CN114302549B - Radio frequency ion source system and radio frequency ion source control method - Google Patents
Radio frequency ion source system and radio frequency ion source control method Download PDFInfo
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- CN114302549B CN114302549B CN202111670990.6A CN202111670990A CN114302549B CN 114302549 B CN114302549 B CN 114302549B CN 202111670990 A CN202111670990 A CN 202111670990A CN 114302549 B CN114302549 B CN 114302549B
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- 230000008859 change Effects 0.000 abstract description 4
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- 230000000694 effects Effects 0.000 description 9
- 238000006386 neutralization reaction Methods 0.000 description 9
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Abstract
The application relates to a radio frequency ion source system and a radio frequency ion source control method, wherein the radio frequency ion source system comprises: the system comprises a radio frequency ion source and at least one radio frequency neutralizer matched with the radio frequency ion source; the radio frequency controller of the radio frequency ion source is connected with the cathode controller of the radio frequency neutralizer through a communication line; the radio frequency controller is used for controlling the radio frequency ion source to start and maintain operation and sending control parameters of the radio frequency ion source to the cathode controller; the cathode controller is used for controlling the radio frequency neutralizer to start and maintain operation according to the control parameters; according to the technical scheme, the radio frequency neutralizer can be started along with the radio frequency ion source and changed along with the change of the load through the radio frequency controller and the cathode controller, independent setting is not needed, the whole process is automatically started and online control is carried out on the radio frequency ion source, the operation complexity of the starting and adjusting process is reduced, and the control efficiency of the radio frequency neutralizer is improved.
Description
Technical Field
The application relates to the technical field of ion source equipment, in particular to a radio frequency ion source system and a radio frequency ion source control method.
Background
The radio frequency ion source is an ion source which generates plasma through radio frequency ionization and accelerates positive ions through a grid electric field to generate ion beams, and a cathode or a neutralizer is needed to provide electrons for neutralization in the use process of the ion source; the radio frequency neutralizer ionizes gas in a radio frequency mode, and then separates electrons through an electric field, so that the radio frequency neutralizer can provide neutralizing electrons for an ion source and has a stable use effect in practical application.
When the conventional radio frequency ion source and the radio frequency neutralizer are matched for use, after the radio frequency ion source is started, the radio frequency neutralizer is started to provide electrons for neutralization, and in the process of starting the radio frequency neutralizer, an operator needs to set control parameters of the radio frequency neutralizer and then adjust the control parameters according to the starting condition of the radio frequency ion source, and in the process of using the radio frequency ion source, when the radio frequency ion source is adjusted, the radio frequency neutralizer matched for use also performs corresponding control so that an output ion beam is properly neutralized.
In actual use, because the radio frequency neutralizer needs to be set by an operator every time when being started, the operation is complex, the efficiency is low, and the radio frequency neutralizer is difficult to adjust to proper parameters.
Disclosure of Invention
Accordingly, it is desirable to provide a rf ion source system and a rf ion source control method for improving the control efficiency of the rf neutralizer.
A radio frequency ion source system comprising: the system comprises a radio frequency ion source and at least one radio frequency neutralizer matched with the radio frequency ion source; the radio frequency controller of the radio frequency ion source is connected with the cathode controller of the radio frequency neutralizer through a communication line;
the radio frequency controller is used for controlling the radio frequency ion source to start and maintain operation and sending control parameters of the radio frequency ion source to the cathode controller;
and the cathode controller is used for controlling the radio frequency neutralizer to start and maintain operation according to the control parameters.
In one embodiment, the number of the radio frequency neutralizers is a plurality, and each radio frequency neutralizer is respectively arranged at a set position of the radio frequency ion source;
and the cathode controllers corresponding to the radio frequency neutralizers respectively control the radio frequency neutralizers to output corresponding electron numbers according to the current beam current required by the detected radio frequency ion sources in all directions.
In one embodiment, each of the radio frequency neutralizers is connected to a common cathode controller.
In one embodiment, the radio frequency neutralizer comprises: an ionization chamber, a radio frequency coil and an insulating gas needle;
the bottom of the ionization chamber is connected with an insulating gas needle, and an air outlet pipe of the insulating gas needle is connected with a gas input hole of the ionization chamber;
the first metal piece of the insulating air needle is connected with an emitter power supply, the second metal piece is grounded, and the first metal piece is used as an emitter of the radio frequency neutralizer.
In one embodiment, a spiral channel is built in the side wall of the ionization chamber;
the radio frequency coil is of a spiral shape design, and the structure of the radio frequency coil is consistent with that of the spiral channel;
the radio frequency coil is installed into the spiral channel from one end of the ionization chamber in a spiral mode; and two ends of the radio frequency coil are connected with radio frequency wires.
