JP2002005833A - Analyzer - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an analyzer by which dioxins or the like contained in a flue gas is quantitatively analyzed effectively. SOLUTION: The analyzer is provided with a laser device 1, a means 2 which guides a laser beam 3 to a fume gas 6, a means 9 by which plasma radiation light 8 emitted from a laser breakdown plasma 7 in a flue gas 6 is guided to a spectroscope 11 and a controller 12, which controls the spectroscope 11.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an analyzer,
In particular, the present invention relates to an analyzer that irradiates smoke emitted from an incinerator or the like with laser light, measures fluorescence of plasma generated from the emitted smoke, and quantifies harmful substances contained in the smoke.

[0002]

2. Description of the Related Art In general, techniques for detecting and quantifying harmful substances such as dioxins contained in flue gas are used in incinerators and various industrial plants at the laboratory level today. Is high.

Conventionally, harmful substances such as dioxin contained in flue gas emitted from incinerators and PCB contained in industrial waste are:
The analysis is mainly performed off-line, and the analysis and quantification are performed with the trouble of many specialized technicians and workers.
In particular, the analysis of harmful substances contained in flue gas involves the concentration of trapping analytes on filters, the pretreatment of filters for various analyzers, and the analysis performed in the laboratory. And it took a long time to obtain the final quantitative analysis result of the concentration of harmful substances.

[0004]

The conventional technique for quantitatively analyzing harmful substances such as dioxin in three stages has the following problems.

For example, when performing an enrichment operation for trapping an object to be analyzed by a filter or the like, it is necessary to process a number of finely divided steps through a carefully determined procedure. It takes a long time of two hours and cannot provide analysis data in a timely manner.

[0006] Further, the need to handle complicated analyzers, and the prolonged analysis work increases the risk of exposure to harmful substances, and further generates waste such as filters used for concentration and the like. Efforts to dispose of waste will increase.

Further, since it takes a long time until the analysis result is obtained, even if the combustion conditions of the incinerator change and a large amount of harmful substances such as dioxin are generated, the change of the incineration temperature condition corresponding to the change can be promptly performed. There were problems and inconveniences such as inability to respond.

[0008] The present invention has been made in view of such circumstances, and in the quantitative analysis of harmful substances such as dioxins contained in flue gas, it is possible to simplify and eliminate the need for a pretreatment step, An object of the present invention is to provide an analyzer for analyzing and quantifying a product online and in real time.

In order to achieve the above object, an analyzer according to the present invention has a laser device for oscillating laser light in a pulsed form and a laser for guiding laser light to flue gas. Remote light guide means, plasma radiation light remote guide means for guiding plasma emission light generated from laser breakdown plasma generated when laser light is emitted to the flue gas to the spectroscope, and connection to the spectroscope And a control device for controlling the timing of irradiating the smoke exhaust with laser light and controlling the timing of dispersing the plasma emission light.

According to a second aspect of the present invention, in the analyzer according to the first aspect, a plasma emission light generating unit is provided in the flue gas.

According to a third aspect of the present invention, in the plasma radiation light generating section, a filter for adsorbing a specific substance of flue gas is accommodated in the sampling pipe.

According to a fourth aspect of the present invention, the filter is characterized by being alkaline.

According to a fifth aspect of the present invention, the laser remote light guiding means and the plasma radiation light remote guiding means are both optical fibers.

According to a sixth aspect of the present invention, the laser remote light guide and the plasma radiation light remote guide are both bundled optical fibers.

As described in claim 7, the remote laser light guide means and the remote plasma radiation light guide means use a single optical fiber which is commonly used.

The single optical fiber includes a dichroic mirror and a reflecting mirror.

According to a ninth aspect of the present invention, the plasma radiation light remote guiding means includes a light separating element and a photomultiplier tube in an optical path of the plasma radiation light.

