JP2002047367A - Method of forming metal film on polyimide surface and conductive belt using the same - Google Patents

Method of forming metal film on polyimide surface and conductive belt using the same

Info

Publication number
JP2002047367A
JP2002047367A JP2000236055A JP2000236055A JP2002047367A JP 2002047367 A JP2002047367 A JP 2002047367A JP 2000236055 A JP2000236055 A JP 2000236055A JP 2000236055 A JP2000236055 A JP 2000236055A JP 2002047367 A JP2002047367 A JP 2002047367A
Authority
JP
Japan
Prior art keywords
metal film
polyimide
belt
film
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2000236055A
Other languages
Japanese (ja)
Inventor
Atsushi Ochi
淳 越智
Yasuhiko Kondo
康彦 近藤
Makoto Sugitani
信 杉谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Rubber Industries Ltd
Original Assignee
Sumitomo Rubber Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Rubber Industries Ltd filed Critical Sumitomo Rubber Industries Ltd
Priority to JP2000236055A priority Critical patent/JP2002047367A/en
Publication of JP2002047367A publication Critical patent/JP2002047367A/en
Pending legal-status Critical Current

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  • Electrostatic Charge, Transfer And Separation In Electrography (AREA)
  • Coating Of Shaped Articles Made Of Macromolecular Substances (AREA)
  • Non-Insulated Conductors (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Fixing For Electrophotography (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method of directly forming a metal film having excellent adhesion on a polyimide surface and also to provide a conductive belt which is prepared by this method and is suitably used as carrying belt that is used as a belt transferring and fixing of an image forming device. SOLUTION: In the method of forming the metal film, the polyimide surface is treated with a strong alkali to open an imide ring, and then the metal film is laminated on the surface by the vapor phase growing method. As the conductive belt, the metal film having conductivity when transferred and becoming as an exothermic core when fixed is laminated on the surface of a base layer made of the polyimide.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、ポリイミドの表面
に金属膜を形成する新規な方法と、この方法によって製
造された導電性ベルトとに関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a novel method for forming a metal film on the surface of polyimide, and a conductive belt manufactured by the method.

【0002】[0002]

【従来の技術】近年、レーザービームプリンタや静電式
複写機等の画像形成装置の分野においてはフルカラー
化、高画質化、並びに省スペース化のための小型化が進
行しつつあり、特にシアン(C)、マゼンタ(M)、お
よびイエロー(Y)の3色、もしくは上記3色に黒
(K)を追加した4色のトナーに対応した3つまたは4
つの現像部を内蔵したフルカラーの装置を、従来のモノ
クロ機並みに小型化することが求められてきている。
2. Description of the Related Art In recent years, in the field of image forming apparatuses such as laser beam printers and electrostatic copiers, miniaturization for full color, high image quality, and space saving is progressing. C), three or four corresponding to three colors of magenta (M) and yellow (Y), or four colors obtained by adding black (K) to the above three colors
It has been required to reduce the size of a full-color device having two built-in developing units to the same size as a conventional monochrome machine.

【0003】そこでこの要求に対応すべく、装置内で用
紙を搬送する搬送ベルトの表面に導電性を付与して、当
該搬送ベルトを、感光体表面に形成されたトナー像を用
紙に転写するための転写ベルトとしても機能させること
で、装置の部品点数を減らすことが主流となりつつあ
る。また最近では上記搬送ベルトを、用紙に転写された
トナー像を加熱、加圧して当該用紙に定着するための定
着ベルトとしても機能させることで、さらに部品点数を
減少させることも検討されている。
In order to respond to this demand, the surface of a transport belt for transporting paper in the apparatus is provided with conductivity, and the transport belt is used to transfer a toner image formed on the surface of a photoreceptor to the paper. It is becoming mainstream to reduce the number of parts of the apparatus by making it function also as a transfer belt. Also, recently, it has been studied to further reduce the number of parts by making the above-mentioned transport belt function as a fixing belt for heating and pressing the toner image transferred onto the sheet to fix the toner image on the sheet.

【0004】定着に際しては、用紙をおよそ120℃以
上という高温下で加圧しなければならないので、上記の
ように転写および定着ベルトを兼ねる搬送ベルトを、装
置内で複雑に屈曲させながら、転写部や定着部等を通過
させつつ循環させることをも併せ考慮すると、当該搬送
ベルトを形成する材料としては、高耐熱、高強度でしか
も耐屈曲性、柔軟性に優れた特殊な材料を使用する必要
がある。かかる特殊な材料としては合成樹脂の中でも数
種しかなく、中でもポリイミド、特に東レ・デュポン社
製の商品名カプトンフィルムに代表される、式(10):
At the time of fixing, the paper must be pressurized at a high temperature of about 120 ° C. or more, so that the transfer belt and the transfer belt, which also serve as the transfer and fixing belts, are complicatedly bent in the apparatus as described above. In consideration of the circulation while passing through the fixing section, etc., it is necessary to use a special material having high heat resistance, high strength, and excellent bending resistance and flexibility as a material for forming the transport belt. is there. As such a special material, there are only a few kinds of synthetic resins. Among them, polyimide (especially, Kapton film (trade name) manufactured by Du Pont-Toray Co., Ltd.) has the formula (10):

