JP2002001933A - Ink jet recording method, ink jet recording head, and ink jet recorder - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance a printing quality by properly detecting the position of a recording head by utilizing a cubic semiconductive element for detecting the position of the recording head. SOLUTION: A radio wave analyzing section 17 and a position detecting section 18 calculate each distance from each fixed communicating means 26 to a radio wave receipt section 16 based on a phase shift and determine the positions of the radio wave receipt part 16 and an ejecting opening (a real ink ejecting position) when the radio wave is transmitted from three fixed communicating means 26 to a cubic semiconductive element 11 and the radio wave receipt part 16 receives the radio wave. An ejection timing control section 19 transmits a signal for controlling ejection timing in order to compensate a position shift of the ejection opening. A liquid ejecting section 23 is controlled by a driving signal from a means 24 for supplying a driving signal of a recorder body 28 and a signal for controlling ejection timing from the control section 19 and records by ejecting ink drops to a paper for printing simultaneously with the reciprocating motion of a carriage.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to an ink jet recording method, an ink jet recording head, and an ink jet recording apparatus.

[0002]

2. Description of the Related Art Conventionally, an image is printed on paper in a dot pattern by moving a carriage on which a recording head is mounted in a printing direction while ejecting ink from a plurality of ejection nozzles provided on the recording head. In such an ink jet recording apparatus, an ink tank containing recording ink is provided, and the ink in the ink tank is supplied to a recording head via an ink supply path.

[0003] In such an ink jet recording apparatus, one of the major factors for performing high-precision and high-quality recording is one.
First, the relative positional relationship between the ink discharge position and the recording medium (recording paper or the like) is accurately maintained. At the time of design, the relative relationship between the carriage and its transport mechanism and the support mechanism and transport mechanism of the recording medium is set with high accuracy,
Based on this, the movement of the carriage and the timing of ink ejection for obtaining a desired recording image are determined,
A record is made. However, the ink ejection position may be slightly distorted due to manufacturing or assembly errors, aging wear or mechanical deterioration. In this case, it is difficult to deposit ink droplets at desired positions on the recording medium, or the shape or size of the ink that adheres to the recording medium changes, thereby deteriorating the quality of an image formed. .

Therefore, an ink jet recording apparatus provided with a mechanism for detecting a position of a carriage on which a recording head is mounted has been used. This is to appropriately detect the position of the carriage using a linear encoder or the like.

[0005]

The above-described carriage position detecting mechanism of the conventional ink jet recording apparatus basically only performs one-dimensional position detection in the moving direction of the carriage. The distance to the medium cannot be known. Further, since the linear encoder is expensive, the cost of the recording apparatus itself increases.

Incidentally, the present applicant has filed Japanese Patent Application No. 2000-1.
No. 14228 proposes an ink jet recording apparatus having a three-dimensional semiconductor element suitable for collecting ink information and an ink tank incorporating the three-dimensional semiconductor element. This invention is based on a ball semiconductor (three-dimensional semiconductor element) manufactured by Ball Semiconductor in which a semiconductor integrated circuit is formed on a spherical surface of a silicon ball having a diameter of 1 mm. The three-dimensional semiconductor element acquires information about the ink such as the remaining amount of ink and information around the element such as the pressure in the tank and transmits the information to an external device in real time to reflect the information on the ink jet recording operation. Since this three-dimensional semiconductor element is spherical, if it is housed in an ink tank, it is possible to detect ambient environment information and exchange bidirectional information with the outside very efficiently compared to a planar type. In addition to notifying the information in the ink tank to the outside, the information can be exchanged in both directions such that the internal information is returned in response to an inquiry from the outside. Although the three-dimensional semiconductor element is provided with information obtaining means and information transmitting means, it is considered that various other functions can be provided. It is hoped that it will contribute to improving the quality of ink jet recording by utilizing it.

Accordingly, an object of the present invention is to utilize a three-dimensional semiconductor element for detecting the position of a recording head and appropriately detect the position of the recording head to contribute to the improvement of printing quality, and to make the three-dimensional semiconductor element more effective. An object of the present invention is to provide an ink jet recording method, an ink jet recording head, and an ink jet recording apparatus which are multifunctional without making the configuration too complicated.

[0008]

According to the present invention, there is provided an ink jet recording method in which an ink jet recording head is mounted on a carriage, and the ink is ejected from recording means of the ink jet recording head to perform recording while the carriage moves. Radio waves are transmitted from the fixed communication means to the three-dimensional semiconductor element fixed to the ink jet recording head, and the three-dimensional semiconductor element receives the radio wave, detects the position of the recording means based on the radio wave, and responds accordingly to the ink. The point is to control the timing of ejection.

According to the present invention, it is possible to detect a three-dimensional position of an ink ejection position in an ink jet recording apparatus, and use this for ink ejection control to achieve high-precision recording.
High quality can be achieved. In particular, since the position can be detected not only one-dimensionally but also three-dimensionally in the moving direction of the carriage, the distance between the recording medium and the ejection position can be known, and the effect of improving the print quality can be obtained. Is big.

By using a three-dimensional semiconductor element, there is no need to install a linear encoder or the like in the main body of the recording apparatus. For example, the carriage speed can be changed.
The degree of freedom in designing an ink jet recording apparatus is increased. Also,
Expensive parts such as linear encoders are not required, and a three-dimensional semiconductor element used for other purposes can also be provided with a position detection function, enabling higher functionality and lower cost by using common parts. It is.

