JP2002026604A - Electric characteristic adjustment method for ceramic dielectric component - Google Patents

Electric characteristic adjustment method for ceramic dielectric component

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Publication number
JP2002026604A
JP2002026604A JP2000215867A JP2000215867A JP2002026604A JP 2002026604 A JP2002026604 A JP 2002026604A JP 2000215867 A JP2000215867 A JP 2000215867A JP 2000215867 A JP2000215867 A JP 2000215867A JP 2002026604 A JP2002026604 A JP 2002026604A
Authority
JP
Japan
Prior art keywords
center frequency
ceramic dielectric
dielectric
heat treatment
adjusted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000215867A
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Japanese (ja)
Other versions
JP4348587B2 (en
Inventor
Hideki Utaki
秀樹 卯滝
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Metal SMI Electronics Device Inc
Original Assignee
Sumitomo Metal SMI Electronics Device Inc
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Priority to JP2000215867A priority Critical patent/JP4348587B2/en
Publication of JP2002026604A publication Critical patent/JP2002026604A/en
Application granted granted Critical
Publication of JP4348587B2 publication Critical patent/JP4348587B2/en
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Expired - Lifetime legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To provide an electric characteristic adjustment method for a ceramic dielectric component by which the electric characteristic such as a center frequency of a ceramic dielectric component of a dielectric filter can efficiently be adjusted. SOLUTION: The dielectric filter 11 is structured such that a surface electrode 13 of an Ag conductor is formed on both sides of a low temperature sintered ceramic dielectric body 12 made of a Ba-Nd-Ti-Bi-Pb-glass additive group or the like by the thick film method. In the case of adjusting the center frequency of the dielectric filters 11, the dielectric filters 11 after sintering are sorted out by offsets of the center frequency and heat treatment is applied to the dielectric filters 11 with the same offset. In this case, the heat treatment temperature is adjusted within a range from 700 deg.C to the sintering temperature of the dielectric filters 11 depending on the offset of the center frequency to adjust the center frequency of the dielectric filters 11 to have the desired center frequency. Thus, the center frequencies of many dielectric filters 11 can efficiently be adjusted by one heat treatment.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、セラミック誘電体
部品の電気特性を調整する方法を改良したセラミック誘
電体部品の電気特性調整方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for adjusting the electrical characteristics of a ceramic dielectric component, which is an improved method for adjusting the electrical characteristics of a ceramic dielectric component.

【0002】[0002]

【従来の技術】近年、携帯用情報通信機器等において
は、帯域通過フィルタとして誘電体フィルタが広く使用
されている。この誘電体フィルタは、直方体形状又は円
筒形状に成形されたセラミック誘電体の所定位置に表面
電極を形成した構造となっている。この誘電体フィルタ
は、製造ばらつき等によって中心周波数がばらつくた
め、誘電体フィルタの製造後に中心周波数を調整する工
程が必要となる。
2. Description of the Related Art In recent years, dielectric filters have been widely used as band-pass filters in portable information communication equipment and the like. This dielectric filter has a structure in which a surface electrode is formed at a predetermined position on a ceramic dielectric formed into a rectangular parallelepiped shape or a cylindrical shape. Since the center frequency of this dielectric filter varies due to manufacturing variations and the like, a step of adjusting the center frequency after manufacturing the dielectric filter is required.

【0003】従来の誘電体フィルタの中心周波数の調整
方法は、誘電体フィルタの製造後に表面電極の形状又は
セラミック誘電体の形状を調整することで、誘電体フィ
ルタの中心周波数を調整するようにしていた。
[0003] In a conventional method of adjusting the center frequency of a dielectric filter, the center frequency of the dielectric filter is adjusted by adjusting the shape of the surface electrode or the shape of the ceramic dielectric after the dielectric filter is manufactured. Was.

【0004】[0004]

【発明が解決しようとする課題】上記従来の誘電体フィ
ルタの中心周波数の調整方法では、誘電体フィルタの製
造後に表面電極の形状又はセラミック誘電体の形状を調
整するため、調整作業が面倒である上に、誘電体フィル
タを1個ずつ調整しなければならず、調整作業の能率が
非常に悪く、その分、生産コストが高くつくという欠点
があった。
In the conventional method of adjusting the center frequency of a dielectric filter, since the shape of the surface electrode or the shape of the ceramic dielectric is adjusted after the dielectric filter is manufactured, the adjustment operation is troublesome. In addition, it is necessary to adjust the dielectric filters one by one, so that the efficiency of the adjustment operation is very poor, and the production cost is correspondingly high.