According to a tenth aspect of the present invention, the plasma radiation light remote guiding means includes a spectroscopic element and a multi-array light detector in an optical path of the plasma radiation light.

As described in the eleventh aspect, the spectral element has a slit on at least one of the entrance side and the exit side.

According to a twelfth aspect of the present invention, the plasma radiation light remote guiding means includes a band-pass filter in the optical path of the plasma radiation light and a photomultiplier tube corresponding to the band-pass filter. .

According to a thirteenth aspect of the present invention, the laser remote light guiding means includes a semi-reflective mirror provided in the optical path of the laser light, and a total reflection mirror in a closed loop formed by bypassing the semi-transparent mirror. .

According to a fourteenth aspect of the present invention, there is provided a laser device for oscillating a laser beam in a pulsed manner.
The laser is selected from G laser, excimer laser, OPO laser, dye laser, copper vapor laser, semiconductor laser, Ti sapphire laser, carbon dioxide laser, and nitrogen gas laser.

According to a fifteenth aspect of the present invention, the laser device is divided into a main laser device and a sub-laser device, and a laser beam oscillating from the main laser device and a laser beam oscillating from the sub-laser device having relatively weak light intensity. The apparatus is provided with means for synthesizing light and irradiating the smoke with the synthesized laser light.

[0024] As described in claim 16, the main laser device is provided with a dichroic mirror in an optical path of laser light.

According to a seventeenth aspect, the sub-laser device has a total reflection mirror in the optical path of the laser beam.

As described in claim 18, the means for irradiating the smoke with the combined laser beam comprises a lens and a reflector at positions on the optical path opposite to each other with the smoke being a boundary.

[0027]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of an analyzer according to the present invention will be described with reference to the drawings and reference numerals attached to the drawings.

FIG. 1 is a conceptual diagram showing a first embodiment of the analyzer according to the present invention.

The analyzer according to the present embodiment is configured such that a cylindrical laser remote light guiding means 2 and a laser beam 3 are sequentially emitted from a laser device 1 along the optical path of a laser beam 3 oscillating in a pulse shape.
A reflecting mirror 4 for irradiating the smoke 6 emitted from the apparatus, and a cylindrical plasma radiation for guiding the generated laser breakdown plasma 7 to a spectroscope 11 as a plasma radiation 8 when irradiating the smoke 6 with the laser light 3. Laser light 3 oscillating in pulse form from remote light guide means 9, reflecting mirror 10 and laser device 1
And a controller 12 for controlling the oscillation time of the laser beam and the time for analyzing the plasma radiation 8 by the spectroscope 11.

The laser device 1 that oscillates the laser light 3 in a pulsed form preferably uses a pulsed Nd: YAG laser (a fundamental wave and a harmonic) as a laser light source. A laser light source that replaces the YAG laser is, for example, an excimer laser (XeC
l, KrF, rare gas halide such as Ar, F), OPO laser, dye laser, copper vapor laser, semiconductor laser, Ti
A pulse laser such as a sapphire laser, a carbon dioxide laser, and a nitrogen gas laser is preferable.

The laser light 3 oscillated in a pulse form from the laser device 1 is supplied to the chimney 5 by the laser remote light guide 2.
And is illuminated by the reflecting mirror 4 onto the flue gas 6.
At this time, the smoke exhaust gas 6 is turned into plasma, and tens to hundreds of microseconds are generated as emission light using fluorescence specific to the contained element. This plasma radiation light 8 is incident on the plasma radiation light guiding means 9 by the reflecting mirror 10 and is guided to the spectroscope 11.
The spectroscope 11 performs spectroscopic analysis of the plasma radiation 8 and quantitatively analyzes harmful substances such as dioxin.

On the other hand, in the case of measuring dioxin, the control device 12 selects an irradiation method according to a specific element such as chlorine and sends an oscillation trigger signal to the laser device 1. When an oscillation trigger signal is given, the laser device 1
Oscillates the laser light 3 in a pulse shape. In this case, as the pulse width, a short pulse of about 1 to 100 nsec is selected.
The energy is desirably about 10 to 1000 mJ.

