JP2001341074A - Regenerative processor for inorganic abrasive waste liquid - Google Patents

Regenerative processor for inorganic abrasive waste liquid

Info

Publication number
JP2001341074A
JP2001341074A JP2000147870A JP2000147870A JP2001341074A JP 2001341074 A JP2001341074 A JP 2001341074A JP 2000147870 A JP2000147870 A JP 2000147870A JP 2000147870 A JP2000147870 A JP 2000147870A JP 2001341074 A JP2001341074 A JP 2001341074A
Authority
JP
Japan
Prior art keywords
waste liquid
abrasive
inorganic abrasive
cleaning
unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000147870A
Other languages
Japanese (ja)
Other versions
JP3776675B2 (en
Inventor
Tsugunobu Shigenaga
次伸 重永
Akinori Ito
彰記 伊藤
Takeshi Moriyama
剛 森山
Kazutoshi Takahashi
一敏 高橋
Setsuo Tani
勢津夫 谷
Hiromitsu Tagi
宏光 多木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
MIKURA BUSSAN KK
Original Assignee
MIKURA BUSSAN KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2000001871U external-priority patent/JP3072151U/en
Application filed by MIKURA BUSSAN KK filed Critical MIKURA BUSSAN KK
Priority to JP2000147870A priority Critical patent/JP3776675B2/en
Priority to KR10-2000-0040744A priority patent/KR100370345B1/en
Priority to CNB001207830A priority patent/CN1133510C/en
Priority to TW89212245U priority patent/TW450155U/en
Publication of JP2001341074A publication Critical patent/JP2001341074A/en
Application granted granted Critical
Publication of JP3776675B2 publication Critical patent/JP3776675B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03B—SEPARATING SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS
    • B03B5/00—Washing granular, powdered or lumpy materials; Wet separating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03B—SEPARATING SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS
    • B03B9/00—General arrangement of separating plant, e.g. flow sheets
    • B03B9/06—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse
    • B03B9/061—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse the refuse being industrial
    • B03B9/063—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse the refuse being industrial the refuse being concrete slurry
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/50—Reuse, recycling or recovery technologies
    • Y02W30/52—Mechanical processing of waste for the recovery of materials, e.g. crushing, shredding, separation or disassembly

Abstract

PROBLEM TO BE SOLVED: To provide a regenerative processor for an inorganic abrasive waste liquid to efficiently collect high purity solution as well as the inorganic abrasive of high purity having abrasive characteristics scarcely different from the unused inorganic abrasive from the used inorganic abrasive waste liquid. SOLUTION: The regenerative processor for the inorganic abrasive waste liquid which is the regenerative processor for the used and slurry type inorganic abrasive waste liquid constitutes its characteristic feature of being furnished with a solution storage tank part A, a removing and classifying part B to remove foreign matter from waste liquid and to wet classify it, a washing part C to wash deteriorated matter to give influence on the regenerative abrasive characteristics of a lubricant from the waste liquid by adding washing to the slurry waste liquid supplied from the removing and classifying part, a classifying part D to separate the waste liquid into a water slurry solid material and solution by wet classifying it and a powder regenerating part E to powder the water slurry solid material by drying or roasting it.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【０００１】[0001]

【発明が属する技術分野】本発明は、使用済みのスラリ
ー状となった無機研磨剤廃液から粉末化した再生無機研
磨剤と溶液を回収することができる無機研磨剤廃液の再
生処理装置に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an inorganic abrasive waste liquid regenerating apparatus capable of recovering a powdered regenerated inorganic abrasive and a solution from used slurry-like inorganic abrasive waste liquid. is there.

【０００２】[0002]

【従来の技術】一般に、使用済みの無機研磨剤を含んだ
廃液はスラリー状であり、このどろどろの固形分の中に
は、加工の際用いられた無機研磨剤と、研磨機，研削機
に由来する鉄（Ｆｅ）や、錫（Ｓｎ）、さらにその他の
無機物質が含まれている。なお、ここでいう無機研磨剤
として一般的に用いられるものをあげると、Ａｌ２Ｏ３
−ＺｒＳｉＯ４系、Ａｌ２Ｏ３系、ＳｉＣ系、酸化セリ
ウム成分等の研磨剤があげられる。さて、この無機研磨
剤廃液の処理装置としては、従来、大型の沈降槽をいく
つも用いた沈降分離装置が一般的で、この沈降槽で固液
分離し、上澄み液は濾過後再使用し、無機研磨剤を含ん
でいるにもかかわらず、固形分は廃棄処分していた。2. Description of the Related Art Generally, a waste liquid containing a used inorganic abrasive is in a slurry state, and the solid content of the slurry contains the inorganic abrasive used in the processing and a polishing machine or a grinder. It contains derived iron (Fe), tin (Sn), and other inorganic substances. In addition, as the inorganic abrasive generally used here, Al 2 O 3
-ZrSiO 4 system, Al 2 O 3 system, SiC-based, abrasive such as cerium oxide component and the like. By the way, as a treatment device for this inorganic abrasive waste liquid, conventionally, a sedimentation separation device using a number of large sedimentation tanks is generally used, and solid-liquid separation is performed in this sedimentation tank, and the supernatant liquid is reused after filtration. Solids were discarded despite containing inorganic abrasives.

【０００３】しかし、このような処理では、有効資源が
無駄になるばかりでなく、環境保全上も問題を残すもの
であった。[0003] However, such processing not only wastes effective resources but also leaves a problem in environmental preservation.

【０００４】そこで、こうして廃棄される無機研磨剤を
回収するために、従来いくつかの技術が提案されてい
る。例えば、特公昭６４−１０２４７号公報で提案され
たのは、切断砥粒を含む溶液から、この切断砥粒などの
固形分と溶液のような混合成分を分離する装置である。
具体的には濾過材による固液分離を行うもので、円筒型
濾過材に連続気孔付軟質樹脂を用い、内部圧力を下げて
吸引方式で原液中の固形分粒子を濾過材外周面に吸着さ
せ、固形物と溶液に分離させるものである。In order to recover the inorganic abrasive discarded in this manner, several techniques have been proposed. For example, Japanese Patent Publication No. Sho 64-10247 proposes an apparatus for separating a solid component such as cutting abrasive grains and a mixed component such as a solution from a solution containing the cutting abrasive grains.
Specifically, solid-liquid separation is performed using a filter medium.The continuous filter is made of a soft resin with continuous pores, and the internal pressure is reduced to allow solid particles in the stock solution to be adsorbed to the outer peripheral surface of the filter medium by suction. , A solid and a solution.

【０００５】次に、特開平４−３１５５７６号公報で提
案されたのは、ラップ加工装置から排出される使用済み
の砥粒液を再生し、この再生した砥粒液を繰り返し循環
する再生・循環装置に関するものである。再生砥粒液は
次第に量を減らしていくため、新規な砥粒と純水を計量
して適量を添加して循環することに特徴をもつものであ
る。Next, Japanese Patent Application Laid-Open No. 4-315576 proposes a regeneration / circulation system which regenerates used abrasive fluid discharged from a lapping machine and repeatedly circulates the regenerated abrasive fluid. It concerns the device. In order to gradually reduce the amount of the regenerated abrasive liquid, it is characterized in that new abrasive particles and pure water are weighed, an appropriate amount is added and circulated.

【０００６】さらに、特開平７−１８６０４１号公報で
提案された従来の技術は、ウエハ等のプレートに対する
研磨装置に関するものであり、複数のサイクロンを用い
て研磨剤を分流分級し、荒仕上げ用、中仕上げ用、仕上
げ用の研磨剤に分別して、循環再利用するものである。
ここで提案されている技術も、特開平４−３１５５７６
号で提案された技術と同様に、研磨剤はスラリー液で循
環され、不足した砥粒が添加されるものである。Further, the conventional technique proposed in Japanese Patent Application Laid-Open No. Hei 7-186041 relates to a polishing apparatus for a plate such as a wafer. It is separated into semi-finishing and finishing abrasives and circulated and reused.
The technology proposed here is also disclosed in Japanese Unexamined Patent Application Publication No. 4-315576.
As in the technique proposed in No. 4, the abrasive is circulated in a slurry liquid to add the insufficient abrasive grains.

【０００７】[0007]

【発明が解決しようとする課題】ところで、近年、産業
廃棄物に対する環境保全の問題が世界的に大きく取り上
げられ、各所で大きな問題となっている。環境問題のほ
か、産業廃棄物として廃棄するということは、地球レベ
ルで考えると資源・エネルギーを無駄にするものであ
る。そして個々の企業において再利用可能なものを廃棄
することは、製造コストを押し上げ、競争力にも影響が
でるといった側面も有している。従って、産業廃棄物を
如何にうまく再生し、再利用するかが、今まさに企業に
厳しく問われており、社会的には産業界の責任とまで考
えられている。Meanwhile, in recent years, the problem of environmental protection for industrial waste has been widely taken up worldwide, and has become a major problem in various places. In addition to environmental problems, disposal as industrial waste is a waste of resources and energy when considered at the global level. Discarding reusable products at individual companies also raises manufacturing costs and has an effect on competitiveness. Therefore, how to properly recycle and reuse industrial waste is now being strictly questioned by companies, and society is considered to be the responsibility of the industry.

【０００８】こうした産業廃棄物をリサイクル利用しよ
うとする動きの中で、使用済みの無機研磨剤の再生技術
が提案されているのは上述したとおりである。しかし、
特公昭６４−１０２４７号公報で提案された分離装置
は、円筒型濾過材に連続気孔付軟質樹脂を用いて、吸引
して固形物と溶液に分離させるものであるが、固形物で
粒子径の異なる物や、凝集し易い溶液では、濾過材の目
が直ぐに目詰まりし、その都度、運転を中断して、目詰
まりした固形物を掻き取るか、濾過材を交換する必要が
あるものであった。As described above, a technique for regenerating a used inorganic abrasive has been proposed in a movement to recycle industrial waste. But,
The separation device proposed in Japanese Patent Publication No. 64-10247 is to separate a solid material and a solution by suction using a soft resin having continuous pores as a cylindrical filter material. With a different material or a solution that easily aggregates, the filter media becomes clogged immediately, and it is necessary to stop the operation and scrape the clogged solids or replace the filter media each time. Was.

【０００９】また、特開平４−３１５５７６号公報で開
示された再生・循環装置は、再生砥粒液に、新規な砥粒
と純水を添加して循環するものであるが、再生砥粒液に
は粒子径の異なる砥粒、さらにはラップ盤、被研磨物体
からの削りクズ等がたえず混入する。その上、砥粒粒子
の特徴である鋭角な粒子形状が丸くなって、そのまま再
生すると本来の性能が著しく低下する等の問題点を有す
るものであった。この点に関しては、特開平７−１８６
０４１号公報で開示された研磨装置も同様であり、再生
液の利用を続けていると研磨剤の再生研磨剤特性が低下
してしまう。このため、無機研磨剤廃液の実用性のある
再生処理装置が期待されてきた。The regenerating / circulating apparatus disclosed in Japanese Patent Application Laid-Open No. 4-315576 is a system in which new abrasive grains and pure water are added to a regenerated abrasive liquid to circulate. Abrasive grains having different particle diameters, scraps from a lapping machine, and an object to be polished are constantly mixed into the particles. In addition, the sharp particle shape, which is a characteristic of the abrasive grains, is rounded, and if it is reproduced as it is, the original performance is significantly reduced. Regarding this point, Japanese Patent Application Laid-Open No. 7-186
The same applies to the polishing apparatus disclosed in Japanese Patent No. 041, and if the regenerating liquid is continuously used, the regenerated polishing agent characteristics of the polishing agent will decrease. For this reason, there has been a demand for a practical reprocessing apparatus for waste inorganic polishing slurry.

【００１０】ところで、この特開平４−３１５５７６号
公報、特開平７−１８６０４１号公報で開示された技術
は、いずれも基本的に再生砥粒液に新規砥粒等を添加し
て再利用するもので、砥粒液から砥粒を完全に戻して用
いるものでなく、どうしても再生した砥粒や溶液の純度
に限界があるものであった。再生無機研磨剤の純度を上
げるというニーズは高いものの、こうした循環型の再生
処理装置では再生無機研磨剤の純度を上げることは基本
的に難しいものであった。The techniques disclosed in Japanese Patent Application Laid-Open Nos. Hei 4-315576 and Hei 7-186041 basically recycle recycled abrasive fluid by adding new abrasive grains and the like. Thus, the abrasive grains were not completely returned from the abrasive liquid and used, but the purity of the regenerated abrasive grains and solution was limited. Although there is a high need to increase the purity of the recycled inorganic abrasive, it has been basically difficult to increase the purity of the recycled inorganic abrasive with such a recycling type reprocessing apparatus.

【００１１】そこで本発明は上記の問題点を解決するも
ので、使用済みの無機研磨剤廃液から、未使用の無機研
磨剤と変わらない研磨剤特性をもつ高純度の無機研磨剤
を効率的に回収でき、分離した溶液も再使用が可能な無
機研磨剤廃液の再生処理装置を提供することを目的とす
る。Accordingly, the present invention solves the above-mentioned problems, and efficiently converts high-purity inorganic abrasives having the same abrasive properties as unused inorganic abrasives from used inorganic abrasive waste liquids. An object of the present invention is to provide an apparatus for regenerating an inorganic abrasive waste liquid which can be recovered and a separated solution can be reused.