More specifically, even if the three-dimensional semiconductor element determines the ink discharge position of the recording means and corrects the ink discharge timing in order to cancel the deviation between the detected discharge position and the desired discharge position. Good. Further, the three-dimensional semiconductor element may transmit the ejection timing control signal for controlling the ink ejection to the recording unit, thereby correcting the ink ejection timing.

The three-dimensional semiconductor element may receive the radio wave, identify and analyze the radio wave, and determine the communication distance of the radio wave. The three-dimensional semiconductor element may determine the communication distance based on the phase shift of the radio wave, Find the position of the three-dimensional semiconductor element from the communication distance,
It is preferable to detect the ejection position of the recording means based on the position of the three-dimensional semiconductor element.

The use of radio waves makes the radiation more widespread than that of a laser or the like, so that there is no need to transmit while following a moving carriage. In addition, since the three-dimensional semiconductor element can have a small inductance, it is suitable for communication using radio waves.

It is preferable that at least three of the fixed communication means emit radio waves toward the three-dimensional semiconductor device. In this case, it is preferable that each fixed communication unit emits a radio wave having a different frequency, amplitude, or signal pattern.

In this manner, the position is detected by the trilateration method.

[0016]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a schematic diagram showing an ink jet recording apparatus according to a first embodiment of the present invention. First, the overall configuration of the inkjet recording apparatus 600 will be briefly described.

The ink jet recording apparatus 600 includes a head cartridge (ink jet recording head) 601.
Is mounted, and the head cartridge 601 is provided with a liquid discharge unit (recording unit) that discharges ink for print recording.
23, and an ink tank to be described later that holds the liquid supplied to the liquid discharge unit 23. A three-dimensional semiconductor element 11 is disposed in the ink tank. As will be described later, the three-dimensional semiconductor element 11 is provided with an energy conversion means 14 for converting an externally supplied electromotive force into electric power.
And a discharge control unit 15 activated by the electric power obtained by the energy conversion unit 14. As shown in FIG.
An electromotive force supply unit 622 that supplies an electromotive force that is external energy to the three-dimensional semiconductor element 11 is provided in the recording device main body 28.
And three fixed communication means 26 for communicating information with the three-dimensional semiconductor element 11 are provided. In addition, the liquid discharge unit 2
No. 3 may be a device in which ink is foamed by the heat of an electrothermal conversion element such as a heater in a liquid path, and the ink is discharged from a minute opening (discharge port) communicating with the liquid path by the bubble growth energy.

As shown in FIG. 1, the head cartridge 601 engages with the spiral groove 606 of the lead screw 605 which rotates via the driving force transmission gears 603 and 604 in conjunction with the forward and reverse rotation of the drive motor 602. Is mounted on a carriage 607. The head cartridge 601 is moved by the power of the drive motor 602 to the carriage 60.
7 is reciprocated along the guide 608 in the directions of arrows a and b. The inkjet recording apparatus 600 includes a recording medium transport unit (not shown) that transports a printing paper P as a recording medium that receives a liquid such as ink discharged from the head cartridge 601. The paper pressing plate 610 of the print paper P conveyed on the platen 609 by the recording medium conveying means presses the print paper P against the platen 609 in the moving direction of the carriage 607.

In the vicinity of one end of the lead screw 605, photocouplers 611 and 612 are provided. The photocouplers 611 and 612 are
07, the photocouplers 611 and 6
This is a home position detecting means for confirming the presence in the area No. 12 and switching the rotation direction of the drive motor 602. In the vicinity of one end of the platen 609, a support member 613 that supports a cap member 614 that covers the front surface of the head cartridge 601 having the discharge port is provided. In addition, an ink suction unit 615 that sucks ink that has been idly discharged from the head cartridge 601 and accumulated inside the cap member 614 is provided. The ink suction unit 615 performs suction recovery of the head cartridge 601 through the opening of the cap member 614.

The ink jet recording apparatus 600 has a main body support 619. The moving member 618 is attached to the main body support 619 in the front-rear direction,
It is supported so as to be movable in a direction perpendicular to the direction of movement 07. The cleaning blade 617 is attached to the moving member 618. Cleaning blade 6
Reference numeral 17 is not limited to this form, and may be another form of a known cleaning blade. Further, the ink suction means 6
15 is provided with a lever 620 for starting suction in the suction recovery operation by the lever 15. The lever 620 moves with the movement of the cam 621 engaging with the carriage 607, and the driving force from the driving motor 602 switches the clutch. The movement is controlled by a known transmission means such as the like. An ink jet recording control unit for giving a signal to a heating element provided in the head cartridge 601 and controlling the driving of each mechanism described above is provided on the recording apparatus main body 28 side, and is shown in FIG. Not.

In the ink jet recording apparatus 600 having the above-described configuration, the head cartridge 601 reciprocates over the entire width of the print sheet P with respect to the print sheet P conveyed on the platen 609 by the recording medium conveying means. During this movement, the drive signal supply means 24
When a drive signal is supplied to the head cartridge 601 from the printer, ink (recording liquid) is discharged from the liquid discharge unit 23 to the recording medium in accordance with this signal, and recording is performed.

Next, the ink jet recording apparatus 600
The three-dimensional semiconductor element 11 housed in the ink tank of the head cartridge 601 will be described in detail.