The laser light 3 is guided to the top of the chimney 5 by the laser remote light guiding means 2, reflected by the reflecting mirror 4 and radiated to the flue gas 6; The light may be condensed on the flue gas 6 by a means.

When the high-intensity laser beam 3 is irradiated, the smoke exhaust gas 6 is immediately turned into plasma, causing so-called laser breakdown (ionization). That is, since the substance in the flue gas is immediately heated to a high temperature (1 to 1.05 million degrees), the substance is decomposed into discrete atoms, and the atoms are in an excited state. The elements contained in the flue gas emitted from the incinerator are mainly nitrogen, oxygen, carbon and hydrogen, but also include trace elements such as chlorine and bromine which are harmful substances such as dioxin.

In particular, chlorine has a characteristic that fluorescence emission at 837.6 nm, which transitions from an excitation level near 10.4 eV, continues to be emitted for 10 microseconds or more even after irradiation with the laser beam 3.

On the other hand, other elements such as nitrogen, oxygen, carbon,
When hydrogen emits fluorescent light in the visible region, the energy of the excitation level is higher than that of chlorine, so that the light emission stops in a short time of 1 microsecond or less, and the fluorescent spectrum around 837.6 nm cannot be found.

For this reason, in quantitatively analyzing the chlorine in the flue gas, the plasma radiation 8 is guided to the spectroscope 11 via the reflector 10 and the plasma radiation remote guiding means 9, and the control device 12 controls the laser device. By controlling the laser light 3 oscillating from 1 and performing spectral analysis about 1 microsecond after the spectral extinction of nitrogen, oxygen, carbon and hydrogen as background light disappears, chlorine in the flue gas 6 can be effectively quantitatively analyzed. Will be able to

As described above, according to the present embodiment, since a complicated pretreatment step is not required, chlorine, which serves as an indicator of concentration of dioxins and the like, can be detected online and in real time during flue gas. Quantitative analysis can be easily performed in a short time.

Also, in this embodiment, elemental analysis can be easily performed in real time and in a relatively short time in a quantitative manner. Therefore, even if a large amount of harmful substances such as dioxins are generated due to a change in operating conditions of the incinerator, for example. In addition, the generation of harmful substances such as dioxin can be suppressed by immediately changing the incineration operation mode.

In this embodiment, since the analysis work associated with the elemental analysis is remotely controlled by the control device 12 or the like, the place where the sample to be measured is handled and the analysis room can be completely isolated, and harmful substances can be prevented. It is possible to prevent an adverse effect on a human body of a worker who handles the data.

FIG. 2 is a conceptual diagram showing a second embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

The analyzer according to the present embodiment is provided with a plasma radiation light generating unit 13 that samples a part of the flue gas 6 emitted from the chimney 5 and generates the plasma radiation 8 from the sampled flue gas 6. is there.

The plasma emission light generating unit 13 is adapted to
A sampling pipe 14 for sampling a part of the gas, a filter 15 for adsorbing a specific substance of the flue gas 6 collected in the sampling pipe 14, for example, inorganic chlorine, and a pulsed laser beam to the flue gas 6 after the purification of the inorganic chlorine. 3, a lens 15a for generating a laser breakdown plasma 7 by giving
A lens 15b for inducing the laser breakdown plasma 7 to generate plasma radiation 8 and condensing the plasma radiation 8;

In such a configuration, for example, when a large amount of inorganic chlorine is generated in the flue gas 6 and is large compared with chlorine bonded to dioxin or the like, the inorganic chlorine is adsorbed by the filter 15 and the inorganic chlorine is absorbed. As in the first embodiment, if the smoke 6 after purification is quantitatively analyzed by laser breakdown spectroscopy, the measurement error of dioxin can be reduced.

