JP2001358208A5 - - Google Patents
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- Publication number
- JP2001358208A5 JP2001358208A5 JP2000180182A JP2000180182A JP2001358208A5 JP 2001358208 A5 JP2001358208 A5 JP 2001358208A5 JP 2000180182 A JP2000180182 A JP 2000180182A JP 2000180182 A JP2000180182 A JP 2000180182A JP 2001358208 A5 JP2001358208 A5 JP 2001358208A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000180182A JP4422300B2 (ja) | 2000-06-15 | 2000-06-15 | ウェハ処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000180182A JP4422300B2 (ja) | 2000-06-15 | 2000-06-15 | ウェハ処理装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007192099A Division JP4422745B2 (ja) | 2007-07-24 | 2007-07-24 | ウェハ位置ずれ検出装置およびウェハ位置ずれ検出方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001358208A JP2001358208A (ja) | 2001-12-26 |
| JP2001358208A5 true JP2001358208A5 (ko) | 2007-09-06 |
| JP4422300B2 JP4422300B2 (ja) | 2010-02-24 |
Family
ID=18681331
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000180182A Expired - Lifetime JP4422300B2 (ja) | 2000-06-15 | 2000-06-15 | ウェハ処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4422300B2 (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4650273B2 (ja) * | 2006-01-12 | 2011-03-16 | シンフォニアテクノロジー株式会社 | 基板搬送装置、および基板位置検出方法 |
| JP2007227781A (ja) * | 2006-02-24 | 2007-09-06 | Tokyo Electron Ltd | 基板の位置ずれ検査機構，処理システム及び基板の位置ずれ検査方法 |
| JP2010032242A (ja) * | 2008-07-25 | 2010-02-12 | Yamatake Corp | 基板検出装置 |
| WO2023023444A1 (en) * | 2021-08-17 | 2023-02-23 | Tokyo Electron Limited | Optical sensors for measuring properties of consumable parts in a semiconductor plasma processing chamber |
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2000
- 2000-06-15 JP JP2000180182A patent/JP4422300B2/ja not_active Expired - Lifetime