CN214588728U - Hollow cathode tube starting device and hollow cathode neutralizer - Google Patents
Hollow cathode tube starting device and hollow cathode neutralizer Download PDFInfo
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- CN214588728U CN214588728U CN202120186525.4U CN202120186525U CN214588728U CN 214588728 U CN214588728 U CN 214588728U CN 202120186525 U CN202120186525 U CN 202120186525U CN 214588728 U CN214588728 U CN 214588728U
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Abstract
The application relates to a hollow cathode tube starting device and a hollow cathode neutralizer; the hollow cathode tube starting device comprises: the heating component is arranged at the head position of the hollow cathode tube, and the maintaining power supply is connected with the hollow cathode tube; the heating component is arranged around the head of the hollow cathode tube; the negative electrode of the maintaining power supply is connected with the hollow cathode tube, and the positive electrode of the maintaining power supply is connected with the maintaining electrode; the maintaining power supply is used for providing maintaining current for the hollow cathode tube when the hollow cathode tube is started; the heating component is used for heating the hollow cathode tube until the temperature of the head position of the hollow cathode tube meets the requirement of thermal electron output; the technical scheme can adapt to the working environment of the low-temperature cathode material, reduces the requirement of high-voltage starting on a power supply, does not need a large amount of gas flow to start, and is convenient for starting control.
Description
Technical Field
The application relates to the technical field of ion source equipment, in particular to a hollow cathode tube starting device and a hollow cathode neutralizer.
Background
The ion source equipment mainly comprises a neutralizer and an ion source, wherein the neutralizer is used for generating electrons, a hollow cathode neutralizer is adopted in the neutralizer, when a hollow cathode tube of the hollow cathode neutralizer works, working gas (generally inert gas such as argon) is firstly input, then the hollow cathode tube is started at high pressure, and the hollow cathode tube works under the argon atmosphere, so that stable electron flow output is realized.
In a common technical scheme, referring to fig. 1, fig. 1 is a schematic structural diagram of a common hollow cathode neutralizer, in order to start a hollow cathode, a start power supply and a maintenance power supply need to participate simultaneously, a hollow cathode tube 11 generates a current loop by puncturing gas at the head of a bile duct, in order to ensure the puncture, the start power supply needs to generate a high voltage of several kilovolts, after the puncture, the high-voltage start power supply is turned off and the maintenance power supply starts to work, and at this time, the maintenance power supply provides a stable maintenance current (about 2A) and outputs the stable operation of the hollow cathode tube 11; after the start-up is completed, the hollow cathode tube 11 is connected to a cathode power supply, and an appropriate voltage is generated by the cathode power supply to realize that the electron current is continuously led out from the hollow cathode tube.
Because the temperature of the high-voltage started hollow cathode tube 11 is relatively high and generally reaches above 2000 ℃, low-temperature cathode materials cannot be used in the hollow cathode neutralizer, for example, tungsten-barium alloy materials, the use temperature is generally below 1000 ℃, so that the equipment cost of the hollow cathode tube 11 is high, the high-voltage start has high requirements on a power supply, a large gas flow is required to be introduced into the gas tube 12 for starting, and the use conditions have high requirements.
SUMMERY OF THE UTILITY MODEL
In view of the above, it is necessary to provide a hollow cathode tube starting device and a hollow cathode neutralizer for overcoming the technical disadvantage of the above hollow cathode tube requiring high use conditions.
A hollow cathode tube starting apparatus comprising: the heating component is arranged at the head position of the hollow cathode tube, and the maintaining power supply is connected with the hollow cathode tube;
the heating component is arranged around the head of the hollow cathode tube; the negative electrode of the maintaining power supply is connected with the hollow cathode tube, and the positive electrode of the maintaining power supply is connected with the maintaining electrode;
the maintaining power supply is used for providing maintaining current for the hollow cathode tube when the hollow cathode tube is started;
the heating component is used for heating the hollow cathode tube until the temperature of the head position of the hollow cathode tube meets the thermal electron output.
In one embodiment, the hollow cathode tube starting apparatus further comprises: and the heating power supply is connected with the heating part and is used for providing heating current for the heating part.
In one embodiment, the heating member includes a heating wire closely wound around a head of the hollow cathode tube;
the heating power supply is an alternating current power supply or a direct current power supply, one end of the heating power supply is connected with the hollow cathode tube, and the other end of the heating power supply is connected with the heating wire.
In one embodiment, the heating member comprises an induction coil disposed at the head of the hollow cathode tube, the induction coil being in non-contact with the head of the hollow cathode tube;
the heating power supply is a medium-frequency or high-frequency power supply, and two ends of the heating power supply are respectively connected with two ends of the induction coil.
In one embodiment, the working gas of the hollow cathode tube is inert gas, and the amount of the introduced working gas is 5-10 sccm; the current range of the maintaining current is 200mA-500 mA.
In one embodiment, the hollow cathode tube starting apparatus further comprises: the control ends are respectively connected with the heating power supply and the maintaining power supply;
the control end is used for controlling the on/off of the heating current output by the heating power supply, the heating time and the heating current, and controlling the on and the maintaining current of the maintaining power supply.
In one embodiment, the hollow cathode tube starting device further comprises a temperature sensor connected to the control end, and the temperature sensor is used for detecting temperature data of the heating component and transmitting the temperature data to the control end.
In one embodiment, the hollow cathode tube starting device further comprises a gas flow meter connected to the gas tube of the hollow cathode tube, and the gas flow meter is used for adjusting the amount of the working gas input into the hollow cathode tube under the control of the control end.
A hollow cathode neutralizer comprising: a hollow cathode tube and the starting device of the hollow cathode tube.
In one embodiment, the hollow cathode neutralizer further comprises: a cathode power supply connected with the hollow cathode tube; wherein the cathode of the cathode power supply is connected with the hollow cathode tube, and the anode is grounded;
and the cathode power supply is used for providing the current required by the continuous output of the electrons for the hollow cathode tube after the hollow cathode tube outputs the thermal electrons.
The technical scheme of this application has following beneficial effect:
when the starting device is started, a heating starting mode is adopted, the heating part arranged at the head position of the hollow cathode tube is used for continuously heating the head position of the hollow cathode tube, so that the temperature of the head position of the hollow cathode tube meets a starting condition, and hot electrons are output, thereby completing a starting process; the technical scheme can adapt to the working environment of the low-temperature cathode material, reduces the requirement of high-voltage starting on a power supply, does not need a large amount of gas flow to start, and is convenient for starting control. In addition, by heating components such as heating wires or induction coils, the starting process can be controlled by adjusting the heating power in use, and the starting efficiency of the hollow cathode tube is improved.
Drawings
FIG. 1 is a schematic diagram of a conventional hollow cathode neutralizer;
FIG. 2 is a schematic structural view of a hollow cathode tube starter according to an embodiment;
FIG. 3 is a schematic view of a heating element configuration according to one embodiment;
FIG. 4 is a schematic view of another embodiment of a heating element configuration;
FIG. 5 is a circuit configuration diagram of a hollow cathode tube starter according to an embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The term "comprises" and any other variations of the embodiments of the present application are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps is not limited to only those steps or modules recited, but may alternatively include other steps or modules not recited, or that are inherent to such process, method, article, or apparatus.
Referring to fig. 2, fig. 2 is a schematic structural diagram of a hollow cathode tube starting apparatus according to an embodiment, including: a heating member 21 and a maintenance power supply 30; wherein, the heating member 21 is disposed around the head position of the hollow cathode tube 11, the maintaining power supply 30 is connected with the hollow cathode tube 11, the negative electrode of the maintaining power supply 30 is connected with the hollow cathode tube 11, and the positive electrode is connected with the maintaining electrode 30; the function of the maintaining power supply 30 is to provide a maintaining current to the hollow cathode tube 11 when the hollow cathode tube 11 is started, the heating member 21 is used for heating the hollow cathode tube 11, and the heating process is carried out until the temperature of the head position of the hollow cathode tube 11 meets the thermal electron output; after that, the heating can be stopped, or the temperature can be controlled to be in a heat preservation working state.
Preferably, the heating member 21 is electrically heated, and thus, the heating member 21 is connected to the heating power supply 21, and the heating power supply 20 supplies a heating current to the heating member 21; it should be noted that, the user of the present invention can also use other heating methods to heat the hollow cathode tube 11, which is not described herein again.
As for the heating component 21, it can also adopt various implementation forms, and preferably, the present embodiment provides two ways of heating the wire 21a and the induction coil 21 b.
In one embodiment, referring to FIG. 3, FIG. 3 is a schematic view of a heating element configuration of one embodiment; the heating member 21 may include a heating wire 21a closely wound around the head of the hollow cathode tube 11; wherein, the heating power supply 20 can be an alternating current power supply (power frequency 50-60Hz) or a direct current power supply, one end of the heating power supply 20 is connected with the hollow cathode tube 11, and the other end is connected with the heating wire 21 a.
