CN112908818A - DC cathode neutralizer - Google Patents
DC cathode neutralizer Download PDFInfo
- Publication number
- CN112908818A CN112908818A CN202110085601.7A CN202110085601A CN112908818A CN 112908818 A CN112908818 A CN 112908818A CN 202110085601 A CN202110085601 A CN 202110085601A CN 112908818 A CN112908818 A CN 112908818A
- Authority
- CN
- China
- Prior art keywords
- ionization
- cathode
- electrode
- ionization chamber
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002184 metal Substances 0.000 claims abstract description 48
- 229910052751 metal Inorganic materials 0.000 claims abstract description 48
- 230000005684 electric field Effects 0.000 claims abstract description 13
- 230000009471 action Effects 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims description 34
- 238000002955 isolation Methods 0.000 claims description 17
- 238000007789 sealing Methods 0.000 claims description 11
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 10
- 229910001220 stainless steel Inorganic materials 0.000 claims description 6
- 239000010935 stainless steel Substances 0.000 claims description 6
- 230000017525 heat dissipation Effects 0.000 claims description 3
- 239000010453 quartz Substances 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 150000002739 metals Chemical class 0.000 abstract description 6
- 230000000694 effects Effects 0.000 abstract description 5
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000002411 adverse Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 22
- 150000002500 ions Chemical class 0.000 description 9
- 239000013077 target material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 4
- 229910052802 copper Inorganic materials 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009296 electrodeionization Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 230000005426 magnetic field effect Effects 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 230000001960 triggered effect Effects 0.000 description 1
- 230000003245 working effect Effects 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
- H01J37/08—Ion sources; Ion guns
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Electron Sources, Ion Sources (AREA)
Abstract
The application relates to a direct current cathode neutralizer, comprising: an ionization chamber, a cathode target, a sustaining pole and a magnet assembly; wherein, the sustain electrode is arranged at the upper part of the ionization chamber and is connected with a sustain power supply; the cathode target is arranged at the bottom of the ionization chamber and is connected with an ionization power supply, and the cathode target and the maintaining electrode are kept insulated and isolated; the magnet assembly is arranged at the bottom of the cathode target and used for generating a strong magnetic field in the ionization chamber; during work, working gas is introduced into the ionization chamber, the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and the electric field to generate plasma; the negative electrons in the plasma are output through an electron output port arranged in the ionization chamber under the action of a maintaining electrode; the technical scheme has the advantages of simple structure and convenient maintenance, and improves the ionization efficiency by using a strong magnetic field; and the cathode target can use various metals and high-temperature-resistant rare metals, so that adverse effects such as pollution and the like on products are avoided.
Description
Technical Field
The application relates to the technical field of ion source equipment, in particular to a direct current cathode neutralizer.
Background
The ion source is an applied scientific technology which has wide application, multiple types, multiple related sciences, strong technological property and rapid development. The ion source is a device for outputting positive ion beams, and positive charges accumulated in the space can cause space ignition if not neutralized and eliminated in time, so that the use effect of the product is seriously influenced. Therefore, a neutralizer is needed to be used with the ion source, and the working effect of the ion source is directly influenced by the neutralizer.
Common neutralizers include filament-type neutralizers, plasma bridge neutralizers, hollow cathode neutralizers, and radio frequency neutralizers. The filament type neutralizer generates electrons by heating the filament, has a simple structure, is short in working time and cannot work in an active gas environment; the plasma bridge neutralizer ionizes inert gas through a hot filament to generate electrons, and the working time can reach dozens of hours; the hollow cathode neutralizer is triggered by high voltage through a hollow cathode tube to generate electrons, and the working time can reach dozens of to hundreds of hours; the radio frequency neutralizer ionizes gas in a radio frequency mode, and then separates electrons through the electric field, so that the output of the electrons is realized, the working time is not limited by consumables and is generally more than 1000 hours.
At present, the cold cathode function can be realized only by using radio frequency, and the radio frequency neutralizer is a neutralizer with better use effect at present due to the stable characteristic and the suitability for being used in a neutralization environment below 2A; referring to fig. 1, fig. 1 is a schematic structural diagram of a conventional radio frequency neutralizer, which mainly comprises a housing, a gas isolation assembly, a radio frequency coil, a maintaining sheet and the like.
