CN107910236A - A kind of electron emitting device based on hot cathode - Google Patents

A kind of electron emitting device based on hot cathode Download PDF

Info

Publication number
CN107910236A
CN107910236A CN201711340737.8A CN201711340737A CN107910236A CN 107910236 A CN107910236 A CN 107910236A CN 201711340737 A CN201711340737 A CN 201711340737A CN 107910236 A CN107910236 A CN 107910236A
Authority
CN
China
Prior art keywords
heating
metab
electronics
electron
insulation sleeve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CN201711340737.8A
Other languages
Chinese (zh)
Other versions
CN107910236B (en
Inventor
张明
刘志
李传
王鹏宇
钱成锦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Huazhong University of Science and Technology
Original Assignee
Huazhong University of Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Huazhong University of Science and Technology filed Critical Huazhong University of Science and Technology
Priority to CN201711340737.8A priority Critical patent/CN107910236B/en
Publication of CN107910236A publication Critical patent/CN107910236A/en
Application granted granted Critical
Publication of CN107910236B publication Critical patent/CN107910236B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/20Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02Main electrodes
    • H01J1/13Solid thermionic cathodes
    • H01J1/20Cathodes heated indirectly by an electric current; Cathodes heated by electron or ion bombardment
    • H01J1/22Heaters

Landscapes

  • Electron Sources, Ion Sources (AREA)

Abstract

The present invention provides a kind of electron generating based on hot cathode, including electronics generating unit and heating unit.Heating unit includes heating component, insulation sleeve and insulating component, heating component includes multiple heating wires, and multiple through holes are provided with metab, metab and insulation sleeve nested arrangement from inside to outside, gap is equipped between metab and insulation sleeve, heating wire is located in gap, and heating wire one end is connected with metab, and the other end forms an output terminal of heating component through through hole;Insulating component sealed airspace, forms heating space;Electronics generating unit includes hot cathode and thermionic emission anode, and the heat that hot cathode is used to receive insulation sleeve produces electronics, launches under the electric field action that electronics is formed between hot cathode and thermionic emission anode.In the case where keeping internal high vacuum condition, which can provide high density electronics to ambient atmosphere environment.

