JP2001343539A - Optical waveguide element - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an optical waveguide element which has low loss, high performance and high reliability by using a reactive oligomer described hereunder. SOLUTION: The material hardened by polymerizing the reactive ligomer which is expressed by a general structural formula described hereunder (a), therein, R1, R2 are substituents such as alkyl group, or a mixture containing the said reactive oligomer and a reactive oligomer having an epoxy ring are used for core and clad. As the optical waveguide element of high quality is conveniently provided, various optical transmission systems which are used in the field of general optics and micro optics and, further, in the field of light communication and optical information processing are inexpensively introduced by using this element.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an optical waveguide device, more particularly, to various optical integrated circuits or optical wiring boards used in the fields of general optics and micro-optics, and in the fields of optical communication and optical information processing. The present invention relates to an optical waveguide device that can be used.

[0002]

2. Description of the Related Art Optical waveguides used in the field of optical information processing and optical communication have been actively studied in recent years with the aim of integration, miniaturization, high functionality, and low cost. Actually, silica-based optical waveguide devices have been put to practical use in a part of the optical communication field. (Literature: Masao Kawachi, NTTR & D vol.43
No. 11 p. 101 (1994)). In addition, studies are being actively conducted on a polymer waveguide in which a simple manufacturing method can be selected using an inexpensive material.

As a method of manufacturing an optical waveguide made of a polymer material, a photo-locking method or a selective light weight method in which a monomer is included in a polymer material and reacted with the monomer by light irradiation to produce a refractive index difference from a non-irradiated portion. Legal (Kurokawa et al., Applied Optics, Vol. 17, p. 646, 1978)
), Application of methods used in semiconductor processing such as lithography and etching (Imamura et al., Electronics Letter, 27
Vol. 1342, 1991), a method using a polymerizable polymer or a resist (Trewela et al., SPIE11).
77, p. 379, 1989).

[0004] In particular, a method of forming a core ridge using a polymerizable polymer to form a waveguide is simple and suitable for cost reduction. Problems such as poor uniformity and reproducibility, substituents that increase absorption loss after the polymerization reaction, for example, OH groups remain, resulting in poor loss, and high water absorption, resulting in insufficient reliability. There is a point, and an optical waveguide having optical characteristics and reliability comparable to those of a silica-based optical waveguide device has not been manufactured.

The present invention has been made in view of such circumstances, and an object of the present invention is to realize an optical waveguide device which simultaneously satisfies low cost, high performance, and high reliability by using a polymer material. It is in.

[0006]

SUMMARY OF THE INVENTION The present invention overcomes these disadvantages by using a reactive oligomer having the following general structural formula (a) to realize an optical waveguide device having low loss, high performance and high reliability. This is the solution.

General structural formula (a)

(Where R1 and R2 are an alkyl group, an alkoxy group, an ether group, a carboxyl group, an amino group, an aldehyde group, an epoxy ring, an aromatic ring, a heterocyclic ring, an oxetane ring, a fluorohydrocarbon group, a fluorohydrocarbon group, A substituent containing one or more of a carbonyl group and a thiocarbonyl group)

Is obtained by curing a polymerizable mixture composed of a mixture containing at least one or more reactive oligomers represented by the formula (I) and a polymerization initiator capable of initiating polymerization of the mixture by heat or light. It is characterized in that a polymer film is used for one or both of a core and a clad.

According to the present invention, a high-quality optical waveguide device can be easily realized, and by using the device of the present invention, it can be used in the fields of general optics and micro optics, and in the fields of optical communication and optical information processing. Various optical transmission systems can be introduced at low cost.

The present invention will be described in more detail. The present invention uses the reactive oligomer of the general structural formula (a) as described above.

General structural formula (a)

(Where R1 and R2 are an alkyl group, an alkoxy group, an ether group, a carboxyl group, an amino group, an aldehyde group, an epoxy ring, an aromatic ring, a heterocyclic ring, an oxetane ring, a fluorohydrocarbon group, a fluorohydrocarbon group, A substituent containing one or more of a carbonyl group and a thiocarbonyl group)

The compounds of the general structural formula (a) are generally called oxetanes, and specifically, 3-ethyl-3-hydroxymethyloxetane, 3-ethyl-3- (phenoxymethyl) oxetane, 4-bis ((3Å, ethyl-3-oxetanyl) methoxy) methyl) benzene, di (1-ethyl (3-oxetanyl)) methyl ether,
Reactive oligomers such as 3-ethyl-3- (2-ethylhexylomethyl) oxetane are exemplified.