However, the traditional radio frequency neutralizer also has obvious technical defects, the radio frequency neutralizer can be realized only by matching the matching network for many times during starting, and the matching process needs to be continuously adjusted, so that the starting difficulty is high; in addition, the requirement on the environment is high, and the starting failure can be caused by small environmental change; and the structure is complex and the maintenance is difficult.
Disclosure of Invention
In view of the above, it is necessary to provide a dc cathode neutralizer for overcoming the technical drawbacks of difficult start-up, complicated structure and difficult maintenance.
A direct current cathode neutralizer comprising: an ionization chamber, a cathode target, a sustaining pole and a magnet assembly; the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; the cathode target is arranged at the bottom of the ionization chamber and is connected with an ionization power supply, and the cathode target is insulated and isolated from the maintaining electrode; the magnet assembly is arranged at the bottom of the cathode target and used for generating a strong magnetic field in the ionization chamber;
during work, working gas is introduced into the ionization chamber, the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and an electric field to generate plasma;
and the negative electrons in the plasma are output through an electron output port arranged in the ionization chamber under the action of the maintaining electrode.
In one embodiment, the dc cathode neutralizer further comprises a sustaining power supply connected to the sustaining electrode and an ionizing power supply connected to the ionizing electrode; the positive end of the maintaining power supply is connected with the maintaining electrode, and the negative end of the maintaining power supply is connected with the ionization electrode; and the negative end of the ionization power supply is connected with the ionization electrode, and the positive end is grounded.
In one embodiment, the dc cathode neutralizer is configured such that, in operation, the ionization electrode is connected to the ionization power supply, the sustain electrode is connected to the sustain power supply, a start voltage is output to the cathode target and the sustain electrode ionizes the working gas, and the sustain power supply outputs a sustain voltage to the sustain electrode after the current reaches a set current value.
In one embodiment, the starting voltage is 1000V, the setting current value is 100-200mA, and the maintaining voltage is 200-500V.
In one embodiment, the magnet assembly includes a cylindrical magnet, and a ring magnet disposed around the cylindrical magnet.
In one embodiment, the direct current cathode neutralizer further comprises a metal water-cooling body shell arranged at the lower part of the cathode target, and the metal water-cooling body shell is connected with the cathode target through a copper sealing heat-conducting component; the magnet assembly is embedded in the middle of the metal water cooling body shell; the metal water-cooling body shell is provided with an ionization electrode connecting point for connecting an ionization power supply, and a water-cooling loop is arranged inside the metal water-cooling body shell and used for heat dissipation.
In one embodiment, the dc cathode neutralizer further comprises a base; the metal water cooling body shell is installed on the base through an insulating block, and the bottom of the base is connected with a sealing connecting piece for sealing and insulating with a vacuum environment.
In one embodiment, the dc cathode neutralizer further comprises a gas supply pipeline arranged in the base, the insulating block and the metal water-cooling body shell, wherein the gas supply pipeline penetrates through the copper sealing heat-conducting component and is used for accessing working gas and conveying the working gas to the ionization chamber.
The direct current cathode neutralizer in one embodiment further comprises a metal shell, wherein the upper part of the metal shell is isolated from the maintaining electrode through a second isolating part; the inner side surface of the metal shell is isolated from the ionization chamber and the metal water-cooling body shell through a third isolation part.
In one embodiment, the metal housing is a stainless steel housing; the metal water cooling body shell is a stainless steel water cooling shell; the first isolation component, the second isolation component and the third isolation component are made of isolation quartz.
The technical scheme of this application has following beneficial effect:
the direct-current ionization power supply is utilized to generate an electric field in an ionization region, the magnet assembly ionization region is utilized to generate a strong magnetic field, the ionization region ionizes working gas under the combined action of the strong magnetic field and the electric field to generate plasma, and negative electrons in the plasma are output under the action of a maintaining electrode; the technical scheme breaks through the cold cathode function which can be realized only by using radio frequency originally, uses a strong magnetic field to act on the surface of a cathode target material, realizes low-voltage ionization, generates plasma, separates ions and electrons by the electric field and outputs the electrons, and the neutralizer has a simple structure and is convenient to maintain, and improves the ionization efficiency by using the strong magnetic field; and the cathode target can use various metals and high-temperature-resistant rare metals, so that adverse effects such as pollution and the like on products are avoided.