【００１２】[0012]

【課題を解決するための手段】本発明の無機研磨剤廃液
の再生処理装置は、原液貯槽部と、除去分級部と、除去
分級部から供給されたスラリー状の廃液に洗浄液を加
え、研磨剤の再生研磨剤特性に影響を与える劣化物質を
該廃液から洗浄する洗浄部と、洗浄部から送られる廃液
を湿式分級して含水スラリー状固形物と溶液に分離する
分級部と、分級部で分離された含水スラリー状固形物を
乾燥もしくは培焼して粉末化する粉末再生部を備えたこ
とを特徴とする。According to the present invention, there is provided an apparatus for regenerating an inorganic abrasive waste liquid, which comprises adding a cleaning liquid to a stock solution storage section, a removal classification section, and a slurry waste liquid supplied from the removal classification section. A washing unit for washing deteriorating substances affecting the regenerated abrasive properties of the waste liquid from the waste liquid, a classification unit for wet classification of the waste liquid sent from the washing unit and separation into a hydrated slurry-like solid and a solution, and a separation unit. It is characterized by having a powder regenerating section for drying or cultivating the hydrated slurry-like solid to powder.

【００１３】これにより、使用済みの無機研磨剤廃液か
ら、未使用の無機研磨剤と変わらない研磨剤特性をもつ
高純度の無機研磨剤を効率的に回収でき、分離した溶液
も再使用が可能である。This makes it possible to efficiently recover a high-purity inorganic abrasive having the same abrasive properties as an unused inorganic abrasive from a used inorganic abrasive waste liquid, and to reuse the separated solution. It is.

【００１４】[0014]

【発明の実施の形態】請求項1に記載された発明は、使
用済みでスラリー状となった無機研磨剤廃液から粉末状
の無機研磨剤を回収する無機研磨剤廃液の再生処理装置
であって、使用済みの無機研磨剤廃液を貯槽するととも
に濃度を所定濃度に調整する原液貯槽部と、原液貯槽部
から供給されたスラリー状の廃液から異物分を除去し異
物分除去後の廃液を湿式分級する除去分級部と、除去分
級部から供給されたスラリー状の廃液に洗浄液を加え、
研磨剤の再生研磨剤特性に影響を与える劣化物質を該廃
液から洗浄する洗浄部と、洗浄部から送られるスラリー
状の廃液を湿式分級して含水スラリー状固形物と溶液に
分離する分級部と、分級部で分離された含水スラリー状
固形物を乾燥もしくは培焼して粉末化する粉末再生部を
備えたことを特徴とする無機研磨剤廃液の再生処理装置
であるから、洗浄部における処理で劣化物質が除去さ
れ、これによって粉末再生部における乾燥もしくは培焼
処理の際不純物がほぼ完全になくなり、無機研磨剤は不
純物の含まれていない元の結晶形に戻り、未使用の無機
研磨剤とほとんど変わらない安定した研磨剤特性をもつ
高純度の無機研磨剤を回収することができる。また、分
級部で分離回収された溶液は除去洗浄部、洗浄部がほと
んどの不純物、劣化物質を除去しているので、不純物が
含まれておらず、そのまま再使用できる程度の純度を有
している。DESCRIPTION OF THE PREFERRED EMBODIMENTS The invention described in claim 1 is an inorganic abrasive waste liquid reclaiming apparatus for recovering a powdery inorganic abrasive from a used and slurryy inorganic abrasive waste liquid. A stock solution storage section for storing used inorganic abrasive waste liquid and adjusting the concentration to a predetermined concentration; and removing the foreign matter from the slurry-like waste liquid supplied from the stock solution storage section, and wet-classifying the waste liquid after removing the foreign matter. The cleaning liquid is added to the removal classification part to be performed, and the slurry waste liquid supplied from the removal classification part,
A washing unit for washing the deteriorating substances affecting the regenerated abrasive properties of the abrasive from the waste liquid, and a classifying unit for wet-classifying the slurry waste liquid sent from the washing unit to separate into a wet slurry solid and a solution. Since the inorganic abrasive waste liquid regeneration treatment device is provided with a powder regeneration unit for drying or cultivating the hydrated slurry-like solid material separated in the classification unit to powder it, the treatment in the washing unit The deteriorating substances are removed, whereby the impurities are almost completely eliminated during the drying or calcination treatment in the powder regenerating section, the inorganic abrasive returns to the original crystal form containing no impurities, and the unused inorganic abrasive is removed. It is possible to recover a high-purity inorganic abrasive having stable abrasive properties that hardly changes. In addition, the solution separated and recovered in the classification section has no impurities, since the cleaning section removes most impurities and deteriorating substances, and has a purity enough to be reused as it is. I have.

【００１５】請求項２に記載された発明は、洗浄液が１
０℃〜１３０℃の温度範囲にある温水もしくは熱水、ま
たはアルコール系溶剤であることを特徴とする請求項1
記載の無機研磨剤廃液の再生処理装置であるから、劣化
物質がきわめて効果的に除去され、粉末再生部における
乾燥もしくは培焼処理の際不純物を残留させる劣化物質
をほぼ完全に除去することができる。According to a second aspect of the present invention, the cleaning liquid is one
2. A hot water or a hot water in a temperature range of 0 ° C. to 130 ° C., or an alcohol solvent.
Since the inorganic abrasive waste liquid regenerating apparatus described above, the deteriorating substances can be removed very effectively, and the deteriorating substances that leave impurities during drying or calcination processing in the powder regenerating section can be almost completely removed. .

【００１６】請求項３に記載された発明は、原液貯槽部
が原料タンクと濃度調整タンクを備え、攪拌機と水位検
知器とエアーピンチバルブを用いて無機研磨剤廃液の固
形分濃度を管理することを特徴とする請求項1または２
に記載の無機研磨剤廃液の再生処理装置であるから、攪
拌機で無機研磨剤廃液中の固形分を分散させ、水位検知
器とエアーピンチバルブを用いて廃液中の固形分濃度を
管理し、無機研磨剤スラリー廃液を最適な濃度に調整す
ることができる。 According to a third aspect of the present invention, the stock solution storage unit includes a raw material tank and a concentration adjusting tank, and the solid content concentration of the inorganic abrasive waste liquid is controlled using a stirrer, a water level detector, and an air pinch valve. 3. The method according to claim 1, wherein
Since the inorganic abrasive waste liquid regeneration treatment device according to the above, the solids in the inorganic abrasive waste liquid are dispersed with a stirrer, and the solid content concentration in the waste liquid is managed using a water level detector and an air pinch valve, and the inorganic content is controlled. Abrasive slurry waste liquid can be adjusted to an optimum concentration.

【００１７】請求項４に記載された発明は、除去分級部
が、鉄分を除去する除鉄機と、他の異物を除去するため
の篩いと、湿式分級機を備え、無機研磨剤廃液から異物
分を除去し、1次の湿式分級を行うことを特徴とする請
求項１〜３のいずれかに記載の無機研磨剤廃液の再生処
理装置であるから、無機研磨剤廃液中の鉄分や他の異物
を取り除き、１次の湿式分級で十分粒度管理された廃液
にすることができる。According to a fourth aspect of the present invention, the removing and classifying unit includes an iron removing machine for removing iron, a sieve for removing other foreign matter, and a wet classifier, and the foreign matter is removed from the inorganic abrasive waste liquid. The inorganic abrasive waste liquid regeneration treatment device according to any one of claims 1 to 3, wherein the primary abrasive classification is performed by removing the component, and iron and other components in the inorganic abrasive waste liquid. Foreign matter can be removed to obtain a waste liquid whose particle size is sufficiently controlled by the first wet classification.

【００１８】請求項５に記載された発明は、洗浄部が、
洗浄タンクと、研磨剤の再生研磨剤特性に影響を与える
劣化物質を洗浄するための洗浄機構を備えたことを特徴
とする請求項１から３のいずれかに記載の無機研磨剤廃
液の再生処理装置であるから、廃液中の不要な油成分、
汚水成分、ゴミ、付着凝集物、バクテリア等の劣化物質
を洗浄機構で洗い流すことができる。また、不要な廃液
はオーバーフローさせ、その後濃度調整し、分級部に連
続して無機研磨剤のスラリー状廃液を一定量ずつ安定し
て送り込める。According to a fifth aspect of the present invention, the cleaning unit comprises:
4. A process for regenerating inorganic abrasive waste liquid according to claim 1, further comprising a cleaning tank and a cleaning mechanism for cleaning a deteriorating substance which affects the regenerated abrasive characteristics of the abrasive. Because it is a device, unnecessary oil components in waste liquid,
Deteriorating substances such as sewage components, dust, adhered aggregates and bacteria can be washed away by the washing mechanism. Unnecessary waste liquid is caused to overflow, then the concentration is adjusted, and the slurry-like waste liquid of the inorganic abrasive can be stably fed to the classifying section by a constant amount.

【００１９】請求項６に記載された発明は、洗浄機構が
洗浄タンクに設けられた噴霧器を備え、洗浄液に少なく
とも蒸気圧以上の背圧を加えて噴霧し洗浄することを特
徴とする請求項５記載の無機研磨剤廃液の再生処理装置
であるから、無機研磨剤に付着した凝集物等の劣化物質
まで確実に洗浄することができる。According to a sixth aspect of the present invention, the cleaning mechanism includes a sprayer provided in the cleaning tank, and the cleaning liquid is sprayed and washed by applying a back pressure of at least a vapor pressure or more to the cleaning liquid. Since the apparatus for regenerating inorganic abrasive waste liquid described above, it is possible to reliably clean even degraded substances such as aggregates attached to the inorganic abrasive.

【００２０】請求項７に記載された発明は、洗浄機構が
洗浄タンクに設けられた加熱装置を備え、加熱して洗浄
することを特徴とする請求項５または６に記載の無機研
磨剤廃液の再生処理装置であるから、洗浄液を加えた廃
液を加熱して、廃液中の劣化物質だけでなく無機研磨剤
に付着した凝集物等の劣化物質まで確実に洗浄すること
ができる。加熱のほかに加圧したり、加熱した廃液を噴
霧することでさらに洗浄効果を高めることもできる。According to a seventh aspect of the present invention, there is provided the inorganic polishing slurry waste liquid according to the fifth or sixth aspect, wherein the cleaning mechanism is provided with a heating device provided in the cleaning tank, and performs the cleaning by heating. Since the apparatus is a regeneration treatment apparatus, it is possible to reliably heat not only the deteriorating substances in the waste liquid but also deteriorating substances such as aggregates attached to the inorganic abrasive by heating the waste liquid to which the cleaning liquid is added. In addition to heating, pressurizing or spraying heated waste liquid can further enhance the cleaning effect.

【００２１】請求項８に記載された発明は、前記分級部
が２次の湿式分級を行うための湿式分級機を備え、溶液
中の粒子を粒子径及び／または比重の違いで複数のクラ
スに分離することを特徴とした請求項１〜７のいずれか
に記載の無機研磨剤廃液の再生処理装置であるから、２
次の湿式分級によって目的とする無機研磨剤の含水スラ
リー状固形物と、この他いくつかのクラスごとに粒のそ
ろった均一な粒子を得ることができ、濾過、分離に優
れ、歩留まりの高い固液分離とすることができる。The invention according to claim 8 is characterized in that the classifying section is provided with a wet classifier for performing secondary wet classification, and the particles in the solution are classified into a plurality of classes according to differences in particle diameter and / or specific gravity. The inorganic abrasive waste liquid regenerating apparatus according to any one of claims 1 to 7, characterized in that the apparatus is separated.
By the following wet classification, it is possible to obtain a water-containing slurry-like solid of the intended inorganic abrasive and uniform particles having uniform sizes in several other classes, and are excellent in filtration and separation and have a high yield. It can be liquid separation.

【００２２】請求項９に記載された発明は、粉末再生部
が、含水スラリー状固形物を８０℃〜１４００℃の範囲
で乾燥もしくは培焼させたことを特徴とする請求項１〜
８のいずれかに記載の無機研磨剤廃液の再生処理装置で
あるから、含水スラリー状固形物の水分が８０℃〜１４
００℃でほぼ完全に除去され、微量な不純物を飛ばし、
研磨剤粒子の結晶形を完全に元に戻すことができる。洗
浄部で劣化物質を洗浄しているので不燃の不純物など残
らないのでほぼ完全に不純物を除くことができる。According to a ninth aspect of the present invention, in the powder regenerating section, the water-containing slurry-like solid is dried or baked at a temperature in the range of 80 ° C to 1400 ° C.
8. Since the apparatus for regenerating inorganic abrasive waste liquid according to any one of 8 above, the water content of the hydrous slurry-like solid is 80 ° C. to 14 ° C.
Almost completely removed at 00 ° C, to remove trace impurities,
The crystal form of the abrasive particles can be completely restored. Since the deteriorating substances are washed in the washing section, non-combustible impurities and the like do not remain, so that impurities can be almost completely removed.