The reactive oligomer used for the optical waveguide of the present invention is polymerized by polymerizing by a reaction between the reactive groups contained in the components. A photopolymerization initiator is added in order to cause the reaction to occur efficiently and sufficiently. Any photopolymerization initiator may be used as long as it is generally used as a photopolymerization initiator.A known compound known to be effective for epoxy resins such as diazonium salts, sulfonium salts, iodonium salts, and selenium salts may be used. Can be selected and used.

The diazonium salt can be represented by Ar-N2 + X-. As Ar, for example, ortho, meta,
Para nitrophenyl, methoxyphenyl, 2,5-
Dichlorophenyl, p- (n-morpholino) phenyl,
X- represents an anion, for example, BF4-, FeCl4-, PF6-, AsF.
6-, SbF6- and the like.

As the sulfonium salt, for example, bis [4
-(Diphenylsulfonium) phenyl] sulfide-
Bis-hexafluorophosphate, bis- [4- (diphenylsulfonyl) phenyl] sulfide-bis-hexafluoroantimonate, etc.
No. 688, page 15, line 24 to page 18, line 1
The compounds described in the line can be used.

As the iodonium salt, for example, di- (4-
In addition to tert-butylphenyl) iodonium hexafluorophosphate, di- (4-tert-butylphenyl) iodonium hexafluoroantimonate and the like, JP-B-59-42688, page 11, line 28 to page 12 The compounds described in line 30 can be used.

The selenium salts include triphenylselenium hexafluoroantimonate, 4-tert-butylphenyldiphenyltetrafluoroborate,
3-dimethylphenyldiphenylantimonate and the like.

Examples of the compound used by mixing with the compound represented by the general structural formula (a) include compounds containing an epoxy ring in addition to oxetanes of the same kind. By light curing
A cured product excellent in heat resistance and moisture resistance can be obtained.

Examples of compounds containing an ethoxy ring include:
3,4-epoxycyclohexylmethyl-3,4-epoxycyclohexanecarboxylate, 3,4-epoxycyclohexylethyl-8,4-epoxycyclohexanecarboxylate, vinylcyclohexene dioxide, allylcyclohexene dioxide, 8,4-epoxy- 4-methylcyclohexyl-2-propylene oxide, 2- (3,4-epoxycyclohexyl-5,5-
Spiro-3,4-epoxy) cyclohexane-m-dioxane, bis (3,4-epoxycyclohexyl) adipate, bis (3,4-epoxycyclohexylmethyl) adipate, bis (3,4-epoxycyclohexyl) ether, bis (3 Aliphatic cyclic epoxy compounds such as 3,4-epoxycyclohexylmethyl) ether and bis (3,4-epoxycyclohexyl) diethylsiloxane, polybutadiene diglycidyl ether, poly-1,
4- (2,3-epoxybutane) -CO-1,2-
(8,4-epoxy) -CO-1,4-butadienediol, neopentyl glycol diglycidyl ether,
1,6-hexanediol diglycidyl ether, polyethylene glycol diglycidyl ether, polypropylene glycol diglycidyl ether, dibromoneopentyl glycol diglycidyl ether, glycidyl o-phthalate, trimethylolpropane polyglycidyl ether, diglycerol polyglycidyl ether, Polyglycerol polyglycidyl ether, sorbitol polyglycidyl ether, allyl glycidyl ether, 2-ethylhexyl glycidyl ether, phenyl glycidyl ether, phenol penta (oxyethylene) glycidyl ether, p-tert-butylphenyl glycidyl ether, dibromophenyl glycidyl ether, lauryl alcohol Pentadeca (oxyethylene) glycidyl Ether, sorbitan polyglycidyl ether, Pentaerisuri 4 Torr polyglycidyl ether, triglycidyl tris (2-hydroxyethyl)
Isocyanurate, resorcin diglycidyl ether,
Polytetramethylene glycol diglycidyl ether,
Adipic acid diglycidyl ester, hydroquinone diglycidyl ether, bisphenol S diglycidyl ether, terephthalic acid diglycidyl ester, glycidyl phthalimide, dibromophenyl glycidyl ether, dibromoneopentyl glycol diglycidyl ether,
Cetyl glycidyl ether, stearyl glycidyl ether, p-octylphenyl glycidyl ether, p-
Phenyl phenyl glycidyl ether, glycidyl benzoate, glycidyl acetate, glycidyl butyrate, spiro glycol diglycidyl ether, reduced malto-s-polyglycidyl ether, bisphenol A diglycidyl ether, hydrogenated bisphenol A diglycidyl ether, bisphenol F diglycidyl ether, bisphenol G diglycidyl ether, tetramethylbisphenol A diglycidyl ether, bisphenol hexafluoroacetone diglycidyl ether, bisphenol C diglycidyl ether, 1,3-bis (1-
(2,3-epoxypropoxy) -1-trifluoromethyl-2,2,2-trifluoroethyl) benzene,
1,4-bis (1- (2,3-epoxypropoxy)-
1-trifluoromethyl-2,2,2-trifluoroethyl) benzene, 4,4′-bis (2,3-epoxypropoxy) octafluorobiphenyl, tetraglycidyl-m-xylylenediamine, tetraglycidyldiaminodiphenylmethane, Triglycidyl-paraaminophenol, triglycidyl-metaaminophenol, diglycidylaniline, diglycidyltribromoaniline,
Epoxy compounds such as tetraglycidyl bisaminomethylcyclohexane, tetrafluoropropyl glycidyl ether, octafluoropentyl glycidyl ether, dodecafluorooctyl diglycidyl ether, styrene oxide, limonene diepoxide, limonene monoxide, α-pinene epoxide, β-pinene epoxide Is mentioned.