Drawings
FIG. 1 is a schematic diagram of a conventional RF neutralizer;
FIG. 2 is a schematic diagram of a DC cathode neutralizer according to one embodiment;
FIG. 3 is a schematic circuit diagram of a DC cathode neutralizer;
FIG. 4 is a cross-sectional view of a DC cathode neutralizer;
FIG. 5 is a schematic three-dimensional cross-sectional view of a DC cathode neutralizer.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The term "comprises" and any other variations of the embodiments of the present application are intended to cover non-exclusive inclusions. For example, a process, method, system, article, or apparatus that comprises a list of steps is not limited to only those steps or modules recited, but may alternatively include other steps or modules not recited, or that are inherent to such process, method, article, or apparatus.
Referring to fig. 2, fig. 2 is a schematic diagram of a dc cathode neutralizer according to an embodiment; the neutralizer comprises: an ionization chamber, a cathode target, a sustaining pole and a magnet assembly; the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; specifically, the ionization chamber may be composed of a cavity-shaped emitter and a cathode target, the emitter may also be realized by a maintenance sheet disposed on an upper portion of the ionization chamber, and the emitter and the cathode target form an electric field, the bottom and top positions are defined for convenience of description and according to the position of fig. 2, and no distinction is made in an actual product. The cathode target is arranged at the bottom of the ionization chamber and connected with an ionization power supply, the cathode target and the sustaining electrode are kept insulated and isolated, and the magnet assembly is arranged at the bottom of the cathode target and used for generating a strong magnetic field in the ionization chamber; the ionization chamber has an ionization region within which the other is ionized.
In the work, working gas (inert gas, generally argon) is introduced into the ionization chamber, the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and an electric field to generate plasma; then, positive ions and negative electrons in the plasma are separated under the action of the electric field of the maintaining electrode, wherein the positive ions are absorbed by the cathode target material, and the negative electrons are output through an electron output port arranged at the upper part of the ionization chamber under the action of the electric field of the maintaining electrode.
The technical scheme of this embodiment has broken through the cold cathode function that originally could only realize using the radio frequency, uses high-intensity magnetic field effect on the cathode target surface, realizes the low pressure ionization, produces plasma, rethread electric field separation ion and electron and with electron output, this neutralizer simple structure, it is convenient to maintain, uses high-intensity magnetic field to improve ionization efficiency. And the cathode target can use various metals and high-temperature-resistant rare metals, so that adverse effects such as pollution and the like on products are avoided.
Compared with the traditional radio frequency neutralizer, the direct current cathode neutralizer designed by the technology simplifies the equipment structure of the neutralizer, can realize the electronic output below 2A, is easy to start, has low requirement on the starting environment, and is easy to maintain.
Based on the techniques provided herein, further embodiments of the dc cathode neutralizer structures of the present application are provided below.
In one embodiment, referring to fig. 3 for a circuit configuration portion, fig. 3 is a circuit schematic of a dc cathode neutralizer; the direct current cathode neutralizer comprises a maintaining power supply and an ionizing power supply, wherein the maintaining power supply is connected with a maintaining electrode, and the ionizing power supply is connected with an ionizing electrode; wherein, the positive terminal of the maintaining power supply is connected with the maintaining electrode, and the negative terminal is connected with the ionization electrode; the negative end of the ionization power supply is connected with the ionization electrode, and the positive end is grounded; the ionization electrode is connected with the cathode target material, and the ionization electrode connection point can be arranged on the cathode target material or other positions. The cathode target material may be selected by the user of this patent, and may be a conductive plate made of a metal material.
Preferably, in operation, the ionization electrode is connected with the ionization power supply, the sustain electrode is connected with the sustain power supply, the start voltage (such as about 1000V) is output to the cathode target and the sustain electrode ionization working gas, and the sustain power supply outputs the sustain voltage (200-.
The scheme of this embodiment utilizes strong magnetic field and electric field combined action to produce plasma to realized the function of cold cathode output electron, use strong magnetic field to make plasma more lively, improved ionization efficiency.
Referring to fig. 4 and 5, fig. 4 and 5 are schematic diagrams of a dc cathode neutralizer configuration; wherein, fig. 4 is a cross-sectional view of the direct current cathode neutralizer, and fig. 5 is a three-dimensional cross-sectional view of the direct current cathode neutralizer.
In one embodiment, the magnet assembly comprises a cylindrical magnet and a ring-shaped magnet sleeved on the cylindrical magnet; a metal water-cooling body shell is arranged at the lower part of the cathode target material, and the metal water-cooling body shell is connected with the cathode target material through a copper sealing heat-conducting component; the magnet assembly is embedded in the middle of the metal water cooling body shell; the ionization pole tie point can set up on the metal water-cooling body shell, connects the ionization power supply of direct current for connect the ionization power supply, the inside water-cooling return circuit that is equipped with of metal water-cooling body shell is used for the heat dissipation, ensures that equipment is not overheated.
