, although it is possible to obtain soft performance in the vertical direction, At the same time, the same characteristics appear strongly in the horizontal direction.

Although the amount of deflection of the coil spring in the vertical direction reaches the limit due to the contact between the wires of the spring,
In the horizontal direction, depending on the aspect ratio of the spring, there is a problem that buckling occurs due to the deflection of the coil spring.

[0007] Buckling is a phenomenon in which the coil spring becomes too soft in the horizontal direction, loses its horizontal resilience, and cannot withstand the lateral force applied to the coil spring, causing lateral displacement. When buckling occurs in the coil spring,
Machines or structures can no longer be supported in vibration isolation.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an anti-vibration mount that uses a coil spring having a large compression amount, has an anti-vibration performance in both horizontal and vertical directions, and does not cause lateral displacement.

[0009]

In order to achieve the above object, in an anti-vibration mount according to the present invention, an elastic body,
A vibration isolation mount having a guide, wherein both ends of the elastic body are supported by the first cover and the second cover, and the guide regulates the displacement of the elastic body in a specific direction, and restricts displacement of the elastic body in a direction other than the specific direction. Having a pressing portion and a supporting portion, wherein the pressing portion and the supporting portion face the first cover and the second cover which are relatively displaced with the expansion and contraction of the elastic body. They are formed together and are in contact with each other to attenuate the vibration of the elastic body.

[0010] Further, the present invention is a vibration isolation mount having an elastic body and a guide, wherein the elastic body has a first cover and a second cover at both ends.
The guide is supported by the cover, and the guide restricts the displacement of the elastic body in a specific direction and prevents deflection in a direction other than the specific direction. The guide has a pressing portion and a supporting portion, and has a pressing portion and a supporting portion. Is formed so as to face the first cover and the second cover which are relatively displaced with the expansion and contraction of the elastic body, and one of the pressing portion and the supporting portion is a viscoelastic material and is in contact with each other. To attenuate the vibration of the elastic body.

One of the pressing portion and the supporting portion is a surface, and the other is a contact that is relatively displaced along the surface.

The supporting portion is a surface to which the viscoelastic body is attached, and the pressing portion is a rotor that contacts the viscoelastic body while rolling on the surface.

The pressing portion is a slider made of a viscoelastic body which comes into contact with the surface of the supporting portion while sliding.

The support portion is a surface to which the viscoelastic body is attached, is formed on the inner surface of the second cover, and the pressing portion is attached to the outer surface of the first cover, and is provided on the surface of the viscoelastic body. It is a rotor that contacts while rolling on top. Also, the first cover and the second cover have a guide post on one of them,
The other side has a guide bush, and the guide post is inserted into the shaft hole of the guide bush so as to be able to advance and retreat, and one of the guide post and the guide bush is used as a supporting portion, and the other is used as a pressing portion, and a sliding member is provided on the contact surface thereof. A viscoelastic body is interposed.

The pressing portion is a slider which is not a viscoelastic body, the cover has a boss, and the guide post and the guide bush are attached to the boss of each cover. Alternatively, at least one of the guide bushes is supported by a boss via a viscoelastic body.

[0016]

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view showing an embodiment of an anti-vibration mount according to the present invention. FIG. 1 shows a mechanism of an anti-vibration mechanism of the anti-vibration mount shown in FIG. FIG.
At the resonance frequency f0 of the elastic body (coil spring) 21
Is approximately expressed by Expression (1). f0 = 5 / √ Deflection (cm) (1)

The attenuation dB of the anti-vibration mount in the combination of the elastic body 21 and the viscoelastic body 22 shown in FIG. 1A is expressed by the following equation (2), where U is the upper end of the anti-vibration mount and D is the lower end. It is as follows. dB = vibration of 20 logU / vibration of D ... (2)

In FIG. 1B, a curve A represents the elastic body 2
6 shows a vibration transmission characteristic of the elastic body 21 when the resonance frequency of No. 1 is f0. The figure is for clarity of explanation.
The surging waveform is not shown. According to the equation (1), in order to lower the resonance frequency f0 in the curve A, it is necessary to increase the compression amount.

By lowering the resonance frequency f0, the resonance magnification in a region having the resonance frequency f0 as a peak as shown by a curve B increases. The resonance magnification of the elastic body raised by lowering the resonance frequency f0 can be reduced by combining the elastic body 21 with the viscoelastic body 22. Curve C shows the characteristics of the anti-vibration mount in which the viscoelastic body 22 is combined with the elastic body 21 having the characteristics of the curve B.

As is apparent from the figure, the resonance frequency of the curve B is lower than that of the curve A.
The damping curve C of the anti-vibration mount in which the resonance frequency is higher than that of the curve B, but is comparable to the resonance frequency of the curve A, and the vibration transfer characteristic of the excellent damping performance in which the resonance magnification is greatly reduced is obtained. can get.

However, lowering the resonance frequency of the elastic body 21 means increasing the amount of compression.
The coil spring used in (1) tends to shift in the horizontal direction, and as a result, the coil spring does not shrink straight, and the object to be supported by the anti-vibration mount remains shifted in the horizontal direction.

In the present invention, a guide that regulates the direction of displacement of the elastic body due to an external force applied to the elastic body in one direction is used, and the displacement of the elastic body is regulated in a specific direction. It is to prevent. The guide is a combination of a pressing portion and a supporting portion, and the pressing portion and the supporting portion are
A first cover and a second cover that are relatively displaced with the expansion and contraction of the elastic body;
Are formed facing each other and support the force generated in the bending direction of the elastic body by coming into contact with each other.
In the present invention, a viscoelastic body that acts directly or indirectly on one of the pressing portion and the supporting portion is used.

Although the viscoelastic body attenuates the vibration of the elastic body in the compression direction, the present invention does not use a self-supporting columnar viscoelastic body as shown in FIG. In the present invention, a viscoelastic body is interposed in one or both of the pressing portion and the supporting portion. By supporting at least one of the pressing portion and the support portion with the viscoelastic body, it is possible to effectively attenuate the horizontal minute vibration of the elastic body.

[0024]

Embodiment 1 In FIGS. 2 and 3, a vibration isolation mount according to the present invention is a vibration isolation mount having an elastic body 1 and a guide 2, and the elastic body 1 has a first cover 3 at both ends. And the second cover 4. In the present invention, a coil spring having a large deflection is used for the elastic body 1, and the coil spring has a damping characteristic of a curve b shown in FIG. 1B.

The first cover 3 and the second cover 4 are
The elastic body 1 is kept at a distance limited by the stopper 5.
Is given an initial compression amount corresponding to the interval. In this embodiment, a screw rod 9 is inserted into the small hole 8 of the flange 7 provided on the boss 6 of the first cover 3, and the tip is screwed into the boss 10 of the second cover 4. 5 shows an example in which the flange 7 is pressed against the head 11 of the screw rod 9 to limit the extension of the elastic body 1.

The guide 2 regulates the vertical displacement of the elastic body 1 in a specific direction and prevents bending in a direction other than the specific direction. The guide 2 has a pressing portion 12 and a support portion 13. The pressing portion 12 and the supporting portion 13 are formed facing each other at a portion of the first cover 3 and the second cover 4 which are relatively displaced with the expansion and contraction of the elastic body 1, and contact with each other to specify the elastic body 1. (Horizontal direction), and one of the pressing portion 12 and the supporting portion 13 is a viscoelastic body E. The viscoelastic body E is for attenuating fine vibrations of the elastic body 1 in the horizontal direction.

