JP2001357996A - Static electricity eliminator and static electricity eliminating method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent temperature lowering of an object to be processed, and to enable to eliminate static electricity while processing at requested temperature. SOLUTION: The static electricity eliminator, supplying the air 18 from an air supply means 10 to an ion generating part 11, neutralizing and eliminating static electricity at an object to be destaticized 20 by spraying ionized air generated at the ion generating part 11 to the object to be destaticized 20, comprises a heating means (a heater) 14 heating ionized air, and a temperature control part 15 controlling the temperature of the heating means 14, and ionized air 19 heated to a certain temperature is sprayed against the object to be destaticized 20.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for removing static electricity and a method for removing static electricity, and more particularly to a device for removing static electricity by spraying ionized air onto a semiconductor device and the like, and a method for removing static electricity.

[0002]

2. Description of the Related Art Since a resin-encapsulated semiconductor device or the like is easily broken by static electricity, there is an electrostatic eliminator for removing the static electricity by blowing ionized air to the semiconductor device or the like. For example, Japanese Unexamined Patent Publication No. Hei.
Japanese Patent Application Laid-Open No. 5 (1999) -2005 discloses a method for removing a semiconductor device by accommodating the semiconductor device in a neutralization device.

FIG. 3 is a block diagram illustrating the configuration of a conventional static electricity removing device. Air 18 introduced from a high-pressure air generator 10 to an ion generator (ionizer) 11
Is ionized by alternating current or pulsed high voltage applied to the needle-shaped electrode unit 13 from the power supply unit 12, taken out as ionized air 19, and sprayed on the object 20 for neutralization and removal of static electricity.

The high-pressure air generator 10 may be any compressed air having an air pressure of 1 to 5 kg / cm 2 and a flow rate of about 100 liter / min, and may use a fan or a small compressor.

FIGS. 4A and 4B are schematic cross-sectional views illustrating two examples of the configuration of the ion generator 11 of the static eliminator of FIG. In FIG. 4A, 50 to 100 at 5 to 20 KV.
This shows a case where an AC power supply of 1 Hz is used. When a high voltage AC is applied to the discharge electrode 13 from the power supply unit 12 of the AC power supply, air around the discharge electrode 13 is ionized. Therefore, the supplied air (air) 18 can be continuously taken out as ionized air 19a having positive and negative polarities.

Further, in FIG.
Shows the case where a DC pulse power supply of 1 to 100 Hz is used,
By applying a high-voltage DC pulse to each of the discharge electrodes 13 and 13a from the positive power supply section 12a and the negative power supply section 12b of the DC power supply, air around the discharge electrode 13 is ionized, and ionized air having positive and negative polarities 19a.

[0007]

The above-described conventional static eliminator is used for processing, assembling, and sorting at a constant temperature, and has no heater or temperature control mechanism. If control is required, eg 100 ° C
When air is blown onto a processing object that requires the above temperature, static electricity can be removed but the temperature of the object decreases.

SUMMARY OF THE INVENTION An object of the present invention is to provide a static eliminator and a static elimination method capable of processing at a desired temperature by preventing a temperature of an object to be processed from lowering.

[0009]

SUMMARY OF THE INVENTION According to the present invention, there is provided a static eliminator for neutralizing and removing static electricity from an object to be neutralized, which sprays ionized air generated in an ion generating section onto the object to be neutralized. And a temperature control unit for controlling the temperature of the heating means, wherein the ionized air is blown onto the object to be neutralized at a constant temperature.

In the present invention, the temperature controller controls the temperature of the outlet of the ionized air to be heated to a predetermined temperature, and has a temperature sensor for detecting the temperature of the outlet of the ionized air, and the temperature sensor. And a drive circuit for supplying a drive voltage to the heating means in accordance with the output of the comparator.

In the present invention, the heating means may be constituted by a heater, and the heating means may be provided at a stage subsequent to the ion generating section.

Further, according to the present invention, there is provided a static electricity removing method for spraying ionized air generated in an ion generating section to an object to be neutralized to neutralize and remove the static electricity of the object to be neutralized, wherein the control heating means comprises: After the ionized air is heated to a predetermined temperature, it is sprayed on the object to be neutralized.