Generally, in the case of an incinerator, organic chlorine such as dioxin and inorganic chlorine (mainly hydrochloric acid) depend on the temperature of the furnace.
Therefore, it is an effective method to measure the concentration of organic chlorine such as dioxin in this embodiment.

Incidentally, since inorganic chlorine is usually present as hydrochloric acid in a low temperature region at the top of the chimney, it can be efficiently captured by using an alkaline filter 15. In addition, the same method as described above is used for harmful substances other than dioxin, such as bromine and other organic halogen substances. It is expected that this method will be effective for induced halogen substances that may cause environmental pollution.

As described above, according to the present embodiment, the amount of harmful substances such as dioxins generated by the temperature change of the incinerator is quantitatively analyzed in real time, so that the operation of the incinerator is effectively controlled based on the information of the quantitative analysis. can do.

FIG. 3 is a conceptual diagram showing a third embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

The analyzer according to the present embodiment is different from the first embodiment in that an optical fiber 16a for guiding the laser light 3 oscillated in a pulse form from the laser device 1 to the flue gas 6 coming out of the chimney 5 is provided. When irradiating the smoke 6 with the laser light 3, the optical fiber 1 guides the plasma radiation 8 generated from the laser breakdown plasma 7 to the spectroscope 11.
6b. The other configuration is the same as that of the first embodiment.

As described above, in the present embodiment, the laser remote light guiding means for guiding the pulsed laser light 3 shown in the first embodiment to the smoke exhaust 6 and the plasma emission light 8 generated from the smoke exhaust 6 are used. Since the optical fibers 16a and 16b are used instead of the plasma radiation light remote guiding means for guiding to the spectroscope 11, element analysis can be performed by remote control.
The place where the sample to be measured is handled and the analysis room can be completely isolated, and the place where a harmful substance which has a bad effect on the human body can be prevented from putting the human body at risk.

In this embodiment, a large number of samples can be simultaneously analyzed in many places by remote control, and the optical fibers 16a and 16b are used.
It can be bent freely, making it easy to access narrow parts and bends, etc., and makes it easy to measure inside specially shaped chimneys and chimneys. The present embodiment uses an optical fiber 16a to guide the laser beam 3 to the flue gas 6 coming out of the chimney 5 and converts the plasma emission light 8 generated from the laser breakdown plasma 7 of the flue gas 6 into a spectroscope. Although the optical fiber 16b was used for guiding to the optical fiber 11, the optical fiber 16b is not limited to this example.
It is also possible to use a so-called bundled optical fiber 17 in which b is a plurality of fibers and the plurality of fibers are combined into one bundle. When analyzing various elements, it is effective in that it can be measured compactly.

FIG. 5 is a conceptual diagram showing a fourth embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

The analyzer according to the present embodiment uses a single optical fiber 17a which is shared by a single remote light guide means for laser and a remote light guide means for plasma emission light. This is provided with a mirror 18 and a reflecting mirror 20.

Now, when the laser beam 3 is oscillated from the laser device 1 in a pulse shape, the laser beam 3 is transmitted through the lens 19a and the dichroic mirror 18 to the single optical fiber 17a.
And is emitted to the flue gas 6 emitted from the chimney 5. In addition,
The single optical fiber 17a may be provided with a condensing device such as a lens at the exit.

When the laser beam 3 transmitted through the dichroic mirror 18 is irradiated on the smoke 6, a laser breakdown plasma 7 is generated from the smoke 6. At this time, the fluorescence of the halogen element such as chlorine generated from dioxin or the like is converted again into the single optical fiber 17a as the plasma emission light 8.
Is guided to the spectroscope 11 via the dichroic mirror 18, the lens 19b, and the reflecting mirror 20.

Generally, the oscillation wavelength of the laser beam 3 is
For example, in the case of a YAG laser, the wavelength is 10.6 microns, and the fluorescence signal of chlorine or the like is 0.84 as described above.
Since the wavelength is on the order of microns, even if the dichroic mirror 18 is provided on the single optical fiber 17a, it is possible to pass only the laser light 3 and reflect light of another wavelength.