【0005】[0005]

【化1】 Embedded image

【0006】で表される繰り返し単位で構成される全芳
香族ポリイミドのフィルムが好適に用いられる。また搬
送ベルトを、上記のように転写および定着ベルトとして
も兼用するために近時、その表面に、転写時の導電性を
確保するとともに定着時の発熱の核となる金属膜を、無
電解めっき法等の従来公知の成膜方法によって積層、形
成することが検討されている。
[0006] A wholly aromatic polyimide film composed of a repeating unit represented by the following formula is preferably used. In recent years, in order to use the transport belt also as a transfer and fixing belt as described above, a metal film that secures conductivity at the time of transfer and generates heat at the time of fixing is recently coated on the surface thereof by electroless plating. Stacking and forming by a conventionally known film forming method such as a method have been studied.

【0007】[0007]

【発明が解決しようとする課題】ところが、前記ポリイ
ミドの表面は平滑で、いわゆるアンカー(投錨)効果が
期待できない上、表面エネルギーの小さい安定な状態で
あって、金属吸着の核になる活性基に乏しいため、その
表面に直接に金属膜を形成した場合には、当該金属膜の
密着性が不十分になる。そして密着性が不十分な金属膜
は、前記のように搬送ベルトを、装置内で複雑に屈曲さ
せることで機械的衝撃を加えつつ、また定着部での高温
加熱とその他の部位での放冷とを繰り返すことで熱的衝
撃を加えつつ、当該装置内を循環させることによって、
短期間でクラックが入ったり剥離したりしやすいという
問題を生じる。
However, the surface of the polyimide is smooth, so that the so-called anchor (anchor) effect cannot be expected, and the polyimide is in a stable state having a small surface energy, and has a low surface energy. When the metal film is formed directly on the surface, the adhesion of the metal film becomes insufficient. As for the metal film with insufficient adhesion, the conveyor belt is bent intricately in the device as described above, applying mechanical shock, and also heating at high temperature in the fixing unit and cooling in other parts. By circulating inside the device while applying thermal shock by repeating
There is a problem that cracks are easily formed or peeled off in a short period of time.

【0008】金属膜の密着性を高めるため、ポリイミド
の表面にプライマ層を形成した上に、金属膜を積層する
ことも検討されている。しかし、プライマ層の材料はポ
リイミドより耐熱性に劣るものしかないため、特に搬送
ベルトの、定着時の耐熱性が不十分になるという問題が
ある。本発明の目的は、ポリイミドの表面に直接に、こ
れまでよりも密着性に優れた金属膜を形成することがで
きる新規な金属膜形成方法と、この方法で製造された、
上記のように転写および定着ベルトを兼ねる、画像形成
装置の搬送ベルト等として好適に使用される導電性ベル
トとを提供することにある。
[0008] In order to enhance the adhesion of the metal film, it has been studied to form a primer layer on the surface of polyimide and then laminate the metal film. However, since the material of the primer layer is inferior to polyimide in heat resistance, there is a problem that the heat resistance of the conveyor belt at the time of fixing becomes insufficient. An object of the present invention is to provide a novel metal film forming method capable of forming a metal film having better adhesiveness directly on the surface of polyimide, and a method for producing the same,
An object of the present invention is to provide a conductive belt suitably used as a transfer belt or the like of an image forming apparatus, which also serves as a transfer and fixing belt as described above.

【0009】[0009]

【課題を解決するための手段および発明の効果】上記課
題を解決するために、発明者らは、ポリイミドの表面を
化学的に処理して、金属吸着の核になる活性基を導入し
たのち金属化する技術について、種々検討した。例えば
特開平10−245444号公報には、ポリイミドの表
面を、過酸化水素または無水酢酸中で、硫酸によって処
理することでスルホン化して、活性基としてのスルホ基
を導入したのち中和し、次いでこのスルホ基を、金属イ
オン含有液で処理してスルホ基の金属塩に変換し、さら
に金属イオンを還元して金属膜を形成することが記載さ
れている。
Means for Solving the Problems and Effects of the Invention In order to solve the above-mentioned problems, the present inventors chemically treat the surface of polyimide to introduce an active group which becomes a nucleus of metal adsorption, and then form a metal. Various studies have been made on the technology to be used. For example, JP-A-10-245444 discloses that the surface of a polyimide is sulfonated by treating it with sulfuric acid in hydrogen peroxide or acetic anhydride to introduce a sulfo group as an active group, and then neutralize. It is described that this sulfo group is treated with a metal ion-containing liquid to convert the sulfo group into a metal salt of a sulfo group, and the metal ion is reduced to form a metal film.