【0005】本発明はこのような事情を考慮してなされ
たものであり、従ってその目的は、セラミック誘電体部
品の中心周波数等の電気特性を能率良く調整することが
でき、生産性向上、生産コスト低減を実現することがで
きるセラミック誘電体部品の電気特性調整方法を提供す
ることにある。
The present invention has been made in view of such circumstances, and accordingly, it is an object of the present invention to efficiently adjust the electric characteristics such as the center frequency of a ceramic dielectric component, and to improve the productivity and production. It is an object of the present invention to provide a method for adjusting the electrical characteristics of a ceramic dielectric component, which can reduce the cost.

【0006】[0006]

【課題を解決するための手段】上記目的を達成するため
に、本発明の請求項1のセラミック誘電体部品の電気特
性調整方法は、低温焼成セラミック誘電体で形成したセ
ラミック誘電体部品の焼成後に、該セラミック誘電体部
品を熱処理する際に、熱処理温度を調整することで、該
セラミック誘電体部品の電気特性を調整するようにした
ものである。つまり、焼成後のセラミック誘電体部品を
中心周波数等の電気特性のずれ量に応じて選別し、同じ
ずれ量のセラミック誘電体部品をまとめて熱処理する。
この際、電気特性のずれ量に応じて熱処理温度を調整す
ることで、セラミック誘電体部品の電気特性を所望の特
性に調整する。これにより、多数のセラミック誘電体部
品の電気特性を1度の熱処理で能率良く調整することが
可能となる。
In order to achieve the above object, a method for adjusting the electrical characteristics of a ceramic dielectric component according to the present invention comprises a method of adjusting the electrical characteristics of a ceramic dielectric component formed of a low-temperature fired ceramic dielectric after firing. When the ceramic dielectric component is heat-treated, the electrical characteristics of the ceramic dielectric component are adjusted by adjusting the heat treatment temperature. In other words, the ceramic dielectric components after firing are selected according to the deviation amount of the electric characteristics such as the center frequency, and the ceramic dielectric parts having the same deviation amount are collectively heat-treated.
At this time, the electric characteristics of the ceramic dielectric component are adjusted to desired characteristics by adjusting the heat treatment temperature according to the deviation amount of the electric characteristics. This makes it possible to efficiently adjust the electrical characteristics of many ceramic dielectric components by one heat treatment.

【0007】この場合、請求項2のように、熱処理温度
を700℃からセラミック誘電体部品の焼成温度までの
範囲で調整することで、該セラミック誘電体部品の中心
周波数を調整するようにすると良い。つまり、後述する
本発明者の実験結果から明らかなように、熱処理温度が
700℃よりも低いと、熱処理の効果が少なく、中心周
波数の変化幅が少ない。また、熱処理温度が焼成温度よ
りも高いと、セラミック誘電体部品の物理特性、電気特
性が高熱で劣化し、セラミック誘電体部品の信頼性が低
下する。従って、熱処理温度を700℃から該セラミッ
ク誘電体部品の焼成温度までの範囲で調整すれば、セラ
ミック誘電体部品の信頼性を維持しながら、中心周波数
を能率良く調整することができる。
In this case, the center frequency of the ceramic dielectric component may be adjusted by adjusting the heat treatment temperature in a range from 700 ° C. to the firing temperature of the ceramic dielectric component. . That is, as is clear from the experimental results of the inventor described later, when the heat treatment temperature is lower than 700 ° C., the effect of the heat treatment is small, and the change width of the center frequency is small. On the other hand, if the heat treatment temperature is higher than the firing temperature, the physical and electrical characteristics of the ceramic dielectric component deteriorate due to high heat, and the reliability of the ceramic dielectric component decreases. Therefore, if the heat treatment temperature is adjusted in the range from 700 ° C. to the firing temperature of the ceramic dielectric component, the center frequency can be adjusted efficiently while maintaining the reliability of the ceramic dielectric component.