In addition, the direct current cathode neutralizer can also comprise a base; wherein, the metal water-cooling body shell passes through the collets and installs on the base, and the bottom of base is connected with sealing connecting piece for with vacuum environment seal insulation, sealing connecting piece as the part of fixed direct current cathode neutralizer, a connecting rod can be connected to it, the length of connecting rod can be adjusted according to the vacuum chamber environment.
Further, the direct current cathode neutralizer can further comprise a gas supply pipeline, for the gas supply pipeline, the scheme of the embodiment is that the gas supply pipeline is arranged inside the neutralizer, namely the gas supply pipeline is arranged in the base, the insulating block and the metal water-cooling body shell, and the gas supply pipeline penetrates through the copper sealing heat-conducting component and is used for connecting working gas and conveying the working gas to the ionization chamber; the gas supply line can be accessed through a sealing connector to ensure that the vacuum chamber is kept sealed.
Furthermore, the direct current cathode neutralizer can also comprise a metal shell, wherein the metal shell is used as a part for protecting the whole neutralizer and needs to be kept insulated from an internal maintaining electrode, a metal water cooling body shell and the like, and accordingly, the upper part of the metal shell is separated from the maintaining electrode through a second separating part; the inner side surface of the metal shell is isolated from the ionization chamber (the maintaining electrode) and the metal water-cooling body shell through a third isolation part; in this embodiment, the metal housing may be a stainless steel housing; the metal water-cooling body shell can be a stainless steel water-cooling shell; the first isolation component, the second isolation component, the third isolation component and the like adopt isolation quartz. The internal structure of the equipment is protected by the metal shell, and the structure ensures insulation with the vacuum chamber environment.
The above-mentioned embodiments only express several embodiments of the present application, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the concept of the present application, which falls within the scope of protection of the present application. Therefore, the protection scope of the present patent shall be subject to the appended claims.
Claims (10)
1. A direct current cathode neutralizer, comprising: an ionization chamber, a cathode target, a sustaining pole and a magnet assembly; the maintaining electrode is arranged at the upper part of the ionization chamber and is connected with a maintaining power supply; the cathode target is arranged at the bottom of the ionization chamber and is connected with an ionization power supply, and the cathode target is insulated and isolated from the maintaining electrode; the magnet assembly is arranged at the bottom of the cathode target and used for generating a strong magnetic field in the ionization chamber;
during work, working gas is introduced into the ionization chamber, the magnet assembly generates a strong magnetic field in an ionization region of the ionization chamber, and the ionization region ionizes the working gas under the combined action of the strong magnetic field and an electric field to generate plasma;
and the negative electrons in the plasma are output through an electron output port arranged in the ionization chamber under the action of the maintaining electrode.
2. The direct current cathode neutralizer according to claim 1, further comprising a sustaining power source connected to the sustaining electrode and an ionizing power source connected to the ionizing electrode; the positive end of the maintaining power supply is connected with the maintaining electrode, and the negative end of the maintaining power supply is connected with the ionization electrode; and the negative end of the ionization power supply is connected with the ionization electrode, and the positive end is grounded.
3. The dc cathode neutralizer according to claim 1, wherein in operation, the ionizing electrode turns on the ionizing power supply, the sustain electrode turns on the sustain power supply, the start voltage is output to the cathode target and the sustain electrode ionizes the working gas, and the sustain power supply outputs the sustain voltage to the sustain electrode after the current reaches the set current value.
4. The DC cathode neutralizer according to claim 3, wherein the start voltage is 1000V, the set current value is 100-200mA, and the sustain voltage is 200-500V.
5. The direct current cathode neutralizer according to claim 1, wherein the magnet assembly comprises a cylindrical magnet, and a ring magnet sleeved on the cylindrical magnet.
6. The direct current cathode neutralizer according to claim 5, further comprising a metal water-cooling body housing disposed at a lower part of the cathode target, wherein the metal water-cooling body housing is connected with the cathode target through a copper-sealed heat-conducting member; the magnet assembly is embedded in the middle of the metal water cooling body shell; the metal water-cooling body shell is provided with an ionization electrode connecting point for connecting an ionization power supply, and a water-cooling loop is arranged inside the metal water-cooling body shell and used for heat dissipation.
7. The direct current cathode neutralizer according to claim 6, further comprising a base; the metal water cooling body shell is installed on the base through an insulating block, and the bottom of the base is connected with a sealing connecting piece for sealing and insulating with a vacuum environment.
8. The direct current cathode neutralizer according to claim 7, further comprising a gas supply line built in the base, the insulating block, and the metal water-cooling body housing, wherein the gas supply line penetrates through the copper-sealed heat conducting member for receiving a working gas and delivering the working gas to the ionization chamber.
9. The direct current cathode neutralizer according to claim 8, further comprising a metal casing, wherein an upper portion of the metal casing is isolated from the sustain electrode by a second isolation member; the inner side surface of the metal shell is isolated from the ionization chamber and the metal water-cooling body shell through a third isolation part.
10. The dc cathode neutralizer according to claim 9, wherein the metal casing is a stainless steel casing; the metal water cooling body shell is a stainless steel water cooling shell; the first isolation component, the second isolation component and the third isolation component are made of isolation quartz.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110085601.7A CN112908818B (en) | 2021-01-22 | 2021-01-22 | DC cathode neutralizer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110085601.7A CN112908818B (en) | 2021-01-22 | 2021-01-22 | DC cathode neutralizer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112908818A true CN112908818A (en) | 2021-06-04 |
| CN112908818B CN112908818B (en) | 2023-07-04 |
Family
ID=76118332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110085601.7A Active CN112908818B (en) | 2021-01-22 | 2021-01-22 | DC cathode neutralizer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112908818B (en) |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013099044A1 (en) * | 2011-12-28 | 2013-07-04 | キヤノンアネルバ株式会社 | Ion beam processing device and neutralizer |
| US20150041432A1 (en) * | 2013-08-12 | 2015-02-12 | Tokyo Electron Limited | Self-sustained non-ambipolar direct current (dc) plasma at low power |
| CN109681399A (en) * | 2018-12-12 | 2019-04-26 | 上海航天控制技术研究所 | A kind of minor diameter efficient microwave ECR averager |
-
2021
- 2021-01-22 CN CN202110085601.7A patent/CN112908818B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2013099044A1 (en) * | 2011-12-28 | 2013-07-04 | キヤノンアネルバ株式会社 | Ion beam processing device and neutralizer |
| US20150041432A1 (en) * | 2013-08-12 | 2015-02-12 | Tokyo Electron Limited | Self-sustained non-ambipolar direct current (dc) plasma at low power |
| CN109681399A (en) * | 2018-12-12 | 2019-04-26 | 上海航天控制技术研究所 | A kind of minor diameter efficient microwave ECR averager |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112908818B (en) | 2023-07-04 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN112908817B (en) | Radio frequency cathode neutralizer | |
| EP0977904A4 (en) | Plasma processing system utilizing combined anode/ion source | |
| US2920235A (en) | Method and apparatus for producing intense energetic gas discharges | |
| JP2000054951A (en) | Electrostatic power unit | |
| TW200406136A (en) | Plasma processing apparatus | |
| CN103298233A (en) | Novel high-density negative pole plasma source | |
| US6975072B2 (en) | Ion source with external RF antenna | |
| US4766351A (en) | Starter for inductively coupled plasma tube | |
| RU2270491C2 (en) | High-frequency neutron source such as neutralizer | |
| US4728862A (en) | A method for achieving ignition of a low voltage gas discharge device | |
| US7947965B2 (en) | Ion source for generating negatively charged ions | |
| CN112908818A (en) | DC cathode neutralizer | |
| KR20070101067A (en) | Compound plasma source and method for dissociating gases using the same | |
| JP3454384B2 (en) | Ion beam generator and method | |
| JPH0559536B2 (en) | ||
| RU2035789C1 (en) | Process of generation of beam of accelerated particles in technological vacuum chamber | |
| Kovarik et al. | Initiation of hot cathode arc discharges by electron confinement in Penning and magnetron configurations | |
| JP2000090844A (en) | Ion source | |
| JP2806641B2 (en) | High frequency inductively coupled plasma mass spectrometer | |
| JPH0837098A (en) | Plasma generating device | |
| JP2671730B2 (en) | Plasma lighting device | |
| JPH0650110B2 (en) | RF ion source | |
| JPH09259781A (en) | Ion source device | |
| GB953524A (en) | Plasma switching electric discharge tube | |
| US3101431A (en) | Sputter ion protective apparatus |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |