CN112908818B - DC cathode neutralizer - Google Patents
DC cathode neutralizer Download PDFInfo
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- CN112908818B CN112908818B CN202110085601.7A CN202110085601A CN112908818B CN 112908818 B CN112908818 B CN 112908818B CN 202110085601 A CN202110085601 A CN 202110085601A CN 112908818 B CN112908818 B CN 112908818B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
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Abstract
The application relates to a direct current cathode neutralizer, comprising: ionization chamber, cathode target, sustain electrode and magnet assembly; wherein, the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; the cathode target is arranged at the bottom of the ionization chamber and is connected with an ionization power supply, and the cathode target and the maintaining electrode are kept insulated and isolated; the magnet assembly is arranged at the bottom of the cathode target and used for generating a strong magnetic field in the ionization chamber; in operation, the ionization chamber is filled with working gas, the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and the electric field to generate plasma; negative electrons in the plasma are output through an electronic output port arranged in the ionization chamber under the action of a maintaining electrode; the technical scheme has the advantages of simple structure and convenient maintenance, and improves ionization efficiency by using a strong magnetic field; and the cathode target material can use various metals, and can use high-resistance Wen Xiyou metal, so that the product is not adversely affected by pollution and the like.
Description
Technical Field
The application relates to the technical field of ion source equipment, in particular to a direct current cathode neutralizer.
Background
The ion source is an application science and technology which has wide application, multiple types, more involved science, strong technological property and very rapid development. The ion source is a device for outputting positive ion beams, and if positive charges accumulated in the space are not neutralized and eliminated in time, space ignition condition can be caused, and the use effect of the product is seriously affected. Therefore, the neutralizer and the ion source are required to be matched for use, and the working effect of the ion source is directly influenced by the quality of the neutralizer.
Common neutralizers include filament neutralizers, plasma bridge neutralizers, hollow cathode neutralizers, and radio frequency neutralizers. The filament type neutralizer generates electrons by heating the filament, has a simple structure, but has short working time and can not work in an active gas environment; the plasma bridge neutralizer ionizes inert gas through a hot filament to generate electrons, and the working time can reach tens of hours; the hollow cathode neutralizer is triggered by high voltage through a hollow cathode tube to generate electrons, and the working time can reach tens to hundreds of hours; the radio frequency neutralizer ionizes gas in a radio frequency mode, and then separates electrons through an electric field to realize electron output, and the working time is not limited by consumable materials and is generally more than 1000 hours.
At present, the cold cathode function can be realized by using radio frequency, and the radio frequency neutralizer is a neutralizer with better use effect at present due to the stable characteristic and suitability for being used in a neutralization environment below 2A; referring to fig. 1, fig. 1 is a schematic structural diagram of a conventional rf neutralizer, which mainly includes a housing, a gas isolation assembly, an rf coil, a sustaining sheet, and the like.
However, the traditional radio frequency neutralizer has obvious technical defects, the traditional radio frequency neutralizer can be realized only by the matching work of a plurality of matching networks during starting, and the matching process needs to be continuously regulated, so that the starting difficulty is high; in addition, the requirement on the environment is high, and the start failure is caused by small environment change; and the structure is complex and the maintenance is difficult.
Disclosure of Invention
Accordingly, it is necessary to provide a dc cathode neutralizer against one of the above-mentioned technical drawbacks of large starting difficulty, complicated structure and difficult maintenance.
A dc cathode neutralizer comprising: ionization chamber, cathode target, sustain electrode and magnet assembly; wherein, the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; the cathode target is arranged at the bottom of the ionization chamber and is connected with an ionization power supply, and the cathode target and the maintaining electrode are kept insulated and isolated; the magnet assembly is arranged at the bottom of the cathode target and is used for generating a strong magnetic field in the ionization chamber;
in operation, the ionization chamber is filled with working gas, the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and the electric field to generate plasma;
negative electrons in the plasma are output through an electronic output port arranged in the ionization chamber under the action of the sustain electrode.
In one embodiment, the dc cathode neutralizer further comprises a sustain power source connected to the sustain electrode and an ionization power source connected to the ionization electrode; wherein, the positive electrode end of the maintenance power supply is connected with the maintenance electrode, and the negative electrode end is connected with the ionization electrode; the negative electrode end of the ionization power supply is connected with the ionization electrode, and the positive electrode is grounded.
In operation, the dc cathode neutralizer is turned on by the ionization electrode, the sustain electrode is turned on by the sustain power, the start voltage is output to the cathode target and the sustain electrode ionizes the working gas, and the sustain power outputs the sustain voltage to the sustain electrode after the current reaches the set current value.
In one embodiment, the starting voltage is 1000V, the set current value is 100-200mA, and the maintaining voltage is 200-500V.
In one embodiment, the magnet assembly includes a cylindrical magnet and a ring magnet sleeved on the cylindrical magnet.
The direct current cathode neutralizer in one embodiment further comprises a metal water-cooled shell arranged at the lower part of the cathode target, wherein the metal water-cooled shell is connected with the cathode target through a copper sealing heat conduction component; the magnet component is embedded in the middle of the metal water cooling body shell; the metal water-cooling body shell is internally provided with a water-cooling loop for heat dissipation.
In one embodiment, the dc cathode neutralizer further comprises a base; the metal water cooling body shell is installed on the base through the insulating block, and a sealing connecting piece is connected to the bottom of the base and used for sealing and insulating with a vacuum environment.
The direct current cathode neutralizer in one embodiment further comprises a gas supply pipeline built in the base, the insulating block and the metal water cooling body shell, wherein the gas supply pipeline penetrates through the copper sealing heat conducting component and is used for connecting working gas and conveying the working gas to the ionization chamber.
The direct current cathode neutralizer in one embodiment further comprises a metal housing, wherein the upper part of the metal housing is isolated from the sustain electrode by a second isolation component; the inner side surface of the metal shell is isolated from the ionization chamber and the metal water-cooled body shell through a third isolation part.
In one embodiment, the metal housing is a stainless steel housing; the metal water cooling body shell is a stainless steel water cooling shell; the first isolation component, the second isolation component and the third isolation component are isolation quartz.
The technical scheme of the application has the following beneficial effects:
generating an electric field in an ionization region by using a direct current ionization power supply, generating a strong magnetic field by using a magnet assembly ionization region, ionizing working gas by using the ionization region under the combined action of the strong magnetic field and the electric field to generate plasma, and outputting negative electrons in the plasma under the action of a maintaining electrode; the technical scheme breaks through the cold cathode function which can be realized only by using radio frequency originally, realizes the low-voltage ionization on the surface of a cathode target by using a strong magnetic field, generates plasma, separates ions and electrons by an electric field and outputs the electrons; and the cathode target material can use various metals, and can use high-resistance Wen Xiyou metal, so that the product is not adversely affected by pollution and the like.
Drawings
FIG. 1 is a schematic diagram of a conventional RF neutralizer;
FIG. 2 is a schematic diagram of a DC cathode neutralizer configuration of one embodiment;
FIG. 3 is a schematic circuit diagram of a DC cathode neutralizer;
FIG. 4 is a cross-sectional view of a DC cathode neutralizer;
fig. 5 is a schematic of a three-dimensional cross-section of a dc cathode neutralizer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application will be further described in detail with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the present application.
The term "comprising" and any other variations of embodiments of the present application are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps is not limited to the particular steps or modules listed but may alternatively include other steps or modules inherent to such process, method, article, or apparatus.
Referring to fig. 2, fig. 2 is a schematic diagram of a dc cathode neutralizer structure of one embodiment; the neutralizer comprises: ionization chamber, cathode target, sustain electrode and magnet assembly; the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; the ionization chamber may be composed of a cavity-shaped emitter and a cathode target, the emitter may be realized by a maintaining plate disposed at the upper part of the ionization chamber, the function of the emitter is to form an electric field with the cathode target, the bottom and top positions are defined for convenience of description according to the position of fig. 2, and no distinction is made in practical products. The cathode target is arranged at the bottom of the ionization chamber and is connected with an ionization power supply, the cathode target and the maintaining electrode are kept insulated and isolated, and the magnet assembly is arranged at the bottom of the cathode target and is used for generating a strong magnetic field in the ionization chamber; the ionization chamber has an ionization region therein in which the other working species are ionized.
In operation, the ionization chamber is filled with working gas (inert gas, generally argon), the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and the electric field to generate plasma; after that, positive ions and negative electrons in the plasma are separated under the action of the electric field of the sustain electrode, wherein the positive ions are absorbed by the cathode target, and the negative electrons are output through an electron output port arranged at the upper part of the ionization chamber under the action of the electric field of the sustain electrode.