【0010】また上記公報記載の発明の発明者でもある
日下らは、ポリイミドの表面を強アルカリで処理してイ
ミド環を開環させることで、ともに活性基として機能す
るアミド結合とカルボキシル基とを生成した後、上記と
同様に金属イオン含有液で処理して金属イオンを吸着さ
せ、次いで金属イオンを還元して金属膜を形成すること
も提案している〔縄舟秀美、西岡太郎、辻治雄、水本省
三、清田優、日下大「ポリイミド樹脂およびエポキシ樹
脂の表面改質を利用するDirect Metallizationに関する
基礎的研究」エレクトロニクス実装学会誌 Vol.2 No.5
(1999)〕。
Kusaka et al., The inventor of the invention described in the above publication, treat the surface of polyimide with a strong alkali to open the imide ring, thereby forming an amide bond and a carboxyl group, both of which function as active groups. It has also been proposed that after forming a metal film, the metal ion is adsorbed by treating with a metal ion-containing liquid in the same manner as described above, and then the metal ion is reduced to form a metal film [Hidemi Nabune, Taro Nishioka, Tsuji Tsuji Haruo, Shozo Mizumoto, Yu Kiyota, Dai Kusaka “Basic Study on Direct Metallization Using Surface Modification of Polyimide and Epoxy Resins” Journal of Japan Institute of Electronics Packaging Vol.2 No.5
(1999)].

【0011】ところが、発明者らが検討したところによ
ると、上記両方法ではいずれも、上記活性基に吸着した
金属イオンを核として、還元処理によってポリイミド表
面の複数箇所で成長した膜が互いにつながるかつながら
ないかといった程度のごく薄い金属膜しか形成すること
ができない。このため、上記公報ではさらにこの金属膜
上に、電気めっきによって金属膜を積層、形成してお
り、金属膜が、厚み方向に不連続な構造となっている。
However, according to the studies made by the inventors, in both of the above methods, whether the films grown at a plurality of places on the polyimide surface by the reduction treatment are connected to each other by using the metal ion adsorbed on the active group as a nucleus or not. Only a very thin metal film of such a degree as not to be connected can be formed. Therefore, in the above publication, a metal film is further laminated and formed on the metal film by electroplating, and the metal film has a structure discontinuous in the thickness direction.

【0012】通常の導電膜であれば、かかる不連続な構
造でも差し支えないと思われるが、この構造を、前記の
ように繰り返し機械的衝撃や熱的衝撃が加えられる搬送
ベルトの金属膜に適用する場合には未だ密着性が十分で
なく、金属膜にクラックが入ったり剥離したりするおそ
れがある。そこで発明者らは、上記の処理によって活性
基を導入したポリイミドの表面に、金属膜を形成する方
法について、さらに検討を行った。
It is considered that such a discontinuous structure may be used as long as it is an ordinary conductive film. However, this structure is applied to a metal film of a transport belt to which mechanical shock and thermal shock are repeatedly applied as described above. In this case, the adhesion is not yet sufficient, and there is a possibility that cracks or peeling may occur in the metal film. Therefore, the inventors have further studied a method of forming a metal film on the surface of the polyimide into which the active group has been introduced by the above treatment.

【0013】その結果、強アルカリで処理してイミド環
を開環させることで、活性基としてのアミド結合とカル
ボキシル基とを生成したポリイミドの表面に、上述した
金属イオンの吸着と還元とによる金属化の処理を行わ
ず、気相成長法によって直接に、所定の膜厚を有する金
属膜を形成することを見出し、本発明を完成するに至っ
た。すなわち請求項1記載の発明は、ポリイミド表面を
強アルカリで処理してイミド環を開環させたのち、この
ポリイミド表面に、気相成長法によって金属膜を形成す
ることを特徴とするポリイミド表面への金属膜形成方法
である。
As a result, by treating with a strong alkali to open the imide ring, the above-mentioned metal ion is adsorbed and reduced by the above-mentioned metal ion adsorption and reduction on the surface of the polyimide in which an amide bond as an active group and a carboxyl group are formed. It has been found that a metal film having a predetermined film thickness is directly formed by a vapor phase growth method without performing a chemical conversion treatment, and the present invention has been completed. That is, the invention according to claim 1 is to form a metal film on the surface of the polyimide by a vapor phase growth method after treating the surface of the polyimide with a strong alkali to open the imide ring. This is a method for forming a metal film.