【００２３】請求項１０に記載された発明は、原液貯槽
部，前記除去分級部，前記洗浄部，前記分級部及び前記
粉末再生部を所定の制御動作に従って制御する制御部が
設けられたことを特徴とする請求項１〜９のいずれかに
記載の無機研磨剤廃液の再生処理装置であるから、原液
貯槽部から粉末再生部に至るまで濃度管理，粒度管理，
温度管理の各ユニットを所定のシーケンスで制御するこ
とができる。 According to a tenth aspect of the present invention, there is provided a control unit for controlling the stock solution storage unit, the removing and classifying unit, the washing unit, the classifying unit and the powder regenerating unit in accordance with a predetermined control operation. Since the apparatus for regenerating an inorganic abrasive waste liquid according to any one of claims 1 to 9, the concentration control, particle size control,
Each unit of the temperature management can be controlled in a predetermined sequence.

【００２４】（実施の形態１）以下、本発明の実施の形
態１の無機研磨剤廃液の再生処理装置について図１を用
いて説明する。図１は本発明の実施の形態１における無
機研磨剤廃液の再生処理装置の構成図である。(Embodiment 1) Hereinafter, an apparatus for regenerating an inorganic abrasive waste liquid according to Embodiment 1 of the present invention will be described with reference to FIG. FIG. 1 is a configuration diagram of an apparatus for regenerating an inorganic abrasive waste liquid according to Embodiment 1 of the present invention.

【００２５】図１において、Ａは使用済みでスラリー状
となった無機研磨剤廃液から粉末状の無機研磨剤を回収
する原液貯槽部、Ｂは原液貯槽部Ａから送られたスラリ
ー状の廃液から鉄分その他の異物分を除去しこれを湿式
分級する除去分級部、Ｃは再生研磨剤特性に影響を与え
る不要な油分や加熱（再生）時に残留する不純物等の劣
化物質を洗浄して除去する洗浄部、Ｄは洗浄部Ｃで洗浄
されたスラリー状の廃液を湿式分級して含水スラリー状
固形物と溶液に分離する分級部、Ｅは分級部Ｄから送ら
れた含水スラリー状固形物を乾燥もしくは培焼して粉末
化した研磨剤を再生する粉末再生部、Ｆは所定の制御動
作に従って原液貯槽部Ａから粉末再生部Ｅまでの各ユニ
ットを連携制御し、高純度の再生無機研磨剤と溶液を自
動的に回収するための制御部である。In FIG. 1, A is a stock solution tank for recovering a powdered inorganic abrasive from a used slurry slurry of inorganic abrasive waste liquid, and B is a slurry liquid waste solution sent from the stock solution tank A. A removal classifier that removes iron and other foreign matter and wet classifies the same. C is a cleaning unit that cleans and removes degraded substances such as unnecessary oil and impurities remaining during heating (regeneration) that affect the characteristics of the regenerated abrasive. Part, D is a classification part for wet classification of the slurry waste liquid washed in the washing part C to separate it into a hydrated slurry solid and a solution, and E is for drying or drying the hydrated slurry solid sent from the classification part D. A powder regenerating section for regenerating the baked and powdered abrasive, F controls each unit from a stock solution storage section A to a powder regenerating section E in accordance with a predetermined control operation, and a high-purity regenerated inorganic abrasive and Automatically collect Which is a control unit.

【００２６】また、図1において、１は原料タンク、２
ａ，２ｂ，２ｃ，２ｄ，２ｅは攪拌機、３ａ，３ｂ，３
ｃ，３ｄは水位検知器、４はエアーピンチバルブ、５，
１１，１７は濃度調整タンク、６，１２，１８はエアー
ドポンプ、９，１５は分級用ポンプ、７は振動篩、８は
除鉄分級タンク、１０，１６は湿式分級機、１３は洗浄
タンク、１９ａは噴霧乾燥機、１９ｂは噴霧乾燥機１９
ａに必要に応じて代えることができる培焼炉、２０は再
生処理装置を制御するための制御盤で、マイクロコンピ
ューター等で構成され、制御動作が手順として記憶され
たものである。制御盤２０は、この制御動作のシーケン
スに従って原液貯槽部Ａ，除去分級部Ｂ，洗浄部Ｃ，分
級部Ｄ及び粉末再生部Ｅの各ユニットを連携制御する。
そして、それぞれのユニット内でも、水位検知器３ａ，
３ｂ，３ｃ，３ｄ等の検知器が検知した信号に基づい
て、フィードバック制御や演算、最適化等が行われる。
また、原液貯槽部Ａ，除去分級部Ｂ，洗浄部Ｃ，分級部
Ｄ及び粉末再生部Ｅの各ユニット間は、濃度調整された
廃液を次段のユニットに供給するための、図１で矢印で
示す配管パイプにより接続されている。 In FIG. 1, reference numeral 1 denotes a raw material tank;
a, 2b, 2c, 2d, 2e are stirrers, 3a, 3b, 3
c, 3d are water level detectors, 4 is an air pinch valve, 5,
11 and 17 are concentration adjusting tanks, 6 and 12 and 18 are air pumps, 9 and 15 are classifying pumps, 7 is a vibrating sieve, 8 is an iron removal classifying tank, 10 and 16 are wet classifiers, and 13 is a washing tank. , 19a is a spray dryer, 19b is a spray dryer 19
A calcination furnace which can be replaced with a if necessary, 20 is a control panel for controlling the regenerating apparatus, which is constituted by a microcomputer or the like, and in which the control operation is stored as a procedure. The control panel 20 controls the units of the stock solution storage section A, the removal classification section B, the cleaning section C, the classification section D, and the powder regeneration section E in accordance with the sequence of the control operation.
And, in each unit, the water level detector 3a,
Feedback control, calculation, optimization, and the like are performed based on signals detected by detectors 3b, 3c, 3d, and the like.
Further, between the units of the stock solution storage unit A, the removal classification unit B, the cleaning unit C, the classification unit D, and the powder regenerating unit E, the arrows in FIG. Are connected by piping pipes indicated by.

【００２７】以下、Ａ〜Ｆの各ユニットについて詳細に
説明する。原液貯槽部Ａは、攪伴機２ａ、水位検知器３
ａ，３ｂが設けられた原料タンク１と、エアーピンチバ
ルブ４を介して原料タンク１と接続された濃度調整タン
ク５と、濃度調整タンク５から次のユニットである除去
分級部Ｂに廃液を送るためのエアードポンプ６から構成
される。濃度調整タンク５には攪拌機２ｂが設けられて
いる。攪拌機２ａ，２ｂは、それぞれ原料タンク１と濃
度調整タンク５内を攪拌して固形物の沈殿を防止し、濃
度管理を行うものである。ここで、濃度は１０％〜１５
％に調整される。この際、攪拌機２ａ，２ｂは攪拌によ
って原料タンク１と濃度調整タンク５内の液面を上下さ
せ、その液面を水位検知器３ａ，３ｂで検出することに
よって簡易に回転数をコントロ−ルするが、スラリー状
の廃液の保持量が変化しても回転数のコントロールがし
易いインバーターで制御するのがより適当である。この
場合、水位検知器３ａ，３ｂによって液面を検出し、そ
の信号でインバーターを制御して攪拌機２ａ，２ｂの回
転数をコントロールするため、原料タンク１と濃度調整
タンク５からのオーバーフローと、低水位時の攪拌機２
ａ，２ｂによる廃液の飛散が確実に防止できる。なお、
濃度調整は単位体積当たりの重量を計測し、その値から
液量を換算することで行う。Hereinafter, the units A to F will be described in detail. The undiluted liquid storage section A includes a stirrer 2a, a water level detector 3
a, 3b, a concentration adjusting tank 5 connected to the raw material tank 1 via an air pinch valve 4, and a waste liquid sent from the concentration adjusting tank 5 to the next classifying unit, the removal classifying unit B. And an air pump 6. The concentration adjusting tank 5 is provided with a stirrer 2b. The stirrers 2a and 2b stir the inside of the raw material tank 1 and the concentration adjusting tank 5 to prevent precipitation of solids, and perform concentration control. Here, the concentration is 10% to 15%.
Adjusted to%. At this time, the stirrers 2a and 2b raise and lower the liquid level in the raw material tank 1 and the concentration adjusting tank 5 by stirring, and detect the liquid level with the water level detectors 3a and 3b to easily control the rotation speed. However, it is more appropriate to control with an inverter that can easily control the number of revolutions even if the amount of retained slurry waste liquid changes. In this case, since the liquid level is detected by the water level detectors 3a and 3b and the signal is used to control the inverter to control the rotation speed of the stirrers 2a and 2b, the overflow from the raw material tank 1 and the concentration adjusting tank 5 and the low Stirrer 2 at water level
Scattering of waste liquid due to a and 2b can be reliably prevented. In addition,
The concentration is adjusted by measuring the weight per unit volume and converting the amount to a liquid amount.

【００２８】このように、水位検知器３ａ，３ｂを設け
ることによって回転数の制御を行っているので、各タン
ク１，５内を攪拌することで生じる液面の揺れによる廃
液のオーバーフローや飛散を防止でき、廃液中の固形分
濃度が管理されるから再生研磨剤の最終的な純度に影響
する供給誤差を防止することができる。なお、水位検知
器３ａ，３ｂは水面の揺れによる誤差の小さい圧力式液
面スイッチが望ましい。また本実施の形態１において
は、原液貯槽部Ａにエアーピンチバルブ４を設けるか
ら、研磨剤によってバルブが摩耗するような不具合や、
配管内における沈降凝集による誤動作がない。無機研磨
剤廃液は濃度調整タンク５で１０％〜１５％の濃度に調
整された後、ダイヤフラム式のエアードポンプ６よって
安定して除去分級部Ｂに送られる。ダイヤフラム式のエ
アードポンプ６は回転部分がなく研磨剤による磨耗等が
少ないため、粘度の高い液体を搬送するのに適してい
る。As described above, since the rotation speed is controlled by providing the water level detectors 3a and 3b, the overflow and scattering of the waste liquid due to the fluctuation of the liquid surface caused by stirring the tanks 1 and 5 can be prevented. Since the concentration of the solid content in the waste liquid is controlled, it is possible to prevent a supply error that affects the final purity of the recycled abrasive. The water level detectors 3a and 3b are desirably pressure-type liquid level switches having a small error due to the fluctuation of the water surface. In the first embodiment, since the air pinch valve 4 is provided in the stock solution storage tank portion A, there is a problem that the valve is worn by the abrasive,
No malfunction due to sedimentation and aggregation in the piping. After the inorganic abrasive waste liquid is adjusted to a concentration of 10% to 15% in the concentration adjusting tank 5, it is stably sent to the removal classification section B by the diaphragm type air pump 6. Since the diaphragm type air pump 6 has no rotating parts and is less worn by an abrasive, it is suitable for transporting a highly viscous liquid.

【００２９】次に、除去分級部Ｂについて説明する。除
去分級部Ｂは、振動篩７と、除鉄機を備えた除鉄分級タ
ンク８と、液体サイクロンから構成された湿式分級機１
０と、濃度調整タンク１１を備えている。この除鉄分級
タンク８と湿式分級機１０の間には分級用ポンプ９が設
けられ、濃度調整タンク１１には洗浄部Ｃに濃度調整さ
れた無機研磨剤廃液を送るエアードポンプ１２が設けら
れている。なお、分級用ポンプ９は耐磨耗性を向上させ
るために、インペラがゴムライニングされたターボ型の
ポンプを用いるのが適当である。湿式分級機１０の作用
でいったん高濃度になった廃液は、ここで再び１０％〜
４０％に調整される。Next, the removal classification section B will be described. The removal classifier B includes a vibrating sieve 7, an iron removal classifier tank 8 equipped with an iron remover, and a wet classifier 1 composed of a hydrocyclone.
0 and a density adjusting tank 11. A classifying pump 9 is provided between the iron removing classifying tank 8 and the wet classifier 10, and an air pump 12 is provided in the concentration adjusting tank 11 for sending the inorganic abrasive waste liquid whose concentration has been adjusted to the cleaning section C. ing. The classifying pump 9 is preferably a turbo-type pump having a rubber-lined impeller in order to improve abrasion resistance. The waste liquid that has once become highly concentrated by the action of the wet classifier 10 is again reduced to 10%
Adjusted to 40%.

【００３０】振動篩７により、スラリー状廃液に含まれ
る不純物や粗い異物が分離され、除鉄分級タンク８によ
り、磁力で鉄分が効率よく取り除かれる。その後、湿式
分級機１０により、１次の湿式分級が行われ濃度調整さ
れるから、次段の洗浄，次々段の２次の湿式分級、その
後の粉末化とあいまって高純度の再生無機研磨剤を回収
することができる。The vibrating sieve 7 separates impurities and coarse foreign substances contained in the slurry waste liquid, and the iron removal tank 8 efficiently removes iron by magnetic force. After that, the first-stage wet classification is performed and the concentration is adjusted by the wet-type classifier 10, so that the high-purity regenerated inorganic abrasive is combined with the next-stage cleaning, the second-stage secondary wet-classification, and the subsequent powdering. Can be recovered.