In one embodiment, referring to FIG. 4, FIG. 4 is a schematic view of a heating element configuration of another embodiment; the heating member 21 may include an induction coil 21b provided at the head of the hollow cathode tube 11, the induction coil 21b being in non-contact with the head of the hollow cathode tube 11; the heating power supply 20 is an intermediate frequency or high frequency power supply, and both ends of the heating power supply 20 are connected to both ends of the induction coil 21b, respectively.
Further embodiments of the hollow cathode tube starter will be described with reference to fig. 5, and fig. 5 is a circuit diagram of the hollow cathode tube starter according to one embodiment.
In one embodiment, the hollow cathode tube starting apparatus may further include a control terminal 40 (e.g., an industrial personal computer) connected to the heating power source 20 and the sustaining power source 30, respectively; the control terminal 40 is used for controlling the on/off of the heating current, the heating time and the heating current of the heating power supply 20, and controlling the on and maintaining current of the maintaining power supply 30; specifically, the control terminal 40 can be embedded with a corresponding control method to automatically control the work flow of the heating power supply 20 and the maintaining power supply 30.
Preferably, the technical solution of the present embodiment may further include a temperature sensor 50 connected to the control end, for detecting the temperature data of the heating component 21 and transmitting the temperature data to the control end 40; specifically, the temperature sensor 50 can detect the temperature of the head of the hollow cathode tube 11, thereby providing real-time control parameters for the heating process.
Preferably, the solution of the present embodiment may further include a gas flow meter 112 connected to the gas pipe 111 of the hollow cathode tube 11, for adjusting the gas amount of the working gas input into the hollow cathode tube 11 under the control of the control end 40; specifically, the amount of gas introduced into the hollow cathode tube 11 during the start-up is controlled by the gas flow meter 112, thereby achieving accurate control of the start-up.
Based on the hollow cathode tube starting device provided by the above embodiment, a working process of the hollow cathode tube starting device in the hollow cathode tube is described as follows:
(1) introducing a working gas into the hollow cathode tube 11; specifically, working gas can be introduced through the gas tube 111 of the hollow cathode tube 11, the working gas is input into the hollow cathode tube 11, and the working gas can be inert gas, generally argon; preferably, the amount of the working gas introduced may be 5 to 10 sccm.
(2) Starting the sustain power supply 30 and inputting a sustain current to the hollow cathode tube 11; specifically, the start-up maintaining power supply 30 supplies a continuous maintaining current to the hollow cathode tube 11, and preferably, the maintaining current may be in a current range of 200mA to 500 mA.
(3) Continuously heating the head position of the hollow cathode tube 11 by using the heating power supply 20; specifically, after a certain amount of working gas is introduced, the head portion of the hollow cathode tube 11 starts to be heated, mainly around the head portion of the bile duct, and the head temperature of the hollow cathode tube 11 is raised by continuing heating.
(4) When the temperature of the head position of the hollow cathode tube 11 meets the thermal electron output, controlling the temperature to be adjusted to a set temperature value; specifically, when the temperature of the hollow cathode tube 11 satisfies the thermionic output after continuous heating, heating may be stopped, or the temperature may be controlled to be in a heat-preservation operating state, and at this time, the sustaining electrode 31 may reach the set several hundred milliamperes of current by maintaining the current of the power supply 30.
(5) Turning on the cathode power supply 60 to provide operating power to the hollow cathode neutralizer; specifically, after the starting process is completed, the working state of continuously outputting electrons is entered, and at this time, the cathode power supply can be turned on to provide working power supply for the hollow cathode neutralizer.
An example of a hollow cathode neutralizer is set forth below.
The hollow cathode neutralizer of the present embodiment, referring to fig. 2 to 5, may include: hollow cathode tube 11, heating member 21, heating power supply 20, maintenance power supply 30, cathode power supply 60, cathode body 70, and the like; wherein, the cathode of the cathode power supply 60 is connected with the hollow cathode tube 11, and the anode is grounded; the cathode body 70 may in turn include a first insulating block 71 and a second insulating block 72 supporting the hollow cathode tube, a holding sheet 31 and a casing 73, and the like.
In the hollow cathode neutralizer, firstly, the other part is introduced into the air pipe connector through the air pipe 111, then the maintaining power supply 30 is started to work, then the heating power supply 20 is started to heat the heating part 21, and when the heating part is heated to meet the thermal electron output condition, the heating is stopped; after the hollow cathode tube 11 outputs thermal electrons, the cathode power supply 60 is connected to supply the current required for continuously outputting electrons to the hollow cathode tube 11, so that the hollow cathode neutralizer continuously outputs electrons.
The hollow cathode neutralizer of the embodiment can adapt to the working environment of low-temperature cathode materials, reduces the requirement of high-voltage starting on a power supply, does not need a large amount of gas flow to start, and is convenient for starting control. In addition, the heating element 21a or the induction coil 21b can control the starting process by adjusting the heating power in use, thereby improving the starting efficiency of the hollow cathode tube 11.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A hollow cathode tube starting device, comprising: the heating component is arranged at the head position of the hollow cathode tube, and the maintaining power supply is connected with the hollow cathode tube;
the heating component is arranged around the head of the hollow cathode tube; the negative electrode of the maintaining power supply is connected with the hollow cathode tube, and the positive electrode of the maintaining power supply is connected with the maintaining electrode;
the maintaining power supply is used for providing maintaining current for the hollow cathode tube when the hollow cathode tube is started;
the heating component is used for heating the hollow cathode tube until the temperature of the head position of the hollow cathode tube meets the thermal electron output.
2. The hollow cathode tube starting device according to claim 1, further comprising: and the heating power supply is connected with the heating part and is used for providing heating current for the heating part.
3. The starting apparatus for a hollow cathode tube according to claim 2, wherein the heating means comprises a heating wire tightly wound around a head of the hollow cathode tube;
the heating power supply is an alternating current power supply or a direct current power supply, one end of the heating power supply is connected with the hollow cathode tube, and the other end of the heating power supply is connected with the heating wire.
4. The hollow cathode tube starting apparatus according to claim 2, wherein the heating member comprises an induction coil provided at the head of the hollow cathode tube, the induction coil being in non-contact with the head of the hollow cathode tube;
the heating power supply is a medium-frequency or high-frequency power supply, and two ends of the heating power supply are respectively connected with two ends of the induction coil.
5. The starting device of claim 2, wherein the working gas of the hollow cathode tube is an inert gas, and the amount of the working gas introduced is 5-10 sccm; the current range of the maintaining current is 200mA-500 mA.
6. A hollow cathode tube starting device according to any one of claims 2 to 5, further comprising: the control ends are respectively connected with the heating power supply and the maintaining power supply;
the control end is used for controlling the on/off of the heating current output by the heating power supply, the heating time and the heating current, and controlling the on and the maintaining current of the maintaining power supply.
7. The hollow cathode tube starting device according to claim 6, further comprising a temperature sensor connected to said control terminal for detecting temperature data of said heating member and transmitting the temperature data to said control terminal.
8. The starting device of claim 6, further comprising a gas flow meter connected to the gas pipe of the hollow cathode tube for adjusting the amount of the working gas supplied to the hollow cathode tube under the control of the control terminal.
9. A hollow cathode neutralizer, comprising: a hollow cathode tube, and a hollow cathode tube starting apparatus as claimed in any one of claims 1 to 8.
10. The hollow cathode neutralizer according to claim 9, further comprising: a cathode power supply connected with the hollow cathode tube; wherein the cathode of the cathode power supply is connected with the hollow cathode tube, and the anode is grounded;
and the cathode power supply is used for providing the current required by the continuous output of the electrons for the hollow cathode tube after the hollow cathode tube outputs the thermal electrons.
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120186525.4U CN214588728U (en) | 2021-01-22 | 2021-01-22 | Hollow cathode tube starting device and hollow cathode neutralizer |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202120186525.4U CN214588728U (en) | 2021-01-22 | 2021-01-22 | Hollow cathode tube starting device and hollow cathode neutralizer |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112908816A (en) * | 2021-01-22 | 2021-06-04 | 中山市博顿光电科技有限公司 | Hollow cathode tube starting method and device and hollow cathode neutralizer |
| CN114302549A (en) * | 2021-12-31 | 2022-04-08 | 中山市博顿光电科技有限公司 | Radio frequency ion source system and radio frequency ion source control method |
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2021
- 2021-01-22 CN CN202120186525.4U patent/CN214588728U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112908816A (en) * | 2021-01-22 | 2021-06-04 | 中山市博顿光电科技有限公司 | Hollow cathode tube starting method and device and hollow cathode neutralizer |
| CN114302549A (en) * | 2021-12-31 | 2022-04-08 | 中山市博顿光电科技有限公司 | Radio frequency ion source system and radio frequency ion source control method |
| CN114302549B (en) * | 2021-12-31 | 2024-02-20 | 中山市博顿光电科技有限公司 | Radio frequency ion source system and radio frequency ion source control method |
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