JP2001353683A5 - - Google Patents
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- Publication number
- JP2001353683A5 JP2001353683A5 JP2001103055A JP2001103055A JP2001353683A5 JP 2001353683 A5 JP2001353683 A5 JP 2001353683A5 JP 2001103055 A JP2001103055 A JP 2001103055A JP 2001103055 A JP2001103055 A JP 2001103055A JP 2001353683 A5 JP2001353683 A5 JP 2001353683A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001103055A JP3994372B2 (ja) | 2000-04-13 | 2001-04-02 | 空気保持装置 |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000-112605 | 2000-04-13 | ||
| JP2000112605 | 2000-04-13 | ||
| JP2001103055A JP3994372B2 (ja) | 2000-04-13 | 2001-04-02 | 空気保持装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001353683A JP2001353683A (ja) | 2001-12-25 |
| JP2001353683A5 true JP2001353683A5 (he) | 2005-08-11 |
| JP3994372B2 JP3994372B2 (ja) | 2007-10-17 |
Family
ID=26590086
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001103055A Expired - Fee Related JP3994372B2 (ja) | 2000-04-13 | 2001-04-02 | 空気保持装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3994372B2 (he) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7260959B2 (en) | 2004-08-27 | 2007-08-28 | Corning Incorporated | Glass handling system and method for using same |
| JP4538849B2 (ja) * | 2005-05-31 | 2010-09-08 | 村田機械株式会社 | 非接触保持装置 |
| JP4847719B2 (ja) * | 2005-06-14 | 2011-12-28 | 株式会社妙徳 | 非接触ハンド |
| JP4607910B2 (ja) * | 2007-01-16 | 2011-01-05 | 東京エレクトロン株式会社 | 基板搬送装置及び縦型熱処理装置 |
| JP4740414B2 (ja) * | 2007-04-24 | 2011-08-03 | 東京エレクトロン株式会社 | 基板搬送装置 |
| JP5046009B2 (ja) * | 2007-05-15 | 2012-10-10 | 圭三 大谷 | ノンコンタクト搬送パッド |
| DE102009051567A1 (de) * | 2009-10-22 | 2011-04-28 | Alexander Borowski | Bernoulli-Düse, Greifervorrichtung mit Bernoulli-Düse und Verfahren zur Herstellung |
| CN103277644B (zh) * | 2013-05-20 | 2015-11-18 | 哈尔滨工业大学 | 多轴支撑气浮平台 |
| JP2020044603A (ja) * | 2018-09-18 | 2020-03-26 | 東洋自動機株式会社 | 物品移送方法及び物品移送装置 |
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2001
- 2001-04-02 JP JP2001103055A patent/JP3994372B2/ja not_active Expired - Fee Related