【００３１】続いて洗浄部Ｃの説明を行う。洗浄部Ｃ
は、廃液中に残存する不要な油成分や、後の粉末化処理
工程で残留物を残すような不純物等の、再生研磨剤特性
に影響を及ぼす劣化物質を洗浄して除去する機能をも
つ。ここでいう劣化物質は、上記した油成分のほか、汚
水成分、非溶解性のゴミ、研磨剤表面に凝固や凝集によ
り付着する付着凝集物質、さらにはこの凝固や凝集を誘
引する誘引物質等を含むものである。とくにこの凝固や
凝集を誘引する誘引物質として代表的なものは、廃液に
広く生息しているバクテリア等であり、ζ-電位や表面
の糖鎖のため、死骸となっても微粒子の凝集を誘引し、
凝集物を生成し、研磨剤に劣化物質となる不純物を付着
させるものである。なお、バクテリア自身、乾燥培焼す
ると灰分を残存させて、再生研磨剤特性を劣化させる
し、研磨剤にも付着するものである。Next, the cleaning section C will be described. Cleaning section C
Has a function of washing and removing deteriorating substances that affect the characteristics of the regenerated abrasive, such as unnecessary oil components remaining in the waste liquid and impurities that leave residues in the subsequent pulverization treatment step. The deteriorating substances referred to herein include, in addition to the above-described oil components, sewage components, insoluble trash, adhered and coagulated substances that adhere to the abrasive surface by coagulation and coagulation, and further, attractants that induce this coagulation and coagulation. Including. In particular, a typical attractant that induces coagulation and coagulation is a bacterium or the like that widely inhabits the waste liquid. Because of the ζ-potential and sugar chains on the surface, it induces coagulation of fine particles even when dead. And
Aggregates are formed, and impurities serving as deteriorating substances are attached to the abrasive. When the bacteria themselves are dried and baked, they leave ash, degrade the characteristics of the regenerated abrasive, and adhere to the abrasive.

【００３２】洗浄部Ｃは、洗浄タンク１３、攪伴機２ｄ
と、水位検知器３ｃ，３ｄ、電動バルブ１４、分級用ポ
ンプ１５と、後で詳述する洗浄機構c0から構成される。
攪拌機２ｄは、洗浄タンク１３内を攪拌して固形物の沈
殿を防止し、濃度管理を行うもので、固形分濃度は再び
１０％〜１５％の範囲に調整される。この際、攪拌機２
ｄは攪拌によって洗浄タンク１３内の液面を上下させ、
その液面を水位検知器３ｃ，３ｄで検出することによっ
て簡易に回転数をコントロールしている。ただ、スラリ
ー状の廃液は自然沈降のため液中の濃度が変化し易く、
また、水位が下がってくる（回転数が上がる）と撹拌機
２ｄのインペラがキャビテーションにより著しく摩耗す
るので、回転数を必要最小限に落とす必要があり、回転
数制御のし易いインバーターで制御するのが望ましい。
また、固形分濃度をあまり高濃度に調整すると、水位検
知器３ｃ，３ｄで検出して行う制御が難しくなるので、
比較的低めの濃度で制御するのが制御を簡単にし得策で
ある。The washing section C includes a washing tank 13, a stirring machine 2d
, Water level detectors 3c and 3d, an electric valve 14, a classification pump 15, and a cleaning mechanism c0 described in detail later.
The stirrer 2d stirs the inside of the washing tank 13 to prevent precipitation of solids and to control the concentration, and the solids concentration is again adjusted to the range of 10% to 15%. At this time, the stirrer 2
d raises and lowers the liquid level in the washing tank 13 by stirring,
The number of revolutions is easily controlled by detecting the liquid level with the water level detectors 3c and 3d. However, the concentration of waste liquid in slurry is easy to change due to natural settling,
Also, when the water level falls (the number of revolutions increases), the impeller of the stirrer 2d is significantly worn due to cavitation. Therefore, it is necessary to reduce the number of revolutions to the minimum necessary, and control with an inverter that can easily control the number of revolutions. Is desirable.
Further, if the solid content concentration is adjusted to an excessively high concentration, it becomes difficult to perform control by detecting the water level with the water level detectors 3c and 3d.
It is advisable to control at a relatively low concentration to simplify the control.

【００３３】洗浄部Ｃでは、洗浄機構c0と攪拌機２ｄに
よって洗浄液を加えて洗浄、攪拌し、廃液をオーバーフ
ローさせ、その後濃度調整する一連のプロセスをできれ
ば数回繰り返して行う。最初は廃液をオーバーフローさ
せることで所定量の廃液を洗浄タンク１３内に確保し、
濃度調整時には逆に洗浄タンク１３内の攪拌によってオ
ーバーフローして廃液が排出するのを防止するため液量
が正しく保持され、廃液中の固形分濃度を正確に管理で
きるから、供給誤差を防止できる。また、オーバーフロ
ーは電動バルブ１４で制御するため制御が電気的に行
え、制御部Ｆによる自動化が容易である。なお、上述し
た通り、洗浄、攪拌、濃度調整は繰り返して行われる
が、最後の一回のプロセスは、廃液に所定量の洗浄液を
加えて洗浄し、これを自然沈降させてから上澄み液を所
定量オーバーフローさせ、系外に排出するのが望まし
い。In the cleaning section C, a series of processes for adding the cleaning liquid by the cleaning mechanism c0 and the stirrer 2d, cleaning and stirring, overflowing the waste liquid, and thereafter adjusting the concentration, are repeated several times if possible. At first, a predetermined amount of waste liquid is secured in the washing tank 13 by overflowing the waste liquid,
Conversely, when the concentration is adjusted, the amount of liquid is properly maintained in order to prevent the waste liquid from being discharged due to overflow in the washing tank 13 due to agitation, and the solid content concentration in the waste liquid can be accurately controlled, so that a supply error can be prevented. Further, since the overflow is controlled by the electric valve 14, the control can be performed electrically, and automation by the control unit F is easy. As described above, the washing, stirring, and concentration adjustment are repeatedly performed. However, in the last one process, the waste liquid is washed by adding a predetermined amount of the cleaning liquid, and the waste liquid is spontaneously settled, and then the supernatant liquid is removed. It is desirable to allow the amount to overflow and discharge it out of the system.

【００３４】そして、上記した最後の一回の考え方を利
用し、制御や装置を簡略化するため次のようにするので
もよい。すなわち、廃液に洗浄液を加えて洗浄機構c0と
撹拌機２ｄで研磨剤を洗浄し、その後自然沈降させ、こ
の上澄み液をオーバーフローするとともに、濃度調整
し、これを繰り返すというものである。除去分級部Ｂか
ら送られてくる廃液中の固形分濃度はほぼ一定に保たれ
ているため、上澄み液をオーバーフローで排出し、必要
に応じて給水も行い、水位検知器３ｃ，３ｄで水位を検
出すれば濃度調整が行えることを利用した方法である。
この方法は装置を安価にでき、洗浄も効果的に行えるも
のであるが、自然沈降を繰り返すので洗浄に比較的長時
間を必要とする。Then, the following one may be used in order to simplify the control and the apparatus by using the above-mentioned one-time thinking. That is, the washing liquid is added to the waste liquid, the abrasive is washed by the washing mechanism c0 and the stirrer 2d, and then the sediment is spontaneously settled. The supernatant liquid overflows, the concentration is adjusted, and this is repeated. Since the solid content concentration in the waste liquid sent from the removal classification section B is kept almost constant, the supernatant liquid is discharged by overflow, and water is supplied if necessary, and the water level is detected by the water level detectors 3c and 3d. This method utilizes the fact that the density can be adjusted if detected.
This method can reduce the cost of the apparatus and can effectively perform the cleaning, but requires a relatively long time for the cleaning due to repeated natural settling.

【００３５】ところで、本発明の実施の形態１では、図
２（ａ）に示すように、洗浄機構c0として洗浄タンク１
３に噴霧器とバッファ槽を設けている。図２（ａ）は本
発明の実施の形態１における洗浄部の第１拡大図、図２
（ｂ）は本発明の実施の形態１における洗浄部の第２拡
大図である。In the first embodiment of the present invention, as shown in FIG. 2A, a cleaning tank 1 is used as a cleaning mechanism c0.
3 is provided with a sprayer and a buffer tank. FIG. 2A is a first enlarged view of the cleaning unit according to the first embodiment of the present invention, and FIG.
FIG. 2B is a second enlarged view of the cleaning unit according to the first embodiment of the present invention.

【００３６】２１は圧縮空気により洗浄液を洗浄タンク
１３内に噴出、噴霧する噴霧器、２２は噴霧器２１から
噴出させる洗浄液の温度調整を行う温度調整装置、２３
は除去分級部Ｂから送られてきた廃液と洗浄タンク１３
でオーバーフローした廃液を合流できるバッファ槽、２
４はオーバーフローした廃液に含まれている不純物や劣
化物質を濾過する濾過装置、２５，２６は流路を切り替
える電動バルブである。濾過装置２４の能力や寿命が問
題になる場合は、濾過装置２４から廃液をバッファ槽２
３に返送しないで系外へ排出する方式を採用するのがよ
い。この場合、オーバーフローの流路は開回路となるか
ら、排出する液の固形分濃度はできるだけ低い方がよ
く、上記の自然沈降後の上澄み液をオーバーフローさせ
て洗浄する方式とあわせて採用するのが適当である。Numeral 21 denotes a sprayer for jetting and spraying the cleaning liquid into the cleaning tank 13 with compressed air, 22 a temperature adjusting device for adjusting the temperature of the cleaning liquid jetted from the atomizer 21, 23.
Is the waste liquid sent from the removal classification section B and the washing tank 13
Tank that can join waste liquid overflowed in
Reference numeral 4 denotes a filtration device for filtering impurities and deteriorating substances contained in the overflowed waste liquid, and reference numerals 25 and 26 denote electric valves for switching flow paths. When the performance and life of the filtration device 24 become a problem, the waste liquid is
It is preferable to adopt a method of discharging the system out of the system without returning it to the system. In this case, since the overflow channel is an open circuit, the solid content concentration of the discharged liquid is preferably as low as possible.It is recommended to adopt the above method in which the supernatant liquid after the natural sedimentation overflows and is washed. Appropriate.

【００３７】噴霧器２１には図示しない圧縮空気の供給
装置が接続されており、蒸気圧以上の背圧を洗浄液に加
えた状態で、洗浄タンク１３内に噴霧するようになって
いる。洗浄液としては、１０℃〜１３０℃、できれば３
０℃〜１３０℃、好ましくは１００℃〜１３０℃の温度
範囲内にある温水もしくは熱水、あるいはアルコール系
溶剤が用いられる。３０℃以下になると洗浄力とバクテ
リア等に対する熱の影響が弱まり、１０℃以下ではさら
にその効果が低下するからである。温水もしくは熱水を
洗浄液として用いる場合に、電気分解によってｐＨ調整
された酸性水やアルカリ水を用いると、さらに効果的な
洗浄ができる。とくに、温水のなかでも１０℃に近い水
を用いる場合このｐＨ調整を行うことが効果的である。
ただ、アルコール系溶剤の場合は適度に加熱することに
より効果が倍増するが、加熱しすぎるのは避けなければ
ならない。そして、温度調整装置２２は洗浄液が槽内に
噴出された状態において、上記の温度になるように温度
コントロールするものである。温度コントロールされた
洗浄液は、噴霧器２１から攪拌されるスラリー状の廃液
に噴霧され、再生研磨剤特性に影響する劣化物質を洗
浄、除去する。The sprayer 21 is connected to a supply device for compressed air (not shown), and sprays the cleaning liquid into the cleaning tank 13 with a back pressure higher than the vapor pressure applied to the cleaning liquid. As a cleaning solution, 10 ° C to 130 ° C, preferably 3 ° C
Hot or hot water within the temperature range of 0 ° C to 130 ° C, preferably 100 ° C to 130 ° C, or an alcohol solvent is used. When the temperature is lower than 30 ° C., the effect of heat on the detergency and bacteria is weakened, and when the temperature is lower than 10 ° C., the effect is further reduced. When hot water or hot water is used as the washing liquid, more effective washing can be performed by using acidic water or alkaline water whose pH has been adjusted by electrolysis. In particular, when using water close to 10 ° C. among warm water, it is effective to perform this pH adjustment.
However, in the case of alcohol-based solvents, the effect is doubled by moderately heating, but excessive heating must be avoided. The temperature controller 22 controls the temperature so that the temperature becomes the above-mentioned temperature when the cleaning liquid is jetted into the bath. The cleaning liquid whose temperature is controlled is sprayed from a sprayer 21 onto a slurry-like waste liquid that is stirred, and cleans and removes a deteriorating substance that affects the characteristics of the regenerated abrasive.

【００３８】温水もしくは熱水の場合はどのような劣化
物質であってもまんべんなく洗浄できるという特徴があ
るが、アルコール系溶剤は油成分等の有機性の劣化物質
をとくに効果的に洗浄できるという特徴がある。そし
て、一種類の洗浄液だけでなく、複数種類の洗浄液を用
いて洗浄を繰り返すことで洗浄効果を高めることもでき
る。In the case of hot water or hot water, any deteriorating substances can be washed evenly, while alcohol solvents can effectively clean organic deteriorating substances such as oil components. There is. The cleaning effect can be enhanced by repeating the cleaning using not only one type of cleaning liquid but also a plurality of types of cleaning liquids.