FIG. 2 is a block diagram of the ink jet recording head 201 including the three-dimensional semiconductor element 11 and the recording apparatus main body 28. The three-dimensional semiconductor element 11 was obtained by the energy conversion means 14 for converting the electromotive force 12 supplied from the electromotive force supply means 622 to the three-dimensional semiconductor element 11 in a non-contact manner into the power 13, and the energy conversion means 14. A discharge control unit 15 that is activated by electric power, and is disposed in an ink tank described later. The electromotive force supplied to operate the three-dimensional semiconductor element 11 is generated by electromagnetic induction. The energy conversion means 14 is desirably formed on or near the surface of the three-dimensional semiconductor element 11.

The discharge control means 15 includes a radio wave receiving section 16,
A radio wave analysis unit 17, a position detection unit 18, a discharge timing control unit 19, a memory 20, a time signal reception unit 21,
A clock 22 is provided. The radio wave receiving unit 16 receives radio waves from the three fixed communication units 26 of the recording device main body 28. The radio wave analysis unit 17 identifies the frequency or amplitude of the radio wave received by the radio wave reception unit 16 and calculates the distance from each fixed communication unit 26 to the radio wave reception unit 16 based on the frequency or amplitude. The position detecting unit 18 is configured to guide the ink jet recording apparatus 600 based on the distances from the three fixed communication units 26.
The actual ejection position of the inkjet recording head 601 is obtained from the position of the radio wave receiving unit 16 within the area. The ejection timing control unit 19 transmits an ejection timing control signal for correcting the ejection timing so that the actual ejection position becomes the ejection position for performing ideal ink ejection. The memory 20 stores data for obtaining the position of the radio wave receiving unit 16 in the ink jet recording apparatus 600 based on the distance from each fixed communication unit 26 to the radio wave receiving unit 16, and the position of the radio wave receiving unit 16 and the ink jet recording head. Data such as a relative positional relationship with the ejection position 601 and data for correcting the actual ejection position to an ejection position for performing ideal ink ejection are stored. The clock 22 supplies time data to the radio wave analyzer 17 in order to know at what timing the radio wave from each fixed communication unit 26 was transmitted. The time signal receiving section 21 synchronizes the time of the recording apparatus main body 28 with the time of the clock 22, and detects the time of radio wave transmission from the fixed communication means 26. Upon receipt of the time signal, the clock 22 is adjusted appropriately. In addition, the fixed communication means 26 and the time signal transmitting section 25 have a clock function
It is controlled by the signal transmission timing generation function 27.

Here, the principle of position detection will be briefly described. In the present embodiment, a three-sided surveying method similar to the position detecting means generally widely known as a so-called GPS (global positioning system) is used.

As shown in FIG. 3, the coordinates of three known points (three fixed communication means in this embodiment) B1, B2, B3 are (x1, y1, z1), (x2, y2, z), respectively.
2), (x3, y3, z3), and the coordinates of one unknown point (solid semiconductor element) A are (x, y, z). Then, the distance from B1, B2, B3 to A is L
If L1, L2, and L3, the following relationship is established.

[0028]

(Equation 1)

Therefore, if the distances L1, L2, L3 are known, three variables (x, y, z) are obtained by calculation using three mathematical expressions.

Next, a method of obtaining a distance in the present invention will be briefly described. For example, a frequency of 100 MHz
When a radio wave with a speed of 300,000 km / s (= 30 cm / ns) is transmitted and the distance between the transmitting point and the receiving point is 30 cm away, the time between departure from the transmitting point and arrival at the receiving point The time required is 1 ns. Therefore, the phase at the transmission point and the phase at the reception point are shifted by an amount corresponding to 1 ns. In this example, the phases are shifted by about 40 °. Therefore, based on such a relationship, the phase when a radio wave transmitted from a transmission point (fixed communication means) at a predetermined phase is received at a reception point (a radio wave reception unit of a three-dimensional semiconductor element) is set to a predetermined phase. By examining the amount of deviation from the phase, the distance between the two can be obtained.

In this embodiment, since the radio waves from the three fixed communication means 26 are received by one radio wave receiving unit,
In order to identify each radio wave, each fixed communication means 26
The frequency, the amplitude, or the pattern of the radio wave transmitted from is changed respectively. Thus, each fixed communication means 26
Have an identification modulation function so that each can transmit a unique radio wave.

As described above, the three-dimensional semiconductor element 11
The position of the radio wave receiving unit 16 in the inkjet recording apparatus 600 is calculated. Then, since the relative positional relationship between the three-dimensional semiconductor element 11 and the ink ejection port in the ink jet recording head 601 is determined in advance when the ink jet recording head 601 is manufactured, the ink ejection port in the ink jet recording apparatus 600 is determined. (Actual ejection position) can be obtained.

One of the important factors for performing high-precision and high-quality printing when performing recording by the ink jet recording apparatus 600 is a positional relationship. An error may occur in the moving mechanism of the carriage 607 due to long-term use or the like, and the recording medium and the ink ejection position are not always kept in an ideal positional relationship. However, mechanically correcting this relative position shift requires a very large amount of work and cannot be easily performed.
Therefore, it is conceivable to perform high-accuracy and high-quality printing by slightly shifting the timing at which ink is ejected, thereby correcting the misalignment between the recording medium and the ink ejection position. Therefore, when the actual ink ejection position is obtained by the above-described method, a deviation from a desired ejection position is checked.
Further, the ejection timing control unit 19 transmits an ejection timing control signal for correcting the ejection timing necessary for correcting the shift.