As described above, in the present embodiment, the laser device 1
And a dichroic mirror 18 and a single optical fiber 1 that transmit only the laser light 3 between the spectroscope 11 and the smoke exhaust 6.
7a, the optical path (optical transmission path) can be simplified and miniaturized as compared with transmitting the laser light 3 and the plasma radiation light 8 separately through fibers.

FIG. 6 is a conceptual diagram showing a fifth embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

In the analyzer according to the present embodiment, when the plasma radiation light 8 is guided to a spectroscope (not shown), the prism-shaped spectral element 22 is provided in the optical path, and the entrance of the prism-shaped spectral element 22 is provided. An entrance slit 21 is provided on the side, and photomultiplier tubes 26a, 26b are provided via exit slits 25 corresponding to the spectral light paths 23, 24 on the exit side.

The plasma emission light 8 generally contains a fluorescent light-emitting component such as chlorine based on dioxin or the like, but when it contains a harmful substance such as an organic halogen,
The fluorescent component of the halogen element is also included. For example,
When the plasma radiation 8 contains fluorine, 68
5.6 nm fluorescence is observed. For this reason, as shown in the figure, the plasma radiation light 8 is separated by the spectroscopic element 22, separated into chlorine fluorescence (837.6 nm) and fluorine fluorescence, and forms an image at another place.

The present embodiment focuses on such a point, and the slit 2 is provided on the entrance side of the prism-shaped spectral element 22.
And optoelectronic element tubes 26a, 26b on the exit side through exit slits 25 corresponding to spectral light paths 23, 24 for separately separating chlorine fluorescence and fluorine fluorescence.
Is provided.

As described above, in this embodiment, the spectral element 2
The entrance slit 2 on each of the entrance side and the exit side
1. Since the exit slit 25 is provided and the photomultiplier tubes 26a and 26b are provided in the respective optical paths of the exit slit 25, many harmful elements can be simultaneously measured in real time and online.

Therefore, according to the present embodiment, since various types of elements are detected online and in real time, and quantified, it is possible to simplify the analysis work and to provide information of the analysis data in a timely manner. it can.

In the present embodiment, the photomultiplier tube 26 is provided in each of the spectral light paths 23 and 24 on the exit side of the spectral element 22.
Although a and 26b are provided, the present invention is not limited to this example. For example, as shown in FIG. 7, a multi-array light detector 27 may be provided in the spectral light paths 23 and 24.

FIG. 8 is a conceptual diagram showing a sixth embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

In the analyzer according to the present embodiment, a band for separating the luminescent component of chlorine and the luminescent component of another element is provided in an optical path for guiding the plasma emission light 8 from the flue gas to a spectroscope (not shown). In addition to providing the pass filters 28a and 28b, photomultiplier tubes 26a and 26b for amplifying the spectrum from the band pass filters 28a and 28b are provided.

In the analyzer according to the present embodiment having such a configuration, the plasma radiation light 8 having a plurality of elements firstly enters the band-pass filter 28a, where the index of, for example, dioxin is measured. Is transmitted through the spectral light path 23 and the remaining chlorine is reflected.
Therefore, the concentration of dioxin or the like can be identified by allowing only the luminescent component such as chlorine to enter the photomultiplier tube 26a via the spectral light path 23 and analyzing this signal.

On the other hand, the plasma radiation light 8 having an element other than dioxin (an element other than chlorine) enters the bandpass filter 28b via the spectral light path 24. The band-pass filter 28b allows the plasma radiation 8 containing, for example, a fluorine element to pass therethrough, and amplifies it by the photomultiplier tube 26b for analysis, thereby identifying fluorine.

