CN207083268U - A kind of plasma producing apparatus based on hot cathode - Google Patents
A kind of plasma producing apparatus based on hot cathode Download PDFInfo
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- CN207083268U CN207083268U CN201720715815.7U CN201720715815U CN207083268U CN 207083268 U CN207083268 U CN 207083268U CN 201720715815 U CN201720715815 U CN 201720715815U CN 207083268 U CN207083268 U CN 207083268U
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- hot cathode
- plasma
- power supply
- sleeve pipe
- temperature insulation
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Abstract
The utility model provides a kind of plasma producing apparatus based on hot cathode.The device includes：Plasma generating unit, heating unit and air supply unit.The heating unit includes electrothermal piece, high-temperature insulation sleeve pipe, insulating component, binding post and power supply；Hot cathode, anode canister, high voltage power supply and high-voltage connection terminal；Air supply unit includes high pressure gas holder and tracheae.The device can provide high-density plasma under atmospheric pressure environment.The device has and has advantage as follows：Simple in construction, small volume, cost are low, produce plasma density greatly and the generation of the accessory substance such as ozone free.The utility model also has advantage of lower cost, simple in construction, can portable mobile, the advantages that flexibility ratio is high.
Description
Technical field
The utility model belongs to a kind of plasma producing apparatus, and in particular to it is a kind of based on hot cathode etc.
Gas ions generating means.
Background technology
At present, it is based primarily upon electron beam irradiation for existing low temperature plasma generating means, glow discharge, corona are put
Several principles such as electricity, dielectric barrier discharge, radio frequency discharge, slip arc discharge and jet electric discharge.Wherein electron beam irradiation equipment
Complicated, cost is high；By hypobaric limitation, commercial Application is difficult to continuous production and with high costs for glow discharge；Corona
Electric discharge and dielectric barrier discharge device require higher to voltage class, in plasma generation process, there is the by-product of higher concentration
Thing ozone and nitrogen oxide etc. generate, and corona discharge assembly is difficult to produce certain single current-carrying plasma in addition；Radio frequency discharge device
Equally there is the problems such as accessory substance generation in discharge process, and it is all by less in breakdown electrode to slide electric arc and jet electric discharge
Air produces plasma, and sphere of action is smaller.
The content of the invention
In view of the above-mentioned problems, the utility model proposes a kind of plasma producing apparatus based on hot cathode,
For producing the in vitro jet such as high density, overcome existing for prior art it is complicated, efficiency is low, ozonation by-product be present asks
Topic.
The utility model proposes a kind of plasma producing apparatus based on hot cathode, including heating is single
Member, plasma generating unit and air supply unit composition, wherein：
The heating unit includes electrothermal piece, high-temperature insulation sleeve pipe, insulating component, binding post and power supply；It is described
Electrothermal piece is arranged in high-temperature insulation sleeve pipe, and both ends connect power output end by two piece-root grafting line terminals of insulating component；Institute
It is tubular structure to state high-temperature insulation sleeve pipe, and its is one side closed, and opposite side is fixedly connected with insulating component, and electrothermal piece is included
Inside, a heated sealed space is formed；By adjusting the electric power output voltage, electrothermal piece heating power can be changed, controlled
High-temperature insulation sleeve surface temperature；
The plasma generating unit includes hot cathode, anode canister and high voltage power supply；The anode canister is
The cylinder-like structure of integral ground, is coaxially located at outside electron emitting cathode；Anode canister one end offers nozzle, for injection etc.
Gas ions, the other end are fixed on insulating component；The hot cathode is tubular structure, and attaching is arranged on high temperature
Insulating sleeve outer surface, to receive the heat that it sends；Hot cathode open at one end is fixed on the insulated heat group
On part；The hot cathode is coaxially disposed with the high-temperature insulation sleeve pipe, for launching electronics；The high voltage power supply is defeated
Go out high-pressure side and make high-pressure stage and be connected by high-voltage connection terminal with the hot cathode, the high voltage power supply output other end is made
It is grounded for earth polar；
The high voltage power supply output voltage can adjust, and for changing hot cathode operating voltage, control plasma
Density occurs for body；
The air supply unit includes high pressure gas holder, and it passes through the insulating component and anode canister and thermoelectricity by tracheae
The cavity that sub- emitting cathode is formed communicates, and the discharge space formed for the sub- emitting cathode of thermoelectric and anode canister provides work gas
Atmosphere；
During work, heated by electrothermal piece, hot cathode launching electronics under high pressure effect, produce plasma
Body, and under airflow function caused by air supply unit, plasma jet is formed, sprayed from the nozzle.