In the present invention, a polymerizable substance containing a reactive oligomer having the above structural formula (a) is used for one or both of a core and a clad of an optical waveguide.

(1) This polymerizable substance is cured to form a clad first, and the polymerizable substance which has a higher refractive index when cured from the clad is applied, and this is irradiated with light through a mask or directly. A latent image is formed on the pattern by removing the unirradiated portion with a solvent to form a pattern, and this portion is used as a core portion through which light passes, and when it is further cured, the refractive index is higher than that of the core portion. An optical waveguide can be manufactured by a method of applying a polymerizable substance to be lowered and forming an upper clad by irradiating ultraviolet rays.

(2) As another waveguide forming method, first, a lower clad layer and a flat film of a core layer are stacked, a core layer is patterned by a photoresist process, and a core ridge is formed by reactive ion etching. It is also possible to form and then cover the upper clad to form a waveguide structure.

The present inventors have found that the polymerizable substance containing the reactive oligomer is capable of forming a pattern by the method described in the above (1), and that the polymerizable substance can be compared with a conventional polymerizable substance. The present invention has been completed by utilizing the extremely excellent formability.

That is, the present invention is based on the fact that a pattern having steep and smooth wall surfaces can be formed by curing a film by light irradiation and developing with a suitable solvent, and this pattern is used for a core ridge of a waveguide. This realizes the optical waveguide device of the present invention. Conventionally,
With this type of ridge pattern forming method, it is difficult to form a thick film and poor reproducibility of processing, but it is possible to form a pattern with good reproducibility.

Further, in the method of forming an optical waveguide described in the above (2), that is, a method of forming a core ridge by reactive ion etching and then covering the upper clad to form a waveguide structure, an optical waveguide having a smooth etched surface is manufactured. It turned out to be possible.

The effectiveness of the present invention will be listed below.

(1) The polymerizable substance containing the reactive oligomer of the structural formula (a) in the present invention is a liquid before being cured and can have high uniformity. It is possible to realize a waveguide that has excellent resolution even when a film that is cured by light irradiation is obtained and has a sufficient resolution even when the film is thickened, and that has small scattering loss and the like.

(2) Since the polymerizable substance containing the reactive oligomer of the structural formula (a) in the present invention is a liquid before being cured, it can be flattened even if it has uneven portions, Therefore, it is easy to form a film corresponding to various shapes, and various optical waveguide devices can be manufactured.

(3) Since the oligomer of the polymerizable substance of the general structural formula (a) in the present invention is randomly linked and cured, an optical waveguide having a small birefringence can be realized.