【００３９】なお、バッファ槽２３はオーバーフローし
た廃液を一時的に貯め、除去分級部Ｂから送られる廃液
と合流させて洗浄タンク１３に送り込むものである。オ
ーバーフローした廃液がこのバッファ槽２３の作用で、
濃度調整に再度利用される。もちろん、不要な廃液はこ
こから排出することもできる。洗浄タンク１３に廃液を
送り込むときには、電動バルブ２５は開、電動バルブ２
６は閉とされる。洗浄部Ｃにおいて洗浄が済むと、濃度
調整された廃液は、電動バルブ２６を開、電動バルブ２
５を閉にして分級用ポンプ１５により次の分級部Ｄに送
られる。いずれも制御部Ｆの制御で行われる。The buffer tank 23 temporarily stores the overflowed waste liquid, joins the waste liquid sent from the removal classification section B, and sends it to the cleaning tank 13. The overflowed waste liquid is operated by the buffer tank 23,
It is used again for density adjustment. Of course, unnecessary waste liquid can also be discharged from here. When sending waste liquid to the cleaning tank 13, the electric valve 25 is opened and the electric valve 2 is opened.
6 is closed. When the washing is completed in the washing section C, the waste liquid whose concentration has been adjusted opens the electric valve 26 and the electric valve 2
5 is closed and sent to the next classifying section D by the classifying pump 15. All are performed under the control of the control unit F.

【００４０】ところで本実施の形態１の洗浄機構c0とし
て、図２（ｂ）に示すように洗浄タンク１３に加熱装置
を設けるのでもよい。２７は洗浄タンク１３内のスラリ
ー状の廃液を加熱する加熱装置、２８は除去分級部Ｂか
ら送られる廃液とオーバーフローした廃液や洗浄液を合
流させ、この廃液を温度調整して加圧することができる
温度調整加圧装置である。不要な廃液はここから排出す
ることもできるし、場合によっては、温度調整加圧装置
２８にオーバーフローした廃液を返送しない方式もきわ
めて有力である。これは図２（ａ）で既に説明したオー
バーフローの開回路の説明と同様であるから、詳細な説
明は省略する。As the cleaning mechanism c0 of the first embodiment, a heating device may be provided in the cleaning tank 13 as shown in FIG. 2B. 27 is a heating device for heating the slurry-like waste liquid in the washing tank 13, and 28 is a temperature at which the waste liquid sent from the removal classification section B and the overflowed waste liquid or the washing liquid are combined, and the waste liquid is temperature-adjusted and pressurized. It is an adjusting pressure device. Unnecessary waste liquid can be discharged from here, and in some cases, a system that does not return the waste liquid overflowing to the temperature adjusting and pressurizing device 28 is very effective. Since this is the same as the description of the open circuit of the overflow already described in FIG. 2A, the detailed description is omitted.

【００４１】本実施の形態１の洗浄機構c0は、加熱装置
２７により洗浄タンク１３内を加熱するとともに、温度
調整加圧装置２８で所定の温度に温度調整した廃液を洗
浄タンク１３内に噴出させ、同時に攪拌機２ｄにより攪
拌することで洗浄を効果的にするものである。内部の液
温度は上記の温度範囲と同様の温度を採用すればよい。
この加熱と攪拌により、無機研磨剤に付着している劣化
物質は確実に除去される。場合によっては図２（ａ）の
噴霧器２１を付設してあわせて洗浄液を噴出させて洗浄
力を高めてもよいし、図２（ｂ）に示すように加熱され
た廃水自体を自液洗浄ラインを介して噴霧器２１から噴
出させて、簡易な噴霧洗浄の構成としてもよい。そし
て、さらには洗浄タンク１３内に超音波発生装置（図示
しない）を設け、超音波洗浄も併用すると洗浄効果を高
めることができる。The cleaning mechanism c0 according to the first embodiment heats the inside of the cleaning tank 13 by the heating device 27 and ejects the waste liquid whose temperature has been adjusted to a predetermined temperature by the temperature adjusting and pressurizing device 28 into the cleaning tank 13. At the same time, the washing is effectively performed by stirring with the stirrer 2d. The temperature of the liquid inside may be similar to the above temperature range.
By this heating and stirring, the deteriorating substances adhering to the inorganic abrasive are reliably removed. Depending on the case, the washing liquid may be spouted together with the sprayer 21 shown in FIG. 2 (a) to increase the washing power, or the heated wastewater itself may be subjected to a self-liquid washing line as shown in FIG. 2 (b). May be ejected from the atomizer 21 via a simple spray cleaning. Further, an ultrasonic generator (not shown) is provided in the cleaning tank 13, and the ultrasonic cleaning can be used together to enhance the cleaning effect.

【００４２】このような洗浄機構c0を設けることによ
り、油成分、汚水成分、ゴミ、研磨剤表面に付着する付
着凝集物質、さらには凝固や凝集を誘引するバクテリア
等を確実に洗浄することができる。洗浄され１０％〜１
５％の範囲に濃度調整された廃液は、制御部Ｆが電動バ
ルブ２５，２６を切り替えた後、分級用ポンプ１５によ
って、安定して一定量づつ分級部Ｄへ自動的に送られ
る。なお、分級用ポンプ１５に用られる材質は金属等の
摩耗を考慮してゴムライニングしたインペラを用いるこ
とが望ましい。By providing such a washing mechanism c0, oil components, sewage components, dust, adhering and coagulating substances adhering to the surface of the abrasive, and bacteria that induce coagulation and coagulation can be surely washed. . Washed 10% ~ 1
After the control unit F switches the electric valves 25 and 26, the waste liquid whose concentration has been adjusted to the range of 5% is automatically sent to the classification unit D by the classification pump 15 stably by a constant amount. The material used for the classifying pump 15 is desirably a rubber-lined impeller in consideration of wear of metal or the like.

【００４３】続いて、分級部Ｄの説明をする。分級部Ｄ
は、湿式分級機１６、濃度調整タンク１７、エアードポ
ンプ１８と、濃度調整タンク１７内を攪拌する攪拌機２
ｅから構成されている。洗浄部Ｃで濃度調整されたスラ
リー状の廃液が濃度調整タンク１７に供給されると、湿
式分級機１６が制御部Ｆからの指令により稼動を開始す
る。すなわち、この湿式分級機１６において、除去分級
部Ｂの１次湿式分級に続き、粒子径及び／または比重が
異なる粒子に対して２次の湿式分級をする作業が開始さ
れる。この分級作業では、目的とする無機研磨剤粒子で
相当脱水が進んだ含水スラリー状固形物と、その他のい
くつかのクラスごとに粒のそろった粒子固形物をえるこ
とができる。 Next, the classification section D will be described. Classification D
Is a wet classifier 16, a concentration adjusting tank 17, an air pump 18, and a stirrer 2 for stirring the inside of the concentration adjusting tank 17.
e. When the slurry-like waste liquid whose concentration has been adjusted in the washing unit C is supplied to the concentration adjusting tank 17, the wet classifier 16 starts operating according to a command from the control unit F. That is, in the wet classifier 16, the operation of performing the secondary wet classification on the particles having different particle diameters and / or specific gravities after the primary wet classification of the removal classification unit B is started. In this classification operation, it is possible to obtain a water-containing slurry-like solid material which has been considerably dehydrated with the intended inorganic abrasive particles, and a solid particle material having a uniform size in each of several other classes.

【００４４】このような分級を実現するため、湿式分級
機１６は、廃液中の異なる粒子を複数、普通は２〜３の
クラスの粒子径に分離することができるマルチ・サイク
ロンを採用するのが適当である。これにより、例えば微
細粒子と中細粒子と粗大粒子とに分離できるし、さらに
比重の異なる物質も分離できる。なお、このマルチ・サ
イクロンは廃液中の固形分濃度が１０％〜１５％の範囲
にあるとき効率がよいため、洗浄部Ｃの洗浄タンク１３
においてこの範囲に濃度調整されて、一定量づつ送り込
まれる。また、分級作業は一回で粒子径の異なる複数の
粒子に分級できるが、必要に応じて３次、４次と数回繰
り返えし、さらに精度を高めることも可能である。湿式
分級は濾材の内部に含水固形分が堆積し、目詰まり等を
起こさないし、濾過，分離，脱水性に優れ、歩留まりが
高いという利点がある。In order to realize such classification, the wet classifier 16 employs a multi-cyclone capable of separating a plurality of particles in the waste liquid into a plurality of particles, usually a particle diameter of a few classes. Appropriate. Thereby, for example, fine particles, medium fine particles, and coarse particles can be separated, and substances having different specific gravities can also be separated. Since the multi-cyclone has high efficiency when the solid concentration in the waste liquid is in the range of 10% to 15%, the cleaning tank 13 of the cleaning section C has high efficiency.
The density is adjusted to this range, and is fed by a fixed amount. Further, the classification operation can be classified into a plurality of particles having different particle diameters at one time, but if necessary, the classification can be repeated several times, such as tertiary and quaternary, to further improve the accuracy. Wet classification has the advantage that solids containing water accumulate inside the filter medium and do not cause clogging, etc., are excellent in filtration, separation and dehydration properties, and have a high yield.

【００４５】ところで分級部Ｄにおいては、上記した各
クラスの粒子からなる含水スラリー状固形物のほか、溶
液も回収することができる。分級部Ｄにおいて固形分が
取り除かれ、除去分級部Ｂと洗浄部Ｃでは異物分や、不
純物、劣化物質がほとんど除去されているから、この分
級部Ｄから回収される溶液は、そのまま再使用すること
が可能なほど高純度である。この純度をさらに上げるた
め、必要に応じて真空ドラムフィルターやフィルタープ
レス等の濾過器を通してもよい。なお、分級部Ｄより前
の工程でも溶液を回収することもできるが、この場合は
どうしても真空ドラムフィルターやフィルタープレス等
の濾過器を設けなければ再使用することができず、コス
ト的に割高となる。また、回収ラインにオゾン発生器を
設けて、回収した溶液を滅菌、消毒することも適当であ
る。これにより、バクテリア等を低減でき、再び研磨剤
を再生するとき劣化物質が少なくなり、高純度の再生無
機研磨剤を回収することができるので継続的に再生処理
する場合きわめて好ましい。In the classifying section D, a solution can be recovered in addition to the hydrated slurry-like solid composed of the particles of each class described above. Since the solid content is removed in the classification section D, and foreign matter, impurities and deteriorating substances are almost removed in the removal classification section B and the cleaning section C, the solution recovered from the classification section D is reused as it is. It is as pure as possible. In order to further increase the purity, a filter such as a vacuum drum filter or a filter press may be used as necessary. In addition, the solution can be recovered even in the step before the classification section D, but in this case, it cannot be reused unless a filter such as a vacuum drum filter or a filter press is provided, and the cost is relatively high. Become. It is also appropriate to provide an ozone generator in the recovery line to sterilize and disinfect the recovered solution. This makes it possible to reduce bacteria and the like, to reduce the amount of deteriorating substances when regenerating the abrasive again, and to recover a high-purity regenerated inorganic abrasive. Therefore, it is extremely preferable to continuously perform the regenerating treatment.

【００４６】廃液は、濃度調整タンク１７で含水率（濃
度）が４０％程度の含水スラリー状固形物に調整され、
粉末再生部Ｅにエアードポンプ１８で安定して送り込ま
れる。 The waste liquid is adjusted to a water-containing slurry solid having a water content (concentration) of about 40% in a concentration adjusting tank 17.
The powder is stably fed into the powder regenerating section E by the air pump 18.

【００４７】次いで、粉末再生部Ｅの説明をすると、粉
末再生部Ｅは噴霧乾燥機１９ａもしくは培焼炉１９ｂか
ら構成される。８０℃〜１４００℃の範囲で乾燥、培焼
する。この温度は、無機研磨剤の材質、目的とする純度
等で決定される。この範囲の温度であればよいが、でき
れば２５０℃以上であればあまり条件に影響されること
なく、ほぼ完全に水分の含まない粉末状の研磨剤を再生
回収できる。比較的再生研磨剤特性を要求しない場合
は、８０℃〜４００℃程度の乾燥レベルの処理で十分で
あるが、より高い再生研磨剤特性を要求する場合には、
１３００℃〜１４００℃の高温で培焼レベルで処理する
のが適当である。この場合、粉末粒子の結晶形を完全に
元に戻すことができ、再生粉末は白色度が著しく増し、
極めて良好な再生無機研磨剤剤とすることができる。な
お、これは培焼により微量な不純物が温度により取り除
かれたものと考えられる。実施の形態１の場合、再生さ
れた研磨剤と未使用（使用前）の研磨剤の特性比較を、
成分分析値や粒度分布、顕微鏡写真を観察する等で行っ
たが、こうして再生された無機研磨剤は、未使用（使用
前）の研磨剤と同等の成分と粒子径、粒子形状を有して
いる。これに関しては後で詳述する。Next, the powder regenerating unit E will be described. The powder regenerating unit E includes a spray dryer 19a or a calcination furnace 19b. It is dried and baked in the range of 80C to 1400C. This temperature is determined by the material of the inorganic abrasive, the desired purity, and the like. A temperature within this range may be used, but if it is 250 ° C. or higher, a powdery abrasive containing almost no water can be regenerated and recovered almost unaffected by conditions. When relatively low reclaimed abrasive properties are not required, treatment at a drying level of about 80 ° C. to 400 ° C. is sufficient, but when higher reclaimed abrasive properties are required,
Suitably, the treatment is carried out at a high temperature of 1300 ° C. to 1400 ° C. at the sintering level. In this case, the crystal form of the powder particles can be completely restored, and the regenerated powder has significantly increased whiteness,
An extremely good recycled inorganic abrasive can be obtained. It is considered that a trace amount of impurities was removed by calcination depending on the temperature. In the case of Embodiment 1, the characteristics of the regenerated abrasive and the unused (before use) abrasive are compared with each other.
Observed by analyzing component analysis values, particle size distribution, micrographs, etc., the inorganic abrasive thus regenerated has the same components, particle diameter and particle shape as unused (before use) abrasives. I have. This will be described later in detail.

【００４８】最後に、制御部Ｆは、原液貯槽部，除去分
級部，洗浄部，分級部及び 粉末再生部を所定の制御動
作に従って制御するもので、原液貯槽部Ａから粉末再生
部Ｅに至るまでの各ユニットをシーケンスに従い連携制
御するものである。制御部Ｆは制御盤２０を備えてお
り、各ユニットを連携制御するとともに、それぞれのユ
ニット内も、水位検知器３ａ、３ｂ、３ｃ，３ｄ等の検
知器が検知した信号に基づいて、フィードバック制御や
演算、最適化等を行うものである。Finally, the control unit F controls the stock solution storage unit, the removal classification unit, the washing unit, the classification unit, and the powder regeneration unit according to a predetermined control operation. Up to each unit in accordance with the sequence. The control unit F includes a control panel 20 and controls each unit in cooperation with each other, and also performs feedback control in each unit based on signals detected by the water level detectors 3a, 3b, 3c, and 3d. , Calculations, optimization and the like.

【００４９】さて、以上説明した本実施の形態１の無機
研磨剤廃液の再生処理装置について、溶融Ａｌ２Ｏ３成
分とＺｒＳｉＯ４成分の混合物からなる無機研磨剤と、
水溶性の潤滑油を用い、シリコンウエハを研磨した場合
について、その動作と作用について具体的に説明する。Now, with respect to the apparatus for regenerating the inorganic abrasive waste liquid according to the first embodiment described above, the inorganic abrasive comprising a mixture of the molten Al 2 O 3 component and the ZrSiO 4 component,
The operation and operation of a case where a silicon wafer is polished using a water-soluble lubricating oil will be specifically described.

【００５０】このとき、無機研磨剤廃液は、水溶性の潤
滑油と研磨剤、研磨機からの研磨屑の鉄分、シリコンウ
エハからの珪素と、その他の微量成分を含むどろどろの
液体（研磨剤廃液）となる。この研磨剤廃液を、原液貯
槽部Ａの原料タンク１に導入し３０分間攪拌する。液の
単位体積当たりの重量を計測するとともに水位検知器３
ａ、３ｂで水位を検知し、これから溶液量、濃度を推定
する。その後制御部Ｆからの指令によりエアーピンチバ
ルブ４が開かれ、矢印の方向に沿って配管パイプ内を濃
度調整タンク５に廃液を落とし、給水装置で水を補給し
て濃度が１０％〜１５％になるように希釈調整する。At this time, the inorganic abrasive waste liquid is a muddy liquid (abrasive waste liquid) containing a water-soluble lubricating oil and an abrasive, iron of polishing dust from a polishing machine, silicon from a silicon wafer, and other trace components. ). This abrasive waste liquid is introduced into the raw material tank 1 of the raw liquid storage tank section A and stirred for 30 minutes. Measures the weight per unit volume of liquid and measures the water level 3
The water level is detected by a and 3b, and the amount and concentration of the solution are estimated from this. Thereafter, the air pinch valve 4 is opened by a command from the control unit F, the waste liquid is dropped into the concentration adjusting tank 5 through the pipe along the direction of the arrow, and water is supplied by a water supply device to reduce the concentration to 10% to 15%. Adjust the dilution so that

【００５１】調整が終了すると、制御部Ｆは、エアード
ポンプ６により、濃度調整された廃液を除去分級部Ｂの
振動篩７に入り（流量９Ｌ／分）、粗粒子やゴミ等の異
物を取り除いた後、除鉄分級タンク８に入り３５００〜
１００００ガウス程度の磁力を有する永久磁石を用いた
除鉄機で鉄成分を除去する。ここで不純物としての研磨
機の研磨屑はほとんど除去される。その後、分級用ポン
プ９で研磨剤廃液は湿式分級機１０に導入され、運転が
開始される。When the adjustment is completed, the control unit F uses the air pump 6 to remove the waste liquid whose concentration has been adjusted, enters the vibrating sieve 7 of the classifying unit B (flow rate 9 L / min), and removes foreign substances such as coarse particles and dust. After removal, it enters iron removal classification tank 8 and 3500
An iron component is removed by an iron removing machine using a permanent magnet having a magnetic force of about 10,000 gauss. Here, polishing dust of the polishing machine as impurities is almost removed. Thereafter, the abrasive waste liquid is introduced into the wet classifier 10 by the classifying pump 9, and the operation is started.

【００５２】湿式分級された研磨剤廃液は配管パイプを
介して濃度調整タンク１１に入る。このとき、研磨剤廃
液の固形分濃度が４０％以上になつているため再度、水
を用い１０〜４０％の濃度に調整する。連続処理が続け
られ、原料タンク１が規定水位下になると原料タンク１
に研磨剤廃液が供給される。この時、振動篩７と除鉄分
級タンク８は制御部Ｆによる自動制御で停止し、１次の
湿式分級が終了する。The abrasive waste liquid that has been subjected to wet classification enters the concentration adjusting tank 11 via a pipe. At this time, since the solid content concentration of the abrasive waste liquid is 40% or more, the concentration is adjusted again to 10 to 40% using water. Continuous processing is continued, and when the raw material tank 1 falls below the specified water level, the raw material tank 1
Is supplied with the abrasive waste liquid. At this time, the vibrating sieve 7 and the iron removal classification tank 8 are stopped under automatic control by the control unit F, and the primary wet classification is completed.

【００５３】続いて、エアードポンプ１２によって、湿
式分級された研磨剤廃液は洗浄部Ｃの洗浄タンク１３に
入り、水位検知器３ｃ，３ｄが運転開始レベルに液面が
達したのを検知すると、攪拌機２ｄの運転が開始され、
同時に洗浄機構c0による洗浄プロセスが開始される。こ
れにより油成分、ゴミ、付着凝集物質、さらにはバクテ
リア等の不要な劣化物質が取り除かれる。その後、分級
用ポンプ１５によって、廃液は分級部Ｄの湿式分級機１
６に送られ、湿式分級機１６が運転を開始され、２次分
級が開始される。分級作業により所定の粒子径に分級さ
れた研磨剤は、配管パイプを通って濃度調整タンク１７
送られ、濃度調整と攪拌が開始される。ここで溶液も回
収される。Subsequently, the abrasive waste liquid that has been wet-classified by the air pump 12 enters the cleaning tank 13 of the cleaning section C, and when the water level detectors 3c and 3d detect that the liquid level has reached the operation start level. , The operation of the stirrer 2d is started,
At the same time, the cleaning process by the cleaning mechanism c0 is started. As a result, unnecessary deteriorating substances such as oil components, dust, adhered and coagulated substances, and bacteria are removed. Thereafter, the waste liquid is separated by the classification pump D in the classification unit D by the classification pump 15.
6, the wet classifier 16 is started to operate, and the secondary classification is started. The abrasive which has been classified to a predetermined particle size by the classification operation passes through a pipe pipe to a concentration adjusting tank 17.
Then, concentration adjustment and stirring are started. Here, the solution is also collected.

【００５４】次いで、粉末再生部Ｅで濃度（含水率）が
４０％に調整された研磨剤廃液をエアードポンプ１８に
て噴霧乾燥機１９ａもしくは培焼炉１９ｂに送り、温度
２５０℃で水分をほぼ完全に含まない研磨剤を再生回収
する。なお、本実施の形態１の場合、粉末化処理を噴霧
乾燥機１９ａで比較的低い温度２５０℃で行っている
が、培焼炉１９ｂにおいて１３００℃〜１４００℃程度
の高温で培焼すると、粉末の白色度が著しく増し、結晶
形が元に戻った良好な粉末にすることができる。もちろ
ん、条件が変われば温度にも若干の変動がある。Next, the abrasive waste liquid whose concentration (water content) has been adjusted to 40% in the powder regenerating section E is sent to the spray dryer 19a or the sintering furnace 19b by the air pump 18 to remove water at a temperature of 250 ° C. Recover and recover almost completely free abrasive. In the case of the first embodiment, the powdering treatment is performed in the spray dryer 19a at a relatively low temperature of 250 ° C., but when the calcination is performed at a high temperature of about 1300 ° C. to 1400 ° C. in the calcination furnace 19b, the powder Has a remarkable increase in whiteness and a good powder whose crystal form has returned to its original state. Of course, if the conditions change, the temperature also slightly changes.

【００５５】さて、以上説明した再生された無機研磨剤
がどのような研磨剤特性を示すかについて、再生された
無機研磨剤と、未使用（使用前）の無機研磨剤、及びス
ラリー状の無機研磨剤廃液含有粒子を比較することで詳
細に説明する。Now, what kind of abrasive properties of the regenerated inorganic abrasive described above are exhibited will be described. The regenerated inorganic abrasive, the unused (before use) inorganic abrasive, and the slurry inorganic This will be described in detail by comparing abrasive waste liquid-containing particles.

【００５６】図３（ａ）は本発明の実施の形態１におけ
る使用前の無機研磨剤の粒度分布図、図３（ｂ）は本発
明の実施の形態１におけるスラリー状の無機研磨剤廃液
含有粒子の粒度分布図、図３（ｃ）は本発明の実施の形
態１における再生無機研磨剤の粒度分布図、図４（ａ）
は本発明の実施の形態１における使用前の無機研磨剤の
顕微鏡写真図、図４（ｂ）は本発明の実施の形態１にお
けるスラリー状の無機研磨剤廃液含有粒子の顕微鏡写真
図、図４（ｃ）は本発明の実施の形態１における再生無
機研磨剤の顕微鏡写真図である。FIG. 3 (a) is a particle size distribution diagram of the inorganic abrasive before use in the first embodiment of the present invention, and FIG. 3 (b) is a slurry containing the inorganic abrasive waste liquid in the first embodiment of the present invention. FIG. 3 (c) is a particle size distribution diagram of the regenerated inorganic abrasive in Embodiment 1 of the present invention, FIG. 4 (a)
4 is a micrograph of the inorganic abrasive before use in Embodiment 1 of the present invention, and FIG. 4B is a micrograph of the slurry-like inorganic abrasive waste liquid-containing particles in Embodiment 1 of the present invention; FIG. (C) is a photomicrograph of the recycled inorganic abrasive according to Embodiment 1 of the present invention.

【００５７】測定試料として上記の溶融Ａｌ２Ｏ３成分
とＺｒＳｉＯ４成分の混合物からなる無機研磨剤を選
び、その未使用（使用前）の研磨剤試料と、再生された
研磨剤試料、及びスラリー状の無機研磨剤廃液含有粒子
の試料を比較して成分分析を行った。分析機器は蛍光Ｘ
線分析装置（リガク製 Ｘ−ＲＡＹ ＳＥＣＲＯＭＥＴ
ＯＲ３２７０）を用いた。各試料は直径３０ｍｍのアル
ミリングを用い、専用ダイスにはさみ、プレス機で２０
トンの圧力で加圧成型し、蛍光Ｘ線スペクトルを測定し
た。得られた蛍光Ｘ線スペクトルに基づく主な検出成分
のＦＰ法による推定定量分析結果を（表１）に示す。含
有量は単純酸化物換算で示している。An inorganic abrasive made of a mixture of the above-mentioned molten Al 2 O 3 component and ZrSiO 4 component was selected as a measurement sample, and the unused (before use) abrasive sample, the regenerated abrasive sample, and the slurry were used. The sample of the particles containing the inorganic abrasive waste liquid in the form of a sample was compared for component analysis. Analytical instrument is fluorescent X
Ray analyzer (Rigaku X-RAY SECROMET)
OR3270) was used. Each sample used an aluminum ring with a diameter of 30 mm, sandwiched between special dies, and pressed with a press machine.
Pressure molding was performed at a pressure of ton, and a fluorescent X-ray spectrum was measured. (Table 1) shows the results of the quantitative analysis of the main detection components estimated by the FP method based on the obtained fluorescent X-ray spectrum. The content is shown in terms of simple oxide.

【００５８】[0058]

【表１】 [Table 1]

【００５９】（表１）によれば、未使用（使用前）の無
機研磨剤と再生研磨剤の成分は、各成分とも差はない
か、あっても１％に満たない僅かな成分差であり、これ
は本来の未使用無機研磨剤の成分誤差の範囲に含まれる
程度のものである。このように再生した無機研磨剤は未
使用の無機研磨剤とほとんど変わらない純度を有するも
のである。これに対し、スラリー状の無機研磨剤廃液の
粒子成分はＦｅ２Ｏ３やＳｉＯ２等その他の不純物が増
えており、Ａｌ２Ｏ３やＺｒＯ２が比較的減少している
のが分かる。この結果からみて本発明の再生処理装置
は、洗浄部Ｃによる劣化物質の洗浄と、粉末再生部Ｅに
よる乾燥培焼で、無機研磨剤廃液から上述の不純物、さ
らには目には見えないがバクテリア等まで含めてほぼ完
全に除去し、再生無機研磨剤の品質を未使用の品質程度
にまで回復させているのが分かる。According to (Table 1), the components of the unused (before use) inorganic abrasive and the regenerated abrasive are not different from the respective components, or at least have a slight component difference of less than 1%. This is within the range of the component error of the originally unused inorganic abrasive. The inorganic abrasive thus regenerated has a purity almost equal to that of an unused inorganic abrasive. On the other hand, it can be seen that in the particle component of the slurry-like inorganic abrasive waste liquid, other impurities such as Fe 2 O 3 and SiO 2 are increased, and Al 2 O 3 and ZrO 2 are relatively reduced. In view of these results, the regenerating apparatus of the present invention is capable of cleaning the deteriorating substances by the cleaning section C and drying and baking by the powder regenerating section E to remove the above-mentioned impurities from the inorganic abrasive waste liquid, It can be seen that the removal was almost completely performed including the removal of the inorganic abrasive, and the quality of the recycled inorganic abrasive was restored to the level of unused quality.

【００６０】次に、図３（ａ）（ｂ）（ｃ）に示すよう
に粒度分布の測定を行って特性比較した。測定機器は島
津レーザ回折式粒度分布測定装置（ＳＡＬＤ−２００
０）である。未使用（使用前）の無機研磨剤と再生した
無機研磨剤の粒度分布は、大体１２μｍ幅で１０μｍ付
近でピークを示すほぼ同様の分布を有している。この範
囲以外に分布上ピークを示すところは存在しない。これ
はいずれもが１０μｍ程度の大きさのほぼ均一な粒子か
ら構成されていることを示している。これに対してスラ
リー状の無機研磨剤廃液の粒度分布は、１０μｍを中心
にやや低めのピークを示すが、このほかにも６μｍ以下
１μｍまで非常に広範な分布を有しており、多数の微粒
子を含んでいるのが分かる。さらに３０μｍから５０μ
ｍの範囲の比較的大きな粒子も含んでいるのも分かる。
これは、研磨後の無機研磨剤廃液には研磨剤粒子のほか
にさまざまの粒子が含有されているためと考えられる。
本発明の再生処理装置は、研磨の結果混入するこれらの
異径の削り屑やその他の粒子を完全に除去し、未使用の
無機研磨剤と同等の粒子の分布状態にまで再生研磨剤を
再生させている。Next, as shown in FIGS. 3A, 3B and 3C, the particle size distribution was measured and the characteristics were compared. The measuring instrument is Shimadzu laser diffraction type particle size distribution analyzer (SALD-200
0). The particle size distributions of the unused (before use) inorganic abrasive and the regenerated inorganic abrasive have approximately the same distribution with a width of about 12 μm and a peak near 10 μm. There is no peak in the distribution other than this range. This indicates that each of them is composed of substantially uniform particles having a size of about 10 μm. On the other hand, the particle size distribution of the slurry-like inorganic abrasive waste liquid shows a slightly lower peak around 10 μm, but also has a very wide distribution from 6 μm to 1 μm, and a large number of fine particles. You can see that it contains Further 30μm to 50μ
It can also be seen that relatively large particles in the range of m are also included.
This is probably because the inorganic abrasive waste liquid after polishing contains various particles in addition to the abrasive particles.
The reclaiming apparatus of the present invention completely removes these different-size shavings and other particles mixed as a result of polishing, and regenerates the reclaimed abrasive to a distribution state of particles equivalent to unused inorganic abrasives. Let me.

【００６１】さらに、図４（ａ）（ｂ）（ｃ）に示すよ
うに粒子形状の顕微鏡観察を行った。測定機器は（株）
島津製作所製 ＥＰＭＡ１６００（倍率×１０００倍）
である。未使用（使用前）の無機研磨剤と再生無機研磨
剤の粒子形状は、いずれも角張った塊状で、稜線がいわ
ばエッジとなった形状をしている。さらに、これらの塊
の中でいくつかの粒子の表面に非常に小さな点状の凝着
物（付着物）が付着しているのが確認できる。両者に
は、粒子形状と、表面の付着物の量にほとんど差がみら
れない。これに対し、スラリー状の無機研磨剤廃液の粒
子は、研磨に寄与しない多数の小さな粒子が混入してい
るのが分かる。また全体的に各粒子の形状が丸っぽく、
エッジとなる稜線をもたない形状となっている。これは
各粒子の表面を多量の付着物が覆っているためと考えら
れる。エッジの存在が研磨特性と密接な関係をもつか
ら、この丸っぽい形状、いいかえれば表面を覆う付着物
が研磨性能をおとす原因となる。本発明の再生処理装置
は、洗浄部Ｃにおいてこの付着物の原因となる劣化物質
をほぼ完全に除去し、粉末再生部Ｅにおいて乾燥培焼す
るから、再生無機研磨剤の研磨性能を未使用の無機研磨
剤と同等のところまで再生、回復させることができたも
のである。Further, as shown in FIGS. 4 (a), 4 (b) and 4 (c), the particle shape was observed with a microscope. Measuring equipment is
Shimadzu EPMA1600 (magnification x 1000)
It is. The particle shapes of the unused (before use) inorganic abrasive and the regenerated inorganic abrasive are both angular lumps and have a shape in which ridges are edges. Further, it can be confirmed that very small point-like deposits (adhesions) are attached to the surfaces of some of the particles in these lumps. There is almost no difference between the two in the particle shape and the amount of deposits on the surface. On the other hand, it can be seen that many small particles that do not contribute to polishing are mixed in the slurry-like inorganic abrasive waste liquid particles. In addition, the shape of each particle is round overall,
It has a shape that does not have a ridge line serving as an edge. This is considered to be because a large amount of deposits covered the surface of each particle. Since the presence of the edge has a close relationship with the polishing characteristics, the round shape, in other words, the deposit covering the surface causes the polishing performance to deteriorate. Since the regenerating apparatus of the present invention almost completely removes the deteriorating substance causing the deposit in the cleaning section C and performs dry calcination in the powder regenerating section E, the polishing performance of the regenerated inorganic abrasive is not used. It can be regenerated and recovered to the same level as an inorganic abrasive.

【００６２】最後に、（表２）は、未使用（使用前）の
無機研磨剤と、再生された無機研磨剤の研磨特性の比較
表である。研磨特性は、研磨速度，表面粗さ（Ｒａ），
スクラッチ（不良数／処理数）について測定した。Finally, Table 2 is a comparison table of the polishing characteristics of the unused (before use) inorganic abrasive and the recycled inorganic abrasive. Polishing characteristics include polishing rate, surface roughness (Ra),
Scratch (number of defects / number of treatments) was measured.

【００６３】[0063]

【表２】 試験方法は、研磨剤を水とラッピングオイルに懸濁さ
せ、ラップ盤を用いて被研磨物を研磨して上記研磨特性
を測定した。[Table 2] In the test method, an abrasive was suspended in water and wrapping oil, and the object to be polished was polished using a lapping machine to measure the above polishing characteristics.

【００６４】研磨特性のうち研削速度は、被研磨物とし
てシリコンウエハを２０枚用い、ラッピング機械として
不二越社製マシンを用いて、３インチφのワークを加重
１００ｇ／ｃｍ２、回転数７０ｒｐｍ、研磨用スラリー
の注入量１２０ｍｌ／分で研磨して測定した。この研磨
用スラリーの組成は、研磨剤６００ｇに対してラッピン
グオイル４５０ｍｌ、水２２５０ｍｌである。表面粗さ
（Ｒａ）は、こうして研磨を行ったシリコンウエハを研
磨後に粗さ計（東京精密社製）で測定した。さらに、ス
クラッチは、この研磨後のシリコンウエハを４０倍の光
学顕微鏡で観察することで調査した。Among the polishing characteristics, the grinding speed was such that 20 silicon wafers were polished and a 3-inch φ work was weighed at 100 g / cm 2 , a rotation speed of 70 rpm, and a lapping machine using a machine made by Fujikoshi Corporation. The polishing was carried out at a pouring rate of 120 ml / min of the slurry for use and measured. The composition of this polishing slurry is 450 g of lapping oil and 2250 ml of water per 600 g of abrasive. The surface roughness (Ra) was measured by a roughness meter (manufactured by Tokyo Seimitsu Co., Ltd.) after polishing the silicon wafer thus polished. Further, the scratch was investigated by observing the polished silicon wafer with an optical microscope of 40 ×.

【００６５】（表２）によれば、未使用（使用前）の無
機研磨剤と再生された無機研磨剤とで、研磨特性に違い
がないことが分かる。このように本発明の再生処理装置
によれば、再生無機研磨剤は、高純度で使用前（未使
用）の無機研磨剤とほとんど変わらない安定した研磨剤
特性を有していることが分かる。According to Table 2, it is found that there is no difference in the polishing characteristics between the unused (before use) inorganic abrasive and the recycled inorganic abrasive. As described above, according to the reclaiming apparatus of the present invention, it can be seen that the reclaimed inorganic abrasive has high purity and stable abrasive properties which are almost the same as those of the inorganic abrasive before use (unused).

【００６６】なお、培焼炉において１３００℃〜１４０
０℃で培焼したときの無機研磨剤粉末の結晶形はＸ線回
折で測定した。測定機器は島津製作所Ｘ線回折装置ＸＤ
−１である。測定条件はＸ線管球について、ターゲット
Ｃｕ，管電流１５ｍＡ，管電圧３５ｋＷ、スリットにつ
いて、発散スリット１（ｄｅｇ），空気散乱防止スリッ
ト１（ｄｅｇ），検出スリット０．３０（ｍｍ）であ
る。この測定結果は、Ｘ線ピークパターンではコランダ
ム結晶のアルミナとジルコンのピークが明確に析出して
おり、使用前と同様にＡｌ２Ｏ３成分相とＺｒＳｉＯ４
成分相の２相の結晶形からなっていることが確認でき
た。In the sintering furnace, 1300 ° C. to 140 ° C.
The crystal form of the inorganic abrasive powder when baked at 0 ° C. was measured by X-ray diffraction. The measuring equipment is Shimadzu X-ray diffractometer XD
It is -1. The measurement conditions are as follows: target X, tube current 15 mA, tube voltage 35 kW, slit 1 (deg), air scattering prevention slit 1 (deg), and detection slit 0.30 (mm) for the X-ray tube. The measurement results show that in the X-ray peak pattern, peaks of corundum crystals of alumina and zircon are clearly precipitated, and the Al 2 O 3 component phase and ZrSiO 4
It was confirmed that it was composed of two phases of the component phases.

【００６７】[0067]

【発明の効果】以上述べたように、本発明の無機研磨剤
廃液の再生処理装置は、除去分級部を設けることによっ
て濃縮廃液中の異物分の除去を行い、研磨剤廃液の１次
の湿式分級を行い、品質的に安定した廃液を洗浄部に送
り込むことができる。As mentioned above, the apparatus for regenerating inorganic abrasive waste liquid of the present invention removes foreign substances in concentrated waste liquid by providing a removal classifying section, and removes the primary wet-type abrasive waste liquid. Classification is performed, and a waste liquid having a stable quality can be sent to the washing unit.

【００６８】また、洗浄部を設けることによってスラリ
ー状の廃液から、再生研磨剤特性に影響する劣化物質で
ある、汚水成分や油成分、付着凝集物質、バクテリア等
を取り除き、安定した品質の研磨剤を再生することがで
きる。Further, by providing a washing section, a deteriorating substance which affects the characteristics of the regenerated abrasive, such as sewage components, oil components, adhered coagulants, bacteria, etc., is removed from the slurry waste liquid, and a stable quality abrasive is obtained. Can be played.

【００６９】また、分級部に湿式分級機を用いるから、
廃液中の粒子を微細粒子と中細粒子と粗大粒子とに分別
でき、さらには比重の異なる粒子も分離できる。Since a wet classifier is used in the classifying section,
Particles in the waste liquid can be separated into fine particles, medium-fine particles, and coarse particles, and particles having different specific gravities can be separated.

【００７０】また、粉末再生部を設けることによって研
磨剤の含水スラリー状固形物の水分を完全に除去し、さ
らには研磨剤を完全に元の結晶形に戻し、粉末状の無機
研磨剤にすることができる。By providing a powder regenerating unit, the water content of the slurry containing the abrasive slurry is completely removed, and the abrasive is completely returned to the original crystal form to obtain a powdery inorganic abrasive. be able to.

【００７１】また、制御部を設けたことにより、再生処
理装置を自動的に安定して制御し、連続作業を行うこと
ができる。Further, by providing the control section, the reproduction processing apparatus can be automatically and stably controlled, and continuous work can be performed.

【００７２】また、再生無機研磨剤は、高純度で使用前
（未使用）の研磨剤とほとんど変わらず安定した研磨剤
特性を有し、さらに、分離された溶液も高純度で不純物
が含まれておらず、そのまま再利用できる純度を有して
おり、使用済みで廃棄される無機研磨剤廃液を有効利用
することができ、環境保全に貢献するものである。The recycled inorganic abrasive has high purity and stable abrasive properties almost same as before use (unused). Further, the separated solution has high purity and contains impurities. It has a purity that can be reused as it is, and can effectively use waste inorganic abrasive waste liquid that has been used and discarded, thereby contributing to environmental conservation.

【図面の簡単な説明】[Brief description of the drawings]

【図１】本発明の実施の形態１における無機研磨剤廃液
の再生処理装置の構成図FIG. 1 is a configuration diagram of an apparatus for regenerating an inorganic abrasive waste liquid according to a first embodiment of the present invention.

【図２】（ａ）本発明の実施の形態１における洗浄部の
第１拡大図 （ｂ）本発明の実施の形態１における洗浄部の第２拡大
図FIG. 2A is a first enlarged view of a cleaning unit according to the first embodiment of the present invention. FIG. 2B is a second enlarged view of a cleaning unit according to the first embodiment of the present invention.

【図３】（ａ）本発明の実施の形態１における使用前の
無機研磨剤の粒度分布図 （ｂ）本発明の実施の形態１におけるスラリー状の無機
研磨剤廃液含有粒子の粒度分布図 （ｃ）本発明の実施の形態１における再生無機研磨剤の
粒度分布図FIG. 3 (a) Particle size distribution diagram of inorganic abrasive before use in Embodiment 1 of the present invention (b) Particle size distribution diagram of slurry-like inorganic abrasive waste liquid-containing particles in Embodiment 1 of the present invention ( c) Particle size distribution diagram of the regenerated inorganic abrasive in Embodiment 1 of the present invention

【図4】（ａ）本発明の実施の形態１における使用前の
無機研磨剤の顕微鏡写真図 （ｂ）本発明の実施の形態１におけるスラリー状の無機
研磨剤廃液含有粒子の顕微鏡写真図 （ｃ）本発明の実施の形態１における再生無機研磨剤の
顕微鏡写真図(A) Micrograph of inorganic abrasive before use in Embodiment 1 of the present invention (b) Micrograph of slurry-containing inorganic abrasive waste liquid-containing particles in Embodiment 1 of the present invention (FIG. 4) c) A micrograph of the recycled inorganic abrasive according to the first embodiment of the present invention.

【符号の説明】[Explanation of symbols]

Ａ 原液貯槽部 Ｂ 除去分級部 Ｃ 洗浄部 Ｄ 分級部 Ｅ 粉末再生部 Ｆ 制御部 １ 原料タンク ２ａ，２ｂ，２ｃ，２ｄ，２ｅ 攪拌機 ３ａ，３ｂ，３ｃ，３ｄ 水位検知器 ４ エアーピンチバルブ ５，１１，１７ 濃度調整タンク ６，１２，１８ エアードポンプ ７ 振動篩 ８ 除鉄分級タンク ９，１５ 分級用ポンプ １０，１６ 湿式分級機 １３ 洗浄タンク １４，２５，２６ 電動バルブ １９ａ 噴霧乾燥機 １９ｂ 培焼炉 ２０ 制御盤 ２１ 噴霧器 ２２ 温度調整装置 ２３ バッファ槽 ２４ 濾過装置 ２７ 加熱装置 ２８ 温度調整加圧装置 ｃ0 洗浄機構 A stock solution storage section B removal classification section C cleaning section D classification section E powder regeneration section F control section 1 raw material tank 2a, 2b, 2c, 2d, 2e stirrer 3a, 3b, 3c, 3d water level detector 4 air pinch valve 5, 11,17 Concentration adjusting tank 6,12,18 Air pump 7 Vibrating sieve 8 Iron removal classifying tank 9,15 Classification pump 10,16 Wet classifier 13 Cleaning tank 14,25,26 Electric valve 19a Spray dryer 19b Cultivation Furnace 20 Control panel 21 Sprayer 22 Temperature control device 23 Buffer tank 24 Filtration device 27 Heating device 28 Temperature control pressurization device c0 Cleaning mechanism

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｂ０３Ｃ 1/28 Ｂ０３Ｃ 1/28 Ｂ２４Ｂ 37/00 Ｂ２４Ｂ 37/00 Ｋ (72)発明者 高橋 一敏 宮崎県宮崎市大字熊野1432番地 (72)発明者 谷 勢津夫 宮崎県宮崎市吉村町上無田堤甲702番地６ (72)発明者 多木 宏光 宮崎県宮崎市大字島之内7078番地２ Ｆターム(参考） 3C047 FF08 GG14 GG17 3C058 AA07 AC04 CB03 DA17 4D071 AA05 AA53 AA62 AB02 AB13 AB23 AB43 AB49 BA01 BA12 BB12 CA01 CA05 DA20 ──────────────────────────────────────────────────の Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat ゛ (Reference) B03C 1/28 B03C 1/28 B24B 37/00 B24B 37/00 K (72) Inventor Kazutoshi Takahashi Miyazaki 1432 Kumano, Miyazaki-shi (72) Inventor, Settsuo Tani 702-6, Tsutsumi Kameda, Yoshimura-cho, Miyazaki-shi, Miyazaki Pref. 3C047 FF08 GG14 GG17 3C058 AA07 AC04 CB03 DA17 4D071 AA05 AA53 AA62 AB02 AB13 AB23 AB43 AB49 BA01 BA12 BB12 CA01 CA05 DA20

Claims (10)

【特許請求の範囲】[Claims] 【請求項１】使用済みでスラリー状となった無機研磨剤
廃液から粉末状の無機研磨剤を回収する無機研磨剤廃液
の再生処理装置であって、 使用済みの無機研磨剤廃液を貯槽するとともに濃度を所
定濃度に調整する原液貯槽部と、 前記原液貯槽部から供給されたスラリー状の廃液から異
物分を除去し前記異物分除去後の廃液を湿式分級する除
去分級部と、 前記除去分級部から供給されたスラリー状の廃液に洗浄
液を加え、研磨剤の再生研磨剤特性に影響を与える劣化
物質を該廃液から洗浄する洗浄部と、 前記洗浄部から送られるスラリー状の廃液を湿式分級し
て含水スラリー状固形物と溶液に分離する分級部と、 前記分級部で分離された含水スラリー状固形物を乾燥も
しくは培焼して粉末化する粉末再生部を備えたことを特
徴とする無機研磨剤廃液の再生処理装置。1. An inorganic abrasive waste liquid reclaiming apparatus for recovering a powdery inorganic abrasive liquid from a used and slurry-like inorganic abrasive waste liquid, comprising a tank for storing a used inorganic abrasive waste liquid. An undiluted solution storage unit that adjusts the concentration to a predetermined concentration, a removal classification unit that removes foreign matter from the slurry waste liquid supplied from the undiluted solution storage unit and wet-classifies the waste liquid after the removal of the foreign matter, and the removal classification unit A washing unit for adding a washing liquid to the slurry waste liquid supplied from the washing unit to wash deteriorating substances affecting the regenerated abrasive properties of the abrasive from the waste liquid; and wet classification of the slurry waste liquid sent from the washing unit. A classification unit for separating into a hydrated slurry-like solid and a solution, and a powder regenerating unit for drying or baking the hydrated slurry-like solid separated in the classification unit to powder. Playback processing apparatus of the agent waste. 【請求項２】前記洗浄液が１０℃〜１３０℃の温度範囲
にある温水もしくは熱水、またはアルコール系溶剤であ
ることを特徴とする請求項1記載の無機研磨剤廃液の再
生処理装置。2. The apparatus for reclaiming inorganic abrasive waste liquid according to claim 1, wherein the cleaning liquid is hot water or hot water in the temperature range of 10 ° C. to 130 ° C., or an alcohol-based solvent. 【請求項３】前記原液貯槽部が原料タンクと濃度調整タ
ンクを備え、攪拌機と水位検知器とエアーピンチバルブ
を用いて無機研磨剤廃液の固形分濃度を管理することを
特徴とする請求項1または２に記載の無機研磨剤廃液の
再生処理装置。3. The undiluted liquid storage section includes a raw material tank and a concentration adjusting tank, and controls a solid concentration of the inorganic abrasive waste liquid using a stirrer, a water level detector, and an air pinch valve. Or an apparatus for regenerating an inorganic abrasive waste liquid according to item 2. 【請求項４】前記除去分級部が、鉄分を除去する除鉄機
と、他の異物を除去するための篩いと、湿式分級機を備
え、無機研磨剤廃液から異物分を除去し、1次の湿式分
級を行うことを特徴とする請求項１〜３のいずれかに記
載の無機研磨剤廃液の再生処理装置。4. The removing and classifying section includes an iron removing machine for removing iron, a sieve for removing other foreign matter, and a wet classifier, and removes foreign matter from the inorganic abrasive waste liquid. The inorganic abrasive waste liquid regeneration treatment apparatus according to any one of claims 1 to 3, wherein the wet classification is performed. 【請求項５】前記洗浄部が、洗浄タンクと、研磨剤の再
生研磨剤特性に影響を与える劣化物質を洗浄するための
洗浄機構を備えたことを特徴とする請求項１から３のい
ずれかに記載の無機研磨剤廃液の再生処理装置。5. The cleaning unit according to claim 1, wherein the cleaning unit includes a cleaning tank and a cleaning mechanism for cleaning a deteriorating substance which affects the regenerated abrasive characteristics of the abrasive. 3. The apparatus for reclaiming inorganic abrasive waste liquid according to claim 1. 【請求項６】前記洗浄機構が前記洗浄タンクに設けられ
た噴霧器を備え、前記洗浄液に少なくとも蒸気圧以上の
背圧を加えて噴霧し洗浄することを特徴とする請求項５
記載の無機研磨剤廃液の再生処理装置。6. The cleaning mechanism according to claim 5, wherein the cleaning mechanism includes a sprayer provided in the cleaning tank, and the cleaning liquid is sprayed and cleaned by applying a back pressure of at least a vapor pressure to the cleaning liquid.
An apparatus for regenerating inorganic abrasive waste liquid as described in the above. 【請求項７】前記洗浄機構が前記洗浄タンクに設けられ
た加熱装置を備え、廃液と洗浄液を加熱して洗浄するこ
とを特徴とする請求項５または６に記載の無機研磨剤廃
液の再生処理装置。7. The reclaiming treatment of an inorganic abrasive waste liquid according to claim 5, wherein the cleaning mechanism includes a heating device provided in the cleaning tank, and heats and cleans the waste liquid and the cleaning liquid. apparatus. 【請求項８】前記分級部が２次の湿式分級を行うための
湿式分級機を備え、溶液中の粒子を粒子径及び／または
比重の違いで複数のクラスに分離することを特徴とした
請求項１〜７のいずれかに記載の無機研磨剤廃液の再生
処理装置。8. The method according to claim 1, wherein the classifying unit includes a wet classifier for performing a secondary wet classification, and separates particles in the solution into a plurality of classes according to a difference in particle diameter and / or specific gravity. Item 7. An apparatus for reclaiming inorganic abrasive waste liquid according to any one of Items 1 to 7. 【請求項９】前記粉末再生部が、含水スラリー状固形物
を８０℃〜１４００℃の範囲で乾燥もしくは培焼させた
ことを特徴とする請求項１〜８のいずれかに記載の無機
研磨剤廃液の再生処理装置。9. The inorganic abrasive according to claim 1, wherein said powder regenerating section dries or sinters the hydrous slurry-like solid at a temperature of 80 ° C. to 1400 ° C. Waste liquid regeneration equipment. 【請求項１０】前記原液貯槽部，前記除去分級部，前記
洗浄部，前記分級部及び前記粉末再生部を所定の制御動
作に従って制御する制御部が設けられたことを特徴とす
る請求項１〜９のいずれかに記載の無機研磨剤廃液の再
生処理装置。10. A control unit for controlling said stock solution storage unit, said removal classification unit, said washing unit, said classification unit and said powder regenerating unit in accordance with a predetermined control operation. An apparatus for reclaiming inorganic abrasive waste liquid according to any one of claims 9 to 13.
JP2000147870A 2000-03-30 2000-05-19 Recycling equipment for inorganic abrasive waste liquid Expired - Fee Related JP3776675B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000147870A JP3776675B2 (en) 2000-03-30 2000-05-19 Recycling equipment for inorganic abrasive waste liquid
KR10-2000-0040744A KR100370345B1 (en) 2000-03-30 2000-07-14 A Reprocessing Device of Inorganic Abrasive Waste Water
CNB001207830A CN1133510C (en) 2000-03-30 2000-07-14 Regenerating treater for waste liquid of inorganic abradant
TW89212245U TW450155U (en) 2000-03-30 2000-07-15 Recycling device for non-organic slurry waste

Applications Claiming Priority (3)

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JP2000001871U JP3072151U (en) 2000-03-30 2000-03-30 Inorganic abrasive waste liquid regeneration processing equipment
JP2000-1871 2000-03-30
JP2000147870A JP3776675B2 (en) 2000-03-30 2000-05-19 Recycling equipment for inorganic abrasive waste liquid

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010530135A (en) * 2007-06-15 2010-09-02 シルフィン カンパニー，リミテッド Method and system for recycling waste slurry generated in semiconductor wafer manufacturing process
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JP2010530135A (en) * 2007-06-15 2010-09-02 シルフィン カンパニー，リミテッド Method and system for recycling waste slurry generated in semiconductor wafer manufacturing process
CN103237628A (en) * 2010-12-16 2013-08-07 株式会社Ihi回转机械 Slurry management device for wire saw
JP2014028424A (en) * 2012-07-31 2014-02-13 Noritake Co Ltd Polishing system and abrasive life determination method
CN107695898A (en) * 2017-11-22 2018-02-16 河南理工大学 A kind of abrasive material gas jet mill material retracting device and method
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