Description

A kind of electron emitting device based on hot cathode
Technical field
The invention belongs to a kind of electron generating, and in particular to a kind of electronics based on hot cathode fills Put.
Background technology
At present, existing electron generating is based primarily upon electron beam irradiation, glow discharge, corona discharge, dielectric impedance are put Electricity, radio frequency discharge, slide several principles such as arc discharge and jet stream electric discharge.Wherein electron beam irradiation device structure is complicated, cost Height causes device volume huge, X-ray is seriously polluted, it is necessary to X-ray-preventing, it is necessary to complicated high voltage power supply and acceleration tube apparatus Safety features;By hypobaric limitation, commercial Application is difficult to continuous production and with high costs for glow discharge;Corona is put Electricity and dielectric barrier discharge device are more demanding to voltage class, and in electron generation process, there is the ozone and nitrogen of higher concentration The accessory substances such as oxide generate, and corona discharge assembly can produce the positive charge with electronics equivalent in addition, cause charge species not single One;Radio frequency discharge device equally has the problems such as accessory substance generation in discharge process, and slide electric arc and jet stream electric discharge all lean on Less air produces electronics in breakdown electrode, and sphere of action is smaller, and charge species are not single.
The content of the invention
In view of the above-mentioned problems, the present invention proposes a kind of electron generating based on hot cathode, for producing High density electron stream, overcomes existing since the mode of the electronics of generation is more complicated, causes electron generating complicated Technical problem.
A kind of electron generating based on hot cathode proposed by the present invention, including:Heating unit and electronics Generating unit, heating unit are used to produce heat electronics generating unit, and electronics generating unit is used to produce simultaneously by heating Launching electronics;
Heating unit includes metab, insulation sleeve, heating component and insulating component, and heating component includes multiple Wire is heated, and multiple through holes are provided with metab, wherein, metab and insulation sleeve nested arrangement from inside to outside, Gap is equipped between metab and insulation sleeve, heating wire is located in gap, and heating wire one end connects with metab Connect, the other end forms an output terminal of heating component through through hole;
Insulating component with metab openend contact with the openend of insulation sleeve, for sealing metal base The gap between insulation sleeve, forms heating space;
The first conducting wire and the second conducting wire are equipped with insulating component, first conducting wire one end is connected with metab, another The first power end as heating unit is held, one end of the second conducting wire is connected with all output terminals of heating component, and the other end is made For the second source end of heating unit;
Heating component produces bombardment electronics after powered up, and insulation sleeve generates heat under the action of electronics is bombarded.
Preferably, electron emission unit includes:Hot cathode and thermionic emission anode, wherein, thermoelectron hair Cathode and thermionic emission anode nested arrangement from inside to outside are penetrated, is equipped between hot cathode and thermionic emission anode Gap, hot cathode are attached to the outer surface of insulation sleeve, openend of the insulating component with hot cathode It is empty between hot cathode and thermionic emission anode for sealing with the contact of the openend of thermionic emission anode Gap, forms emission space;
Privates is equipped with insulating component, one end of privates is connected with hot cathode, the other end As the first power end of electron emission unit, second source end of the thermionic emission anode as electron emission unit;
Hot cathode is used to receive the heat of insulation sleeve and produces electronics, and electronics is in hot cathode and heat Under the action of the electric field acceleration formed between electron emission anode, penetrating electrons transmitting anode film, forms transmitting.
Preferably, thermionic emission anode is silicon nitride film.
Preferably, realize that control electronics is close by varying the voltage between thermionic emission anode and hot cathode Degree.
Preferably, metab is provided with a through hole positioned at top and multiple through holes being centrosymmetric.
Preferably, metab, insulation sleeve and hot cathode are spherical in semicircle.
Preferably, it is the tungsten filament in incense coil shape to heat wire.
Preferably, incense coil shape tungsten filament line footpath is in 0.5mm~5mm.Tungsten filament is not easy to blow in the range of this, and will not be because of tungsten filament Surface curvature radius is big and transmitting is become difficult, and tungsten filament is installed in high-temperature insulation set, provides temperature not less than 800 DEG C. By adjusting low-tension supply (14) output voltage, tungsten filament heating power, control high-temperature insulation set surface temperature are adjusted.
In general, by the contemplated above technical scheme of the present invention compared with prior art, it can obtain down and show Beneficial effect:
1st, for the present invention by the way of heating hot cathode produces electronics, working voltage is low, simple in structure, is not required to High voltage power supply and protection equipment that will be complicated, and device flexibility ratio is high.
2nd, ozone free and X-ray pollution.Compared to conventional electron generating, the heating thermoelectron hair that the present invention uses Penetrate cathode and produce the mode of electronics when working, obstructed too high voltages breakdown air just can outwardly launch single electronics, therefore Ozone free and X-ray pollution.
3rd, the present invention produces bombardment electronics by heating metal assembly in metal assembly, by bombardment electronic action and absolutely Edge is put on, and heats insulation sleeve, using the teaching of the invention it is possible to provide the heat of higher, and heated evenly by the way of electron bombardment, tungsten filament makes Use longer life expectancy.
4th, electrode provided by the invention is in hemispherical and is bonded with insulation sleeve, heat can be preferably absorbed from insulation sleeve, Be conducive to produce electronics.
5th, electron emission voltage can be reduced as thermionic emission anode using silicon nitride film.Silicon nitride film machine Tool intensity is high, electronics ejection efficiency is much better than the conventional of titanium and aluminium oxide etc and draws material, therefore can easily be formed low The electronics of the big density of energy.
