JP2001502423A5 - - Google Patents

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Publication number
JP2001502423A5
JP2001502423A5 JP1998517958A JP51795898A JP2001502423A5 JP 2001502423 A5 JP2001502423 A5 JP 2001502423A5 JP 1998517958 A JP1998517958 A JP 1998517958A JP 51795898 A JP51795898 A JP 51795898A JP 2001502423 A5 JP2001502423 A5 JP 2001502423A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP1998517958A
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English (en)
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JP3999274B2 (ja
JP2001502423A (ja
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Priority claimed from PCT/EP1997/005211 external-priority patent/WO1998016802A1/de
Publication of JP2001502423A publication Critical patent/JP2001502423A/ja
Publication of JP2001502423A5 publication Critical patent/JP2001502423A5/ja
Application granted granted Critical
Publication of JP3999274B2 publication Critical patent/JP3999274B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Description

Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
Figure 2001502423
JP51795898A 1996-10-16 1997-09-23 光学位置測定装置 Expired - Fee Related JP3999274B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19642680.4 1996-10-16
DE19642680 1996-10-16
PCT/EP1997/005211 WO1998016802A1 (de) 1996-10-16 1997-09-23 Optische positionsmesseinrichtung

Publications (3)

Publication Number Publication Date
JP2001502423A JP2001502423A (ja) 2001-02-20
JP2001502423A5 true JP2001502423A5 (ja) 2005-05-12
JP3999274B2 JP3999274B2 (ja) 2007-10-31

Family

ID=7808916

Family Applications (1)

Application Number Title Priority Date Filing Date
JP51795898A Expired - Fee Related JP3999274B2 (ja) 1996-10-16 1997-09-23 光学位置測定装置

Country Status (6)

Country Link
US (1) US6151128A (ja)
EP (1) EP0932819B1 (ja)
JP (1) JP3999274B2 (ja)
AT (1) ATE212714T1 (ja)
DE (2) DE19741848A1 (ja)
WO (1) WO1998016802A1 (ja)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10333772A1 (de) * 2002-08-07 2004-02-26 Dr. Johannes Heidenhain Gmbh Interferenzielle Positionsmesseinrichtung
US9212990B1 (en) 2011-12-06 2015-12-15 Zybertec Llc System and methods for molecular detection using intracavity laser absorption spectroscopy
JP6705649B2 (ja) * 2015-12-22 2020-06-03 株式会社ミツトヨ エンコーダ
JP6664211B2 (ja) * 2015-12-22 2020-03-13 株式会社ミツトヨ エンコーダ

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3239108A1 (de) * 1982-10-22 1984-04-26 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut Positionsmessverfahren und einrichtungen zur durchfuehrung des verfahrens
GB8413955D0 (en) * 1984-05-31 1984-07-04 Pa Consulting Services Displacement measuring apparatus
DE3541199C1 (de) * 1985-11-21 1987-06-25 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmesseinrichtung
US5283434A (en) * 1991-12-20 1994-02-01 Canon Kabushiki Kaisha Displacement detecting device with integral optics
JP3005131B2 (ja) * 1992-12-28 2000-01-31 キヤノン株式会社 変位検出装置
DE4316221C2 (de) * 1993-05-14 1995-11-23 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
JP3196459B2 (ja) * 1993-10-29 2001-08-06 キヤノン株式会社 ロータリーエンコーダ
EP0662603B1 (de) * 1993-12-08 1997-03-12 Dr. Johannes Heidenhain GmbH Längenmesssystem
JP3513251B2 (ja) * 1994-03-14 2004-03-31 キヤノン株式会社 光学式変位センサ
DE19507613C2 (de) * 1995-03-04 1997-01-23 Heidenhain Gmbh Dr Johannes Längen- oder Winkelmeßeinrichtung
DE19521295C2 (de) * 1995-06-10 2000-07-13 Heidenhain Gmbh Dr Johannes Lichtelektrische Positionsmeßeinrichtung
EP0750179B1 (de) * 1995-06-22 2000-04-26 Dr. Johannes Heidenhain GmbH Positionsmesseinrichtung

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