As described above, in the present embodiment, since the plurality of band-pass filters 28a and 28b and the photomultiplier tubes 26a and 26b are provided correspondingly, the apparatus for quantitatively analyzing dioxin and the like in the smoke exhaust gas is provided. Can be simplified and downsized, other types of elements can be detected online and in real time, and information on analysis data can be provided in a timely manner.

In this embodiment, a plurality of band-pass filters 28a and 28b and corresponding photomultipliers 26a and 26b are provided in the optical path of the plasma radiation 8; however, the present invention is not limited to this example. As shown in FIG. 9, pulsed laser light 3 from laser device 1 and smoke exhaust (not shown)
One semi-transparent mirror 29 is provided in the optical path for guiding
Closed filter 31 formed by bypassing semi-transparent mirror 29
May be provided with a plurality of total reflection mirrors 30a, 30b, 30c.

In this case, the pulsed laser light 3 oscillated from the laser device 1 is applied to the semi-transparent mirror 29 and the total reflection mirror 30.
Due to the functions of a, 30b, and 30c, a part of the circuit circulates through the closed loop 31, so that a time delay occurs. The pulse width can be extended by overlapping the laser beams 3 that have caused the time delay.

Usually, the pulse width of the pulsed laser light 3 is about 5 nsec in the case of a YAG laser, and considering that the propagation time of the laser light 3 is 3 nsec per 1 m, for example, the length of the above-described closed loop 31 is long. By adjusting the height to about 1.7 m, the laser pulse width can be doubled. When a laser breakdown plasma is produced in such a configuration, for example, in the case of chlorine, the energy level of the excitation level is 10.4 e.
Since V is lower than V and other elements, the laser pulse width is widened, and by adjusting the laser pulse width so that excitation of about 10.4 eV can be efficiently performed, chlorine atoms are emphasized to emit fluorescence, Oxygen of other noise emitting components,
The fluorescence of nitrogen, hydrogen, carbon and the like can be relatively weakened, and the accuracy of analysis can be improved.

Therefore, according to the present embodiment, the semi-transparent mirror 29 is provided in the optical path of the laser device 1, and the total reflection mirrors 30a, 30b, and 30c are provided in the closed loop 31, so that the pulse width of the laser beam 3 is changed. In addition, the analysis accuracy can be improved.

FIG. 10 is a conceptual diagram showing a seventh embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

The analyzer according to the present embodiment divides the laser device 1 into a plurality of main laser devices 32 and sub-laser devices 33, a dichroic mirror 34 in the optical path of the main laser device 32, and a sub-laser device. A total reflection mirror 35 is provided on the optical path of the device 33, and the laser beam 3 oscillated from the main laser device 32 and the laser beam 3 oscillated from the sub-laser device 33 are combined by a dichroic mirror 34 to form a combined laser beam 36. It is.

In the analyzer according to this embodiment having such a configuration, the pulsed laser light 3 oscillated from the main laser device 1 passes through the dichroic mirror 34. The weak pulsed laser light 3 oscillated from the sub-laser device 33 is reflected by the total reflection mirror 35 and enters the dichroic mirror 34. Usually, the pulsed laser light 3 from one side and the weak pulsed laser light 3 from the other are combined by the dichroic mirror 34 even if the wavelengths are different. At this time, the synthesized laser light 36 is scattered by the smoke exhaust 6, but a part thereof is returned to the spectroscope (not shown). Therefore, if the intensity is measured, the concentration of the scattered particles of the smoke exhaust 6 becomes clear. . This concentration information can improve the measurement accuracy by estimating and correcting the amount by which the fluorescence component such as chlorine of the laser-breakdown plasma attenuates due to scattering.

Therefore, according to the present embodiment, the laser device 1 is divided into the main laser device 32 and the sub-laser device 33, and the dichroic mirror 34 and the total reflection mirror 35 are provided in the respective optical paths of the laser devices 32 and 33. Each of them is provided, and the laser light 3 from the main laser device 32 is combined with the weak laser light 3 from the sub-laser device 33, and the scattering state is measured. Can be improved.

FIG. 11 is a conceptual diagram showing an eighth embodiment of the analyzer according to the present invention. In addition, the same reference numerals are given to the same or corresponding portions as the configuration of the first embodiment.

The analyzer according to this embodiment uses the synthetic laser beam 36 of the seventh embodiment to irradiate the smoke exhaust 6 with
A lens 37 and a reflecting mirror 38 are provided at a position on an optical path opposite to the smoke exhaust 6.

In the analyzer according to this embodiment having such a configuration, the combined laser beam 36 is transmitted to the lens 37 and the smoke
When the light is returned to the spectroscope (not shown) as the plasma radiation 8 via the reflector, the reflection effect is further enhanced by the reflecting mirror 38 and the spectroscope is returned to the spectroscope. Even if there is a dirt on the optical path or the optical system in the middle, it can be applied sufficiently if the correction is made, and it can contribute more effectively to online operability.

Therefore, according to the present embodiment, the smoke exhaust 6
The lens 37 and the reflecting mirror 38 are installed at the position of the optical path opposite to the boundary, and the reflection effect of the synthetic laser light 36 is further enhanced, so that the scattered particle concentration of the flue gas 6 becomes clear and the analysis accuracy is improved. Can be done.

[0082]

As described above, the analyzer according to the present invention is provided with the laser remote control means for analyzing the concentration of dioxin and the like in the flue gas. Hazardous substances can be easily and quantitatively analyzed on-line and in real time, and a control operation for suppressing the generation of harmful substances such as dioxin can be easily performed based on the quantitative analysis information.

[Brief description of the drawings]

FIG. 1 is a conceptual diagram showing a first embodiment of an analyzer according to the present invention.

FIG. 2 is a conceptual diagram showing a second embodiment of the analyzer according to the present invention.

FIG. 3 is a conceptual diagram showing a third embodiment of the analyzer according to the present invention.

FIG. 4 is a conceptual diagram showing a modification of the third embodiment of the analyzer according to the present invention.

FIG. 5 is a conceptual diagram showing a fourth embodiment of the analyzer according to the present invention.

FIG. 6 is a conceptual diagram showing a fifth embodiment of the analyzer according to the present invention.

FIG. 7 is a conceptual diagram showing a modification of the fifth embodiment of the analyzer according to the present invention.

FIG. 8 is a conceptual diagram showing a sixth embodiment of the analyzer according to the present invention.

FIG. 9 is a conceptual diagram showing a modification of the analyzer according to the sixth embodiment of the present invention.

FIG. 10 is a conceptual diagram showing a seventh embodiment of the analyzer according to the present invention.

FIG. 11 is a conceptual diagram showing an eighth embodiment of the analyzer according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Laser apparatus 2 Laser remote light guide means 3 Laser light 4 Reflector 5 Chimney 6 Smoke exhaust 7 Laser breakdown plasma 8 Plasma radiation 9 Plasma radiation light remote light guide 10 Reflector 11 Spectroscope 12 Controller 13 Plasma radiation Generation unit 14 Sampling pipe 15 Filter 15a, 15b Lens 16a, 16b Optical fiber 17 Bundle optical fiber 17a Single optical fiber 18 Dichroic mirror 19a, 19b Lens 20 Reflecting mirror 21 Inlet slit 22 Spectral element 23, 24 Spectral optical path 25 Exit slit 26a , 26b Photomultiplier tube 27 Multi-array photodetector 28a, 28b Bandpass filter 29 Semi-transmissive mirror 30a, 30b, 30c Total reflection mirror 31 Closed loop 32 Main laser device 33 Secondary laser device 34 Dichroic mirror 35 Total reflection mirror 36 Synthetic laser beam 37 Lens 38 Reflector

