JP2001342559A - METHOD FOR MANUFACTURING Te ALLOY TARGETING MATERIAL - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a low melting Te alloy targeting material of high density and low oxygen value in a satisfactory yield. SOLUTION: The method for manufacturing the Te alloy targeting material is characterized by steps of manufacturing the Te alloy powder with a gas atomization method, cold-forming the powder by inserting it in a die set for cold forming, and then sintering the powder compact left in the die set in it.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for producing a Te-based alloy target material capable of obtaining a low-melting target material having a high density and a low oxygen value with a good yield.

[0002]

2. Description of the Related Art Conventionally, in a method of manufacturing a Te-based alloy target material, for example, in the case of a Ge-Sb-Te-based target material, a desired component is cast from a raw material containing Ge, Sb, and Te, and then crushed. A method of producing irregularly shaped powders by means of hot pressing or other means to densify the powders, or forming the powders by cold pressing and sintering them. The actual state is that after coarse pulverization by a pulverizer, pulverization by a fine pulverizer until the particle diameter becomes about 500 μm or less, and bonding by high-density sintering by a hot press.

[0003]

However, the above-described technique has the following problems. That is, in the pulverized powder, it is difficult to control oxygen at the time of pulverization, so that the oxygen value of the powder increases and the oxygen of the resulting target material also increases. In order to keep oxygen low, it is appropriate to prepare powder by gas atomization, but the obtained powder is spherical and is easily cracked at the time of taking out by cold forming using a die set, resulting in poor yield. Further, the hot press process has a drawback that the cycle time is long and the process capability is poor.

[0004]

Means for Solving the Problems In order to solve the above-mentioned problems, the present inventors have made intensive developments. As a result, a powder of a low-melting target material component is produced by gas atomization, and then the powder is subjected to cold pressing. After forming and sintering the entire die in a state where the material is in the die set, the target material is taken out of the die to obtain a high-density, low-oxygen-value, low-melting-point target material with a good yield with good yield. It is to provide a manufacturing method. The gist of the invention is that after producing a Te-based alloy powder by a gas atomizing method, the powder is inserted into a die set for cold forming and cold-formed, and then the powder compact is placed in the die set. A method for producing a Te-based alloy target material characterized by sintering in a state left.

[0005]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, the present invention will be described in detail. In the present invention, the raw material containing Ge, Sb, and Te is quenched by an inert gas atomizing method to obtain Ge-
After producing a low melting point alloy powder such as Sb-Te system, insert into a die set and cold compact, then sinter the powder compact while remaining in the die set. In the conventional process such as taking out and sintering the powder after cold compacting, the material yield cracks during the removal due to residual stress in the molding material, especially at the moment when the molding material comes out from the die, so the molding yield was very poor . In addition, the hot press method is costly and has a limited process capability. According to the present invention, since sintering is performed while removing the residual stress in the die, the density is higher than that of a normal method and cracks are not generated even when the die is taken out, so that powder crushing is used. As a result, it is possible to produce a favorable target material having a lower oxygen value.

[0006] Since the melting point of a Te-based alloy is usually about 600 ° C, in casting and gas atomizing, its melting point + 150 to 200 ° C, that is, 750 to 800 ° C.
Dissolve at a temperature of about ° C. On the other hand, the hot press temperature and the sintering temperature in the present invention are both about 600 ° C. to 65 ° C.
Perform at 0 ° C. However, since the cycle time is long in the hot pressing process, it is desired to improve the process capability. Therefore, in the present invention, the powder compact is sintered in a state where the powder compact remains in the die set after the cold compacting. As a result, the cycle time is short, the process capability is excellent, and the cost is reduced.

Further, when powder is directly produced by gas atomization, the time required for the pulverization step is reduced, and the influence of surface oxidation or the like caused by the pulverization is suppressed, so that a powder having a lower oxygen content than the conventional method can be obtained. Further, since the gas atomized powder has a spherical shape, it is difficult to maintain the shape after cold forming, and cracking or chipping occurs in a step of taking out from a die set after cold forming, so that industrial handling was impossible. However, in the present invention, the target material can be manufactured without such a problem by taking out the sintered body after sintering in a state where the molding material is left in the die set after cold molding.

[0008]

The present invention will be specifically described below with reference to examples. Ge, Sb, and Te are 14, 2
Each ingot was weighed so as to be 4, 62% by weight and melted in an induction melting furnace.
An atomized powder having an average particle size of 200 μm was produced. The powder was filled in a cold die set, cold-formed at a surface pressure of 5 t / cm ² , and the die with the upper and lower punches removed was placed in a sintering furnace and sintered at 630 ° C. for 2 hours to form. I got a body. In addition, as a comparative material of the conventional process, the atomized powder was taken out of the die set after cold forming, and the cracking and cracking states were compared. As a result, the product according to the present invention had a yield of 100%. About 80% of the samples had cracks and cracks.

[0009]

As described above, after producing the low melting point alloy powder according to the present invention by gas atomization, it is cold-formed into a disk shape in a die set using a uniaxial press, and then put into a sintering furnace together with the die set. By sintering, there is no problem of cracking or cracking, productivity is improved compared to the hot pressing process, and a high melting point target with a low oxygen value and a high density can be obtained at a high yield by using atomized powder. It has a very excellent effect.

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Claims (1)

[Claims] After producing a Te-based alloy powder by a gas atomizing method, inserting the powder into a die set for cold compaction and performing cold compaction, the powder compact remains in the die set. A method for producing a Te-based alloy target material, characterized by sintering.