The above is a description of the three-dimensional semiconductor element 11 of the present embodiment.
The data necessary for various calculations and the like are stored in the memory 20 in advance. Usually, these data are stored in the memory 20 as initial data when the ink jet recording head 601 or the ink jet recording apparatus 600 is manufactured.

Usually, the ink jet recording head 601
In this embodiment, a drive signal is supplied from the drive signal supply unit 24 of the recording apparatus main body 28, and ink is selectively ejected in synchronization with the movement of the carriage 607 to record a desired image or the like. In the embodiment, the ink ejection timing instructed by the drive signal is corrected by the ejection timing control signal transmitted from the ejection timing control unit 19 of the three-dimensional semiconductor element 11 to perform the ink ejection. However, when the position detection unit 18 determines that the actual ejection position matches the desired position, the ejection timing control unit 19 does not transmit the ejection timing control signal.

Here, an outline of the operation of the ink jet recording apparatus of this embodiment will be described with reference to the flowcharts of FIGS. 4 (a) and 4 (b).

The ink jet recording apparatus 60 of the present embodiment
0, first, in a head manufacturing process, the relative positional relationship between the radio wave receiving unit 16 of the three-dimensional semiconductor element 11 and the ink ejection port in the ink jet recording head 601 is actually measured using a jig (not shown). . Then, the measured data is stored in the memory 20 as data in an initial state. Then, when these positional relations deviate from the initial state, that is, when these relative positional relations are not in a desired relation, how to adjust the ejection timing to correct this, Various data such as mathematical formulas necessary for the calculation for detecting the position of the three-dimensional semiconductor element 11 are stored in the memory 20 of the three-dimensional semiconductor element 11.

Thereafter, when the ink jet recording apparatus 600 is completed and used by a user, first, a time signal is transmitted from the time signal transmitting section 25 to the three-dimensional semiconductor element 11 and the time signal receiving section 21 is transmitted. Receives it,
It is determined whether or not the time of the time signal matches the time of the clock 22, and if they do not match, the clock 22 is corrected to match. Then, radio waves for position detection are transmitted from the three fixed communication means 26 to the three-dimensional semiconductor element 11. When the radio wave receiving unit 16 receives the signal, the radio wave analyzing unit 17 and the position detecting unit 18 transmit the radio wave receiving unit 16 from each fixed communication unit 26 based on the phase shift as described above.
Are calculated, and the position of the radio wave receiving unit 16 in the ink jet recording apparatus 600 is obtained based on the calculated distance.
The position of the ejection port (actual ink ejection position) is obtained. In the case where the position of the ejection port obtained in this way is different from the initial state, in the present embodiment, the ejection timing is shifted in order to offset this positional shift. Therefore, the ejection timing control unit 19 transmits an ejection timing control signal to the liquid ejection unit 23. Various data and the like required in the above data processing are all stored in the memory 20 in advance. Further, it is preferable that the positional deviation detected in this way is stored in the recording unit.

The liquid discharge unit 23 is controlled by a drive signal supplied from the drive signal supply unit 24 of the recording apparatus main body 28 and a discharge timing control signal from the discharge timing control unit 19, and conveys the print paper P and the carriage. Recording is performed by ejecting ink droplets onto the print paper P in synchronization with the reciprocating movement of 607.

The operation of the three-dimensional semiconductor device 11 is such that the electromotive force supply means 622 applies an electromotive force 12 to the three-dimensional semiconductor device 11 and the energy conversion means 14
Is converted into electric power 13 and the electric power is used to control the discharge control means 1
5 is activated.

Next, an energy generating means applicable to the three-dimensional semiconductor device 11 of the present invention will be described. FIG. 5 is a diagram for explaining the principle of power generation by the energy generating means, which is a component of the three-dimensional semiconductor device of the present invention.

In the present embodiment, the coil (inductor) L is provided in the three-dimensional semiconductor element 11, and the electromotive force supply means 622 changes the magnetic flux around the coil L, so that the coil L is applied to the coil L by electromagnetic induction. Generate an induced electromotive force. That is, when the conductor coil L of the oscillation circuit 102 is placed adjacent to the coil La of the external resonance circuit 101 of the electromotive force supply means 622, and the current Ia flows through the coil La through the external resonance circuit 101, the oscillation circuit A magnetic flux B passing through the coil L of 102 is generated. Here, when the current Ia is changed, the magnetic flux B passing through the coil L changes, so that an induced electromotive force V is generated in the coil L. Therefore,
Oscillation circuit 1 as energy generating means for spherical silicon
02, and the external resonance circuit 1 as the electromotive force supply means 622 is provided in the recording body 28 outside the three-dimensional semiconductor element 11.
01, the conductor coil L of the oscillation circuit 102 on the three-dimensional semiconductor element 11 side and the external resonance circuit 1 outside the three-dimensional semiconductor element.
By arranging the coil La so as to be adjacent thereto, it is possible to generate electric power for operating the three-dimensional semiconductor element 11 by induced electromotive force due to electromagnetic induction from the outside.

