JP2001346386A5 - - Google Patents
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- Publication number
- JP2001346386A5 JP2001346386A5 JP2000162714A JP2000162714A JP2001346386A5 JP 2001346386 A5 JP2001346386 A5 JP 2001346386A5 JP 2000162714 A JP2000162714 A JP 2000162714A JP 2000162714 A JP2000162714 A JP 2000162714A JP 2001346386 A5 JP2001346386 A5 JP 2001346386A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000162714A JP4529237B2 (ja) | 2000-05-31 | 2000-05-31 | 振動アクチュエータ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2000162714A JP4529237B2 (ja) | 2000-05-31 | 2000-05-31 | 振動アクチュエータ |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2001346386A JP2001346386A (ja) | 2001-12-14 |
| JP2001346386A5 true JP2001346386A5 (ja) | 2007-05-31 |
| JP4529237B2 JP4529237B2 (ja) | 2010-08-25 |
Family
ID=18666579
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000162714A Expired - Lifetime JP4529237B2 (ja) | 2000-05-31 | 2000-05-31 | 振動アクチュエータ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4529237B2 (ja) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2019030091A (ja) | 2017-07-28 | 2019-02-21 | セイコーエプソン株式会社 | 圧電駆動装置、圧電駆動装置の駆動方法、ロボット、電子部品搬送装置、プリンター、及び、プロジェクター |
| JP2022070448A (ja) | 2020-10-27 | 2022-05-13 | セイコーエプソン株式会社 | 圧電駆動装置及びロボット |
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2000
- 2000-05-31 JP JP2000162714A patent/JP4529237B2/ja not_active Expired - Lifetime