Preferably, the electrothermal piece is the heating wire to take the shape of the letter U, and its material is nichrome or tungsten, line footpath 0.5mm~
5mm, in the shape of a spiral in high-temperature insulation sleeve pipe, temperature is provided not less than 1500 DEG C；Exported by adjusting the power supply
Voltage, electrothermal piece heating power is adjusted, can control high-temperature insulation sleeve surface temperature；
Preferably, 2~50cm of the high-temperature insulation casing length, cylinder 1~5cm of external diameter, using including quartz ampoule or corundum
High-temperature insulation material including pipe makes；
Preferably, the hot cathode use containing mass fraction for 2.2% La2O3Or Y2O3Or Ce2O3's
Thermionic emission materials including Rare-Earth Tungsten and rare earth molybdenum make, cylinder 1~5cm of internal diameter, cylinder 1~5mm of thickness, and tube length 2~
50cm。
Preferably, 5~20kW of the high voltage power supply rated operating power, output voltage are 0~20kV continuously adjustabes, output
For direct current；
Preferably, high pressure gas holder institute storing gas is to include Ar inert gases or CO2Reproducibility non-combustible inside
Gas, volume are 30L~300L, and operating pressure is 0.1MPa~0.7MPa.
Preferably, the gas circuit of the air supply unit is provided with air gauge, for monitoring high pressure gas holder air pressure；
Preferably, the insulating component offers multiple passages, the evenly distributed side of air supply unit tracheorrhaphy multichannel
Formula, communicated by each passage with the cavity that anode canister and hot cathode are formed.
Plasma producing apparatus provided by the utility model based on hot cathode, there is advantages below：
(1) electron density is high.Rare-Earth Tungsten thermionic emission materials have good electron emission characteristic, zero-field emission electric current
Density is higher, using such a material as negative electrode, can be produced under relatively low voltage and a certain operating temperature highdensity etc.
Gas ions.
(2) accessory substance such as ozone free.The thermoelectricity used compared to conventional low temperature plasma generating device, the utility model
During sub- emitting cathode work, it can outwardly launch single electronics not by not puncturing air to produce plasma, thus it is odorless
The accessory substances such as oxygen generate.
(3) simple in construction, flexibility ratio is high.It is the utility model advantage of lower cost, simple in construction, can portable mobile, flexibly
Degree is higher.
Brief description of the drawings
Fig. 1 is structural representation of the present utility model；
Fig. 2 is the utility model heating unit insulating component partial enlarged drawing.
Embodiment
In order that the purpose of this utility model, technical scheme and advantage are more clearly understood, below in conjunction with accompanying drawing and implementation
Example, the utility model is further elaborated.It should be appreciated that specific embodiment described herein is only explaining this
Utility model, it is not used to limit the utility model.It is in addition, involved in each embodiment of the utility model disclosed below
As long as and to technical characteristic each other do not form conflict can be mutually combined.With reference to embodiments with accompanying drawing to this reality
With new further explanation.
As shown in figure 1, the utility model is made up of heating unit, plasma generating unit and air supply unit：
The heating unit includes electrothermal piece 10, high-temperature insulation sleeve pipe 11, insulating component 12, binding post 13, electricity
Source 14；The electrothermal piece 10 takes the shape of the letter U in high-temperature insulation sleeve pipe 11, and both ends pass through two piece-root grafting lines of insulating component 12
Terminal 13 connects the output end of power supply 14, and the high-temperature insulation sleeve pipe 11 is one side closed, and opposite side is fixed with insulating component 12 to be connected
Connect；
By adjusting the output voltage of power supply 14, the heating power of electrothermal piece 10, the table of control high-temperature insulation sleeve pipe 11 are adjusted
Face temperature；
The plasma generating unit includes hot cathode 20, anode canister 21 and high voltage power supply 22；Anode canister
21 are coaxially located at outside electron emitting cathode 20, and the integral ground of anode canister 21, its one end is provided with nozzle 25, jet plasma；
The hot cathode 20 is located on insulating component 12, is coaxially disposed with the high-temperature insulation sleeve pipe 11, for sending out
Radio；The output of high voltage power supply 22 high-pressure side makees high-pressure stage and passes through high-voltage connection terminal 23 and the hot cathode
20 are connected, and high voltage power supply 22 exports the other end and is grounded as earth polar；
The hot cathode 20 is cylindrical in shape, and attaching is arranged on the outer surface of high-temperature insulation sleeve pipe 11；Thermionic emission
The one end of negative electrode 20 is fixed on 12 on insulating component；The anode canister 21 is cylindrical, and one end is solid with insulating component 12
Fixed connection；
The output voltage of high voltage power supply 22 can adjust, for changing the operating voltage of hot cathode 20, control etc.
Density occurs for gas ions；
The air supply unit includes high pressure gas holder 30, and it is passed through by tracheae 31 and opened up on the insulating component 12
Passage, the discharge space that the sub- emitting cathode 20 of thermoelectric and anode canister 21 are formed provides work atmosphere；
During work, heated by electrothermal piece 10, hot cathode 20 high pressure effect under launching electronics, produce etc. from
Daughter, and under airflow function caused by air supply unit, plasma jet is formed, sprayed from the nozzle.
The plasma producing apparatus, it is further characterized by：
The electrothermal piece 10 is nichrome wire or tungsten filament, line footpath 1mm, in the shape of a spiral installed in high-temperature insulation sleeve pipe
It is interior, temperature is provided as 800 DEG C；
The length 10cm of high-temperature insulation sleeve pipe 11, cylinder external diameter 1cm, is made using alundum tube；
The hot cathode 20, which uses, contains La2O3Rare-Earth Tungsten material make, electrode is cylindrical in shape, cylinder internal diameter
1.1cm, cylinder thickness 2mm, tube length 10cm；
The rated power 20kW of high voltage power supply 22, output voltage are 0~20kV continuously adjustabes, and output form is direct current shape
Formula；
Described 30 storing gas of high pressure gas holder are CO2Gas, volume 100L, operating pressure are 0.1MPa~0.7MPa.
The utility model provides a kind of plasma producing apparatus based on hot cathode, has advantages below：
(1) electron density is high.Rare-Earth Tungsten thermionic emission materials have good electron emission characteristic, zero-field emission electric current
Density is higher, using such a material as negative electrode, can be produced under relatively low voltage and a certain operating temperature highdensity etc.
Gas ions.
(2) accessory substance such as ozone free.The thermoelectricity used compared to conventional low temperature plasma generating device, the utility model
During sub- emitting cathode work, it can outwardly launch single electronics not by not puncturing air to produce plasma, thus it is odorless
The accessory substances such as oxygen generate.
(3) simple in construction, flexibility ratio is high.It is the utility model advantage of lower cost, simple in construction, can portable mobile, flexibly
Degree is higher.
As it will be easily appreciated by one skilled in the art that preferred embodiment of the present utility model is the foregoing is only, not
To limit the utility model, any modification of all made within spirit of the present utility model and principle, equivalent substitution and change
Enter, should be included within the scope of protection of the utility model.
Claims (7)
1. a kind of plasma producing apparatus based on hot cathode, including heating unit, plasma generating unit
Formed with air supply unit, it is characterised in that：
The heating unit includes electrothermal piece (10), high-temperature insulation sleeve pipe (11), insulating component (12), binding post (13)
With power supply (14)；The electrothermal piece (10) is arranged in high-temperature insulation sleeve pipe (11), and both ends pass through insulating component (12)
Two piece-root grafting line terminals (13) connect power supply (14) output end；The high-temperature insulation sleeve pipe (11) is tubular structure, and its is one side closed, separately
Side is fixedly connected with insulating component (12), and electrothermal piece (10) is included, and forms a heated sealed space；Pass through
The power supply (14) output voltage is adjusted, electrothermal piece (10) heating power can be changed, controls high-temperature insulation sleeve pipe (11) surface temperature
Degree；
The plasma generating unit includes hot cathode (20), anode canister (21), high voltage power supply (22) and high pressure
Binding post (23)；The anode canister (21) is the cylinder-like structure of integral ground, is coaxially located at electron emitting cathode (20) outside
Portion；Anode canister (21) one end offers nozzle (25), and for jet plasma, the other end is fixed on insulating component (12)
On；The hot cathode (20) is tubular structure, and attaching is arranged on high-temperature insulation sleeve pipe (11) outer surface, to receive it
The heat sent；Hot cathode (20) open at one end is fixed on the insulating component (12)；The thermoelectron
Emitting cathode (20) is coaxially disposed with the high-temperature insulation sleeve pipe (11), for launching electronics；High voltage power supply (22) output
High-pressure side is made high-pressure stage and is connected by high-voltage connection terminal (23) with the hot cathode (20), and high voltage power supply (22) is defeated
Go out the other end to be grounded as earth polar；
High voltage power supply (22) output voltage can adjust, for changing hot cathode (20) operating voltage, control etc.
Density occurs for gas ions；
The air supply unit includes high pressure gas holder (30), and it passes through the insulating component (12) and anode by tracheae (31)
The cavity that cylinder (21) and hot cathode (20) are formed communicates, for the sub- emitting cathode of thermoelectric (20) and anode canister (21)
The discharge space of composition provides work atmosphere；
During work, by electrothermal piece (10) heat, hot cathode (20) high pressure effect under launching electronics, produce etc. from
Daughter, and under airflow function caused by air supply unit, plasma jet is formed, sprayed from the nozzle.
2. plasma producing apparatus as claimed in claim 1, it is characterised in that：
The electrothermal piece (10) is the heating wire that takes the shape of the letter U, and its material is nichrome or tungsten, line footpath 0.5mm~5mm, in spiral shell
Revolve shape to be arranged in high-temperature insulation sleeve pipe, provide temperature not less than 1500 DEG C.
3. plasma producing apparatus as claimed in claim 1, it is characterised in that：
High-temperature insulation sleeve pipe (11) 2~50cm of length, cylinder 1~5cm of external diameter, using including quartz ampoule or alundum tube
High-temperature insulation material makes.
4. plasma producing apparatus as claimed in claim 1, it is characterised in that：
High voltage power supply (22) 5~20kW of rated operating power, output voltage are 0~20kV continuously adjustabes, are exported as direct current
Electricity.
5. plasma producing apparatus as claimed in claim 1, it is characterised in that：
High pressure gas holder (30) institute storing gas is to include Ar inert gases or CO2Reproducibility non-combustible gas inside, volume
For 30L~300L, operating pressure is 0.1MPa~0.7Mpa.
6. plasma producing apparatus as claimed in claim 1, it is characterised in that：
The gas circuit of the air supply unit is provided with air gauge, for monitoring high pressure gas holder (30) air pressure.
7. plasma producing apparatus as claimed in claim 1, it is characterised in that：
The insulating component offers multiple passages, and air supply unit tracheae passes through each passage and anode canister (21) and heat
The cavity that electron emitting cathode (20) is formed communicates.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720715815.7U CN207083268U (en) | 2017-06-20 | 2017-06-20 | A kind of plasma producing apparatus based on hot cathode |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720715815.7U CN207083268U (en) | 2017-06-20 | 2017-06-20 | A kind of plasma producing apparatus based on hot cathode |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207083268U true CN207083268U (en) | 2018-03-09 |
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ID=61426208
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| Application Number | Title | Priority Date | Filing Date |
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| CN201720715815.7U Active CN207083268U (en) | 2017-06-20 | 2017-06-20 | A kind of plasma producing apparatus based on hot cathode |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107182165A (en) * | 2017-06-20 | 2017-09-19 | 华中科技大学 | A kind of plasma emission device based on hot cathode |
| WO2020155827A1 (en) * | 2019-01-28 | 2020-08-06 | 北京工业大学 | Method for enhancing performance of ecr plasma source |
| CN107182165B (en) * | 2017-06-20 | 2024-05-14 | 华中科技大学 | Plasma emission device based on thermionic emission cathode |
-
2017
- 2017-06-20 CN CN201720715815.7U patent/CN207083268U/en active Active
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107182165A (en) * | 2017-06-20 | 2017-09-19 | 华中科技大学 | A kind of plasma emission device based on hot cathode |
| CN107182165B (en) * | 2017-06-20 | 2024-05-14 | 华中科技大学 | Plasma emission device based on thermionic emission cathode |
| WO2020155827A1 (en) * | 2019-01-28 | 2020-08-06 | 北京工业大学 | Method for enhancing performance of ecr plasma source |
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