More specifically, a magnetic field generator is arranged at a specific position within the movement range of the carriage 607, and the magnetic flux generated by the magnetic field generator acts on the coil L of the three-dimensional semiconductor element 11. For example, a configuration is conceivable in which an electromagnet device is arranged at a home position or the like, and the carriage 607 frequently stops at this home position. In this case, when the carriage 607 is stopped at the home position, that is, in a state where the coil L of the three-dimensional semiconductor element 11 is at the position of the electromagnet device, if the electromagnet device is driven by alternating current, the direction of the magnetic flux constantly changes. . Since the magnetic field applied to the coil L keeps changing, an induced electromotive force is generated in the coil L. Further, the magnetic field generating device may be fixed within the moving range of the carriage 607, and an induced electromotive force may be generated in the coil L when the coil L of the three-dimensional semiconductor element 11 crosses the generated magnetic field. it can. In this case, the magnetic field generator does not need to change the magnetic field,
An electromagnet device or a permanent magnet may be used.

Next, the three-dimensional semiconductor element 11 of the present embodiment
A method of manufacturing the device will be described. FIG. 6 is a process chart for explaining an example of the method of manufacturing a three-dimensional semiconductor device according to the present invention, and shows each step in a cross section passing through the center of the spherical silicon. In addition, here, a manufacturing method in which the center of gravity of the spherical silicon is formed below the center, the upper part inside the spherical body is made hollow, and the hollow part is kept in an airtight state is taken as an example.

[0045] Figure 6 to the spherical silicon shown in (a), the thermally oxidized SiO ₂ as shown in FIG. 6 (b) on its entire surface
After forming the film 202, patterning is performed using a photolithography process, and as shown in FIG.
An opening 203 is formed in a part of the O ₂ film.

Then, as shown in FIG.
The upper portion of the silicon is partially removed by anisotropic etching using a KOH solution through
To form Thereafter, as shown in FIG.
Using a VD method, a SiN film 20 is formed on the inner and outer surfaces of the three-dimensional device.
5 is formed.

Further, as shown in FIG. 6F, a Cu film 20 is formed on the entire surface of the three-dimensional device by using a metal CVD method.
6 is formed. Then, as shown in FIG. 6 (g), the Cu film 206 is patterned using a well-known photolithography process to form a conductor coil L having a number of turns N, which is a part of the oscillation circuit. Thereafter, the three-dimensional element in which the conductor coil L is formed is taken out of the vacuum device into the atmosphere, the upper opening 203 is closed with a sealing member 207 such as a resin or a plug, and the cavity 204 inside the spherical body is sealed. .

Further, N-MOS circuit elements are used as drive circuit elements other than the coil L formed on spherical silicon before manufacturing such a three-dimensional semiconductor element. FIG.
FIG. 1 shows a schematic cross-sectional view of the N-MOS circuit element cut in a longitudinal direction.

Referring to FIG. 7, a P conductive Si substrate 401 is provided.
In addition, a P-Mos 450 is formed in the N-type well region 402 and an N-Mos 451 is formed in the P-type well region 403 by introducing and diffusing impurities such as ion plantation using a general Mos process. PM
The os 450 and the N-Mos 451 are formed through a gate insulating film 408 having a thickness of several hundred angstroms and have a thickness of 4000 to 5000 angstroms by poly-Si deposited by a CVD method. Region 4 into which impurity of the type is introduced
05, the drain region 406, etc.
os450 and N-Mos451 constitute a C-Mos logic.

N-mos transistor 30 for driving the element
No. 1 is obtained by the steps of impurity introduction and diffusion.
It comprises a drain region 411, a source region 412, a gate wiring 413, and the like on the mold well substrate 402.

Here, N-Mo is used as an element driving driver.
When the s-transistor 301 is used, the distance L between the drain and the gate constituting one transistor is about 10 at minimum.
μm. One of the breakdowns of the 10 μm is the width of the source and drain contacts 417, and the width of the contact 417 is 2 × 2 μm. 2, 2 μm.
Other than that, 4 μm of 2 × 2 μm for the distance between the contact 417 and the gate 413 and 4 μm for the width of the gate 413
And the total is 10 μm.

Between each element, 5000 angstroms or more and 1
An oxide film isolation region 453 is formed by field oxidation having a thickness of 0000 angstroms or less, and the elements are isolated. This field oxide film functions as the first heat storage layer 414.

After each element is formed, an interlayer insulating film 416 is formed.
Has a thickness of about 7,000 angstroms and has a PS
After being deposited with a G, BPSG film or the like and subjected to a flattening process or the like by heat treatment, wiring is performed by an Al electrode 417 serving as a first wiring layer via a contact hole. Thereafter, an interlayer insulating film 418 such as an SiO ₂ film was deposited by plasma CVD to a thickness of 10,000 to 15,000 angstroms, and a through hole was formed.

The N-Mos circuit is formed before forming a three-dimensional semiconductor device as shown in FIG. Then, the connection with the oscillation circuit as the energy generating means of the present invention and the sensor section as the information obtaining means is made through the above-mentioned through holes.

In this embodiment, the three-dimensional semiconductor element as described above is fixed to the wall surface of the ink tank. 8 to 11 show configuration examples of the ink tank. In an ink tank 501 shown in FIG. 8, a flexible ink bag 502 containing ink is arranged in a housing 503, a bag opening 502a is closed with a rubber stopper 504 fixed to the housing 503, and an ink outlet 502 is provided. By inserting the hollow needle 505 into the rubber stopper 504 to communicate with the inside of the bag, ink is supplied to a liquid ejection unit (not shown).

The ink tank 511 shown in FIG.
Ink supply port 51 of housing 512 containing ink 513
4, a liquid ejection unit 515 for ejecting ink toward the recording paper S and performing recording is attached.