6th, electron density is high.Rare-Earth Tungsten thermionic emission materials have good electron emission characteristic, zero-field emission electronics Density is higher, using such a material as cathode, can produce highdensity electricity under relatively low voltage and a certain operating temperature Son.
7th, device uses hemispheric structure.The hemispheric structure of high degree of symmetry makes electron emission evenly be conducive to Device uniformly bears load, increases structural strength, and can reduce processing technology difficulty, reduces processing cost.
Brief description of the drawings
Fig. 1 is the structure diagram of the electron generating provided by the invention based on hot cathode;
Fig. 2 is the bottom view of the electron generating main body provided by the invention based on hot cathode.
Embodiment
In order to make the purpose , technical scheme and advantage of the present invention be clearer, with reference to the accompanying drawings and embodiments, it is right The present invention is further elaborated.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention, and It is not used in the restriction present invention.As long as in addition, technical characteristic involved in each embodiment of invention described below Not forming conflict each other can be mutually combined.
The present invention proposes a kind of electron generating based on hot cathode, for producing high density electron stream, Overcome it is existing in the prior art it is complicated, efficiency is low, the problem of being polluted there are ozonation by-product and X-ray.
Fig. 1 is the structure diagram of the electron generating provided by the invention based on hot cathode, and Fig. 2 is this The bottom view of the electron generating main body based on hot cathode provided is provided.The electron generating includes heating Unit and electronics generating unit, heating unit are used to produce heat electronics generating unit, and electronics generating unit is used to pass through Heating is generated and transmitted by electronics.
Heating unit includes heating component, insulation sleeve 11, wire connection terminal 12, insulating component 13,14 and of low-tension supply Metab 15.Heating component includes multiple heating wires, and heating wire can be incense coil shape tungsten filament 10.Wherein, insulate Set 11 and metab 15 are in hemispherical, and insulation sleeve is made by quartz ampoule or alundum tube, can bear high temperature, metab It can bear high temperature.In embodiment provided by the invention, high-temperature insulation covers 11 radiuses for the ㎝ of 25 ㎝~35, the ㎝ of 1 ㎝ of set thickness~2.
Insulation sleeve 11 is nested with metab 15 to be placed, and is set between high-temperature insulation set 11 and refractory metal base 15 Gap, insulating assembly 13 and the openend of high-temperature insulation set 11 and the opening end in contact of refractory metal base 15 are equipped with, is used for Gap is provided between sealing high-temperature insulation set 11 and refractory metal base 15, forms heating gap.Refractory metal base 15 tops offer a hole, 6 circular holes are angularly opened up on hemisphere face, incense coil shape tungsten filament is in heating gap, and its one end An output terminal of heating component is formed through refractory metal base 15 via a hole, its other end is fixed on high temperature resistant gold Belong on base 15, refractory metal base 15 is used to form heating gap, fixes incense coil shape tungsten filament and forms heater circuit A part.
Two output terminals of low-tension supply 14 are connected with two wire connection terminals 12 on insulating assembly 13 respectively, resistance to height The openend of warm metab 15 is connected by the first conducting wire being arranged in insulating assembly 13 with wire connection terminal, heating component All output terminals are connected with the second conducting wire being arranged in insulating assembly 13, and by the second conducting wire with another wire connection terminal Connection.
By adjusting 14 output voltage of power supply, 10 heating power of incense coil shape tungsten filament can be changed, control high-temperature insulation covers 11 tables Face temperature.
Electronics generating unit includes hot cathode 20, silicon nitride film 21, high-voltage connection terminal 22, ground terminal 23rd, support base 24 and high voltage power supply 25;Wherein, hot cathode 20 is in hemispherical that hot cathode 20 uses Rare earth oxide, Rare-Earth Tungsten and rare earth-Mo are made, and the mass percent of rare earth oxide is 2.2%, rare-earth oxidation Thing can be La2O3Or Y2O3Or Ce2O3.26 ㎝ of hemisphere internal diameter~40cm of hot cathode, 1~5mm of thickness.Silicon nitride Film 21 be used as thermionic emission anode, its thickness be 300nm, by single chip be 0.7mm × 0.7mm or 0.7mm × The silicon nitride film of 40mm is paved with just a hemisphere surface in an array manner.
Hot cathode 20 is hemispherical configuration, attaches and is installed on 11 outer surfaces of high-temperature insulation set, to receive its hair The heat gone out;Silicon nitride film 21 is the hemispherical configuration of integral ground, is located at outside hot cathode 20;Silicon nitride film 21 are fixed on insulating component 13;20 open at one end of hot cathode is fixed on insulating component 13;Thermoelectricity Sub- emitting cathode 20 covers 11 homocentric settings with high-temperature insulation, for launching electronics;Hot cathode 20, silicon nitride film 21 with And insulating component 13 forms emission space.
25 5~20kW of rated operating power of high voltage power supply, output voltage is continuously adjustable for 0~20kV, exports as direct current. 25 output voltage of high voltage power supply adjusts, and for changing 20 operating voltage of electron emitting cathode, density occurs for control electronics.
During work, bombardment electronics, the very big high-temperature insulation of the bombardment heating coefficient of heat conduction are produced by incense coil shape tungsten filament 10 Set 11, is bonded, it can be evenly heated electron emitting cathode 20, make electron emission by covering high-temperature insulation with electron emitting cathode The launching electronics under high pressure effect of cathode 20, and the electric field acceleration formed between electron emitting cathode 20 and silicon nitride film 21 Under effect, penetrate silicon nitride film 21 and go out, incide in surrounding environment, form electron emission.
Incense coil shape tungsten filament line footpath is in 0.5mm~5mm.Tungsten filament is not easy to blow in the range of this, and will not be because of tungsten filament Radius of curvature is big and transmitting is become difficult, and tungsten filament is installed in high-temperature insulation set, provides temperature not less than 800 DEG C.
As it will be easily appreciated by one skilled in the art that the foregoing is merely illustrative of the preferred embodiments of the present invention, not to The limitation present invention, all any modification, equivalent and improvement made within the spirit and principles of the invention etc., should all include Within protection scope of the present invention.