──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. ⁷ Identification symbol FI Theme coat ゛ (Reference) G01N 33/00 G01N 33/00 D (72) Inventor Hironobu Kimura 8 Shinsugita-cho, Isogo-ku, Yokohama-shi, Kanagawa Pref. Inside Toshiba Yokohama Office (72) Inventor Masayoshi Okamoto 201-1 Kansei-cho, Tsurumi-ku, Yokohama-shi, Kanagawa Prefecture Inside Therm Co., Ltd. F-term in Toshiba Yokohama Office (reference) 2G043 AA01 BA06 CA01 DA05 EA01 EA14 FA05 GA02 GA04 GA06 GB03 HA01 HA02 HA05 HA09 JA01 JA05 KA08 KA09 LA02 MA01 NA01

Claims (18)

[Claims] 1. A laser device for oscillating laser light in a pulse form, a laser remote light guiding means for guiding the laser light to smoke, and a laser breakdown plasma generated when the smoke is irradiated with the laser light. A plasma radiation light remote guiding means for guiding the generated plasma radiation light to the spectroscope, and controlling the timing of irradiating the smoke light with the laser light connected to the spectroscope and controlling the timing of dispersing the plasma radiation light. An analyzer, comprising: a control device for controlling. 2. The analyzer according to claim 1, further comprising a plasma emission light generator provided in the flue gas. 3. The analyzer according to claim 2, wherein the plasma radiation light generating section accommodates a filter for adsorbing a specific substance of flue gas in the sampling pipe. 4. The analyzer according to claim 3, wherein the filter is alkaline. 5. The analyzer according to claim 1, wherein the laser remote light guide and the plasma radiation light remote guide are both optical fibers. 6. The analyzer according to claim 1, wherein the laser remote light guide and the plasma radiation light remote guide are both bundled optical fibers. 7. The analyzer according to claim 1, wherein the laser remote light guide means and the plasma radiation light remote light guide means use a single common optical fiber. 8. The analyzer according to claim 1, wherein the single optical fiber includes a dichroic mirror and a reflecting mirror. 9. The analyzer according to claim 1, wherein the plasma radiation light remote guiding means includes a spectroscopic element and a photomultiplier tube in an optical path of the plasma radiation light. 10. The analyzer according to claim 1, wherein the plasma radiation light remote guiding means includes a spectroscopic element and a multi-array light detector in an optical path of the plasma radiation light. 11. The analyzer according to claim 9, wherein the spectroscopic element has a slit on at least one of the entrance side and the exit side. 12. The plasma radiation light remote guiding means according to claim 1, further comprising a band-pass filter in an optical path of the plasma radiation light and a photomultiplier tube corresponding to the band-pass filter. Analysis equipment. 13. The laser remote light guide means according to claim 1, wherein a semi-transparent mirror is provided in an optical path of the laser beam, and a total reflection mirror is provided in a closed loop formed by bypassing the semi-transparent mirror. Analysis equipment. 14. A laser device that oscillates laser light in a pulsed form includes a pulse Nd: YAG laser, excimer laser, OPO laser, dye laser, copper vapor laser, semiconductor laser, Ti sapphire laser, carbon dioxide laser, and nitrogen gas laser. 2. The analyzer according to claim 1, wherein any one of the following is selected. 15. The laser device is divided into a main laser device and a sub-laser device, and a laser beam oscillating from the main laser device and a laser beam with a relatively weak light amount oscillating from the sub-laser device are synthesized. 2. The analyzer according to claim 1, further comprising means for irradiating the smoke with smoke. 16. The main laser device according to claim 1, further comprising a dichroic mirror in an optical path of the laser light.
6. The analyzer according to 5. 17. The analyzer according to claim 15, wherein the auxiliary laser device includes a total reflection mirror in an optical path of the laser light. 18. The analyzer according to claim 15, wherein the means for irradiating the smoke with the combined laser beam includes a lens and a reflecting mirror at positions on the optical path facing each other with the smoke being a boundary.