【0014】上記請求項1記載の発明の金属膜形成方法
においては、まずポリイミド表面を強アルカリで処理す
ると、強アルカリと接触した最表面部に位置するポリイ
ミドのイミド環が、上記強アルカリとの反応によって開
環して、ともに金属吸着の核になる活性基として機能す
るアミド結合とカルボキシル基とが生成される。したが
って次工程で、上記ポリイミドの表面に、気相成長法に
よる金属膜の形成を行うと、まず上記アミド結合および
カルボキシル基に吸着した金属原子を核として膜が成長
する結果、ポリイミドの表面に直接に、これまでより密
着性に優れる上、厚み方向に連続した、所定の膜厚を有
する均一な構造の金属膜を形成することができる。
In the method for forming a metal film according to the first aspect of the present invention, first, when the surface of the polyimide is treated with a strong alkali, the imide ring of the polyimide located on the outermost surface in contact with the strong alkali is in contact with the strong alkali. The ring is opened by the reaction to generate an amide bond and a carboxyl group, both of which function as active groups that serve as nuclei for metal adsorption. Therefore, in the next step, when a metal film is formed on the surface of the polyimide by vapor phase epitaxy, the film first grows with the metal atom adsorbed on the amide bond and the carboxyl group as a nucleus. In addition, it is possible to form a metal film having a predetermined thickness and a uniform structure which is more excellent in the adhesiveness and continuous in the thickness direction.

【0015】またそれゆえに、少なくともその表面がポ
リイミドにて形成されたベース層を備えるとともに、当
該ベース層の表面に、上記請求項1記載の金属膜形成方
法によって金属膜が積層、形成されたことを特徴とする
請求項3記載の発明の導電性ベルトは、当該金属膜の密
着性に優れており、繰り返し機械的衝撃や熱的衝撃が加
えられても、これまでのように短期間に、金属膜にクラ
ックが入ったり剥離したりすることが防止される。
[0015] Therefore, at least a surface of the base layer is formed of polyimide, and a metal film is laminated and formed on the surface of the base layer by the method of forming a metal film according to claim 1. The conductive belt according to the third aspect of the present invention is excellent in the adhesion of the metal film, and even if a mechanical shock or a thermal shock is repeatedly applied, in a short time as before. Cracks and peeling of the metal film are prevented.

【0016】したがって上記金属膜が、転写時の導電性
を確保するとともに定着時の発熱の核となることと相ま
って、上記導電性ベルトは、転写および定着ベルトを兼
ねる、画像形成装置の搬送ベルト等として好適に使用す
ることができる。
Therefore, in combination with the fact that the metal film secures conductivity at the time of transfer and serves as a nucleus of heat generation at the time of fixing, the conductive belt serves as a transfer and fixing belt, such as a transfer belt of an image forming apparatus. Can be suitably used.

【0017】[0017]

【発明の実施の形態】以下に、本発明を説明する。 《金属膜形成方法》本発明の金属膜形成方法は、前述し
たカプトンフィルムなどの、前記式(10)で表される繰り
返し単位で構成される全芳香族ポリイミドの表面に、金
属膜を形成するために好適である。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below. << Metal film forming method >> The metal film forming method of the present invention forms a metal film on the surface of a wholly aromatic polyimide composed of the repeating unit represented by the above formula (10), such as the aforementioned Kapton film. It is suitable for.

【0018】但し本発明の金属膜形成方法は、上記全芳
香族ポリイミドだけでなく、それ以外の、分子中にイミ
ド環を有する種々のポリイミドの表面に、密着性に優れ
た金属膜を形成するためにも有効である。本発明の金属
膜形成方法では、まず上記ポリイミドの表面を、強アル
カリで処理してイミド環を開環させる。強アルカリとし
ては水酸化ナトリウム(NaOH)、水酸化カリウム
(KOH)等が挙げられる。
However, the metal film forming method of the present invention forms a metal film having excellent adhesion on the surface of not only the above-mentioned wholly aromatic polyimide but also various polyimides having an imide ring in the molecule. It is also effective for. In the metal film forming method of the present invention, the surface of the polyimide is first treated with a strong alkali to open the imide ring. Examples of the strong alkali include sodium hydroxide (NaOH) and potassium hydroxide (KOH).

【0019】処理は、強アルカリの、所定の濃度、温度
の水溶液中に、ポリイミドを一定時間、浸漬することで
行われる。このうち強アルカリの水溶液の濃度は、効率
的でしかも偏りのない均一な処理を行うために、例えば
水酸化カリウムの水溶液の場合、3〜7M程度であるの
が好ましい。また液温は、室温(23±1℃)前後であ
っても良いが、やはり効率的でしかも偏りのない均一な
処理を行うことを考慮すると、およそ40〜60℃程度
に加温するのが好ましい。
The treatment is performed by immersing the polyimide in an aqueous solution of a strong alkali at a predetermined concentration and temperature for a certain period of time. Among them, the concentration of the strong alkali aqueous solution is preferably about 3 to 7 M in the case of, for example, an aqueous solution of potassium hydroxide in order to perform an efficient and uniform treatment. The temperature of the solution may be around room temperature (23 ± 1 ° C.), but it is preferable to heat the solution to about 40 to 60 ° C. in consideration of performing an efficient and uniform treatment without bias. preferable.

【0020】上記の温度に加温した強アルカリ水溶液中
に、ポリイミドを3〜7分程度浸漬すると、例えば前記
式(10)で表される繰り返し単位で構成される全芳香族ポ
リイミドの場合は、強アルカリと接触した最表面部に位
置する繰り返し単位のイミド環が、式(11)に示すよう
に、上記強アルカリとの反応によって開環して、ともに
金属吸着の核になる活性基として機能するアミド結合と
カルボキシル基とが生成される。
When the polyimide is immersed in a strong alkaline aqueous solution heated to the above temperature for about 3 to 7 minutes, for example, in the case of a wholly aromatic polyimide composed of a repeating unit represented by the above formula (10), As shown in the formula (11), the imide ring of the repeating unit located on the outermost surface in contact with the strong alkali opens as a result of the reaction with the strong alkali to function as an active group that serves as a core of metal adsorption. An amide bond and a carboxyl group are generated.

【0021】[0021]

【化2】 Embedded image

【0022】次に、処理されたポリイミドを酸の水溶液
に浸漬するなどして中和し、水洗したのち、十分に乾燥
させた状態で、気相成長法によって、その表面に、金属
膜を積層、形成する。金属膜を形成する金属としては、
気相成長法で成膜可能な種々の金属がいずれも使用可能
であり、当該金属膜の用途等に応じて適宜、選択すれば
よい。例えば前述した転写および定着ベルトを兼ねる搬
送ベルトの表面に形成される金属膜を形成する金属とし
ては、例えば銅(Cu)、アルミニウム(Al)、チタ
ン(Ti)等が挙げられる。これらの金属はそれぞれ1
種単独で金属膜を形成できる他、2種以上を併用して、
つまり合金の状態で金属膜を形成することもできる。
Next, the treated polyimide is neutralized by dipping in an aqueous solution of an acid or the like, washed with water, dried sufficiently, and then a metal film is laminated on the surface thereof by vapor phase epitaxy. ,Form. As the metal forming the metal film,
Any of various metals that can be formed by a vapor phase growth method can be used, and may be appropriately selected according to the use of the metal film. For example, copper (Cu), aluminum (Al), titanium (Ti), and the like are examples of the metal that forms the metal film formed on the surface of the transport belt that also serves as the transfer and fixing belts described above. Each of these metals is 1
In addition to being able to form a metal film alone, two or more species can be used in combination,
That is, the metal film can be formed in an alloy state.

【0023】ポリイミドの表面に金属膜を形成するため
の気相成長法としては、例えば (a) 直流二極スパッタリング法、高周波スパッタリン
グ法などの、真空もしくはガス雰囲気中に電界を印加し
てグロー放電を発生させ、それをターゲットに接触させ
ることで、ターゲットの金属をスパッタリングして、基
材としてのポリイミドの表面に到達させて金属膜を形成
するスパッタリング法 (b) 直流励起法、高周波励起法などの、ガス雰囲気雰
囲気中に電界を印加してプラズマを発生させ、そこへ蒸
発源から蒸発させた金属を接触させて、イオン化した状
態で、基材としてのポリイミドの表面に到達させて金属
膜を形成するイオンプレーティング法などが、いずれも
採用可能であり、特にスパッタリング法が好適に採用さ
れる。
The vapor phase growth method for forming a metal film on the surface of polyimide includes, for example, (a) glow discharge by applying an electric field in a vacuum or gas atmosphere, such as a DC bipolar sputtering method or a high frequency sputtering method. Sputtering method that generates metallization and contacts it with the target to sputter the metal of the target and reach the surface of polyimide as the base material to form a metal film. (B) DC excitation method, high frequency excitation method, etc. In the gas atmosphere, an electric field is applied to generate plasma, and the metal evaporated from the evaporation source is brought into contact therewith, and in a state of ionization, reaches the surface of the polyimide as a base material to form a metal film. Either the ion plating method or the like to be formed can be adopted, and particularly, the sputtering method is suitably adopted.

【0024】特にその中でも、強アルカリでの処理によ
ってポリイミドの表面に生成した、活性基としてのアミ
ド結合やカルボキシル基がグロー放電にさらされること
などで潰されるのを防止することを考慮すると、他の方
式より膜付着速度が大きく、基材の温度上昇が小さく、
かつ荷電粒子衝突に起因する基材損傷を抑制しやすいマ
グネトロンスパッタリング法、その中でも特にヘリコン
スパッタリング法が好適に採用される。
In particular, considering that the amide bond or carboxyl group as an active group formed on the surface of the polyimide by the treatment with the strong alkali is prevented from being crushed by exposure to glow discharge, other factors are considered. The film deposition rate is higher than that of
In addition, a magnetron sputtering method that easily suppresses damage to the base material due to charged particle collisions, particularly a helicon sputtering method, is particularly preferably employed.

【0025】スパッタリング法の条件等は、基材として
のポリイミドの寸法、形状、形成する金属膜の種類や厚
み等に基づき、採用するスパッタリング法の種類に応じ
て適宜、設定される。2種以上の金属の合金からなる金
属膜を形成する場合は、それぞれの金属のスパッタリン
グ率に基づいて組成を調整した合金をターゲットとして
使用する、各金属ごとのターゲットを装置内に配置して
同時に、あるいは交互にスパッタリングするといった方
法が採用される。
The conditions of the sputtering method and the like are appropriately set according to the type of the sputtering method to be used, based on the dimensions and shape of the polyimide as the base material, the type and thickness of the metal film to be formed, and the like. When forming a metal film made of an alloy of two or more kinds of metals, an alloy whose composition is adjusted based on the sputtering rate of each metal is used as a target. Or alternately sputtering.

【0026】かかる本発明の金属膜形成方法によれば、
以上で説明したように強アルカリによるポリイミドの前
処理と、スパッタリング法などの気相成長法による金属
膜の積層、形成とを組み合わせることによって、ポリイ
ミドの表面に直接に、これまでよりも密着性に優れる
上、厚み方向に連続した、所定の厚みを有する均一な金
属膜を形成することが可能となる。 《導電性ベルト》本発明の導電性ベルトは、少なくとも
その表面がポリイミドにて形成されたベース層の表面、
すなわちポリイミドの表面に、上記本発明の金属膜形成
方法によって金属膜が積層、形成されたものである。
According to the metal film forming method of the present invention,
As described above, by combining the pretreatment of the polyimide with a strong alkali and the lamination and formation of a metal film by a vapor deposition method such as a sputtering method, directly on the surface of the polyimide, more adhesive than before. In addition, it is possible to form a uniform metal film having a predetermined thickness which is continuous in the thickness direction. << Conductive Belt >> The conductive belt of the present invention has at least a surface of a surface of a base layer formed of polyimide,
That is, a metal film is laminated and formed on the surface of polyimide by the above-described metal film forming method of the present invention.

【0027】このうちベース層は、前述したカプトンフ
ィルムなどの、ポリイミドフィルム単体で形成できる
他、場合によってはポリイミドと、金属箔や繊維布等で
形成された基材層等との積層構造とすることもできる。
導電性ベルトを構成する各層の厚みは特に限定されない
が、例えばポリイミドフィルム単体でベース層を形成し
た、転写および定着ベルトを兼ねる画像形成装置の搬送
ベルトの場合は、当該ベース層の厚み、つまりポリイミ
ドフィルムの厚みが10〜100μm程度、金属膜の厚
みが1〜5μm程度であるのが好ましい。
Of these, the base layer can be formed of a polyimide film alone such as the above-mentioned Kapton film, or, in some cases, has a laminated structure of polyimide and a base layer formed of metal foil, fiber cloth, or the like. You can also.
The thickness of each layer constituting the conductive belt is not particularly limited, for example, a base layer formed of a single polyimide film, in the case of a transfer belt of an image forming apparatus also serving as a transfer and fixing belt, the thickness of the base layer, that is, polyimide Preferably, the thickness of the film is about 10 to 100 μm, and the thickness of the metal film is about 1 to 5 μm.

【0028】かかる本発明の導電性ベルトは、先に述べ
たように金属膜の密着性に優れており、繰り返し機械的
衝撃や熱的衝撃が加えられても、これまでのように短期
間に、金属膜にクラックが入ったり剥離したりすること
が防止される。したがって上記金属膜が、転写時の導電
性を確保するとともに定着時の発熱の核となることと相
まって、本発明の導電性ベルトは、上述した転写および
定着ベルトを兼ねる、画像形成装置の搬送ベルト等とし
て好適に使用することができる。
The conductive belt of the present invention is excellent in the adhesion of the metal film as described above, so that even if a mechanical or thermal shock is repeatedly applied, the conductive belt can be used in a short time as before. In addition, cracking and peeling of the metal film are prevented. Therefore, in combination with the fact that the metal film secures conductivity at the time of transfer and serves as a nucleus of heat generation at the time of fixing, the conductive belt of the present invention also serves as the transfer belt of the image forming apparatus, which also serves as the transfer and fixing belts described above. And the like.

【0029】[0029]

【実施例】以下に本発明を、実施例、比較例に基づいて
説明する。 実施例1 画像形成装置の、転写および定着ベルトを兼ねる搬送ベ
ルトに使用する導電性ベルトのモデルを作製すべく、ベ
ース層としての厚み25μmのポリイミドフィルム〔前
出の東レ・デュポン社製のカプトンフィルム〕の表面
に、下記の処理を行った。
The present invention will be described below based on examples and comparative examples. Example 1 A polyimide film having a thickness of 25 μm as a base layer [Kapton film manufactured by Toray Dupont Co., Ltd. as a base layer] in order to prepare a model of a conductive belt used as a transfer belt also serving as a transfer and fixing belt of an image forming apparatus. ] Was subjected to the following treatment.

【0030】すなわちまず上記ポリイミドフィルムを、
液温を50℃に保持した5Mの水酸化カリウム水溶液中
に5分間、浸漬して、その最表面部のポリイミドのイミ
ド環を開環させた。次いで、このポリイミドフィルムを
6Mの塩酸水溶液で中和し、十分に水洗し、さらに十分
に乾燥させたのち、超高真空ヘリコンスパッタリング装
置〔日本真空技術(株)製のMUEシリーズ〕のチャンバ
内の、基材保持部にセットし、チャンバを閉じて、装置
の真空系でもってチャンバ内を到達真空度10-6hPa
まで真空引きしつつ、ヘリコンスパッタリング法によっ
て、その片面に、厚み2μmの銅膜をスパッタリング形
成した。
That is, first, the above polyimide film is
It was immersed for 5 minutes in a 5M aqueous solution of potassium hydroxide maintained at a liquid temperature of 50 ° C. to open the polyimide imide ring on the outermost surface. Next, the polyimide film was neutralized with a 6 M hydrochloric acid aqueous solution, sufficiently washed with water, and further sufficiently dried. Then, the inside of a chamber of an ultra-high vacuum helicon sputtering device (MUE series manufactured by Japan Vacuum Engineering Co., Ltd.) was used. , Set in the substrate holder, close the chamber, and reach the inside of the chamber with a vacuum system of 10 -6 hPa by the vacuum system.
While evacuating to a vacuum, a copper film having a thickness of 2 μm was formed by sputtering on one surface thereof by a helicon sputtering method.

【0031】比較例1 同じポリイミドフィルムを強アルカリでの処理、中和、
水洗および乾燥の工程を省略して直接に、超高真空ヘリ
コンスパッタリング装置のチャンバ内の、基材保持部に
セットして、実施例1と同条件で、その片面に、厚み2
μmの銅膜をスパッタリング形成した。 比較例2 同じポリイミドフィルムを強アルカリでの処理後、0.
05Mの硫酸銅水溶液に1分間、浸漬して、その表面に
銅イオンを吸着させた。
Comparative Example 1 The same polyimide film was treated with strong alkali, neutralized,
The washing and drying steps were omitted and directly set on the substrate holding part in the chamber of the ultra-high vacuum helicon sputtering apparatus, and under the same conditions as in Example 1, a thickness of 2
A μm copper film was formed by sputtering. Comparative Example 2 After treating the same polyimide film with a strong alkali,
It was immersed in a 05M aqueous solution of copper sulfate for 1 minute to adsorb copper ions on its surface.

【0032】次にこのポリイミドフィルムを、0.01
Mの水素化ホウ素ナトリウム(NaBH4)に5分間、
浸漬して還元することで、上記ポリイミドフィルムの表
面に銅膜を析出させたのち、この銅膜を陰極として電気
銅めっきを行って、合計の厚みが2μmの銅膜を形成し
た。 金属膜の密着性試験 日本工業規格JIS K5400「塗料一般試験方法」
に所載の付着性試験(碁盤目法)に則って、実施例1、
比較例1、2でポリイミドフィルムの表面に積層、形成
した金属膜の密着性を試験した。試験は、実施例1、比
較例1ともに2個のサンプルについて行った。
Next, this polyimide film was treated with 0.01
M sodium borohydride (NaBH 4 ) for 5 minutes
After a copper film was deposited on the surface of the polyimide film by immersion and reduction, electrolytic copper plating was performed using the copper film as a cathode to form a copper film having a total thickness of 2 μm. Metal film adhesion test Japanese Industrial Standard JIS K5400 "General paint test method"
Example 1 according to the adhesion test (cross-cut method) described in
In Comparative Examples 1 and 2, the adhesion of the metal film laminated and formed on the surface of the polyimide film was tested. The test was performed on two samples in both Example 1 and Comparative Example 1.