Claims (8)

1. a kind of electron generating based on hot cathode, it is characterised in that occur including heating unit and electronics Unit, heating unit are used to produce heat electronics generating unit, and electronics generating unit is used to be generated and transmitted by by heating Electronics;
Heating unit includes metab (15), insulation sleeve (11), heating component and insulating component (13), heating component Including multiple heating wires (10), and multiple through holes are provided with metab, wherein, metab (15) and insulation sleeve (11) nested arrangement from inside to outside, is equipped with gap between metab (15) and insulation sleeve (11), heating wire is located at gap Interior, heating wire one end is connected with metab, and the other end forms an output terminal of heating component through through hole;
The contact of the openend of insulating component (13) same to metab (15) and the openend of insulation sleeve (11), for sealing Gap between metab (15) and insulation sleeve (11), forms heating space;
The first conducting wire and the second conducting wire are equipped with insulating component (13), first conducting wire one end is connected with metab, another The first power end as heating unit is held, one end of the second conducting wire is connected with all output terminals of heating component, and the other end is made For the second source end of heating unit;
Heating component produces bombardment electronics after powered up, and insulation sleeve generates heat under the action of electronics is bombarded.
2. electron generating as claimed in claim 1, it is characterised in that electron emission unit includes:Thermionic emission is cloudy Pole and thermionic emission anode, wherein, hot cathode and thermionic emission anode nested arrangement from inside to outside, thermoelectron Gap is equipped between emitting cathode and thermionic emission anode, hot cathode is attached to the outer surface of insulation sleeve, insulation Insulating assembly (13) with hot cathode openend contact with the openend of thermionic emission anode, for sealing heat Gap between electron emitting cathode and thermionic emission anode, forms emission space;
Privates is equipped with insulating component (13), one end of privates is connected with hot cathode, the other end As the first power end of electron emission unit, second source end of the thermionic emission anode as electron emission unit;
The heat that hot cathode is used to receive insulation sleeve produces electronics, and electronics is sent out in hot cathode and thermoelectron Under the action of the electric field acceleration formed between shining sun pole, penetrating electrons transmitting anode film, forms transmitting.
3. electron generating as claimed in claim 2, it is characterised in that thermionic emission anode is silicon nitride film.
4. electron generating as claimed in claim 2 or claim 3, it is characterised in that by varying thermionic emission anode and heat Voltage between electron emitting cathode realizes control electron density.
5. such as Claims 1-4 any one of them electron generating, it is characterised in that metab is provided with one and is located at The through hole on top and multiple through holes being centrosymmetric.
6. such as claim 2 to 5 any one of them electron generating, it is characterised in that metab, insulation sleeve and heat Electron emitting cathode is spherical in semicircle.
7. such as claim 1 to 6 any one of them electron generating, it is characterised in that the heating wire is incense coil The tungsten filament of shape.
8. electron generating as claimed in claim 7, it is characterised in that the incense coil shape tungsten filament line footpath 0.5mm~ 5mm。
CN201711340737.8A 2017-12-14 2017-12-14 Electron emission device based on thermionic emission cathode Active CN107910236B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201711340737.8A CN107910236B (en) 2017-12-14 2017-12-14 Electron emission device based on thermionic emission cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201711340737.8A CN107910236B (en) 2017-12-14 2017-12-14 Electron emission device based on thermionic emission cathode