In one embodiment, the radio frequency neutralizer comprises: an ionization chamber, a radio frequency coil, and an insulating collar;
the radio frequency coil is of a spiral shape design and is sleeved outside the ionization chamber;
the radio frequency coil is welded outside the ionization chamber in a brazing mode, and the insulating sleeve ring is welded outside the radio frequency coil in a brazing mode; the outer side wall of the ionization chamber after welding, the radio frequency coil and the inner side wall of the insulation sleeve ring are fixedly connected.
In one embodiment, the rf ion source system further comprises: the system comprises a first direct current source module, a first radio frequency power supply and a first matching network, and a second direct current source module, a second radio frequency power supply and a second matching network;
the first radio frequency power supply is connected with a radio frequency coil of the radio frequency ion source through the first matching network; the first direct current source module and the first radio frequency power supply are respectively connected with the cathode controller;
the second radio frequency power supply is connected with a radio frequency coil of the radio frequency neutralizer through the second matching network; the second direct current source module and the second radio frequency power supply are respectively connected with the radio frequency controller;
the radio frequency controller, the first direct current source module, the first radio frequency power supply and the first matching network are arranged in a first 4U chassis;
the cathode controller, the second direct current source module, the second radio frequency power supply and the second matching network are arranged in a second 4U chassis.
In one embodiment, the first 4U chassis is provided with: the first power supply interface, the first radio frequency coil interface, the first direct current power control interface, the first communication interface and the first gas control interface;
the first power supply interface is connected with an external power supply, a first radio frequency power supply, a first matching network and a first direct current source module in the case;
the first radio frequency coil interface is connected with a radio frequency coil of the radio frequency ion source and a first matching network in the case;
the first direct current power supply control interface is connected with a grid of the radio frequency ion source and a second direct current power supply module in the case;
the first communication interface is connected with the cathode controller and a radio frequency controller in the case;
the first gas control interface is connected with a flowmeter on a gas supply pipeline of the radio frequency ion source and a radio frequency controller in the case.
In one embodiment, the second 4U chassis is provided with: the device comprises a first power supply interface, at least one first radio frequency coil interface, at least one first direct current power supply control interface, a first communication interface and at least one first gas control interface;
the second power supply interface is connected with an external power supply, a second radio frequency power supply, a second matching network and a second direct current source module in the case;
the second radio frequency coil interface is connected with a radio frequency coil of the radio frequency neutralizer and a second matching network in the case;
the second direct current power supply control interface is connected with an emitter electrode and a maintaining electrode of the radio frequency neutralizer and a second direct current source module in the case;
the second communication interface is connected with the radio frequency controller and a cathode controller in the case;
the second gas control interface is connected with a flowmeter on a gas supply pipeline of the radio frequency neutralizer and a cathode controller in the case.
The radio frequency ion source control method is applied to the radio frequency ion source system and is characterized by comprising the following steps:
the radio frequency controller acquires radio frequency control parameters of the radio frequency ion source;
the radio frequency controller sends the real-time control parameters to the cathode controller;
the cathode controller calculates cathode control parameters of the corresponding radio frequency neutralizer according to the radio frequency control parameters;
and the cathode controller controls the corresponding radio frequency neutralizer according to the cathode control parameters.
In one embodiment, the radio frequency control parameter includes a radio frequency source screen current, and the number of the radio frequency neutralizers is a plurality;
the cathode controller calculates cathode control parameters of a corresponding radio frequency neutralizer according to the radio frequency control parameters, and the cathode controller comprises:
the cathode controller calculates emitter currents distributed by all the radio frequency neutralizers according to the radio frequency source screen electrode current of the radio frequency ion source; the sum value of the emitter currents distributed by the radio frequency neutralizers is larger than or equal to the radio frequency source screen electrode current of the radio frequency ion source;
the cathode controller controls the corresponding radio frequency neutralizer according to the cathode control parameters, and the radio frequency neutralizer comprises:
and the cathode controller respectively controls the second direct current source module to output matched emitter current to the radio frequency neutralizer according to the distributed emitter current, so that the radio frequency neutralizer operates along with the radio frequency ion source.
In one embodiment, the radio frequency ion source control method further includes a radio frequency neutralizer start-up procedure:
setting a starting parameter of a radio frequency neutralizer through the cathode controller;
the cathode controller receives a one-key start control instruction sent by the radio frequency controller and introduces working gas;
the cathode controller starts a second radio frequency power supply and outputs radio frequency power to a radio frequency coil of the radio frequency neutralizer;
the cathode controller starts a first direct current power supply to provide voltage for a maintaining electrode and an emitter of the radio frequency neutralizer until the electron beam current is pulled out;
the cathode controller controls the first direct current power supply to output voltage with set parameters to the maintaining pole and the emitting pole of the radio frequency neutralizer.
In one embodiment, the setting, by the cathode controller, a start-up parameter of a radio frequency neutralizer includes:
setting a starting parameter of a radio frequency neutralizer on an operation page of a neutralizer controller; wherein the starting parameters include emitter voltage and current, sustain voltage and any combination of gas flow parameters;
the cathode controller receives a one-key start control instruction sent by the radio frequency controller and introduces working gas, and the cathode controller comprises:
the radio frequency controller responds to one-key starting operation of a user and outputs a one-key starting control instruction to the cathode controller;
the cathode controller controls the switch and flow of the gas flowmeter on the gas supply pipeline of the radio frequency neutralizer, so that working gas enters the insulating gas needle for diversion and then enters the ionization chamber.
According to the technical scheme, the radio frequency neutralizer can be started along with the radio frequency ion source and changed along with the change of the load through the radio frequency controller and the cathode controller, independent setting is not needed, the whole process is automatically started and online control is carried out on the radio frequency ion source, the operation complexity of the starting and adjusting process is reduced, and the control efficiency of the radio frequency neutralizer is improved.
Furthermore, a plurality of radio frequency neutralizers are arranged around the radio frequency ion source to work simultaneously, so that the cathode can be ensured to provide more uniform neutralization electrons for the radio frequency ion source, the number of electrons required by each direction of the radio frequency ion source is detected in real time during work, the number of electrons provided by each radio frequency neutralizer is automatically regulated, the ion neutralization effect is greatly improved, and the vacuum coating effect is improved.
Furthermore, the radio frequency neutralizer of the radio frequency ion source system and the electric equipment of the radio frequency ion source are respectively integrated in a standard 4U case, so that the high cost caused by the length of the wire and the requirement of the wire can be solved, and a large amount of installation space can be reduced.
Drawings
FIG. 1 is a schematic diagram of a radio frequency ion source system of one embodiment;
FIG. 2 is a schematic diagram of an exemplary RF ion source matching multiple RF neutralizers;
FIG. 3 is a schematic electrical structure of a radio frequency ion source of one embodiment;
FIG. 4 is a schematic electrical diagram of a radio frequency neutralizer of one embodiment;
FIG. 5 is a flow chart of a method of controlling a radio frequency ion source according to one embodiment;
FIG. 6 is a schematic cross-sectional view of a radio frequency neutralizer of one embodiment;
fig. 7 is a schematic cross-sectional structure of a radio frequency neutralizer of another embodiment.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
The term "comprising" and any other variations of embodiments of the present application are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps is not limited to the particular steps or modules listed but may alternatively include other steps or modules inherent to such process, method, article, or apparatus.
Referring to fig. 1, fig. 1 is a schematic diagram of an rf ion source system according to one embodiment; the application provides a radio frequency ion source system, includes: the system comprises a radio frequency ion source and at least one radio frequency neutralizer matched with the radio frequency ion source; the radio frequency controller of the radio frequency ion source is connected with the cathode controller of the radio frequency neutralizer through a communication line.
In operation, the radio frequency controller is used for controlling the radio frequency ion source to start and maintain operation and sending control parameters of the radio frequency ion source to the cathode controller; the cathode controller is used for controlling the radio frequency neutralizer to start and maintain operation according to the control parameters.
According to the radio frequency ion source system, the radio frequency controller of the radio frequency ion source is connected with the cathode controller of the radio frequency neutralizer through the communication line, so that in the operation process, the radio frequency controller can transmit control parameters of the radio frequency ion source to the cathode controller, then the cathode controller carries out related operation according to the control parameters, operation parameters corresponding to the radio frequency ion source matched with the radio frequency neutralizer are obtained through calculation, and the radio frequency neutralizer is controlled to start and maintain operation according to the operation parameters.
According to the technical scheme, the radio frequency neutralizer can be started along with the radio frequency ion source and changed along with the change of the load through the radio frequency controller and the cathode controller, independent setting is not needed, the whole process is automatically started and online control is carried out on the radio frequency ion source, the operation complexity of the starting and adjusting process is reduced, and the control efficiency of the radio frequency neutralizer is improved.
In one embodiment, considering that in the vacuum coating machine, the electron beam provided by the radio frequency neutralizer to the radio frequency ion source is easy to be uneven due to the interference of equipment such as an electron gun, a dry pot and the like, so that partial ions are insufficiently neutralized, in order to improve the ion neutralization effect and avoid influencing the vacuum coating effect, the number of the radio frequency ion source system can be multiple, and each radio frequency neutralizer is respectively arranged at a set position of the radio frequency ion source; FIG. 2 is a schematic diagram of an exemplary RF ion source matching multiple RF neutralizers, as shown in FIG. 2; in the drawings, two radio frequency neutralizers are taken as an example for illustration, and the basic principle is similar for the technical scheme of more than two radio frequency neutralizers, and the description is omitted here.
As shown in the figure, the cathode controller corresponding to each radio frequency neutralizer respectively controls the radio frequency neutralizer to output corresponding electron quantity according to the current beam current required by each direction of the detected radio frequency ion source.
In the above embodiment, in the scheme of adopting a plurality of rf neutralizers, the output state of the electron beam may be detected according to the positions of the rf neutralizers, so as to correspondingly adjust the number of the output electron beam currents of the rf neutralizers when the rf ion source is adjusted, thereby realizing the following control.
For example, taking the emitter current of the cathode neutralizer and the screen current of the rf ion source as examples, assume that the rf ion source matches two rf neutralizers, namely a first rf neutralizer and a second rf neutralizer, the current of the first rf neutralizer being I 1 The current of the second radio frequency neutralizer is I 2 The screen current of the radio frequency ion source is I, and any moment I needs to be ensured 1 +I 2 More than or equal to I, therefore, in the working process, the cathode controller can calculate the current I in real time according to the screen electrode current I received by the radio frequency controller in real time and the number of electrons required by each radio frequency neutralizer of the detected radio frequency ion source respectively 1 And current I 2 For current I 1 And current I2, the respective proportions can be set in advance, for example, I can be set 1 ：I 2 =1: 1, can also be provided with I 1 ：I 2 =4: 1, and the like, or can be set according to actual demand conditions; the scheme realizes the automatic following adjustment of the radio frequency neutralizer, does not need to carry out setting operation, and greatly improves the control efficiency and the control accuracy.
Preferably, in the rf ion source system of the present application, each rf neutralizer is connected to a common cathode controller; the plurality of radio frequency neutralizers adopt a cathode controller, so that the equipment cost is reduced, and meanwhile, the space occupation is reduced; of course, in practical application, a plurality of cathode controllers may be set to control according to practical operation requirements, which will not be described in detail herein.
According to the technical scheme of the embodiment, aiming at the condition of insufficient ion neutralization, the plurality of radio frequency neutralizers are arranged around the radio frequency ion source to work simultaneously, so that the cathode can be ensured to provide more uniform neutralization electrons for the radio frequency ion source, the number of electrons required by the radio frequency ion source in each direction is detected in real time during working, the number of electrons provided by each radio frequency neutralizer is automatically regulated, the ion neutralization effect is greatly improved, and the vacuum coating effect is improved.
In an embodiment, based on the structure of the rf ion source system provided in the foregoing embodiment, in order to reduce the distance between the communication line and the rf line, avoid interference of the rf and reduce the equipment cost, the technical scheme of the present application may further perform integrated processing on each equipment component.
Referring to fig. 3 and 4, fig. 3 and 4 are electrical schematic diagrams of rf ion source systems; there is shown a part of the electrical structure, wherein fig. 3 is a schematic electrical structure of an rf ion source of one embodiment, and fig. 4 is a schematic electrical structure of an rf neutralizer of one embodiment; as illustrated, the rf ion source system of this embodiment includes: the system comprises a first direct current source module, a first radio frequency power supply and a first matching network, and a second direct current source module, a second radio frequency power supply and a second matching network.
The first radio frequency power supply is connected with a radio frequency coil of the radio frequency ion source through a first matching network; the first direct current source module and the first radio frequency power supply are respectively connected with the cathode controller; the second radio frequency power supply is connected with a radio frequency coil of the radio frequency neutralizer through a second matching network; the second direct current source module and the second radio frequency power supply are respectively connected with the radio frequency controller; the radio frequency controller, the first direct current source module, the first radio frequency power supply and the first matching network are arranged in a first 4U chassis; the cathode controller, the second direct current source module, the second radio frequency power supply and the second matching network are arranged in the second 4U case.
According to the technical scheme of the embodiment, the radio frequency neutralizer of the radio frequency ion source system and the electric equipment of the radio frequency ion source are respectively integrated in the standard 4U case, so that the problems of high cost caused by wire length and wire requirement can be solved, and a large amount of installation space can be reduced.
In the conventional technology, the radio frequency power supply, the matching network, the controller and other equipment structures are generally independently arranged and are installed by adopting independent 2U, 2U and 3U cases, so that longer wire communication and longer radio frequency wires are needed among all the equipment structures, the longer the radio frequency wires are, the larger the interference is, the higher the wire requirements are, and the equipment cost is also high.
As an embodiment, as shown in fig. 3, the first 4U chassis is provided with: the first power supply interface, the first radio frequency coil interface, the first direct current power control interface, the first communication interface and the first gas control interface; the first power supply interface is connected with an external power supply, a first radio frequency power supply, a first matching network and a first direct current source module in the case.
The first radio frequency coil interface is connected with a radio frequency coil of the radio frequency ion source and a first matching network in the case; the first direct current power control interface is connected with a grid mesh (comprising a screen electrode, an acceleration electrode and a deceleration electrode) of the radio frequency ion source, and a second direct current power module in the case; the first communication interface is connected with the cathode controller and the radio frequency controller in the case; the first gas control interface is connected with a flowmeter on a gas supply pipeline of the radio frequency ion source and a radio frequency controller in the case.
As an embodiment, as shown in fig. 4, the second 4U chassis is provided with: the device comprises a first power supply interface, at least one first radio frequency coil interface, at least one first direct current power supply control interface, a first communication interface and at least one first gas control interface.
The second power supply interface is connected with an external power supply, a second radio frequency power supply, a second matching network and a second direct current source module in the case; the second radio frequency coil interface is connected with a radio frequency coil of the radio frequency neutralizer and a second matching network in the case; the second direct current power supply control interface is connected with an emitter and a maintaining electrode of the radio frequency neutralizer and a second direct current source module in the case; the second communication interface is connected with the radio frequency controller and the cathode controller in the case; the second gas control interface is connected with a flowmeter on a gas supply pipeline of the radio frequency neutralizer and a cathode controller in the case.
In the technical scheme of the embodiment, aiming at the defects in the electrical structural design of the current radio frequency ion source system, the first 4U case and the second 4U case are utilized to optimally design and install each equipment structure, a plurality of equipment structures are integrated in a standard 4U case, the equipment cost of conduction and communication between a plurality of cases is saved, the high cost caused by the wire length and the wire requirement is not only solved, but also a large number of equipment structure installation spaces are reduced, the equipment is easy to install, and the product quality is improved as a whole.
An embodiment of a method of controlling a radio frequency ion source is described below.
The radio frequency ion source control method of the present application may be applied to the radio frequency ion source system of the above embodiment, and referring to fig. 5, fig. 5 is a flowchart of a radio frequency ion source control method of an embodiment, where the method is a control method in a working process of a radio frequency ion source, and includes:
step S1, the radio frequency controller obtains radio frequency control parameters of the radio frequency ion source.
As shown in fig. 1 and 2, during operation of the rf ion source, the rf control parameters of the rf ion source may be obtained by the rf controller.
As an example, the number of radio frequency neutralizers is a plurality; taking two rf neutralizers as an example, as shown in fig. 2, the two rf neutralizers can provide neutralizing electrons to the rf ion source from different directions.
Step S2, the radio frequency controller sends the real-time control parameters to the cathode controller;
based on the communication line, the radio frequency controller of the radio frequency ion source can send control parameters in the running process of the radio frequency ion source to the cathode controller in real time, so that the radio frequency neutralizer is automatically adjusted, and the parameters are not required to be set.
And S3, the cathode controller calculates the cathode control parameters of the corresponding radio frequency neutralizer according to the radio frequency control parameters.
The radio frequency control parameters comprise relevant parameters such as a radio frequency source screen electrode current and the like; for example, the cathode controller may calculate the emitter current allocated by each rf neutralizer based on the rf source screen current of the rf ion source; since the emitter current of the cathode neutralizer needs to be ensured to be greater than or equal to the screen current of the radio frequency ion source at any time; therefore, the emitter current distributed by each radio frequency neutralizer can be calculated according to the radio frequency source screen electrode electricity of the radio frequency ion source; the foregoing examples also list detailed parameter calculation procedures, and are not described in detail herein.
And S4, controlling the corresponding radio frequency neutralizer by the cathode controller according to the cathode control parameters.
Specifically, the cathode controller respectively controls the second direct current source module to output matched emitter current to the radio frequency neutralizer according to the distributed emitter current, so that the radio frequency neutralizer operates along with the radio frequency ion source.
According to the technical scheme, in the working process of the radio frequency ion source, the radio frequency neutralizer can be started along with the radio frequency ion source and changed along with the change of the load through the radio frequency controller and the cathode controller, independent setting is not needed, the whole process is automatically started and online control is carried out on the radio frequency ion source, the operation complexity of the starting and adjusting process is reduced, and the control efficiency of the radio frequency neutralizer is improved.
In one embodiment, the method for controlling a radio frequency ion source further provides a starting process of a radio frequency neutralizer, which specifically includes the following steps:
(1) The starting parameters of the radio frequency neutralizer are set through the cathode controller.
As an embodiment, the starting parameters of the radio frequency neutralizer can be set on the operation page of the neutralizer controller; among other parameters, the start-up parameters include emitter voltage and current, sustain voltage and gas flow parameters, etc.
(2) The cathode controller receives a one-key start control instruction sent by the radio frequency controller and introduces working gas.
As an embodiment, a one-key starting function can be set, a user can perform one-key starting operation through the radio frequency controller, the radio frequency controller responds to the one-key starting operation of the user and then outputs one-key starting control instructions to the cathode controller, and the cathode controller controls the on-off and the flow of the gas flowmeter on the gas supply pipeline of the radio frequency neutralizer, so that working gas enters the insulating gas needle for diversion and then enters the ionization chamber; the working gas enters the insulating gas needle to be insulated and isolated, and slowly enters the ionization chamber through the gas pipeline to be ionized under the action of the gas shunt insulator of the insulating gas needle, so that the working gas is fully ionized.
(3) The cathode controller starts a second radio frequency power supply and outputs radio frequency power to a radio frequency coil of the radio frequency neutralizer.
The radio frequency power is relatively large during starting, the power is between 120W and 150W, and the power is large and is easy to discharge arc, so that the starting is facilitated.
(4) The cathode controller starts a second direct current power supply to supply voltage to the maintaining electrode and the emitter of the radio frequency neutralizer until the electron beam current is pulled out.
Specifically, after the radio frequency power reaches a preset value, a certain voltage is transmitted to a maintaining electrode and an emitting electrode of the radio frequency neutralizer through a first direct current power supply, and tiny glow is generated in an ionization chamber under the action of radio frequency energy; before the electron beam is pulled out, the relay is controlled by the cathode controller to continuously switch the voltage of the emitter, the high voltage and the low voltage are continuously switched, meanwhile, the maintaining electrode is controlled to always keep a certain voltage, and when an electron is found to be pulled out in the ionization chamber to form the electron beam, the radio frequency neutralizer is started successfully.
(5) The cathode controller controls the second direct current power supply to output voltage with set parameters to the maintaining pole and the emitting pole of the radio frequency neutralizer.
Specifically, after the radio frequency neutralizer is successfully started, the cathode controller controls the relay to stop switching operation, meanwhile, the emitter keeps a certain small voltage, and the working gas in the ionization chamber is kept to be ionized continuously, so that the radio frequency neutralizer keeps a working state.
According to the technical scheme, in the starting process of the radio frequency neutralizer, the radio frequency neutralizer can be started along with the radio frequency ion source through the radio frequency controller and the cathode controller, independent setting is not needed, the whole process is started automatically, the starting operation complexity is reduced, and the control efficiency of the radio frequency neutralizer is improved.
For the radio frequency neutralizer in the technical solution of the present application, several embodiments are provided below.
Referring to fig. 6, fig. 6 is a schematic cross-sectional structure of a radio frequency neutralizer according to one embodiment, and in one example provided herein, the radio frequency neutralizer includes: ionization chamber 10, sustain electrode 11, target 21, magnet 22, vacuum feed-in connector 23, housing 13, etc.; wherein, the ionization chamber 10 is isolated from the target 21 by a first quartz insulator 31, the housing 13 is isolated from the ionization chamber 10 by a second quartz insulator 32, a water cooling structure 41 is arranged around the magnet 22, and the vacuum feed-in connector 23 is isolated from the water cooling structure 41 by an insulator 34.
In operation, working gas flows out of the gas storage bottle to the front end of the flowmeter, the working gas enters the bottom of the radio frequency neutralizer from the stainless steel pipeline through the feed-in component under the control of the cathode controller and then passes through the magnetic field, and the working gas is ionized in the ionization cavity under the action of the magnetic field and the electric field by giving a certain voltage to the target, and then gives a certain voltage to the sustain electrode, so that electrons are pulled out of the ionization cavity to form electron beam current, and electrons needed by the neutralization in the operation of the radio frequency ion source are obtained.
Referring to fig. 7, fig. 7 is a schematic cross-sectional structure of a radio frequency neutralizer of another embodiment; comprising the following steps: ionization chamber 10, radio frequency coil 20, housing 13, sustain electrode 11, etc.; the bottom of the ionization chamber 10 is connected with an insulating gas needle 30, and an air outlet pipe 35 of the insulating gas needle 30 is connected with a gas input hole of the ionization chamber 10 for introducing working gas and insulating and isolating; the first metal piece 31 of the insulating gas needle 30 is tightly attached to the bottom of the ionization chamber 10, and meanwhile, the first metal piece 31 of the insulating gas needle 30 is connected with an emitter power supply and the second metal piece 32 is grounded; thereby, the first metal 31 acts as an emitter of the radio frequency neutralizer.
Based on the above technical scheme, the insulating gas needle 30 is tightly attached to the bottom of the ionization chamber 10, and the first metal piece 31 is used as the emitter, so that an emitter assembly is not required to be additionally arranged, the whole equipment structure of the radio frequency neutralizer can be greatly simplified, the equipment volume is reduced, the equipment is more compact, and the using effect of the radio frequency neutralizer is improved.
With the structure of fig. 7, the side wall of the ionization chamber 10 is internally provided with a spiral channel 10a; the radio frequency coil 20 is of a spiral shape design and has a structure consistent with that of the spiral channel 10a; the radio frequency coil 20 is installed into the spiral channel 10a from one end of the ionization chamber 10 in a spiral manner; the rf coil 20 is connected to rf wires at both ends. Preferably, the spiral channel 10a of the ionization chamber 10 is further sealed at the interface positions (dotted line frame in the drawing) at both ends so that the radio frequency coil 20 in the spiral channel 10a is sealed from the outside.
By the radio frequency ionization device with the structure, the radio frequency coil 20 is firmly fixed in the spiral channel 10a, so that the influence of unstable position caused by high-temperature deformation on the radio frequency introduction can be avoided, and meanwhile, by the sealing treatment of the two end positions, the radio frequency coil 20 is prevented from being contacted with the atmosphere, the oxidation probability is reduced, and the maintenance period can be prolonged; the rf coil 20 based on the above design is closer to the ionization chamber 10, so that the rf usage efficiency introduced into the ionization chamber 10 is higher; and the complexity of the whole structure of the radio frequency neutralizer is reduced, and the use effect of the radio frequency neutralizer is improved.
The above examples merely represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.
Claims (6)
1. A radio frequency ion source system, comprising: the system comprises a radio frequency ion source, at least one radio frequency neutralizer matched with the radio frequency ion source, a first direct current source module, a first radio frequency power supply, a first matching network, a second direct current source module, a second radio frequency power supply and a second matching network; the radio frequency controller of the radio frequency ion source is connected with the cathode controller of the radio frequency neutralizer through a communication line;
the radio frequency controller is used for controlling the radio frequency ion source to start and maintain operation and sending control parameters of the radio frequency ion source to the cathode controller;
the cathode controller is used for controlling the radio frequency neutralizer to start and maintain operation according to the control parameters;
the number of the radio frequency neutralizers is multiple, and each radio frequency neutralizer is respectively arranged at a set position of the radio frequency ion source; the cathode controllers corresponding to the radio frequency neutralizers respectively control the radio frequency neutralizers to output corresponding electron numbers according to the current beam current required by the detected radio frequency ion sources in all directions; each of said radio frequency neutralizers being connected to a common cathode controller;
the radio frequency neutralizer comprises: an ionization chamber, a radio frequency coil and an insulating gas needle; the bottom of the ionization chamber is connected with an insulating gas needle, and an air outlet pipe of the insulating gas needle is connected with a gas input hole of the ionization chamber; the first metal piece of the insulating air needle is connected with an emitter power supply and the second metal piece is grounded, and the first metal piece is used as an emitter of the radio frequency neutralizer;
the first radio frequency power supply is connected with a radio frequency coil of the radio frequency ion source through the first matching network; the first direct current source module and the first radio frequency power supply are respectively connected with the cathode controller; the second radio frequency power supply is connected with a radio frequency coil of the radio frequency neutralizer through the second matching network; the second direct current source module and the second radio frequency power supply are respectively connected with the radio frequency controller;
the radio frequency controller, the first direct current source module, the first radio frequency power supply and the first matching network are arranged in a first 4U chassis; the cathode controller, the second direct current source module, the second radio frequency power supply and the second matching network are arranged in a second 4U chassis.
2. The rf ion source system of claim 1, wherein the first 4U chassis is provided with: the first power supply interface, the first radio frequency coil interface, the first direct current power control interface, the first communication interface and the first gas control interface;
the first power supply interface is connected with an external power supply, a first radio frequency power supply, a first matching network and a first direct current source module in the case;
the first radio frequency coil interface is connected with a radio frequency coil of the radio frequency ion source and a first matching network in the case;
the first direct current power supply control interface is connected with a grid of the radio frequency ion source and a first direct current source module in the case;
the first communication interface is connected with the cathode controller and a radio frequency controller in the case;
the first gas control interface is connected with a flowmeter on a gas supply pipeline of the radio frequency ion source and a radio frequency controller in the case.
3. The rf ion source system of claim 1, wherein the second 4U chassis is provided with: the device comprises a first power supply interface, at least one first radio frequency coil interface, at least one first direct current power supply control interface, a first communication interface and at least one first gas control interface;
the second power supply interface is connected with an external power supply, a second radio frequency power supply, a second matching network and a second direct current source module in the case;
the second radio frequency coil interface is connected with a radio frequency coil of the radio frequency neutralizer and a second matching network in the case;
the second direct current power supply control interface is connected with an emitter electrode and a maintaining electrode of the radio frequency neutralizer and a second direct current source module in the case;
the second communication interface is connected with the radio frequency controller and a cathode controller in the case;
the second gas control interface is connected with a flowmeter on a gas supply pipeline of the radio frequency neutralizer and a cathode controller in the case.
4. A method of controlling a radio frequency ion source applied to the radio frequency ion source system of any one of claims 1-3, comprising:
the radio frequency controller acquires radio frequency control parameters of the radio frequency ion source; the radio frequency control parameters comprise a radio frequency source screen electrode current, and the number of the radio frequency neutralizers is multiple;
the radio frequency controller sends the radio frequency control parameters to the cathode controller;
the cathode controller calculates cathode control parameters of the corresponding radio frequency neutralizer according to the radio frequency control parameters; comprising the following steps: the cathode controller calculates emitter currents distributed by all the radio frequency neutralizers according to the radio frequency source screen electrode current of the radio frequency ion source; the sum value of the emitter currents distributed by the radio frequency neutralizers is larger than or equal to the radio frequency source screen electrode current of the radio frequency ion source;
the cathode controller controls the corresponding radio frequency neutralizer according to the cathode control parameters, and the radio frequency neutralizer comprises: and the cathode controller respectively controls the second direct current source module to output matched emitter current to the radio frequency neutralizer according to the distributed emitter current, so that the radio frequency neutralizer operates along with the radio frequency ion source.
5. The method of claim 4, further comprising a radio frequency neutralizer start-up procedure:
setting a starting parameter of a radio frequency neutralizer through the cathode controller;
the cathode controller receives a one-key start control instruction sent by the radio frequency controller and introduces working gas;
the cathode controller starts a second radio frequency power supply and outputs radio frequency power to a radio frequency coil of the radio frequency neutralizer;
the cathode controller starts a second direct current power supply to provide voltage for a maintaining electrode and an emitter of the radio frequency neutralizer until the electron beam current is pulled out;
the cathode controller controls the second direct current power supply to output voltage with set parameters to the maintaining pole and the emitting pole of the radio frequency neutralizer.
6. The method according to claim 5, wherein the setting, by the cathode controller, a start-up parameter of a radio frequency neutralizer comprises:
setting a starting parameter of a radio frequency neutralizer on an operation page of a neutralizer controller; wherein the starting parameters include emitter voltage and current, sustain voltage and any combination of gas flow parameters;
the cathode controller receives a one-key start control instruction sent by the radio frequency controller and introduces working gas, and the cathode controller comprises:
the radio frequency controller responds to one-key starting operation of a user and outputs a one-key starting control instruction to the cathode controller;
the cathode controller controls the switch and flow of the gas flowmeter on the gas supply pipeline of the radio frequency neutralizer, so that working gas enters the insulating gas needle for diversion and then enters the ionization chamber.
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5581156A (en) * | 1995-07-31 | 1996-12-03 | The United States Of America As Represented By The Secretary Of The Army | HF sustained, DC discharge driven negative ion source with automatic control system |
| WO2001022470A1 (en) * | 1999-09-17 | 2001-03-29 | Nordiko Limited | Ion beam vacuum sputtering apparatus and method |
| CN106206230A (en) * | 2016-08-31 | 2016-12-07 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of power supply to the ion source system and ion source |
| CN110995009A (en) * | 2019-12-18 | 2020-04-10 | 深圳航天科技创新研究院 | Integrated cathode power supply and system thereof |
| CN112908817A (en) * | 2021-01-22 | 2021-06-04 | 中山市博顿光电科技有限公司 | Radio frequency cathode neutralizer |
| CN214588728U (en) * | 2021-01-22 | 2021-11-02 | 中山市博顿光电科技有限公司 | Hollow cathode tube starting device and hollow cathode neutralizer |
| CN113793791A (en) * | 2021-09-15 | 2021-12-14 | 中山市博顿光电科技有限公司 | Ion beam shape modification ion source, starting method thereof and vacuum chamber |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6724160B2 (en) * | 2002-04-12 | 2004-04-20 | Kaufman & Robinson, Inc. | Ion-source neutralization with a hot-filament cathode-neutralizer |
| US7853364B2 (en) * | 2006-11-30 | 2010-12-14 | Veeco Instruments, Inc. | Adaptive controller for ion source |
| US10573495B2 (en) * | 2017-10-09 | 2020-02-25 | Denton Vacuum, LLC | Self-neutralized radio frequency plasma ion source |
-
2021
- 2021-12-31 CN CN202111670990.6A patent/CN114302549B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5581156A (en) * | 1995-07-31 | 1996-12-03 | The United States Of America As Represented By The Secretary Of The Army | HF sustained, DC discharge driven negative ion source with automatic control system |
| WO2001022470A1 (en) * | 1999-09-17 | 2001-03-29 | Nordiko Limited | Ion beam vacuum sputtering apparatus and method |
| CN106206230A (en) * | 2016-08-31 | 2016-12-07 | 北京埃德万斯离子束技术研究所股份有限公司 | A kind of power supply to the ion source system and ion source |
| CN110995009A (en) * | 2019-12-18 | 2020-04-10 | 深圳航天科技创新研究院 | Integrated cathode power supply and system thereof |
| CN112908817A (en) * | 2021-01-22 | 2021-06-04 | 中山市博顿光电科技有限公司 | Radio frequency cathode neutralizer |
| CN214588728U (en) * | 2021-01-22 | 2021-11-02 | 中山市博顿光电科技有限公司 | Hollow cathode tube starting device and hollow cathode neutralizer |
| CN113793791A (en) * | 2021-09-15 | 2021-12-14 | 中山市博顿光电科技有限公司 | Ion beam shape modification ion source, starting method thereof and vacuum chamber |
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| CN114302549A (en) | 2022-04-08 |
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