【0033】そして、上記試験の評価方法に則って、当
該評価方法で規定された評価点数でもって、金属膜の密
着性を評価したところ、比較例1は評価点数が0〜2点
であり、金属膜が殆ど密着していないことがわかった。
また比較例2は評価点数が4〜5点で、上記に比べれば
金属膜の密着性が向上しているものの、未だ十分でない
ことがわかった。これに対し実施例1は、評価点数が8
〜10点で、金属膜が強固に密着していることが確認さ
れた。
Then, according to the evaluation method of the above test, the adhesion of the metal film was evaluated using the evaluation points specified by the evaluation method. Comparative Example 1 had 0 to 2 evaluation points. It was found that the metal film hardly adhered.
In Comparative Example 2, the evaluation score was 4 to 5 points, and although the adhesion of the metal film was improved as compared with the above, it was found that it was still insufficient. On the other hand, in Example 1, the evaluation score was 8
At 10 to 10, it was confirmed that the metal film was firmly adhered.

【0034】以上の結果を表1に示す。Table 1 shows the above results.

【0035】[0035]

【表1】 [Table 1]

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) // C08L 79:08 C08L 79:08 (72)発明者 杉谷 信 兵庫県神戸市中央区脇浜町3丁目6番9号 住友ゴム工業株式会社内 Fターム(参考) 2H032 BA09 BA18 BA21 BA23 2H033 AA23 AA31 BA11 BA12 BB01 4F006 AA39 AB73 BA07 DA01 5G307 GA06 GC02 5G323 AA01 ──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme court ゛ (Reference) // C08L 79:08 C08L 79:08 (72) Inventor Shin Shinitani 3-chome, Wakihama-cho, Chuo-ku, Kobe City, Hyogo Prefecture No. 6-9 Sumitomo Rubber Industries, Ltd. F term (reference) 2H032 BA09 BA18 BA21 BA23 2H033 AA23 AA31 BA11 BA12 BB01 4F006 AA39 AB73 BA07 DA01 5G307 GA06 GC02 5G323 AA01

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】ポリイミド表面を強アルカリで処理してイ
ミド環を開環させたのち、このポリイミド表面に、気相
成長法によって金属膜を形成することを特徴とするポリ
イミド表面への金属膜形成方法。
1. A method of forming a metal film on a polyimide surface, comprising treating a polyimide surface with a strong alkali to open an imide ring, and then forming a metal film on the polyimide surface by a vapor phase growth method. Method.
【請求項2】気相成長法がスパッタリング法であること
を特徴とする請求項1記載のポリイミド表面への金属膜
形成方法。
2. The method for forming a metal film on a polyimide surface according to claim 1, wherein the vapor phase growth method is a sputtering method.
【請求項3】少なくともその表面がポリイミドにて形成
されたベース層を備えるとともに、当該ベース層の表面
に、請求項1記載の金属膜形成方法によって金属膜が積
層、形成されたことを特徴とする導電性ベルト。
3. A method according to claim 1, further comprising a base layer formed of polyimide on at least the surface thereof, and a metal film formed on the surface of the base layer by the metal film forming method according to claim 1. Conductive belt.
JP2000236055A 2000-08-03 2000-08-03 Method of forming metal film on polyimide surface and conductive belt using the same Pending JP2002047367A (en)

Priority Applications (1)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006324475A (en) * 2005-05-19 2006-11-30 Sumitomo Metal Mining Co Ltd Method of manufacturing metal-clad polyimide substrate
JP2010287434A (en) * 2009-06-11 2010-12-24 Dowa Electronics Materials Co Ltd Substrate with silver conductive film and method for manufacturing same

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000143028A (en) * 1998-11-16 2000-05-23 Kanegafuchi Chem Ind Co Ltd Medium conveyor belt
JP2001277424A (en) * 2000-04-03 2001-10-09 Mitsubishi Shindoh Co Ltd Metallized polyimide film and method for manufacturing the same

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000143028A (en) * 1998-11-16 2000-05-23 Kanegafuchi Chem Ind Co Ltd Medium conveyor belt
JP2001277424A (en) * 2000-04-03 2001-10-09 Mitsubishi Shindoh Co Ltd Metallized polyimide film and method for manufacturing the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006324475A (en) * 2005-05-19 2006-11-30 Sumitomo Metal Mining Co Ltd Method of manufacturing metal-clad polyimide substrate
JP2010287434A (en) * 2009-06-11 2010-12-24 Dowa Electronics Materials Co Ltd Substrate with silver conductive film and method for manufacturing same

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