【0008】また、表面電極を有するセラミック誘電体
部品の電気特性を調整する場合は、請求項3のように、
表面電極の表面にめっき膜を形成すると共に、該めっき
膜の膜厚を調整することで、該セラミック誘電体部品の
電気特性を調整するようにしても良い。この場合、焼成
後のセラミック誘電体部品を中心周波数等の電気特性の
ずれ量に応じて選別し、同じずれ量のセラミック誘電体
部品の表面電極をまとめてめっき処理する。この際、電
気特性のずれ量に応じてめっき膜の膜厚を調整すること
で、セラミック誘電体部品の電気特性を所望の特性に調
整する。これにより、多数のセラミック誘電体部品の電
気特性を1度のめっき処理で能率良く調整することが可
能となる。
Further, when adjusting the electric characteristics of the ceramic dielectric component having the surface electrode,
The electrical characteristics of the ceramic dielectric component may be adjusted by forming a plating film on the surface of the surface electrode and adjusting the thickness of the plating film. In this case, the fired ceramic dielectric components are selected in accordance with the deviation of the electrical characteristics such as the center frequency, and the surface electrodes of the ceramic dielectric components having the same deviation are collectively plated. At this time, the electric characteristics of the ceramic dielectric component are adjusted to desired characteristics by adjusting the thickness of the plating film according to the deviation amount of the electric characteristics. This makes it possible to efficiently adjust the electrical characteristics of many ceramic dielectric components by a single plating process.

【0009】この場合、請求項4のように、めっき膜の
膜厚を20μm以下の範囲で調整することで、セラミッ
ク誘電体部品の中心周波数を調整するようにすると良
い。つまり、後述する本発明者の実験結果から明らかな
ように、めっき膜の膜厚が厚くなるほど、中心周波数の
変化幅が大きくなるが、めっき膜の膜厚が20μmより
も厚くなると、最小損失(挿入損失)の劣化が大きくな
り、その影響を無視できなくなる。従って、最小損失の
劣化を小さくするために、めっき膜の膜厚は20μm以
下にすることが好ましい。
In this case, it is preferable to adjust the center frequency of the ceramic dielectric component by adjusting the thickness of the plating film within a range of 20 μm or less. In other words, as is clear from the experimental results of the inventor described later, as the thickness of the plating film increases, the width of change in the center frequency increases, but when the thickness of the plating film is greater than 20 μm, the minimum loss ( The deterioration of the insertion loss becomes large, and the effect cannot be ignored. Therefore, in order to reduce the deterioration of the minimum loss, the thickness of the plating film is preferably set to 20 μm or less.

【0010】[0010]

【発明の実施の形態】[実施形態(1)]本発明の実施
形態(1)では、誘電体フィルタ11の中心周波数の調
整を熱処理によって行う。図1に示すように、誘電体フ
ィルタ11は、低温焼成セラミック誘電体12の表面に
厚膜法で表面電極13を形成した構造となっている。低
温焼成セラミック誘電体12としては、例えば、Ba−
Nd−Ti−Bi−Pb−ガラス添加物系、珪酸塩系
(BaO−Al2 3 −SiO2 −B2 3 等)、Pb
系ペロブスカイト系等、1000℃以下で焼成可能な低
温焼成セラミック誘電体を用いれば良い。また、表面電
極13は、低温焼成セラミック誘電体12と同時焼成可
能な厚膜導体、例えばAg、Ag/Pd、Ag/Pt、
Au、Cu等を用いれば良い。尚、表面電極13は、低
温焼成セラミック誘電体12と同時焼成したり、或は、
低温焼成セラミック誘電体12の焼成後に表面電極13
を厚膜法で後付けするようにしても良い。
[Embodiment (1)] In the embodiment (1) of the present invention, the center frequency of the dielectric filter 11 is adjusted by heat treatment. As shown in FIG. 1, the dielectric filter 11 has a structure in which a surface electrode 13 is formed on a surface of a low-temperature fired ceramic dielectric 12 by a thick film method. As the low-temperature fired ceramic dielectric 12, for example, Ba-
Nd-Ti-Bi-Pb- glass additive system, silicate (BaO-Al 2 O 3 -SiO 2 -B 2 O 3 , etc.), Pb
A low-temperature fired ceramic dielectric that can be fired at 1000 ° C. or less, such as a perovskite-based ceramic dielectric, may be used. The surface electrode 13 is made of a thick-film conductor that can be co-fired with the low-temperature fired ceramic dielectric 12, such as Ag, Ag / Pd, Ag / Pt, or the like.
Au, Cu, or the like may be used. The surface electrode 13 is fired simultaneously with the low temperature fired ceramic dielectric 12, or
After firing the low temperature fired ceramic dielectric 12, the surface electrode 13
May be added later by a thick film method.

【0011】この誘電体フィルタ11の中心周波数を調
整する場合は、焼成後の誘電体フィルタ11を中心周波
数のずれ量に応じて選別し、同じずれ量の誘電体フィル
タ11をまとめて熱処理する。この際、中心周波数のず
れ量に応じて、熱処理温度を700℃から誘電体フィル
タ11の焼成温度までの範囲で調整することで、誘電体
フィルタ11の中心周波数を所望の中心周波数に調整す
る。これにより、多数の誘電体フィルタ11の中心周波
数を1度の熱処理で能率良く調整することが可能とな
り、生産性向上、生産コスト低減を実現することができ
る。
When the center frequency of the dielectric filter 11 is adjusted, the fired dielectric filter 11 is selected according to the shift amount of the center frequency, and the dielectric filters 11 having the same shift amount are heat-treated together. At this time, the center frequency of the dielectric filter 11 is adjusted to a desired center frequency by adjusting the heat treatment temperature in a range from 700 ° C. to the firing temperature of the dielectric filter 11 according to the shift amount of the center frequency. As a result, the center frequency of many dielectric filters 11 can be efficiently adjusted by a single heat treatment, thereby improving productivity and reducing production cost.

【0012】本発明者は、誘電体フィルタ11の熱処理
温度と熱処理後の中心周波数との関係を評価する試験を
行ったので、その試験結果を次の表1に示す。
The present inventor conducted a test for evaluating the relationship between the heat treatment temperature of the dielectric filter 11 and the center frequency after the heat treatment. The test results are shown in Table 1 below.

【0013】[0013]

【表1】 [Table 1]

【0014】この試験に用いた誘電体フィルタ11の低
温焼成セラミック誘電体12は、Ba−Nd−Ti−B
i−Pb−ガラス添加物系の低温焼成セラミック誘電体
であり、表面電極13は、Ag導体で形成されている。
この誘電体フィルタ11の焼成温度は930℃である。
熱処理は、それぞれ大気中で1時間行った。
The low temperature fired ceramic dielectric 12 of the dielectric filter 11 used in this test is made of Ba-Nd-Ti-B.
It is an i-Pb-glass additive-based low-temperature fired ceramic dielectric, and the surface electrode 13 is formed of an Ag conductor.
The firing temperature of the dielectric filter 11 is 930 ° C.
The heat treatment was performed for one hour in the air.

【0015】熱処理前の誘電体フィルタ11の中心周波
数は870MHzであり、熱処理後の中心周波数は、熱
処理温度によって変化することが確認された。熱処理温
度が730℃、780℃、830℃の場合は、熱処理後
の中心周波数が熱処理前の中心周波数よりも高くなり、
熱処理温度が870℃、900℃の場合は、熱処理後の
中心周波数が熱処理前の中心周波数よりも低下した。
尚、熱処理温度が830〜870℃の範囲で、熱処理の
前後で中心周波数がほとんど変化しない温度Tが存在
し、熱処理温度がこの温度Tよりも高くなると、熱処理
後の中心周波数が熱処理前の中心周波数よりも低下し、
反対に、熱処理温度がこの温度Tよりも低くなると、熱
処理後の中心周波数が熱処理前の中心周波数よりも高く
なる。
The center frequency of the dielectric filter 11 before the heat treatment was 870 MHz, and it was confirmed that the center frequency after the heat treatment changed depending on the heat treatment temperature. When the heat treatment temperature is 730 ° C., 780 ° C., 830 ° C., the center frequency after the heat treatment is higher than the center frequency before the heat treatment,
When the heat treatment temperature was 870 ° C. or 900 ° C., the center frequency after the heat treatment was lower than the center frequency before the heat treatment.
When the heat treatment temperature is in the range of 830 to 870 ° C., there is a temperature T at which the center frequency hardly changes before and after the heat treatment, and when the heat treatment temperature is higher than this temperature T, the center frequency after the heat treatment becomes the center frequency before the heat treatment. Lower than the frequency,
Conversely, when the heat treatment temperature is lower than the temperature T, the center frequency after the heat treatment becomes higher than the center frequency before the heat treatment.

【0016】この場合、熱処理温度が700℃よりも低
いと、熱処理の効果が少なく、中心周波数の変化幅が少
ない。また、熱処理温度が焼成温度(930℃)よりも
高いと、誘電体フィルタ11の物理特性、電気特性が高
熱で劣化し、誘電体フィルタ11の信頼性が低下する。
従って、熱処理温度を700℃から焼成温度(930
℃)までの範囲で調整すれば、誘電体フィルタ11の信
頼性を維持しながら、中心周波数を能率良く調整するこ
とができる。特に、熱処理温度が850℃付近から焼成
温度(930℃)付近までの範囲では、熱処理温度に応
じて中心周波数が直線的に低周波数域側に変化するた
め、この範囲で熱処理温度を調整すれば、中心周波数の
調整が容易である。
In this case, if the heat treatment temperature is lower than 700 ° C., the effect of the heat treatment is small, and the variation of the center frequency is small. If the heat treatment temperature is higher than the firing temperature (930 ° C.), the physical properties and electrical properties of the dielectric filter 11 deteriorate due to high heat, and the reliability of the dielectric filter 11 decreases.
Therefore, the heat treatment temperature is increased from 700 ° C. to the firing temperature (930
C.), the center frequency can be adjusted efficiently while maintaining the reliability of the dielectric filter 11. In particular, when the heat treatment temperature is in the range from about 850 ° C. to the sintering temperature (930 ° C.), the center frequency changes linearly toward the low frequency range according to the heat treatment temperature. The adjustment of the center frequency is easy.

【0017】尚、本実施形態(1)の熱処理による中心
周波数の調整は、種々の構造の誘電体フィルタに適用で
き、更に、誘電体フィルタの他に、共振器等の他のセラ
ミック誘電体部品にも適用できる。また、セラミック誘
電体部品の中心周波数以外の電気特性を熱処理によって
調整するようにしても良い。また、熱処理後に、表面電
極13の表面をめっき処理するようにしても良い。
The adjustment of the center frequency by the heat treatment of the embodiment (1) can be applied to dielectric filters having various structures. Further, in addition to the dielectric filters, other ceramic dielectric parts such as resonators can be used. Also applicable to Further, electrical characteristics other than the center frequency of the ceramic dielectric component may be adjusted by heat treatment. After the heat treatment, the surface of the surface electrode 13 may be plated.

【0018】[実施形態(2)]本発明の実施形態
(2)では、図2に示すように、誘電体フィルタ11の
表面電極13の表面に形成するめっき膜14の膜厚を調
整することで、誘電体フィルタ11の中心周波数を調整
する。誘電体フィルタ11の低温焼成セラミック誘電体
12と表面電極13は、前記実施形態(1)と同じであ
る。
[Embodiment (2)] In the embodiment (2) of the present invention, as shown in FIG. 2, the thickness of the plating film 14 formed on the surface of the surface electrode 13 of the dielectric filter 11 is adjusted. Then, the center frequency of the dielectric filter 11 is adjusted. The low-temperature fired ceramic dielectric 12 and the surface electrode 13 of the dielectric filter 11 are the same as those in the embodiment (1).

【0019】この誘電体フィルタ11の中心周波数を調
整する場合は、焼成後(めっき処理前)の誘電体フィル
タ11を中心周波数のずれ量に応じて選別し、同じずれ
量の誘電体フィルタ11の表面電極13をまとめてめっ
き処理して、表面電極13の表面にめっき膜14を形成
する。このめっき処理の前後で、誘電体フィルタ11の
フィルタ特性が図3に示すように変化し、めっき処理後
の中心周波数がめっき処理前の中心周波数よりも低周波
数域側に変化する。このめっき処理工程で、中心周波数
のずれ量に応じてめっき膜14の膜厚を20μm以下の
範囲で調整することで、誘電体フィルタ11の中心周波
数を所望の中心周波数に調整する。これにより、多数の
誘電体フィルタ11を中心周波数を1度のめっき処理で
能率良く調整することが可能となる。
When adjusting the center frequency of the dielectric filter 11, the dielectric filter 11 after firing (before plating) is selected according to the shift amount of the center frequency, and the dielectric filter 11 having the same shift amount is selected. The surface electrode 13 is collectively plated to form a plating film 14 on the surface of the surface electrode 13. Before and after this plating process, the filter characteristics of the dielectric filter 11 change as shown in FIG. 3, and the center frequency after the plating process changes to a lower frequency range than the center frequency before the plating process. In this plating step, the center frequency of the dielectric filter 11 is adjusted to a desired center frequency by adjusting the thickness of the plating film 14 within a range of 20 μm or less according to the shift amount of the center frequency. This makes it possible to efficiently adjust the center frequency of many dielectric filters 11 by one plating process.

【0020】この場合、めっき膜14は、Niめっきを
下地とするSnめっき、或は、Niめっきを下地とする
Auめっき等、表面電極13の仕様に応じてめっきの種
類を選択すれば良い。
In this case, the type of the plating film 14 may be selected according to the specifications of the surface electrode 13, such as Sn plating using Ni plating as a base, or Au plating using Ni plating as a base.

【0021】本発明者は、めっき膜14の膜厚と、誘電
体フィルタ11のめっき処理前後の中心周波数との関係
を評価する試験1〜3を行ったので、その試験結果を説
明する。この試験1〜3では、表面電極13の表面に、
電解めっきにより、Niめっきを下地とするSnめっき
(Ni/Snめっき)を施した。
The present inventor has performed tests 1 to 3 for evaluating the relationship between the thickness of the plating film 14 and the center frequency of the dielectric filter 11 before and after the plating process. The test results will be described. In these tests 1 to 3, the surface of the surface electrode 13
Sn plating (Ni / Sn plating) using Ni plating as a base was performed by electrolytic plating.

【0022】《試験1》試験1のめっき処理条件とめっ
き処理前後のフィルタ特性値の変化を次の表2に示す。
<< Test 1 >> The plating conditions of Test 1 and the changes in the filter characteristic values before and after the plating are shown in Table 2 below.

【0023】[0023]

【表2】 [Table 2]

【0024】この試験1では、表面電極13の表面に、
6.1μmのNi/Snめっき膜(2.3μmのNiめ
っき膜と3.8μmのSnめっき膜)を形成すること
で、中心周波数を低周波数域側に1.6MHzに調整で
きたが、最小損失(挿入損失)の劣化は、0.03dB
にとどまり、無視できる。
In Test 1, the surface of the surface electrode 13
By forming a 6.1 μm Ni / Sn plating film (a 2.3 μm Ni plating film and a 3.8 μm Sn plating film), the center frequency could be adjusted to 1.6 MHz in the lower frequency range, but the minimum The deterioration of the loss (insertion loss) is 0.03 dB
Stay and can be ignored.

【0025】《試験2》試験2のめっき処理条件とめっ
き処理前後のフィルタ特性値の変化を次の表3に示す。
<< Test 2 >> Table 3 shows the plating conditions of Test 2 and changes in filter characteristic values before and after plating.

【0026】[0026]

【表3】 [Table 3]

【0027】この試験2では、表面電極13の表面に、
12.5μmのNi/Snめっき膜(4.5μmのNi
めっき膜と8.0μmのSnめっき膜)を形成すること
で、中心周波数を低周波数域側に3.4MHzに調整で
きたが、最小損失の劣化は、0.05dBにとどまり、
無視できる。
In Test 2, the surface of the surface electrode 13
12.5 μm Ni / Sn plated film (4.5 μm Ni
By forming a plating film and an Sn plating film of 8.0 μm), the center frequency could be adjusted to 3.4 MHz in the lower frequency range, but the deterioration of the minimum loss was only 0.05 dB,
I can ignore it.

【0028】《試験3》試験3のめっき処理条件とめっ
き処理前後のフィルタ特性値の変化を次の表4に示す。
<< Test 3 >> The plating conditions of Test 3 and changes in filter characteristic values before and after plating are shown in Table 4 below.

【0029】[0029]

【表4】 [Table 4]

【0030】この試験3では、表面電極13の表面に、
14.4μmのNi/Snめっき膜(5.2μmのNi
めっき膜と9.2μmのSnめっき膜)を形成すること
で、中心周波数を低周波数域側に4.0MHzに調整で
きたが、最小損失の劣化は、0.01dBにとどまり、
無視できる。
In Test 3, the surface of the surface electrode 13
14.4 μm Ni / Sn plated film (5.2 μm Ni
By forming a plating film and a 9.2 μm Sn plating film), the center frequency could be adjusted to 4.0 MHz in the lower frequency range, but the degradation of the minimum loss was only 0.01 dB,
I can ignore it.

【0031】以上の試験1〜3の結果から、Ni/Sn
めっき膜の膜厚と中心周波数の変化幅との関係が図4に
示すように直線的になることが判明した。Ni/Snめ
っき膜の膜厚は、めっき時間によって調整できるため、
予め、めっき時間と中心周波数の変化幅との関係を実験
等で測定しておき、焼成後(めっき処理前)の誘電体フ
ィルタ11を中心周波数のずれ量に応じてめっき時間を
決めてめっき処理すれば、中心周波数の調整を簡単且つ
精度良く行うことができる。尚、めっき膜の膜厚は、め
っき処理時の電流によっても変化するため、電流によっ
てめっき膜の膜厚を調整するようにしたり、勿論、電流
とめっき時間の両方でめっき膜の膜厚を調整するように
しても良い。
From the results of the above tests 1 to 3, Ni / Sn
It was found that the relationship between the thickness of the plating film and the change width of the center frequency became linear as shown in FIG. Since the thickness of the Ni / Sn plating film can be adjusted by the plating time,
The relationship between the plating time and the change width of the center frequency is measured in advance by an experiment or the like. Then, the center frequency can be adjusted easily and accurately. Since the thickness of the plating film varies depending on the current during the plating process, the thickness of the plating film is adjusted by the current, or, of course, the thickness of the plating film is adjusted by both the current and the plating time. You may do it.

【0032】図4から明らかなように、めっき膜の膜厚
が厚くなるほど、中心周波数の変化幅が直線的に大きく
なるが、めっき膜の膜厚が20μmよりも厚くなると、
最小損失の劣化が大きくなり、その影響を無視できなく
なる。従って、最小損失の劣化を小さくするために、め
っき膜の膜厚は20μm以下にすることが好ましく、め
っき膜の膜厚を20μm以下の範囲で調整すれば、最小
損失の劣化を抑えながら中心周波数を能率良く調整でき
る。
As is clear from FIG. 4, as the thickness of the plating film increases, the width of change in the center frequency increases linearly. However, when the thickness of the plating film exceeds 20 μm,
The deterioration of the minimum loss becomes large, and the effect cannot be ignored. Therefore, in order to reduce the deterioration of the minimum loss, the thickness of the plating film is preferably set to 20 μm or less. If the thickness of the plating film is adjusted within the range of 20 μm or less, the center frequency can be suppressed while suppressing the deterioration of the minimum loss. Can be adjusted efficiently.

【0033】尚、本実施形態(2)のめっき処理による
中心周波数の調整は、種々の構造の誘電体フィルタに適
用でき、更に、誘電体フィルタの他に、共振器等の他の
セラミック誘電体部品にも適用できる。セラミック誘電
体も1000℃以下で焼成する低温焼成セラミック誘電
体に限定されず、1000℃以上で焼成するセラミック
誘電体を用いても良い。また、セラミック誘電体部品の
中心周波数以外の電気特性をめっき処理によって調整す
るようにしても良い。
The adjustment of the center frequency by the plating process of the embodiment (2) can be applied to dielectric filters having various structures. Further, in addition to the dielectric filters, other ceramic dielectrics such as resonators can be used. It can be applied to parts. The ceramic dielectric is not limited to a low-temperature fired ceramic dielectric fired at 1000 ° C. or lower, and a ceramic dielectric fired at 1000 ° C. or higher may be used. Further, electric characteristics other than the center frequency of the ceramic dielectric component may be adjusted by plating.

【0034】[0034]

【発明の効果】以上の説明から明らかなように、本発明
の請求項1によれば、セラミック誘電体部品の焼成後
に、該セラミック誘電体部品を熱処理する際に、熱処理
温度を調整することで、該セラミック誘電体部品の電気
特性を調整するようにしたので、多数のセラミック誘電
体部品の電気特性を1度の熱処理で能率良く調整するこ
とが可能となり、生産性向上、生産コスト低減を実現す
ることができる。
As is apparent from the above description, according to the first aspect of the present invention, after the ceramic dielectric component is fired, the heat treatment temperature is adjusted when the ceramic dielectric component is heat-treated. Since the electric characteristics of the ceramic dielectric parts are adjusted, the electric characteristics of a large number of ceramic dielectric parts can be efficiently adjusted by one heat treatment, thereby improving the productivity and reducing the production cost. can do.

【0035】更に、請求項2では、熱処理温度を700
℃から焼成温度までの範囲で調整することで、該セラミ
ック誘電体部品の中心周波数を調整するようにしたの
で、セラミック誘電体部品の信頼性を維持しながら、中
心周波数を能率良く調整することができる。
Further, in claim 2, the heat treatment temperature is set to 700.
The center frequency of the ceramic dielectric component was adjusted by adjusting the temperature in the range from ℃ to the firing temperature, so that the center frequency could be adjusted efficiently while maintaining the reliability of the ceramic dielectric component. it can.

【0036】また、請求項3では、セラミック誘電体部
品の表面電極に形成するめっき膜の膜厚を調整すること
で、該セラミック誘電体部品の電気特性を調整するよう
にしたので、多数のセラミック誘電体部品の電気特性を
1度のめっき処理で能率良く調整することが可能とな
り、生産性向上、生産コスト低減を実現することができ
る。
In the third aspect, the electric characteristics of the ceramic dielectric component are adjusted by adjusting the thickness of the plating film formed on the surface electrode of the ceramic dielectric component. The electrical characteristics of the dielectric component can be efficiently adjusted by a single plating process, so that productivity can be improved and production cost can be reduced.

【0037】更に、請求項4では、めっき膜の膜厚を2
0μm以下の範囲で調整することで、セラミック誘電体
部品の中心周波数を調整するようにしたので、最小損失
の劣化を抑えながら中心周波数を能率良く調整できる。
Further, in claim 4, the thickness of the plating film is 2
Since the center frequency of the ceramic dielectric component is adjusted by adjusting the range of 0 μm or less, the center frequency can be adjusted efficiently while suppressing the deterioration of the minimum loss.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の実施形態(1)で用いる誘電体フィル
タの縦断面図
FIG. 1 is a longitudinal sectional view of a dielectric filter used in an embodiment (1) of the present invention.

【図2】本発明の実施形態(2)で用いる誘電体フィル
タの縦断面図
FIG. 2 is a longitudinal sectional view of a dielectric filter used in an embodiment (2) of the present invention.

【図3】めっき処理前後の誘電体フィルタのフィルタ特
性の変化を示す図
FIG. 3 is a diagram showing a change in filter characteristics of a dielectric filter before and after a plating process.

【図4】めっき膜の膜厚と中心周波数の変化幅との関係
を測定した実験データを示す図
FIG. 4 is a diagram showing experimental data obtained by measuring the relationship between the thickness of a plating film and the width of change in the center frequency.

【符号の説明】[Explanation of symbols]

11…誘電体フィルタ(セラミック誘電体部品)、12
…低温焼成セラミック誘電体、13…表面電極、14…
めっき膜。
11 ... dielectric filter (ceramic dielectric component), 12
... Low temperature firing ceramic dielectric, 13 ... Surface electrode, 14 ...
Plating film.

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 低温焼成セラミック誘電体で形成したセ
ラミック誘電体部品の電気特性を調整する方法におい
て、 前記セラミック誘電体部品の焼成後に、該セラミック誘
電体部品を熱処理する際に、熱処理温度を調整すること
で、該セラミック誘電体部品の電気特性を調整すること
を特徴とするセラミック誘電体部品の電気特性調整方
法。
1. A method for adjusting electrical characteristics of a ceramic dielectric component formed of a low-temperature fired ceramic dielectric, comprising: adjusting a heat treatment temperature when heat-treating the ceramic dielectric component after firing the ceramic dielectric component. Thereby adjusting the electrical characteristics of the ceramic dielectric component.
【請求項2】 前記熱処理温度を700℃から前記セラ
ミック誘電体部品の焼成温度までの範囲で調整すること
で、該セラミック誘電体部品の中心周波数を調整するこ
とを特徴とする請求項1に記載のセラミック誘電体部品
の電気特性調整方法。
2. The center frequency of the ceramic dielectric component is adjusted by adjusting the heat treatment temperature in a range from 700 ° C. to a firing temperature of the ceramic dielectric component. Method for adjusting electrical characteristics of ceramic dielectric component.
【請求項3】 表面電極を有するセラミック誘電体部品
の電気特性を調整する方法において、 前記表面電極の表面にめっき膜を形成すると共に、該め
っき膜の膜厚を調整することで、前記セラミック誘電体
部品の電気特性を調整することを特徴とするセラミック
誘電体部品の電気特性調整方法。
3. A method for adjusting electric characteristics of a ceramic dielectric component having a surface electrode, comprising: forming a plating film on a surface of the surface electrode; and adjusting a film thickness of the plating film. A method for adjusting the electrical characteristics of a ceramic dielectric component, comprising adjusting the electrical characteristics of a body component.
【請求項4】 前記めっき膜の膜厚を20μm以下の範
囲で調整することで、前記セラミック誘電体部品の中心
周波数を調整することを特徴とする請求項3に記載のセ
ラミック誘電体部品の電気特性調整方法。
4. The ceramic dielectric component according to claim 3, wherein a center frequency of the ceramic dielectric component is adjusted by adjusting a thickness of the plating film within a range of 20 μm or less. Characteristics adjustment method.
JP2000215867A 2000-07-12 2000-07-12 Method for adjusting electrical characteristics of ceramic dielectric parts Expired - Lifetime JP4348587B2 (en)

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Application Number Priority Date Filing Date Title
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JP2002026604A true JP2002026604A (en) 2002-01-25
JP4348587B2 JP4348587B2 (en) 2009-10-21

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