[0013]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings. FIG. 1 is a block diagram illustrating the configuration of one embodiment of the present invention. The air 18 introduced from the high-pressure air generator 10 into the ion generator 11 is ionized by alternating or pulsed high voltage applied to the needle-shaped electrode unit 13 from the power supply unit 12, and the temperature is controlled by the temperature control unit 15. After passing through the heater section 14, the air is taken out as ionized air 19 through a pipe 17 and is sprayed on an object 20 to be neutralized and to remove static electricity.

According to this embodiment, the temperature control unit 15 controls the temperature of the outlet of the ionized air to be heated to a predetermined temperature, and electrically heats the outer periphery of the cylindrical body through which the ionized air passes. Since the temperature of the portion 14 can be controlled, the introduced air 18 can be controlled at a desired temperature, and the processing range of the object 20 to be neutralized can be expanded.

FIG. 2 is a block diagram further embodying the embodiment of FIG. In this case, the temperature control unit 15 includes a temperature sensor 16 attached to an end of a pipe-shaped pipe 17 as shown in FIG. 1, and the temperature control unit 15 detects a temperature at an outlet of ionized air. 16 comprises a comparator 21 for comparing the output of 16 with a voltage corresponding to the control temperature, and a drive circuit 22 for supplying a drive voltage to the heating means 14 according to the output of the comparator 21.

In the present embodiment, the temperature sensor 16 detects the temperature of the ionized air 19 at the outlet of the pipe 17 and controls the temperature by the temperature control unit 15a. It has the characteristic that it can be controlled. Therefore, the processing temperature of the charge removal target 20 can be arbitrarily set in accordance with the necessity.

In the present embodiment, the power supply section 12 described in the conventional example (FIG. 4) is 50
When using an AC power supply of ~ 100Hz or 5 ~ 20KV
In this case, a case where a DC pulse power supply of 0.1 to 100 Hz is used is applicable, and the high-pressure air generator 10 described in the conventional example is also applied.

[0018]

As described above, according to the static eliminator of the present invention, ionized high-temperature air having a constant temperature can be obtained and sprayed on an object to be neutralized, and static elimination requiring a constant temperature is required. It has the effect of neutralizing and removing static electricity from the target object without causing the effect of the temperature drop of the target object. Also, by disposing the heater section after the ion generation section, The portion also has the effect that it is not necessary to use a special heat-resistant material.

[Brief description of the drawings]

FIG. 1 is a block diagram of an apparatus for removing static electricity according to an embodiment of the present invention.

FIG. 2 is a block diagram further embodying the embodiment of FIG. 1;

FIG. 3 is a block diagram showing a configuration of a conventional static electricity removing device.

FIG. 4 is a schematic cross-sectional view showing a configuration of an ion generator of a conventional static electricity removing device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 High-pressure air generation part 11 Ion generation part 12 Power supply part 12a Positive power supply part 12b Negative power supply part 13, 13a Electrode part 14 Heater part 15 Temperature control part 16 Temperature sensor 17 Pipe-like pipe 18 Air 19 Ionized air 20 Object for static elimination 21 Comparison Container 22 Drive circuit

Claims (6)

[Claims] A heating means for heating ionized air in a static electricity eliminator for spraying ionized air generated in an ion generating section onto an object to be neutralized to neutralize and remove static electricity from the object to be eliminated, and this heating means A temperature control unit for controlling the temperature of the static electricity removing device, wherein the ionized air is blown at a constant temperature to the object to be neutralized. 2. The static eliminator according to claim 1, wherein the temperature controller controls the temperature of the outlet of the ionized air to be heated to a predetermined temperature. 3. A temperature controller for detecting a temperature of an outlet of ionized air, a comparator for comparing an output of the temperature sensor with a voltage corresponding to a control temperature, and heating in accordance with an output of the comparator. 3. A static eliminator according to claim 1, further comprising a driving circuit for supplying a driving voltage to the means. 4. The static eliminator according to claim 1, wherein said heating means comprises a heater. 5. The static eliminator according to claim 1, wherein the heating means is provided at a stage subsequent to the ion generating section. 6. A static electricity removing method for spraying ionized air generated in an ion generating section onto an object to be neutralized to neutralize and remove static electricity from the object to be neutralized, wherein said ionized air is subjected to a predetermined heating by a control heating means. A method for removing static electricity, comprising: spraying the object to be neutralized after heating to a temperature.