The ink tank 521 shown in FIG.
Comprises a first chamber in which ink 522 is housed in a completely sealed state;
It has a second chamber in the atmosphere communication state for accommodating the negative pressure generating member 523, and a communication path 524 for communicating the first and second chambers at the bottom of the tank. When ink is consumed from the ink supply port 525 on the second chamber side, the air 522 in the first chamber is led out to the second chamber instead of the air entering the first chamber from the second chamber side. In the tank 521 having such a configuration, the three-dimensional semiconductor elements 525 and 526 may be fixed to the wall surfaces of the first chamber and the second chamber, respectively.

The ink tank 531 shown in FIG.
Is a cartridge in which a porous member 532 holding ink is stored, and a liquid ejection unit 533 for using the stored ink for recording is attached. Also in the tank 531 having such a configuration, the three-dimensional semiconductor elements 534 and 535 may be fixed to the ink tank side and the liquid discharge unit side, respectively.

As shown in FIGS. 10 and 11, a plurality of three-dimensional semiconductor elements may be provided in the recording head. Considering that the carriage moves over a wide range in a space surrounded by various other members, and that a three-dimensional recording in the future will be performed,
This is because there is a possibility that blind spots of communication may be generated only with three-dimensional semiconductor elements. When a plurality of three-dimensional semiconductor elements are provided as described above, it is preferable to provide four or more fixed communication means 26 in the recording apparatus main body as shown in FIG. As described above, by providing two or more three-dimensional semiconductor elements 11 or providing four or more fixed communication means 26, the ejection position can be detected with higher accuracy.

When a plurality of three-dimensional semiconductor elements are provided, FIG.
Although an independent element as shown in may be prepared separately,
A configuration may be adopted in which some functions are shared and three-dimensional semiconductor elements communicate with each other.

According to the present embodiment, the three-dimensional semiconductor element 1
1 has the energy conversion means 14, so that there is no need to perform direct electrical wiring with the outside, and even in locations where direct electrical wiring with the outside is difficult, the three-dimensional semiconductor element 11 and the carriage 6
It is possible to grasp the position of the discharge port in real time while moving 07. Further, since the three-dimensional semiconductor element 11 has the energy conversion means 14, there is no need to arrange a means for accumulating electromotive force for operating the three-dimensional semiconductor element 11, so that the three-dimensional semiconductor element 11 can be reduced in size. It is possible to dispose even in a narrow place.

As a method of bidirectional communication between the three-dimensional semiconductor element and the outside, a wireless LAN using a microwave band frequency is used.
An AN system or a wireless access system using quasi-millimeter-wave / millimeter-wave band frequencies can be applied.

Here, an outline of transmission and reception by the wireless LAN system will be described. Hereinafter, data transmission from the three-dimensional semiconductor element to the recording device will be described. Conversely, when data is transmitted from the recording device to the three-dimensional semiconductor element, a data ID is allocated to each side, and identification is thereby performed.

The three-dimensional semiconductor device on the transmission side has a line monitoring unit, a data handling unit, an acknowledgment check unit, and an error processing unit. The recording unit on the reception side has a data handling unit, an acknowledgment unit, An error processing unit, a display unit, and the like are provided.

FIG. 13 is a flowchart for the three-dimensional semiconductor device on the transmitting side. In the case of transmitting data, after performing initial setting according to a determined transmission protocol, an address on the receiving side is set, and data is transmitted. If a signal collision occurs during transmission, or if no acknowledgment is returned from the designated receiving-side device, retransmission is performed. During operation, the status of the line and the presence / absence of an acknowledgment are displayed on a display unit provided in a recording device or the like on the receiving side to prompt the user to make an appropriate determination.

FIG. 14 shows a flowchart in the recording device on the receiving side. This receiver always monitors the line,
After confirming its own address, data is fetched from the line and stored in a buffer in the main memory. During reception, if the block mark of every 16 bytes cannot be confirmed, or if the checksums do not match in the error detection processing after the reception is completed, the reception is interrupted as a reception error, and the line is monitored again. Wait for the header to arrive. If the reception was successful without error, the received content is displayed on the display unit.

The three-dimensional semiconductor element 11 can have various functions in addition to the above-described series of operations for detecting the ejection position and controlling the ejection timing. For example, although not shown, in addition to the energy conversion means 14 and the discharge control means 15 described above, information acquisition means for acquiring information around the three-dimensional semiconductor element, and whether or not this information is content to be transmitted to the outside And a transmitting means for transmitting this information to the outside. Specifically, when the three-dimensional semiconductor element arranged in the ink tank is made of spherical silicon,
(1) a sensor that detects the pH of ink by forming an SiO ₂ film or a SiN film as an ion-sensitive film, (2) a pressure sensor that has a diaphragm structure and detects a pressure change in a tank, and (3) a material. A sensor or the like for detecting the presence or absence of ink based on the amount of water in the tank using the conductive effect described above can be provided as information obtaining means. Further, the information transmitting means is configured to convert the electric power obtained by the energy conversion into energy for transmitting the information to the outside when the determining means determines that the information needs to be transmitted to the outside. Can also. The energy to be transmitted can use a magnetic field, light, shape, color, radio wave, sound, etc. For example, if it is determined that the remaining amount of ink is less than 2 ml, a sound is generated. The fact that the tank needs to be replaced may be transmitted to the ink jet recording apparatus main body. Further, the transmission destination is not limited to the main body of the ink jet recording apparatus. In particular, in the case of light, shape, color, sound, and the like, the transmission may be performed to human vision or hearing. Further, the transmission method may be changed according to the information, such as by sound when it is determined that the remaining amount of ink is 2 milliliters or less, and by light when the ph of the ink is largely changed.

[0068]

According to the present invention, it is possible to detect a three-dimensional position of an ink discharge position in an ink jet recording apparatus, and to use this for ink discharge control to achieve high precision and high quality recording. In particular, one
Since the position can be detected not only three-dimensionally but also three-dimensionally, the distance between the recording medium and the ejection position can be known, and the effect of improving the print quality is great.

By using a three-dimensional semiconductor element, it is not necessary to install a linear encoder or the like in the main body of the recording apparatus. For example, the carriage speed can be changed.
The degree of freedom in designing an ink jet recording apparatus is increased. Also,
Expensive parts such as linear encoders are not required, and a three-dimensional semiconductor element used for other purposes can also be provided with a position detection function, enabling higher functionality and lower cost by using common parts. It is.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating an ink jet recording apparatus according to a first embodiment of the present invention.

FIG. 2 is a block diagram of a main part of the inkjet recording apparatus according to the first embodiment.

FIG. 3 is an explanatory diagram showing the principle of position detection.

FIG. 4A is a flowchart of an initial setting at the time of manufacturing an ink jet recording apparatus, and FIG. 4B is a flowchart at the time of using the apparatus.

FIG. 5 is a diagram for explaining the power generation principle of the three-dimensional semiconductor device according to the first embodiment.

FIG. 6 is a process chart illustrating a method for manufacturing a three-dimensional semiconductor device according to the first embodiment.

FIG. 7 is an N-M used for the three-dimensional semiconductor device shown in FIG. 6;
FIG. 3 is a schematic cross-sectional view of the OS circuit element cut in a longitudinal direction.

FIG. 8 is a diagram showing a first example of an ink tank suitable for disposing a three-dimensional semiconductor element.

FIG. 9 is a diagram illustrating a second example of an ink tank suitable for disposing a three-dimensional semiconductor element.

FIG. 10 is a diagram showing a third example of an ink tank suitable for disposing a three-dimensional semiconductor element.

FIG. 11 is a diagram illustrating a fourth example of an ink tank suitable for disposing a three-dimensional semiconductor element.

FIG. 12 is a schematic view of an ink jet recording apparatus having a plurality of three-dimensional semiconductor elements.

FIG. 13 is a diagram showing a flowchart of a three-dimensional semiconductor element on the transmission side when bidirectional communication is performed between the three-dimensional semiconductor element of the ink jet recording apparatus of the present invention and the main body of the recording apparatus.

FIG. 14 is a diagram illustrating a flowchart in the recording apparatus main body on the receiving side when bidirectional communication is performed between the three-dimensional semiconductor element of the ink jet recording apparatus and the main body of the recording apparatus.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 11 Three-dimensional semiconductor element 12 Electromotive force 13 Electric power 14 Energy conversion means 15 Discharge control means 16 Radio wave reception part 17 Radio wave analysis part 18 Position detection part 19 Discharge timing control part 20 Memory 21 Time signal reception part 22 Clock 23 Liquid discharge part (recording Means) 24 drive signal supply means 25 time signal transmission section 26 fixed communication means 27 clock function / signal transmission timing generation function 28 recording apparatus main body 101 external resonance circuit 102 oscillation circuit 201 spherical silicon 202 SiO ₂ film 203 opening 204 cavity 205 SiN Film 206 Cu film 207 Sealing member 210 Three-dimensional semiconductor element 501 Ink tank 502 Ink bag 502 a Bag opening 503 Housing 504 Rubber stopper 505 Hollow needle 511 Ink tank 512 Housing 513 Ink 514 Ink supply port 515 Liquid ejection part 521 Ink tank 522 Ink 523 Negative pressure generating member 524 Communication path 525, 526 Three-dimensional semiconductor element 531 Ink tank 532 Porous member 533 Liquid ejection part 534, 535 Three-dimensional semiconductor element 600 Inkjet recording device 601 Head cartridge (inkjet recording head) 602 Drive motor 603, 604 Driving force transmission gear 605 Lead screw 606 Helical groove 607 Carriage 608 Guide 609 Platen 610 Paper press plate 611,612 Photocoupler 613 Support member 614 Cap member 615 Ink suction means 617 Cleaning blade 618 Moving member support Body 620 Lever 621 Cam P Print paper B Magnetic flux L Coil (inductor)

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Inventor Hiroyuki Ishinaga 3-30-2 Shimomaruko, Ota-ku, Tokyo Inside Canon Inc. (72) Inventor Mochizuki Nga 3-30-2 Shimomaruko, Ota-ku, Tokyo Within Canon Inc. (72) Inventor Ichiro Saito 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Takaaki Yamaguchi 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (72) Inventor Ryoji Inoue 3-30-2 Shimomaruko, Ota-ku, Tokyo F-term within Canon Inc. (reference) 2C056 EA24 EB07 EB36 EB59 EC07 EC37 KC11 KC13 KC14 KC16 KC21 KC30 2C480 CA01 CA09 CA16 CA31 CB45 EC04 EC13

Claims (29)

[Claims] 1. An ink jet recording method in which an ink jet recording head is mounted on a carriage and ink is ejected from recording means of the ink jet recording head to perform recording while the carriage moves, wherein the ink jet recording head is fixed to the ink jet recording head. For the three-dimensional semiconductor device, a radio wave is transmitted from the fixed communication unit, and the three-dimensional semiconductor device receives the radio wave, detects the position of the recording unit based on the radio wave, and adjusts the timing of ink ejection accordingly. An inkjet recording method, characterized by controlling. 2. The method according to claim 1, wherein the three-dimensional semiconductor element determines an ink ejection position of the recording unit, and corrects an ink ejection timing to offset a difference between the detected ejection position and a desired ejection position. 2. The ink jet recording method according to 1. 3. The ink-jet recording according to claim 2, wherein the three-dimensional semiconductor element corrects the ink ejection timing by transmitting an ejection timing control signal for controlling ink ejection to the recording means. Method. 4. The ink jet recording method according to claim 1, wherein the three-dimensional semiconductor element receives the radio wave, identifies and analyzes the radio wave, and obtains a communication distance of the radio wave. 5. The three-dimensional semiconductor device obtains a communication distance based on a phase shift of the radio wave, obtains a position of the three-dimensional semiconductor device from the communication distance, and obtains a position of the three-dimensional semiconductor device based on the position of the three-dimensional semiconductor device. The inkjet recording method according to claim 4, wherein the ejection position of the recording unit is detected. 6. A method of using a plurality of the three-dimensional semiconductor elements,
The inkjet recording method according to claim 1. 7. The recording means, based on a drive signal supplied from a recording apparatus main body and the three-dimensional semiconductor element,
The ink jet recording method according to any one of claims 1 to 6, wherein an ink ejection operation is performed. 8. The apparatus according to claim 1, wherein at least three of said fixed communication means emit radio waves toward said three-dimensional semiconductor device.
8. The ink jet recording method according to any one of items 1 to 7. 9. The ink jet recording method according to claim 8, wherein each of the fixed communication units emits a radio wave having a different frequency, amplitude, or signal pattern. 10. The ink jet recording method according to claim 8, wherein the position detection is performed by a trilateration method. 11. A recording device that performs recording by discharging ink, and a three-dimensional semiconductor element that detects a position of the recording device and controls timing of ink discharge in accordance with the position.
Ink jet recording head. 12. A three-dimensional semiconductor device, comprising: a position detector for determining an ink discharge position of the recording unit; and a offset between the discharge position and a desired discharge position detected by the position detector. The inkjet recording head according to claim 11, further comprising: an ejection timing control unit that corrects an ink ejection timing. 13. The ink jet print head according to claim 12, wherein said discharge timing control section transmits a discharge timing control signal for controlling ink discharge to said recording means. 14. The semiconductor device according to claim 12, wherein the three-dimensional semiconductor device further includes a radio wave receiving unit that receives a radio wave from outside, and a radio wave analysis unit that identifies and analyzes the radio wave to obtain a communication distance of the radio wave. 14. The ink jet recording head according to item 13. 15. The radio wave analysis unit and the position detection unit determine a communication distance of a radio wave based on a phase shift of an external radio wave received by the radio wave reception unit, and determine the three-dimensional semiconductor from the communication distance. 15. The ink jet recording head according to claim 14, wherein a position of the element is obtained, and the ejection position of the recording unit is detected based on the position of the three-dimensional semiconductor element. 16. The ink jet recording head according to claim 14, wherein the radio wave analyzing unit can identify at least one of a frequency and an amplitude of a received radio wave. 17. The ink jet recording head according to claim 11, wherein said three-dimensional semiconductor element has a clock. 18. The ink jet recording head according to claim 17, wherein the time can be adjusted by an external signal. 19. The ink jet recording head according to claim 11, wherein said three-dimensional semiconductor element has a memory for storing data for position detection and ejection control. 20. The memory according to claim 19, wherein the memory corrects the ejection timing based on a desired ink ejection position and a positional relationship between the desired ejection position and the actual ejection position detected by the position detecting means. 20. The ink jet recording head according to claim 19, wherein data is stored. 21. The ink jet recording head according to claim 11, comprising a plurality of said three-dimensional semiconductor elements. 22. An ink jet recording head according to claim 11, a carriage on which said ink jet recording head is mounted and moving, and fixed communication for transmitting a radio wave toward said three-dimensional semiconductor element. And a recording apparatus main body having means. 23. A driving signal supply unit for supplying a driving signal to the recording unit in the recording apparatus main body, wherein the recording unit is configured to detect an ink based on the driving signal and the three-dimensional semiconductor element. 23. The ink jet recording apparatus according to claim 22, which performs an ejection operation. 24. The ink jet recording apparatus according to claim 22, wherein the recording apparatus main body is provided with at least three fixed communication means for transmitting a radio wave toward the three-dimensional semiconductor element. 25. The ink jet recording apparatus according to claim 24, wherein radio waves transmitted from each of the fixed communication means have different frequencies, amplitudes, or signal patterns. 26. The recording area on the recording medium by the recording means is an area which spreads two-dimensionally.
The inkjet recording apparatus according to any one of the above. 27. The recording area on the recording medium by the recording means is an area that spreads three-dimensionally.
The inkjet recording device according to any one of the above. 28. The recording area is a three-dimensional outer surface,
An ink jet recording apparatus according to claim 27. 29. The recording area according to claim 2, wherein the recording area is spherical.
29. The ink jet recording apparatus according to 7 or 28.