The technical scheme of the embodiment breaks through the cold cathode function which can be realized by using radio frequency originally, realizes the ionization of the cathode target surface by using a strong magnetic field, generates plasma, separates ions and electrons by an electric field and outputs the electrons. And the cathode target material can use various metals, and can use high-resistance Wen Xiyou metal, so that the product is not adversely affected by pollution and the like.
Compared with the traditional radio frequency neutralizer, the direct current cathode neutralizer designed by the technology simplifies the equipment structure of the neutralizer, can realize electronic output below 2A, is easy to start, has reduced requirements on the starting environment, and is easy to maintain.
Based on the techniques provided herein, further embodiments of the dc cathode neutralizer structures of the present application are provided below.
In one embodiment, for circuit configuration parts, referring to fig. 3, fig. 3 is a circuit schematic diagram of a dc cathode neutralizer; the direct-current cathode neutralizer comprises a maintenance power supply and an ionization power supply, wherein the maintenance power supply is connected with the maintenance electrode, and the ionization power supply is connected with the ionization electrode; wherein, the positive electrode end of the maintenance power supply is connected with the maintenance electrode, and the negative electrode end is connected with the ionization electrode; the negative electrode end of the ionization power supply is connected with the ionization electrode, and the positive electrode is grounded; the ionization electrode is connected with the cathode target, and the connection point of the ionization electrode can be arranged on the cathode target or at other positions. The cathode target material can be selected according to the user of the patent, and a conductive plate made of a metal material can be adopted.
Preferably, in operation, the ionization electrode is connected with an ionization power supply, the sustain electrode is connected with a sustain power supply, a starting voltage (such as about 1000V) is output to the cathode target and the sustain electrode ionizes working gas, and after the current reaches a set current value (100-200 mA), the sustain power supply outputs a sustain voltage (200-500V) to the sustain electrode.
According to the scheme, the plasma is generated by the combined action of the strong magnetic field and the electric field, the function of outputting electrons by the cold cathode is realized, the strong magnetic field is used for enabling the plasma to be more active, and the ionization efficiency is improved.
Referring to fig. 4 and 5, fig. 4 and 5 are schematic views of a dc cathode neutralizer structure; fig. 4 is a cross-sectional view of the dc cathode neutralizer, and fig. 5 is a schematic three-dimensional cross-sectional view of the dc cathode neutralizer.
In one embodiment, the magnet assembly comprises a cylindrical magnet and a ring-shaped magnet sleeved on the cylindrical magnet; a metal water-cooled body shell is arranged at the lower part of the cathode target, and the metal water-cooled body shell is connected with the cathode target through a copper sealing heat conduction component; the magnet component is embedded in the middle of the metal water cooling body shell; the ionization electrode connecting point can be arranged on the metal water-cooled body shell and is connected with a direct-current ionization power supply for connecting the ionization power supply, and a water-cooled loop is arranged in the metal water-cooled body shell and used for radiating heat so as to ensure that equipment is not overheated.
In addition, the direct current cathode neutralizer can also comprise a base; the metal water cooling body shell is installed on the base through the insulating block, the bottom of the base is connected with a sealing connecting piece for sealing insulation with a vacuum environment, the sealing connecting piece is used as a component for fixing the direct current cathode neutralizer, a connecting rod can be connected to the sealing connecting piece, and the length of the connecting rod can be adjusted according to the vacuum chamber environment.
Further, the direct current cathode neutralizer may further include a gas supply pipe, for which the solution of the embodiment is that the gas supply pipe is disposed inside the neutralizer, that is, is built in the base, the insulating block, and the metal water cooling body shell, and the gas supply pipe penetrates through the copper sealing heat conducting component, and is used for accessing the working gas and delivering to the ionization chamber; the air supply pipe can be connected through a sealing connecting piece, so that the air supply pipe is kept sealed with the vacuum chamber.
Further, the dc cathode neutralizer may further include a metal housing as a member for protecting the entire neutralizer, which is insulated from the inside sustain electrode, the metal water-cooled body housing, etc., whereby the upper portion of the metal housing is isolated from the sustain electrode by a second isolating member; the inner side surface of the metal shell is isolated from the ionization chamber (the maintaining pole) and the metal water cooling body shell through a third isolating part; in this embodiment, the metal housing may be a stainless steel housing; the metal water-cooled body shell can be a stainless steel water-cooled shell; the first isolation part, the second isolation part, the third isolation part and the like adopt isolation quartz. The internal structure of the equipment is protected by the metal shell, and the structure is insulated from the vacuum chamber environment.
The above examples merely represent a few embodiments of the present application, which are described in more detail and are not to be construed as limiting the scope of the invention. It should be noted that it would be apparent to those skilled in the art that various modifications and improvements could be made without departing from the spirit of the present application, which would be within the scope of the present application. Accordingly, the scope of protection of the present application is to be determined by the claims appended hereto.
Claims (9)
1. A dc cathode neutralizer, comprising: ionization chamber, cathode target, sustain electrode and magnet assembly; wherein, the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; the cathode target is arranged at the bottom of the ionization chamber and connected with a direct-current ionization power supply, and the cathode target and the maintaining electrode are kept in insulation and isolation; the magnet assembly is arranged at the bottom of the cathode target and is used for generating a strong magnetic field in the ionization chamber;
in operation, the ionization chamber is filled with working gas, the direct current ionization power supply generates an electric field in an ionization region, the magnet assembly generates a strong magnetic field in the ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and the electric field to generate plasma; the ionization electrode is connected with a direct-current ionization power supply, the maintenance electrode is connected with a maintenance power supply, a starting voltage is output to the cathode target material and the maintenance electrode ionizes working gas, and after the current reaches a set current value, the maintenance power supply outputs a maintenance voltage to the maintenance electrode; the set current value is 100-200mA, and the maintaining voltage is 200-500V;
positive ions and negative electrons in the plasma are separated under the effect of a maintaining electrode electric field, the positive ions are absorbed by a cathode target, and the negative electrons are output through an electronic output port arranged in an ionization chamber under the effect of the maintaining electrode.
2. The dc cathode neutralizer of claim 1, further comprising a sustain power source connected to said sustain pole and a dc ionization power source connected to said ionization pole; wherein, the positive electrode end of the maintenance power supply is connected with the maintenance electrode, and the negative electrode end is connected with the ionization electrode; the negative electrode end of the direct current ionization power supply is connected with the ionization electrode, and the positive electrode is grounded.
3. The dc cathode neutralizer of claim 1, wherein the start-up voltage is 1000V.
4. The dc cathode neutralizer of claim 1, wherein the magnet assembly comprises a cylindrical magnet and a ring magnet sleeved on the cylindrical magnet.
5. The direct current cathode neutralizer according to claim 4, further comprising a metal water-cooled body housing disposed below the cathode target, wherein the metal water-cooled body housing is connected to the cathode target by a copper-sealed heat conducting member; the magnet component is embedded in the middle of the metal water cooling body shell; the metal water-cooling body shell is internally provided with a water-cooling loop for heat dissipation.
6. The dc cathode neutralizer of claim 5, further comprising a base; the metal water cooling body shell is installed on the base through the insulating block, and a sealing connecting piece is connected to the bottom of the base and used for sealing and insulating with a vacuum environment.
7. The dc cathode neutralizer of claim 6, further comprising a gas supply conduit built into the base, insulator block, metal water cooler housing, the gas supply conduit extending through the copper seal heat conducting member for access to a working gas and delivery to the ionization chamber.
8. The dc cathode neutralizer of claim 7, further comprising a metal housing, wherein an upper portion of the metal housing is isolated from the sustain pole by a second isolation member; the inner side surface of the metal shell is isolated from the ionization chamber and the metal water-cooled body shell through a third isolation part.
9. The dc cathode neutralizer of claim 8, wherein the metal housing is a stainless steel housing; the metal water cooling body shell is a stainless steel water cooling shell; the second isolation component and the third isolation component are isolation quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110085601.7A CN112908818B (en) | 2021-01-22 | 2021-01-22 | DC cathode neutralizer |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110085601.7A CN112908818B (en) | 2021-01-22 | 2021-01-22 | DC cathode neutralizer |
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| CN112908818A CN112908818A (en) | 2021-06-04 |
| CN112908818B true CN112908818B (en) | 2023-07-04 |
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| JP2015088218A (en) * | 2011-12-28 | 2015-05-07 | キヤノンアネルバ株式会社 | Ion beam processing apparatus and neutralizer |
| US9978568B2 (en) * | 2013-08-12 | 2018-05-22 | Tokyo Electron Limited | Self-sustained non-ambipolar direct current (DC) plasma at low power |
| CN109681399A (en) * | 2018-12-12 | 2019-04-26 | 上海航天控制技术研究所 | A kind of minor diameter efficient microwave ECR averager |
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