(4) Since the polymerizable substance containing the reactive oligomer of the structural formula (a) in the present invention is adjusted by mixing several kinds of oligomer materials, the core and the clad constituting the optical waveguide device of the present invention are prepared. Since the refractive index can be controlled in a wide range, various optical waveguide elements from a multi-mode waveguide to a single-mode waveguide can be obtained.

(5) Since the reactive oligomer of the general structural formula (a) in the present invention does not generate an OH group during the ring-opening reaction, the absorption loss of the OH group is small in the near infrared region (around 1.4 μm). The optical waveguide according to the present invention can reduce the loss.

(6) The reactive oligomer of the structural formula (a) in the present invention does not generate an OH group during the ring-opening reaction and is rich in hydrophobicity, so that it has a low water absorption and can be used in an environment such as constant temperature and humidity. It is possible to realize a highly reliable optical waveguide device.

[0035]

EXAMPLES The present invention will be described more specifically with reference to examples, but the present invention is not limited to these examples.

[0036]

Example 1 One component (10 wt%) of a reactive oligomer having the structural formula (1) shown below, bisphenol A
Diglycidyl ether (30 wt%), 4-epoxy-
4-methylcyclohexyl-2-propylene oxide (40 wt%) allyl glycidyl ether (18 wt
%) And a polymerizable resin prepared by adjusting 2% by weight of a photopolymerization initiator, prepared by spin coating, and photocured to obtain a lower clad 10. (See FIG. 1a). The refractive index of this cured product was 1.53 at a wavelength of 0.85 μm.

Next, one component (10 wt%) of a reactive oligomer having the same structure, bisphenol A diglycidyl ether (40 wt%), 4-epoxy-4-methylcyclohexyl-2-propylene oxide (30 wt%)
Polymerizable resin for core 12 containing a mixture of allyl glycidyl ether (18 wt%) and 2 wt% of photopolymerization initiator
Was prepared and applied on the lower clad 10 (see FIG. 1b).

Thereafter, as shown in FIG. 1C, UV light 14 was irradiated through a mask 13 having a waveguide pattern.
The irradiation amount was 2000 mJ / cm2. Thereafter, when this sample was developed with an organic solvent, the mixture of the liquid reactive oligomers was cured only in the light-irradiated portions according to the pattern of the mask 13, and a ridge pattern 15 having a shape as shown in FIG.

The refractive index after curing is 1. at a wavelength of 0.85 μm.
545. Thereafter, the polymerizable resin for cladding used in forming the lower clad was applied to the ridge pattern and cured to form the clad 16, thereby producing a waveguide. By this operation, the clad 1 made of resin having a refractive index of 1.52
A multi-mode channel waveguide 18 (40 μm in depth and 40 μm in width) having a core 17 made of a UV-curable resin having a refractive index of 6, 1.545 was produced (see FIG. 1 e).

This optical waveguide is separated by a dicing saw into 5
cm, and the insertion loss was measured. The result was 0.5 dB or less at a wavelength of 0.85 μm and 1.5 dB at a wavelength of 1.3 μm.
dB or less. The polarization dependence of the insertion loss was 0.1 dB or less even at a wavelength of 1.3 μm.

Structural formula (1)

[0042]

Example 2 In the same manner as in Example 1, a reactive oligomer having the structural formula (1) was used as one component (10 wt%), bisphenol A diglycidyl ether (30 wt%),
Epoxy-4-methylcyclohexyl-2-propylene oxide (40 wt%) allyl glycidyl ether (1
(8 wt%) and a polymerizable resin prepared by adjusting 2 wt% of a photopolymerization initiator, were applied to a substrate, and were photo-cured to form a lower clad. The refractive index of this cured product was 1.525 at a wavelength of 1.3 μm.

Next, a reactive oligomer having the structural formula (1) was used as one component (10 wt%), bisphenol A diglycidyl ether (35 wt%), 4-epoxy-4-methylcyclohexyl-2-propylene oxide (35 wt%).
%) A mixture of allyl glycidyl ether (18 wt%) and a polymerizable resin containing 2 wt% of a photopolymerization initiator were applied by spin coating. Thereafter, UV light was applied through a mask having a Y-branch waveguide pattern. The irradiation amount is 2
000 mJ / cm2. Then, when this sample was developed with an organic solvent, the mixture of the reactive oligomers in a liquid state was hardened only in the light-irradiated portion according to the mask pattern.
A ridge pattern 20 having a Y-branch shape as shown in FIG.

The refractive index after curing is 1.5 at a wavelength of 1.3 μm.
35. Thereafter, the polymerizable resin used for the lower clad was applied to the ridge pattern and cured to produce a waveguide. By this operation, a single mode channel waveguide (6 μm in depth and 6 μm in width) having a clad made of a resin having a refractive index of 1.525 and a core made of a UV curable resin having a refractive index of 1.535 was produced.

This optical waveguide is separated by a dicing saw into 5
cm at a wavelength of 1.3 μm and 1.5 dB or less at 1.55 μm.
dB or less. The polarization dependence of the insertion loss was 0.1 dB or less even at a wavelength of 1.3 μm. 150 ° C
There was no remarkable increase in loss even at a high temperature, and there was sufficient heat resistance. Y-branch could be manufactured, but excess loss 0.2
The result was as good as around dB.

[0046]

Example 3 In the same manner as in Example 1, the reactive oligomer having the structural formula (2) was used as one component (10 wt%), bisphenol A diglycidyl ether (30 wt%),
Epoxy-4-methylcyclohexyl-2-propylene oxide (40 wt%) allyl glycidyl ether (1
(8 wt%) and a polymerizable resin prepared by adjusting 2 wt% of a photopolymerization initiator, were applied to a substrate, and were photo-cured to form a lower clad. The refractive index of this cured product was 1.535 at a wavelength of 1.3 μm.

Next, a reactive oligomer having the structural formula (2) was used as a component (10 wt%), bisphenol A diglycidyl ether (35 wt%), 4-epoxy-4-methylcyclohexyl-2-propylene oxide (35 wt%).
%) A mixture of allyl glycidyl ether (18 wt%) and a polymerizable resin containing 2 wt% of a photopolymerization initiator were applied by spin coating. Thereafter, UV light was applied through a mask having a Y-branch waveguide pattern. The irradiation amount is 2
000 mJ / cm2. Thereafter, when this sample was developed with an organic solvent, the mixture of the reactive oligomers in the liquid state was cured only in the light-irradiated portions according to the mask pattern, and a Y-branched ridge pattern could be produced.

The refractive index after curing is 1.5 at a wavelength of 1.3 μm.
45. Thereafter, the polymerizable resin used for the lower clad was applied to the ridge pattern and cured to produce a waveguide. By this operation, a single mode channel waveguide (6 μm in depth and 6 μm in width) having a cladding made of a resin having a refractive index of 1.535 and a core made of a UV curable resin having a refractive index of 1.545 was produced.

This optical waveguide is separated by a dicing saw into 5
cm at a wavelength of 1.3 μm and 1.5 dB or less at 1.55 μm.
dB or less. The polarization dependence of the insertion loss was 0.1 dB or less even at a wavelength of 1.3 μm. A good result was obtained with an excess loss of about 0.2 dB in the Y branch. Further 15
Even at a high temperature of 0 ° C., there was no remarkable increase in loss, and there was sufficient heat resistance. On the other hand, even under a constant temperature and constant humidity of 85 ° C. and 85% RH, there was no remarkable increase in loss, and there was sufficient environmental reliability.

Structural formula (2)

[0051]

Example 4 In the same manner as in Example 1, a reactive oligomer having the structural formula (2) was used as one component (10 wt%), bisphenol A diglycidyl ether (30 wt%),
Epoxy-4-methylcyclohexyl-2-propylene oxide (40 wt%) allyl glycidyl ether (1
(8 wt%) and a polymerizable resin prepared by adjusting the polymerization initiator to 2 wt%, were applied to a substrate, and thermally cured at 100 ° C. to form a lower clad. The refractive index of this cured product was 1.535 at a wavelength of 1.3 μm.

Next, one component (10 wt%) of the reactive oligomer having the structural formula (2), bisphenol A diglycidyl ether (35 wt%), 4-epoxy-4-methylcyclohexyl-2-propylene oxide (35 wt%)
%) A mixture of allyl glycidyl ether (18 wt%) and a polymerizable resin containing 2 wt% of a photopolymerization initiator were applied by spin coating. After that, it was similarly thermally cured. Next, the photoresist was patterned and dry-etched with oxygen gas using the resist as a mask to obtain a core ridge having a Y-branch waveguide pattern. The refractive index after fabrication was 1.545 at a wavelength of 1.3 μm.

Thereafter, the polymerizable resin used for the lower clad was applied to the ridge pattern and cured at 100 ° C. to produce a waveguide. By this operation, a single mode channel waveguide (6 μm in depth and 6 μm in width) having a cladding made of a resin having a refractive index of 1.535 and a core made of a resin having a refractive index of 1.545 was produced.

This optical waveguide is separated by a dicing saw into 5
cm at a wavelength of 1.3 μm and 1.5 dB or less at 1.55 μm.
dB or less. The polarization dependence of the insertion loss was 0.1 dB or less even at a wavelength of 1.3 μm. As for the branch, the excess loss was about 0.2 dB, which was a good result.

Further, even at a high temperature of 150 ° C., there was no remarkable increase in loss, and sufficient heat resistance was obtained. 85 ° C, 85% R
There was no remarkable increase in loss even under the constant temperature and humidity of H, and there was sufficient environmental reliability.

[0056]

Fifth Embodiment A cladding made of a resin having a refractive index of 1.535 and a core made of a resin having a refractive index of 1.545 are formed in the same manner by using light curing instead of heat curing using the same materials as in the fourth embodiment. A single mode channel waveguide having a depth of 6 μm, a width of 6 μm, and a length of 6 cm having the following characteristics was produced. 0.5 dB or less at 1.3 μm wavelength, 1.5 d at 1.55 μm
B or less.

The polarization dependence of the insertion loss is 1.3 wavelength.
Even at μm, it was 0.1 dB or less. Y-branch could be produced, and the excess loss was about 0.2 dB, which was a good result. Also 15
Even at a high temperature of 0 ° C., there was no remarkable increase in loss, and there was sufficient heat resistance.

On the other hand, even under a constant temperature and humidity condition of 85 ° C. and 85% RH, there was no remarkable increase in loss, and there was sufficient environmental reliability.
In addition, directional couplers, star couplers, optical waveguide type grating ring resonators, which are basic circuits of optical circuits,
MXN combined branching and the like could be produced.

[0059]

As described above, according to the present invention, a high-quality optical waveguide device can be easily realized, and by using the device of the present invention, the optical waveguide device can be used in general optics and micro optics, and in optical communication and optical communication. Various optical transmission systems used in the field of optical information processing can be introduced at low cost.

[Brief description of the drawings]

FIG. 1 shows a general manufacturing example of the present invention.

FIG. 2 shows a Y-branch core ridge according to the present invention.

DESCRIPTION OF SYMBOLS 10 Lower clad 11 Substrate 12 Polymerizable resin for core 13 Mask 14 UV light 15 Ridge pattern 16 Cladding 17 Core 18 Multi-mode channel waveguide 20 Ridge pattern of Y branch shape

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Toru Maruno 2-3-1 Otemachi, Chiyoda-ku, Tokyo Nippon Telegraph and Telephone Corporation (72) Inventor Koji Enbutsu 2-3, Otemachi, Chiyoda-ku, Tokyo No. 1 Nippon Telegraph and Telephone Corporation (72) Norio Murata Inventor F-term (reference) 2H047 QA05 TA42 in NTT Advanced Technology Co., Ltd. 2-1-1 Nishi-Shinjuku, Shinjuku-ku, Tokyo

Claims (2)

[Claims] 1. The following general structural formula (a) (However, R1 and R2 are an alkyl group, an alkoxy group, an ether group, a carboxyl group, an amino group, an aldehyde group, an epoxy ring, an aromatic ring, a heterocyclic ring, an oxetane ring, a fluorohydrocarbon group, a fluorohydrocarbon group, a carbonyl group, And a mixture containing at least one reactive oligomer represented by the formula (1), which is capable of initiating polymerization of the mixture by heat or light. An optical waveguide cable wherein a polymer film obtained by curing a polymerizable mixture composed of an agent and an agent is used for one or both of a core and a clad. 2. A mixture containing at least one or more of the reactive oligomers and one or more of the reactive oligomers having an epoxy ring, and a polymerization initiator capable of initiating polymerization of these reactive oligomers by heat or light. 2. The optical waveguide device according to claim 1, wherein a polymer film obtained by curing a polymerizable mixture composed of an agent and one or both of the core and the clad is used.