In this embodiment, the support 13 is
The surface to which the viscoelastic body E is attached, and the second cover 4
Is formed on the inner surface. The pressing portion 12 is a contact that makes contact with the surface of the viscoelastic body E of the support portion 13. In this embodiment, the pressing portion 12 is attached to the outer surface of the first cover 3,
The rotor is in contact with the viscoelastic body E while rolling on the surface. Note that the distinction between the first cover 3 and the second cover 4 is made solely for convenience of explanation, and which side is the first cover 3.
Or the second cover.

In the present invention, the first cover 3 and the second cover 3
The cover 4 is kept at an interval limited by the stopper 5, and the elastic body 1 is given an initial compression amount corresponding to the interval. In a case where the vibration damping mount according to the present invention is used to support a machine or a structure, when vibration of the floor propagates to the machine or the structure via the vibration isolating mount, the vibration isolating mount is vertically moved by a vertical component of the vibration. And the rotor of the pressing portion 12 rolls on the surface of the viscoelastic body E of the support portion 13 by the vertical displacement accompanying expansion and contraction of the elastic body, thereby giving resistance to the vertical movement, and The damping force of the elastic body E acts from the lateral direction, and effective vibration isolation performance is exhibited even for horizontal fine vibration of a level of several μm. The force acting in the vertical direction is effectively attenuated by a characteristic equivalent to the vibration propagation characteristic shown by the curve C in FIG.

On the other hand, even if the elastic body 1 is largely bent in the horizontal direction, the rotor of the pressing portion 12 is received by the surface of the support portion 13, so that the bending of the elastic body 1 is prevented and almost no lateral displacement occurs.

The vertical and horizontal damping performance can be adjusted by adjusting the magnitude of the force of pressing the rotor of the pressing portion 12 against the surface of the viscoelastic body E of the support portion 13. The horizontal damping performance can be adjusted by changing the thickness of the viscoelastic body 2.

[0031]

Second Embodiment As described above, in the first embodiment, the support portion 1
Reference numeral 3 denotes a surface to which the viscoelastic body E is attached,
FIG. 2 shows an example in which a rotor that comes into contact with the surface of the viscoelastic body E while rolling is used.
A sliding element made of a viscoelastic body that comes into contact with the sliding element 3 while sliding on the surface can be used.

In FIG. 4, the first cover 3 and the second cover 4 have bosses 6 and 10 at the center, respectively. A guide post 14 is provided at the center of the boss 6 of the first cover 3.
A guide bush 1 having a shaft hole for receiving a guide post 14 is provided on a boss 10 of the second cover 4.
5 are attached. The coil spring, which is the elastic body 1,
The two terminals are disposed around the first cover 3 and the second cover 4, respectively. In this embodiment, the guide 2 is formed between a guide post 14 which is a part of each cover and a guide bush 15.

That is, the guide post 14 is inserted into the shaft hole of the guide bush 15 so as to be able to move forward and backward.
An annular groove is provided on a part of the peripheral surface of the guide post 14,
An annular viscoelastic body E is fitted into the annular groove as the pressing portion 12 of the guide 2, and the outer surface thereof is used as a slider to form the support portion 1.
3 is brought into contact with the inner surface of the shaft hole of the guide bush 15.

In the case where the mechanical equipment or the structure is supported by using the anti-vibration mount according to the second embodiment, if the vibration of the floor propagates to the mechanical equipment or the structure via the anti-vibration mount, the vibration is removed by the vertical component of the vibration. The vibration mount is pressurized in the vertical direction, the elastic body 1 is compressed, and the pressing portion 12 of the guide post 14 is displaced while sliding on the inner surface of the shaft hole of the guide bush 15 as a slider, following the vertical displacement. The damping effect occurs due to the generated frictional force. Further, the fine vibration in the horizontal direction is attenuated by the vibration damping effect due to the viscosity of the viscoelasticity E. The force acting in the vertical direction is effectively attenuated substantially by the attenuation characteristic shown by the curve C in FIG.

On the other hand, with respect to the horizontal vibration far exceeding the vibration to be subjected to vibration isolation, even if the elastic body 1 itself is largely bent, the force acting in the horizontal direction is received by the guide 2 and the elastic body 1 is received. 1 is prevented, and lateral displacement hardly occurs. In this embodiment, the guide post 14 and the guide bush 15 may be provided on either side of the first cover 3 or the second cover 4, and one of the guide post 14 and the guide bush 15 is supported. Part 1
3. When the other is the pressing portion 12, in short, the guide 2 only needs to have the viscoelastic body E interposed on its contact surface as a sliding element by sliding contact. It may be provided on the side.

According to this embodiment, by incorporating a viscoelastic body utilizing sliding contact into the guide, lateral displacement (horizontal displacement) of the anti-vibration mount is prevented, and relative displacement between the pressing portion and the supporting portion is achieved. The resulting frictional force provides vertical damping performance, and the viscosity between the pressing portion and the support portion provides horizontal damping performance.

[0037]

Embodiment 3 In FIG. 5, the boss 6 of the first cover 3 is shown.
Guide post 14 is established in the center of the second cover 4
A guide bush 15 having a shaft hole for receiving the guide post 14 is attached to the boss 10. Elastic body 1
Are disposed around the guide bush 15, and both ends thereof are respectively connected to the first cover 3 and the second cover 3.
, Respectively.

The guide post 14 includes a guide bush 15
Of the guide post 14
In this embodiment, an O-ring is fitted as a pressing portion 12 into an annular groove provided on a part of the peripheral surface of the guide member, and an outer surface of the O-ring is used as a slider to contact an inner surface of a shaft hole of a guide bush 15 serving as a support portion 13. Thus, the guide 2 is formed between the guide post 14 which is a part of each of the covers 3 and 4 and the guide bush 15.

On the other hand, at least one of the guide post 14 and the guide bush 15 is supported by the boss 6 or 10 via a viscoelastic body E, respectively. In FIG. 5, the guide post 1 is attached to the viscoelastic body E embedded in the boss 6.
4 shows an example in which the supporting member 4 is supported. Although illustration is omitted,
Similarly, the guide bush 15 may be supported by the viscoelastic body embedded in the boss 10, or the guide post 14 and the guide bush 15 may be supported by the viscoelastic body embedded in the bosses 6 and 10, respectively.

In this embodiment, when the vibration of the floor propagates through the anti-vibration mount to a machine or a structure on the anti-vibration mount, the vertical vibration is applied to the guide post 1.
The fine vibration in the horizontal direction is absorbed by the viscoelastic body E and is attenuated by the frictional force between the pressing portion 12 of FIG.

[0041]

As described above, according to the present invention, the displacement of the elastic body supported by the first cover and the second cover is restricted to a specific direction by using the guide, and the deflection other than the specific direction is suppressed. The guide includes a combination of a pressing portion and a supporting portion, and the pressing portion and the supporting portion are portions of the first cover and the second cover that are relatively displaced with the expansion and contraction of the elastic body. It is formed to face each other and attenuates the vibration of the elastic body by contacting each other.In particular, by using a viscoelastic body for one of the pressing part and the supporting part, the vertical and horizontal damping characteristics are reduced. The elastic body uses a coil spring with a large compression displacement to prevent the deflection of the elastic body far beyond the vibration to be removed in the horizontal direction and restrict the displacement of the elastic body in a specific direction. Magnification and resonance frequency can be kept low It has an effect.

[Brief description of the drawings]

FIG. 1A is a diagram showing a basic configuration of a vibration damper;
(B) is a figure which shows the damping characteristic of an elastic body and a vibration damper.

FIG. 2 is a cross-sectional side view of the vibration damper showing the first embodiment of the present invention, and is a cross-sectional view taken along line XX of FIG.

FIG. 3 is a sectional plan view of the same part.

FIG. 4 is a sectional side view of a vibration damper according to a second embodiment of the present invention.

FIG. 5 is a sectional side view of a vibration damper according to a third embodiment of the present invention.

FIG. 6 is a diagram showing a conventional example of a vibration damper.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Elastic body 2 Guide 3 1st cover 4 2nd cover 5 Stopper 6,10 Boss 7 Flange 8 Small hole 9 Screw rod 11 Head of screw rod 12 Pressing part 13 Support part 14 Guide post 15 Guide bush E Viscoelasticity body

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[Procedure amendment]

[Submission date] November 28, 2000 (200.11.
28)

[Procedure amendment 1]

[Document name to be amended] Statement

[Correction target item name] Brief description of drawings

[Correction method] Change

[Correction contents]

[Brief description of the drawings]

FIG. 1A is a diagram illustrating a basic configuration of a vibration isolation mount , and FIG. 1B is a diagram illustrating attenuation characteristics of an elastic body and a vibration isolation damper.

FIG. 2 is a cross-sectional side view of the anti-vibration mount according to the first embodiment of the present invention, and is a cross-sectional view taken along line XX of FIG.

FIG. 3 is a sectional plan view of the same part.

FIG. 4 is a sectional side view of an anti-vibration mount according to a second embodiment of the present invention.

FIG. 5 is a sectional side view of an anti-vibration mount according to a third embodiment of the present invention.

FIG. 6 is a diagram showing a conventional example of an anti-vibration mount .

[Description of Signs] 1 Elastic body 2 Guide 3 First cover 4 Second cover 5 Stopper 6,10 Boss 7 Flange 8 Small hole 9 Screw rod 11 Screw rod head 12 Pressing part 13 Supporting part 14 Guide post 15 Guide bush E Viscoelastic body

Claims (8)

[Claims] 1. An anti-vibration mount having an elastic body and a guide, wherein the elastic body has both ends supported by a first cover and a second cover, and the guide determines a displacement of the elastic body by a specific value. The first cover has a pressing portion and a supporting portion, and the pressing portion and the supporting portion are relatively displaced in accordance with expansion and contraction of the elastic body. A vibration isolator mounted in contact with each other and attenuating vibration of the elastic body. 2. An anti-vibration mount having an elastic body and a guide, wherein the elastic body has both ends supported by a first cover and a second cover, and the guide determines a displacement of the elastic body by a specific value. The first cover has a pressing portion and a supporting portion, and the pressing portion and the supporting portion are relatively displaced in accordance with expansion and contraction of the elastic body. And one of the pressing portion and the supporting portion is a viscoelastic body,
An anti-vibration mount, which is in contact with each other to attenuate vibration of an elastic body. 3. The anti-vibration mount according to claim 2, wherein one of the pressing portion and the supporting portion is a surface, and the other is a contact that is relatively displaced along the surface. 4. The device according to claim 2, wherein the supporting portion is a surface to which the viscoelastic body is attached, and the pressing portion is a rotor that contacts the viscoelastic body while rolling on the surface. Anti-vibration mount. 5. The anti-vibration mount according to claim 3, wherein the pressing portion is a slider made of a viscoelastic body that comes into contact with the surface of the supporting portion while sliding. 6. The support portion is a surface to which a viscoelastic body is attached, is formed on an inner surface of the second mount, and the pressing portion is
4. The anti-vibration mount according to claim 3, wherein the rotor is mounted on an outer surface of the first mount and comes into contact with the viscoelastic body while rolling. 7. The first cover and the second cover have a guide post on one side and a guide bush on the other side, and the guide post is inserted into a shaft hole of the guide bush so as to be able to move forward and backward. 3. The anti-vibration mount according to claim 2, wherein one of the post and the guide bush is a supporting portion, and the other is a pressing portion, and a viscoelastic body is interposed as a slider on a contact surface thereof. 8. The pressing portion is a slider that is not a viscoelastic body, the cover has a boss, and the guide post and the guide bush are attached to the boss of each cover. Or at least one of the guide bushes,
The anti-vibration mount according to claim 1, wherein the mount is supported by a boss via a viscoelastic body.