Publications (2)

Publication Number Publication Date
CN107910236A true CN107910236A (en) 2018-04-13
CN107910236B CN107910236B (en) 2023-07-04

Family

ID=61870036

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201711340737.8A Active CN107910236B (en) 2017-12-14 2017-12-14 Electron emission device based on thermionic emission cathode

Country Status (1)

Country Link
CN (1) CN107910236B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110995060A (en) * 2019-12-14 2020-04-10 杭州电子科技大学 Method and device for multiplexing thermal power generation and thermal energy storage based on electron emission
CN113838724A (en) * 2021-09-18 2021-12-24 山东大学 Hot cathode assembly, vacuum virtual cathode automatic measuring device and method

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010030899A1 (en) * 2008-09-12 2010-03-18 Vu1 Corporation System and apparatus for cathodoluminescent lighting
CN103903941A (en) * 2012-12-31 2014-07-02 同方威视技术股份有限公司 Cathode-control multi-cathode distributed X-ray device and CT equipment with same
CN107182165A (en) * 2017-06-20 2017-09-19 华中科技大学 A kind of plasma emission device based on hot cathode
CN207676874U (en) * 2017-12-14 2018-07-31 华中科技大学 A kind of electron emitting device based on hot cathode

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010030899A1 (en) * 2008-09-12 2010-03-18 Vu1 Corporation System and apparatus for cathodoluminescent lighting
CN103903941A (en) * 2012-12-31 2014-07-02 同方威视技术股份有限公司 Cathode-control multi-cathode distributed X-ray device and CT equipment with same
CN107182165A (en) * 2017-06-20 2017-09-19 华中科技大学 A kind of plasma emission device based on hot cathode
CN207676874U (en) * 2017-12-14 2018-07-31 华中科技大学 A kind of electron emitting device based on hot cathode

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110995060A (en) * 2019-12-14 2020-04-10 杭州电子科技大学 Method and device for multiplexing thermal power generation and thermal energy storage based on electron emission
CN113838724A (en) * 2021-09-18 2021-12-24 山东大学 Hot cathode assembly, vacuum virtual cathode automatic measuring device and method
CN113838724B (en) * 2021-09-18 2022-06-21 山东大学 Hot cathode assembly, vacuum virtual cathode automatic measuring device and method

Also Published As

Publication number Publication date
CN107910236B (en) 2023-07-04

Similar Documents

Publication Publication Date Title
CN110731128B (en) Energy efficient plasma process for generating free charge, ozone and light
US9679736B2 (en) Encapsulated structure for X-ray generator with cold cathode and method of vacuuming the same
CN107910236A (en) A kind of electron emitting device based on hot cathode
CN109121278A (en) A kind of plasma-activated oil treatment provisions
WO2012063379A1 (en) Field emission apparatus and hand-held nondestructive inspection apparatus
US2759112A (en) Electron tube thermoelectric generator
CN207676874U (en) A kind of electron emitting device based on hot cathode
CN207083268U (en) A kind of plasma producing apparatus based on hot cathode
US2201720A (en) Thermionic cathode structure
KR100725763B1 (en) Electric field ultraviolet rays lamp
CN107182165A (en) A kind of plasma emission device based on hot cathode
CN105097413B (en) Novel ion source and ionization method
US1619318A (en) Electrostatic detector and amplifier
CN106229246B (en) Cold cathode electron gun of vacuum electron magnetron
CN210129480U (en) Multistation filament forming structure
US1945749A (en) Vapor electric device
US1032914A (en) Vapor electric apparatus.
US1917848A (en) Ultra-violet lamp
US3452231A (en) Refractory oxide incandescent lamp
JP2013235656A (en) Field emission device and portable nondestructive inspection device
JP4114770B2 (en) Vacuum processing equipment for oxygen ion generation
US1459412A (en) Thermionic translating device
CN107221595B (en) Vacuum Heat fulgurite
CN107195519B (en) Extraction window of high-energy charged particle beam from vacuum to atmosphere
CN110379690A (en) Using the cold-cathode gun of RF excited field emission electron beam

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant