CN1315232A - Regenerating treater for waste liquid of inorganic abradant - Google Patents

Regenerating treater for waste liquid of inorganic abradant Download PDF

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Publication number
CN1315232A
CN1315232A CN00120783A CN00120783A CN1315232A CN 1315232 A CN1315232 A CN 1315232A CN 00120783 A CN00120783 A CN 00120783A CN 00120783 A CN00120783 A CN 00120783A CN 1315232 A CN1315232 A CN 1315232A
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China
Prior art keywords
waste liquid
inorganic abradant
classification
abrasive
mentioned
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CN00120783A
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Chinese (zh)
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CN1133510C (en
Inventor
重永次伸
伊藤彰记
森山刚
高桥一敏
谷势津夫
多木宏光
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SANKURA BUSSAN KK
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SANKURA BUSSAN KK
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Priority claimed from JP2000001871U external-priority patent/JP3072151U/en
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Publication of CN1315232A publication Critical patent/CN1315232A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03B—SEPARATING SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS
    • B03B5/00—Washing granular, powdered or lumpy materials; Wet separating
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
    • B03B—SEPARATING SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS
    • B03B9/00—General arrangement of separating plant, e.g. flow sheets
    • B03B9/06—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse
    • B03B9/061—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse the refuse being industrial
    • B03B9/063—General arrangement of separating plant, e.g. flow sheets specially adapted for refuse the refuse being industrial the refuse being concrete slurry
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02W—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO WASTEWATER TREATMENT OR WASTE MANAGEMENT
    • Y02W30/00—Technologies for solid waste management
    • Y02W30/50—Reuse, recycling or recovery technologies
    • Y02W30/52—Mechanical processing of waste for the recovery of materials, e.g. crushing, shredding, separation or disassembly

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Separation Of Solids By Using Liquids Or Pneumatic Power (AREA)

Abstract

The invention provides a regenerative processor for an inorganic abrasive waste liquid to efficiently collect the powder of inorganic abrasive from the used inorganic abrasive waste liquid. The regenerative processor is furnished with a solution storage tank part, a removing and classifying part to remove foreign matter from waste liquid and to wet classify it, a washing part to wash deteriorated matter to give influence on the regenerative abrasive characteristics of a lubricant from the waste liquid by adding washing to the slurry waste liquid supplied from the removing and classifying part, a classifying part to separate the waste liquid into a water slurry solid material and solution by wet classifying it and a powder regenerating part to powder the water slurry solid material by drying or roasting it.

Description

The regenerating treater of waste liquid of inorganic abradant
The present invention relates to from used slimy waste liquid of inorganic abradant, to reclaim the regenerating treater of the waste liquid of inorganic abradant of pulverous regeneration inorganic abradant and solution.
Generally, the waste liquid that contains used inorganic abradant is a muddy, in its various solid compositions, contains and adds the inorganic abradant of using man-hour, by iron (Fe) and the tin (Sn) that shredder, grinding machine produce, also has other inorganic substance.As inorganic abradant, general having of using: Al 2O 3-ZrSiO 4System, Al 2O 3System, SiC system, the abrasive of cerium oxide compositions such as (Ce).In addition, as the treatment unit of waste liquid of inorganic abradant, generally all used the settling separation device of several large-scale subsiders in the past.In this subsider, solid and liquid separation, top clarified liq re-uses after can filtering, no matter whether solid then contains inorganic abradant all discards.
This processing mode is not only wasted efficient resource, and on the protection environment problem is arranged also.
In order to reclaim this depleted inorganic abradant, several method was proposed once in the past.For example, the device of the mixing composition of solid composition such as separation cut abrasive particle and solution has been proposed from the solution of the abrasive particle that contains cut-out in No. 10247/89 communique of Japanese patent laid-open publication gazette.The concrete practice is, utilizes filter member to carry out separating of solid and liquid, on columnar filter member, employing has the soft resin of continuous pore, reduce internal pressure, usefulness attraction mode on the filter member outer surface, makes solid and solution separating with the solids sorption in the stoste.
Secondly, disclose in No. 315576/92 communique at Japanese Patent and proposed to make the used abrasive particle liquid of from abrasive working appts, discharging to regenerate, make this regenerated abrasive particle liquid circulation device of cyclic regeneration repeatedly.Because the amount of regeneration abrasive particle liquid reduces gradually, so, add an amount of new abrasive particle and pure water and circulate through measuring.
In addition, to disclose the prior art that proposes in No. 186041/95 communique be flat plate milling devices such as relevant wafer to Japanese Patent.It adopts a plurality of cyclonic separators, and abrasive is shunted classification, is divided into the abrasive that roughing is used, semi-finishing is used and precision work is used, recycle.Here to disclose the technology that proposes in No. 315576/92 communique identical for the technology of Ti Chuing and Japanese Patent, and the circulation agent all is from the circulation of mud form, add insufficient abrasive particle.
Yet, in recent years, to the environmental issue of the trade waste big problem that becomes international.Except environmental problem, the article as trade waste is abandoned cause the waste of the resource and the energy on earth.But some enterprises abandon recycling article, cause manufacturing cost to improve, and are also influential to competitive power.Therefore, how regenerating, utilize trade waste, become the problem that enterprise must consider today, also is the responsibility of society and industry member.
Utilize in the work of trade waste in recirculation, as mentioned above, proposed used inorganic abradant regenerating technique.But the tripping device that proposes in No. 10247/89 communique of Japanese patent laid-open publication gazette adopts the soft resin that adds continuous pore on the filter member of drum type brake, by attracting, with solid and solution separating.Because solids diameter difference in the solution of cohesion easily, can be stopped up the hole of filter member, makes the device operation interrupted, therefore must take out the solid that stops up the filter member hole, changes filter member.
In addition, Japanese Patent discloses No. 315576/92 regeneration described in the communique, circulation device will add new abrasive particle and pure water and circulate in regeneration abrasive particle liquid.Because in the regeneration abrasive particle liquid, abrasive particle particle dia difference, and can constantly sneak into the smear metal of cutting from abrasive disk and grinding charge body etc. in the regeneration abrasive particle liquid.Like this, become circle, regenerated abrasive and original performance are obviously reduced as the acute angle particle shape of abrasive particle particle characteristics.About this point, disclose No. 186041/95 milling apparatus described in the communique at Japanese Patent and exist too, when utilizing regenerated liquid continuously, the characteristic of regeneration abrasive reduces.Therefore, hope can have a kind of regenerating treater of waste liquid of inorganic abradant that can be practical.
In addition, because Japanese Patent discloses the technology described in the communique No. 315576/92, No. 186041/95, all be in regeneration abrasive particle liquid, to add new abrasive particle basically, utilize again, therefore, can not get back to abrasive particle fully from abrasive particle liquid.Like this, the limited purity system of regenerated abrasive particle and solution.Yet the demand that improves regeneration inorganic abradant purity increases gradually, and with the regenerating treater of this circular form, is difficult to improve the purity of inorganic abradant of regenerating basically.
The present invention proposes in order to address the above problem, its objective is will provide from used waste liquid of inorganic abradant, reclaim effectively and have the high purity inorganic abradant that not have abrasive characteristic of change with untapped inorganic abradant, and the isolating solution inorganic abradant regenerating treater that can re-use.
The regenerating treater of waste liquid of inorganic abradant of the present invention has: stoste storage tank part; Remove the classification part; From remove the muddy waste liquid that classification partly supplies with, add washings, the washing part that the material inferior of influence regeneration abrasive characteristic is cleaned from this waste liquid; The waste liquid of sending into from the washing part is carried out wet classification, be separated into the classification part of aqueous muddy solid and solution; Isolating aqueous muddy solid in the classification part is carried out drying or roasting, do the powder regeneration section of powdered.
Like this, can be from used waste liquid of inorganic abradant, the abrasive characteristic of recovery and untapped inorganic abradant does not change effectively, highly purified inorganic abradant; Isolated solution also can re-use simultaneously.
The main points of invention below are described.
Be washing mud in the past, circulated as milling liquid.In this liquid circulation, can remove the dust of sneaking in the liquid, but can not remove attached to the lip-deep material inferior that liquid mass is degenerated of abrasive particle.
The contriver furthers investigate and improve its characteristic making the regeneration abrasive particle and not using abrasive particle to have same purity, and having found out attached to the lip-deep material inferior of abrasive particle is the maximum reason that regeneration abrasive particle abrasive characteristic is degenerated.And find that the bacterium in the waste liquid etc. also can make regeneration abrasive particle characteristic degenerate, can encourage surperficial material growth inferior.When the abrasive characteristic degenerated, this material inferior was very sharp, and relevant abrasive particle seamed edge becomes circle.As described later, in inducing substance, in cast iron, contain C etc. usually.
The regeneration of existing abrasive particle is carried out with this waste liquid, only removes the dust in the waste liquid, can not peel off dirt settling, though therefore regeneration abrasive particle and do not use the size-grade distribution of abrasive particle approaching, but abrasive particle still can not be regenerated.
The contriver has tried out the whole bag of tricks in order to remove this material inferior, and is all wrong.Abrasive particle is mixed use with solution, after the regeneration, be mixed in the same solution and use, can not get significative results, have to get back to powder and consider.When pulverulence, lip-deep dirt settling must reveal (abrasive particle separates) from solution, therefore can these dirt settlings be removed fully directly near the lip-deep material inferior of abrasive particle.
As the concrete grammar of removing dirt settling, first method is, utilizes the physical force that deliquescent hydraulic shock etc. is arranged with attaching surface, and the material inferior in the liquid is peeled off.Here can be with warm water or hot water, spray or stir and accomplish.Existing washing and stirring can not solve the problem of material inferior attached to the abrasive particle surface, can not remove the dirt settling of cohesion.In fact can not freely remove these dirt settlings.Particularly, the stirring of usefulness such as existing classification, the speed of relative movement of abrasive particle and liquid is low.The present invention in order to separate the dirt settling that peels off, need not give energy.On the contrary, for classification, settling velocity is very important, and the stirring that surpasses settling velocity does not need yet.
In addition, the present invention is used to peel off the washing part of dirt settling, gives and peels off the dirt settling energy, and dirt settling is removed.As second method, added that in the powder regeneration section abrasive of will regenerating is done powdered, drying or baking heat to hundreds of degree centigrade to 1400 ℃, when adding thermal shocking, material inferior is removed fully.For example, when using the abrasive disk (platform) of cast iron with the most use, the abrasive waste liquid is Fe 3C and C reach the mud by blended black.Carbon makes Fe as inducing substance 3The C cohesion becomes huge piece, and regeneration abrasive characteristic is degenerated.This carbon can not be removed with pickling, in washing part of the present invention and powder regeneration section, is can the regenerated unique method 900 ℃～1400 ℃ following roastings.
Like this, the present invention has: the washing part of peeling off the material inferior that adheres to; Can after removing dirt settling, remove the classification portion of impurity again; Carry out thermal shocking and impurity incendiary powder regeneration section at hundreds of under degree centigrade to 1400 ℃ then.As a result, can bear again aspect abrasive characteristic and size-grade distribution and other, with the identical regeneration abrasive particle of untapped abrasive particle.This regeneration abrasive particle can play the effect more not inferior fully than untapped abrasive particle when grinding, grinding.
According to the present invention, a kind of from used muddy waste liquid of inorganic abradant, reclaim the waste liquid of inorganic abradant regenerating treater of Powdered inorganic abradant, it has: used waste liquid of inorganic abradant is stored, simultaneously its concentration is adjusted to the stoste storage tank part of given concentration; To remove foreign matter from the muddy waste liquid that above-mentioned stoste storage tank is partly supplied with, that the more above-mentioned waste liquid of removing foreign matter is carried out wet classification removes the classification part; Removing the muddy waste liquid that classification partly supplies with from above-mentioned, add washings, from this waste liquid, clean the washing part of the material inferior of influence regeneration abrasive characteristic; To carry out wet classification from the muddy waste liquid that above-mentioned washing is partly sent, with the classification part of aqueous muddy solid and solution separating; Isolating aqueous slurry shape solid in the above-mentioned classification part is carried out drying or roasting, do the powder regeneration section of powdered.Through the washing partially disposed, can remove material inferior; Like this, in the powder regeneration section when drying or roasting, do not have impurity fully, inorganic abradant returns back to the crystallization of circle free from foreign meter, can reclaim that do not change fully, the highly purified inorganic abradant of stable abrasive characteristic with untapped inorganic abradant.In addition, the solution of Separation and Recovery in the classification part, owing to remove the washing part, the washing part can be removed impurity and material inferior fully, and is therefore free from foreign meter, can re-use.
The regenerating treater of waste liquid of inorganic abradant as described in the present invention, above-mentioned washings is the warm water or the hot water of 10 ℃～130 ℃ of temperature ranges, or the ethanol kind solvent.Owing to remove material inferior effectively, when powder regeneration section drying or calcination process, can remove remaining impurities and material inferior fully.
Waste liquid of inorganic abradant regenerating treater as described in the present invention, above-mentioned stoste storage tank partly has former hopper and concentration adjusting tank, utilizes stirrer and liquid level detector and air pinched valve, the solid components and concentration in the management waste liquid of inorganic abradant.Therefore, available stirrer disperses the solid composition in the waste liquid of inorganic abradant, uses liquid level detector and air pinched valve again, and the solids concn in the management waste liquid is adjusted to optimum with the concentration of inorganic abradant muddy waste liquid.
The regenerating treater of waste liquid of inorganic abradant is as described in the present invention above-mentionedly removed classification and is partly had magnetic separator de-ironing except that the de-iron composition, removes the sieve and the wet classifier of other foreign matter; From waste liquid of inorganic abradant, remove foreign matter, carry out wet classification one time.Therefore, iron and other foreign matter in the waste liquid of inorganic abradant can be removed, the extraordinary waste liquid of granular management can be obtained with a wet classification.In the described waste liquid of inorganic abradant regenerating treater of claim 3, can do these work too.
Waste liquid of inorganic abradant regenerating treater as described in the present invention, above-mentioned washing partly have rinse bath and clean washing mechanism to the influential material inferior of regeneration abrasive characteristic of abrasive.Therefore, unwanted oil, sewage, the dust in the available washing mechanism flush away waste liquid, adhere to materials inferior such as condensation product, bacterium.In addition, unwanted waste liquid overflow then, is adjusted concentration, with the muddy waste liquid of a certain amount of inorganic abradant, stably delivers to the classification part continuously.In the described inorganic abradant regenerating treater of claim 3, can do these work too.
The regenerating treater of waste liquid of inorganic abradant as described in the present invention, above-mentioned washing mechanism has the atomizer that is contained in the above-mentioned rinse bath, adds the back pressure more than the vapor pressure at least in above-mentioned washings, carries out spray washing.Therefore, can clean the materials inferior such as condensation product that condense upon on the inorganic abradant reliably.
The regenerating treater of waste liquid of inorganic abradant as described in the present invention, above-mentioned washing mechanism has the heating unit that is contained in the above-mentioned rinse bath, with waste liquid and washings heating, clean.Therefore, to adding the waste liquid heating of washings, not only can clean the material inferior in the waste liquid reliably, and can clean attached to the materials inferior such as condensation product on the inorganic abradant.Except that heating, pressurization makes the waste liquid of heating become spraying again, more can improve clean effect.In the described waste liquid of inorganic abradant regenerating treater of claim 6, also can do same work.
Waste liquid of inorganic abradant regenerating treater as described in the present invention, above-mentioned classification partly has the wet classifier that carries out the secondary wet classification, and the separate particles in the solution is become particle dia and/or the different a plurality of ranks of proportion.Therefore, can pass through the secondary wet classification, the uniform particle of the aqueous slurry shape solid of the inorganic abradant that obtains wishing and the particle of other several levels.Refilter, separate, obtain high solid of yield rate and liquid separation.In claim 3～7, in any described waste liquid of inorganic abradant regenerating treater, also can carry out same work.
Waste liquid of inorganic abradant regenerating treater as described in the present invention, above-mentioned powder regeneration section, in 80 ℃～1400 ℃ temperature range, the aqueous muddy solid of drying or roasting.Under 80 ℃～1400 ℃, almost can remove the moisture in the aqueous muddy solid fully, the impurity of trace is selected, and circle is replied in the crystallization of abrasive particle fully.Because the washing part has been cleaned material inferior, does not have residual non-combustible impurities, therefore can remove impurity fully.In claim 3～8, in any described waste liquid of inorganic abradant regenerating treater, also can carry out same work.
The regenerating treater of waste liquid of inorganic abradant as described in the present invention, when making cast iron abrasive disk, above-mentioned powder regeneration section, in 900 ℃～1400 ℃ temperature range, the aqueous muddy solid of drying or roasting.Therefore, when using the abrasive disk of cast iron with the most use (platform), the abrasive waste liquid is Fe 3The mud of C and carbon and oily blended black, this carbon becomes inducing substance, makes Fe 3The C cohesion becomes huge piece, and regeneration abrasive characteristic is degenerated.This carbon can not be removed with pickling, therefore, in the washing of washing part with in the powder regeneration section, is unique possible renovation process 900 ℃～1400 ℃ following roastings.
The regenerating treater of waste liquid of inorganic abradant is provided with and can controls above-mentioned stoste storage tank part according to given control action as described in the present invention, removes the classification part, the control section of classification part and powder regeneration section.Therefore, to the powder regeneration section, granular management, each device of temperature treatment can be managed from stoste storage tank part by given sequential control concentration.In claim 3～9, in any described waste liquid of inorganic abradant regenerating treater, also can carry out same work.
Waste liquid of inorganic abradant regenerating treater of the present invention is removed the classification part by setting, removes the foreign matter in the concentrating spent liquor, carries out a wet classification of abrasive waste liquid again, and the waste liquid of stay in grade is sent in the washing part.
In addition, by the washing part is set, remove the material inferior of influence regeneration abrasive characteristic from the muddy waste liquid, sewage and oil adhere to condensed matter, bacterium etc., the abrasive of the stay in grade of can regenerating.
In addition, because use wet classifier in the classification part, the particle in the waste liquid can be divided into fine particle, middle small-particle and oversize particle can also separate the different particle of proportion.
In addition,, can remove aqueous muddy solid moisture in the abrasive fully, make abrasive reply circular crystal form fully, therefore can obtain pulverous inorganic abradant by the powder regeneration section is set.
By control section is set, can be automatically and stably control regenerating treater, work continuously.
Moreover, regeneration inorganic abradant purity height, its stable abrasive characteristic does not change fully with the abrasive that uses preceding (using); Isolated solution also is highly purified, free from foreign meter, has recycling high purity.Therefore can effectively utilize used discarded inorganic abradant, environmental protection is contributed.
Below in conjunction with accompanying drawing embodiments of the invention are elaborated.
Fig. 1 is the pie graph of the waste liquid of inorganic abradant regenerating treater of embodiments of the invention 1;
Fig. 2 (a) is first enlarged view of the washing part of embodiments of the invention 1;
Fig. 2 (b) is second enlarged view of the washing part of embodiments of the invention 1;
Fig. 3 (a) is the particle size distribution figure of the inorganic abradant before the embodiment of the invention 1 is used;
Fig. 3 (b) is the particle size distribution figure of particle contained in the muddy waste liquid of inorganic abradant of embodiments of the invention 1;
Fig. 3 (c) is the particle size distribution figure of the regeneration inorganic abradant of embodiments of the invention 1;
Fig. 4 (a) is the microphotograph figure of the inorganic abradant before embodiments of the invention 1 use;
Fig. 4 (b) is the microphotograph figure of particle contained in the muddy waste liquid of inorganic abradant of embodiments of the invention 1;
Fig. 4 (c) is the microphotograph figure of the regeneration inorganic abradant of embodiments of the invention 1.
Embodiment 1
The following waste liquid of inorganic abradant regenerating treater that the embodiment of the invention 1 is described according to Fig. 1.Fig. 1 is the pie graph of regenerating treater of the waste liquid of inorganic abradant of the embodiment of the invention 1.
Among Fig. 1, A is from used muddy waste liquid of inorganic abradant, reclaims the stoste storage tank part of pulverous inorganic abradant; B removes iron from the muddy waste liquid that stoste storage tank part A is sent and other foreign matter, and that carries out wet classification removes the classification part; The washing part of C material inferior such as remaining impurities when cleaning the unwanted oil remove influence regeneration abrasive characteristic and heating (regeneration); D is for the muddy waste liquid of cleaning in the washing portion C is carried out wet classification, with the classification part of aqueous muddy solid and solution separating; E carries out drying or roasting for the aqueous pulpous state solid that rises to sending from classification part D, and making becomes the abrasive of powder regenerated powder regeneration section; F is a control action according to the rules, and stepless control each device from stoste storage tank part A to powder regeneration section E reclaims the control section of highly purified regeneration inorganic abradant and solution automatically.
In Fig. 1,1 is former grain groove; 2a, 2b, 2c, 2d, 2e are stirrer; 3a, 3b, 3c, 3d are the liquid level detector; 4 is the air pinched valve; 5,11,17 is the concentration adjusting tank; 6,12,18 is air pump; 9,15 pumps of using for classification; 7 is vibratory screening apparatus; 8 for removing the classification case of de-iron; 10,16 is wet classifier; 13 is rinse bath; 19a is a spray-drier; 19b is for replacing the stoving oven of spray-drier 19a as required; 20 for being used to control the controller 20 of regenerating treater.Controller 20 is made of minicomputer etc., can store control action in order.Controller 20 can be according to the order of control action, and stepless control stoste storage tank part A is removed classification part B, washing portion C, the various devices of classification part D and powder regeneration section E.In addition, in each device, can be according to liquid level detector 3a, 3b, 3c, the signal of detectors such as 3d, detection carries out feedback control and calculating, is optimized processing etc.In addition, in order to supply with next device through the waste liquid of over-richness adjustment, stoste storage tank part A is removed classification part B, and the washing portion C between each device of classification part D and powder regeneration section E, couples together with the pipeline shown in Fig. 1 arrow.
Describe the various devices of A～F below in detail.Stoste storage tank part A is by stirrer 2a; Liquid level detector 3a is installed, the former hopper 1 of 3b; The concentration adjusting tank 5 that is connected with former hopper 1 by air pinched valve 4; From concentration adjusting tank 5, the air pump of removing among the classification part B 6 that waste liquid is sent to as next device constitutes.In concentration adjusting tank 5, stirrer 2b is housed.Stirrer 2a, 2b stir in former hopper 1 and concentration adjusting tank 5 respectively, prevent solid precipitation, carry out the concentration management.Here, concentration is adjusted to 10%～15%.At this moment, stirrer 2a, 2b move up and down the liquid level in former hopper 1 and the concentration adjusting tank 5 by stirring, and by using liquid level detector 3a, 3b detects this liquid level, can control the turnover number of stirrer simply.Even the maintenance dose of muddy waste liquid changes, also can suitably carry out the control of revolution with simple umformer.In this case, with liquid level detector 3a, 3b detects liquid level, removes the control change device with this signal again, control stirrer 2a, the revolution of 2b, therefore, in the time of can preventing waste liquid overflow from former hopper 1 and concentration adjusting tank 5 and low liquid level reliably, the waste liquid that stirrer 2a, 2b cause splashes.The concentration adjustment is a weight of measuring per unit volume, is scaled by this value that amount of liquid carries out so again.
Like this, owing to be provided with liquid level detector 3a, 3b carries out revolution control, can prevent owing to stir each former hopper 1 and concentration adjusting tank 5 causes that liquid level rocks the waste liquid overflow that causes or splash.Again because can manage solid components and concentration in the waste liquid, therefore can prevent to influence the supply error of the final purity of regeneration abrasive.In addition, liquid level detector 3a, 3b preferably liquid level rock the little pressure type surface cock of error that causes.Therefore in present embodiment 1,, do not have the flase operation that the precipitation cohesion in fault such as the valve wearing and tearing that caused by abrasive and the pipeline causes because on stoste storage tank part A, the air pinched valve is housed.Waste liquid of inorganic abradant with concentration adjusting tank 5, is adjusted to concentration after 10%～15%, is stablized by diaphragm type air pump 6, delivers to and removes classification part B.Because diaphragm type air pump 6 do not have rotating part, therefore reason such as the wearing and tearing that abrasive causes are few is suitable for transporting the high liquid of viscosity.
Secondly, illustrate and remove classification part B.Remove classification part B and have vibratory screening apparatus 7, have the deironing classification case 8 of magnetic separator de-ironing, the wet classifier and the concentration adjusting tank 11 that constitute by liquid cyclone formula separator.Between deironing classification case 8 and wet classifier 10, classification is set with pump 9, on concentration adjusting tank 11, be provided with the waste liquid of inorganic abradant that concentration is adjusted, deliver to the air pump 12 of washing portion C.In order to improve the wear resistance of classification, can use impeller to be coated with the turbine pump of rubber with pump 9.The concentration height of waste liquid utilizes the effect of wet classifier, if then can be adjusted to 10%～40% with concentration again.
Utilize vibratory screening apparatus 7, impurity contained in the muddy waste liquid and big foreign matter can be separated; Utilize deironing classification case 8 again, can remove de-iron efficiently by magnetic force.Then, utilize wet classifier 10 to carry out wet classification one time, after the adjustment concentration, carry out cleaning of next stage, carry out the secondary wet classification in next stage more again, then the abrasive after the classification is done powdered, with regard to recyclable highly purified regeneration inorganic abradant.
Then, the washing portion C is described.The washing portion C have clean remove unwanted oil remaining in the waste liquid and in the powdered treatment process residual impurity such as residue, to the function of the influential material inferior of regeneration abrasive characteristic.So-called material inferior except above-mentioned oil, also comprises sewage, and undissolved dust owing to solidifying or condense the adhesion condensed matter that is attached on the abrasive surface on the abrasive surface, brings out this inducing substance that solidifies or condense etc.Here, as bringing out the above-mentioned this inducing substance that solidifies or condense, typically have: the bacterium that in waste liquid, extensively exists etc.; With because the sugar chain on Zeta-potential or surface brings out the micropartical that becomes the bacterium corpse and assembles, form condensation product, make the impurity that becomes material inferior stick to material on the abrasive.In addition, when drying and roasting bacterium itself, remaining ashes down also can make regeneration abrasive characteristic degenerate, and stick on the abrasive.
In addition, under the situation of using cast iron abrasive disk (platform) with the most use, the abrasive waste liquid is Fe 3The mud of C and carbon and oily blended black, this carbon is exactly inducing substance, can make Fe 3C condenses.
The washing portion C is by rinse bath 13; Stirrer 2d; Liquid level detector 3c, 3d; Motorized valve 14; Classification pump 15; The cO of washing mechanism that will describe in detail later on constitutes.Stirrer 2d stirs in rinse bath 13, prevents solid precipitation, carries out the concentration management; Therefore, may once more solids concn be adjusted in 10%～15% scope.At this moment, the stirring of stirrer 2d moves up and down the liquid level in the rinse bath 13, utilizes liquid level detector 3c, and 3d detects this liquid level, can control the turnover number of stirrer simply.In addition, because muddy waste liquid natural subsidence, concentration changes easily in the liquid, and again because when liquid level descends (risings of stirrer revolution), the impeller of stirrer 2d is owing to cavitation and noticeable wear, so it is minimum that the stirrer revolution is reduced to.At this moment, the most handy simple umformer of the control of stirrer revolution is controlled.Again because when solids concn was adjusted higherly, with liquid level detector 3c, 3d detected and carries out difficulty of control ratio, therefore, controls relatively simple under lower concentration.
In the washing portion C, add washings, utilize washing cO of mechanism and stirrer 2d to wash and stir, make the waste liquid overflow, carry out the operation that a series of concentration are adjusted then, carry out several times repeatedly.At first, by making the waste liquid overflow, in rinse bath 13, guarantee the waste liquid of specified rate, then opposite when concentration is adjusted, prevent from the waste liquid overflow to be discharged, correctly to keep liquid measure because of in rinse bath 13, stirring, so that correctly manage the solids concn in the waste liquid, therefore can prevent to supply with error.Because overflow is the electronic control of being undertaken by motorized valve 14, therefore realize automatization with control section F easily again.As mentioned above, carry out wash agitation repeatedly, the concentration adjustment in the end in the procedure, is washed in the washings adding waste liquid with specified rate, makes the waste liquid natural subsidence, makes the top clarified liq overflow of specified amount, is expelled to outside the system.
Consider to utilize above-mentioned last procedure,, also can carry out as follows in order to make control and device simple.That is, in waste liquid, add washings,, then, make the abrasive natural subsidence, make top clarified liq overflow, simultaneously, adjust concentration, carry out repeatedly with washing cO of mechanism and stirrer 2d washing abrasive.In order to make the solids concn from remove the waste liquid that classification part B sends keep certain, top clarified liq overflow is discharged, also can add water as required, utilize liquid level detector 3c, 3d detects liquid level, carries out the concentration adjustment.The device price of this method is low, can wash effectively; But owing to will carry out natural subsidence repeatedly, it is longer to wash the required time.
In addition, shown in Fig. 2 (a), in embodiments of the invention 1, in rinse bath 13, be provided with atomizer and dashpot as the washing cO of mechanism.Fig. 2 (a) is first enlarged view of the washing part of the embodiment of the invention; Fig. 2 (b) is second enlarged view of the washing part of the embodiment of the invention 1.
21 for to be ejected to washings in the rinse bath 13 with pressurized air, becomes the atomizer of spraying; 22 for adjusting from the temperature adjustment device of the washings temperature of atomizer ejection; 23 is in rinse bath 13, makes from the dashpot at the waste liquid interflow of removing waste liquid that classification part B sends and overflow; 24 is the impurity contained in the waste liquid of filtrating overflow and the filtration unit of material inferior; 25,26 for switching the motorized valve of stream.Under the filtration capacity or problematic situation of life-span of filtration unit 24, can waste liquid not returned to dashpot 23 from filtration unit 24 yet, but adopt the mode that is expelled to the system outside.In this case, because the overflow stream is an open loop, it is low that the solid components and concentration in the expel liquid can be tried one's best; The top clarified liq overflow of employing after with above-mentioned natural subsidence, the mode of washing is more suitable.
The compressed air-feed device that does not illustrate among the figure is connected with atomizer 21, under the state that the back pressure more than the vapor pressure is added in the washings, forms spraying in rinse bath 13.Can adopt 10 ℃～130 ℃ as washings, or 30 ℃～130 ℃, be preferably warm water or hot water in 100 ℃～130 ℃ scopes; Or ethanol kind solvent.When washings below 30 ℃ the time, washing force and the heat affecting of bacterium etc. weakened, below 10 ℃ the time, effect reduces.Under the situation as washings with warm water or hot water, when sour water that uses electrolysis adjustment pH value and alkaline water, washing effect is better.Particularly in warm water, under the situation of use near 10 ℃ water, adjust the pH value, effect is better.Under situation with the ethanol kind solvent, suitably heats multiplication, but must avoid excessive heat.Temperature control equipment 22, can the state in washings is ejected to rinse bath under, temperature is controlled in the said temperature scope.Temperature controlled washings nebulizes the muddy waste liquid that is ejected to stirring from atomizer, can wash and remove the influential material inferior of regeneration abrasive characteristic.
Under warm water or hot water situation, these materials inferior are common can both be cleaned, and the material effect inferior of the clean organic property of wet goods of ethanol kind solvent is fine.In addition, can not only use a kind of washings, can be with multiple washings repetitive scrubbing, effect more can improve.
Dashpot 23 is used for the waste liquid of temporary storage overflow, and from removing the waste liquid interflow that classification part B sends here, delivers in the rinse bath 13.The waste liquid of overflow under the effect of dashpot 23, can utilize once more through the over-richness adjustment.Certainly, the waste liquid of not wanting can be discharged.When waste liquid being sent in the rinse bath 13, motorized valve 25 is opened, and motorized valve 26 cuts out.When clean finishing in the washing portion C, open motorized valve 26, close motorized valve 25, by the waste liquid that classification is adjusted concentration with pump 15, deliver to next classification part D.In any one action, all control by control section F.
As the cO of washing mechanism of present embodiment 1, shown in Fig. 2 (b), can in rinse bath 13, heating unit be set.27 is the heating unit at rinse bath 13 internal heating muddy waste liquids; 28 for will with the waste liquid and the washings interflow of overflow, carrying out the temperature adjustment to this waste liquid from removing the waste liquid that classification part B sends here, and the temperature of pressurization is adjusted pressurizing device.Unwanted waste liquid can be discharged, and is according to circumstances different, and employing also is not favourable with the waste back-cycling temperature regulation pressurizing device 28 of overflow.These explanations with existing overflow open loop to Fig. 2 (a) are identical, so save detailed description.
The cO of washing mechanism of present embodiment 1 using heating unit 27 in rinse bath 13 internal heating, can be ejected in the rinse bath 13 be adjusted to the waste liquid of specified temperature by temperature regulation pressurizing device 28; Stir and to wash effectively with stirrer 2d simultaneously.The temperature of internal liquid also can adopt above-mentioned same temperature range.By heating and stirring, can remove reliably attached to the material inferior on the inorganic abradant.According to circumstances different, the such atomizer 21 of Fig. 2 (a) can be set, the ejection washings improves clearing power; Also can shown in Fig. 2 (b),,,, form simple spray washing from atomizer 21 ejections by the liquid scrubbing pipeline with the waste liquid of heating itself.The ultrasonic generator (not shown) can also be set in rinse bath 13,, improve washing effect with ultrasonic washing and usefulness.
By such cO of washing mechanism is set, reliably wash oil, sewage, dust, attached to the condensed matter on the abrasive surface with bring out bacterium that solidifies or condense etc.After cleaning, concentration is adjusted to the waste liquid of 10%～15% scope, after control section F switches motorized valve 25,26, is stablized with pump 15 by classification, delivers to classification part D automatically by certain amount.Consider the wearing and tearing of metal etc., classification preferably is coated with rubber with the material that the impeller in the pump 15 uses.
Then, classification part D is described.Classification part D is by wet classifier 16, concentration adjusting tank 17, and air pump 18, the stirrer 2e that stirs in concentration adjusting tank 17 constitutes.By the washing portion C, when the muddy waste liquid that concentration is adjusted is supplied with concentration adjusting tank 17, utilize the instruction of sending from control section F, wet classifier 16 is started working.This wet classifier 16 then after removing the wet classification of classification part B, begins particle dia and/or the different particle of proportion are carried out the secondary wet classification.By this graded operation, can obtain sloughing considerable water, but still contain the mud thing solid matter of water as the inorganic abradant particle process of object; With the particle solid that several rank particles are arranged.
In order to realize classification, wet classifier 16 has adopted the different particles in the waste liquid, is separated into the multi-cyclone of a plurality of (common is 2～3) rank particle dia.Like this, for example be separable into fine particle, middle small-particle and oversize particle; Can also separate the different material of proportion.Because the solid components and concentration of multi-cyclone in waste liquid is in 10%～15% scope, efficient is higher, therefore washs the concentration in the rinse bath 13 in the portion C, is adjusted to this scope, sends to by a certain amount of again.Graded operation can once that particle dia is different a plurality of particle classifications, but as required, can repeat three, four times, to improve precision.Because wet classification is being piled up aqueous solid matter in filter member inside, so can not stop up, has filtration, separate, dehydration property is good, the advantage that yield rate is high.
In addition, in classification part D, except the aqueous slurry shape solid matter of forming by other particle of above-mentioned each grade, can also reclaim solution.Because in classification part D, removed solid matter, utilize again and remove classification part B and washing portion C, removed foreign matter and impurity fully, material inferior etc., therefore the purity height of the solution that reclaims from classification part D can reuse.In order to improve purity better, as required, also can be again by strainers such as vacuum core strainer or extruding type strainers.In the operation before classification part D, also can reclaim solution, if but at this moment strainers such as vacuum core strainer or extruding type strainer are not set, just can not re-use this solution, so cost improves.In addition, be preferably in the recovery train, ozonizer is set; The solution that reclaims is sterilized sterilization.Like this, can reduce bacterium etc., when regenerating abrasive once more, can reduce material inferior, can reclaim highly purified regeneration inorganic abradant, this is extraordinary to proceeding manipulation of regeneration.
Waste liquid is adjusted to water ratio (concentration) and reaches about 40% aqueous slurry shape solid in concentration adjusting tank 17, in powder regeneration section E, stably sends with air pump 18 again.
Next illustrates powder regeneration section E.Powder regeneration section E is made of spray-drier 19a or stoving oven 19b.In 80 ℃～1400 ℃ scopes, carry out drying, roasting.This temperature is by decisions such as inorganic abradant material desired degree of purity.In this temperature range, the recovery of can regenerating, but more than 250 ℃, to regeneration condition also not influence, can regenerate and reclaim almost completely water-free Powdered abrasive.Under regeneration abrasive characteristic less demanding situation, it is just passable to carry out drying under 80 ℃～400 ℃ temperature; But under the situation that regeneration abrasive characteristic is had relatively high expectations, be preferably under 1300 ℃～1400 ℃ the high temperature and carry out calcination process.At this moment, powder particle is replied circle fully, and regeneration powder whiteness significantly increases, and can obtain extraordinary regeneration inorganic abradant.By roasting, the impurity of trace also can be removed by temperature.To the regeneration abrasive of embodiment 1 with do not use the characteristic of the abrasive of (before using) to compare, carried out analysis of components, and size-grade distribution, observed microphotograph etc., found that, the regenerated inorganic abradant is all identical with particle shape with the abrasive composition and the particle dia that do not use (before using), and relevant this point will elaborate later.
At last, control section F can remove the classification part to stoste storage tank part, the washing part, classification part and powder regeneration section, control action is in accordance with regulations controlled, can carry out stepless control to each device from stoste storage tank part A to powder regeneration section E.Control section F has controller 20, in each device of stepless control, can be in each device, and according to liquid level detector 3a, 3b, the signal that 3c, detectors such as 3d detect carries out feedback control and calculating, is optimized etc.
More than in the waste liquid of inorganic abradant regenerating treater of Shuo Ming present embodiment, use fused Al 2O 3Composition and ZrSiO 4Inorganic abradant and water-soluble lubricating oil that the mixture of composition is formed.Work when now just grinding silicon wafer and effect do specifying.
At this moment, waste liquid of inorganic abradant is for comprising water-soluble lubricating oil and abrasive, the iron of the lapping rejects that comes out from shredder, the element silicon that silicon wafer comes out and the liquid of other microcomponent (abrasive waste liquid).This abrasive waste liquid is imported in the former hopper 1 of stoste storage tank part A, stirred 30 minutes, measure the weight of liquid per unit volume, use liquid level detector 3a simultaneously, 3b detects liquid level, calculates solution amount and concentration by these values.Then,, open air pinched valve 4,, make waste liquid in pipeline, fall into concentration adjusting tank 5, use the feeding apparatus make up water again, concentration dilution to 10%～15% along the direction of arrow according to the instruction of sending under the control section.
After adjusting end, control section F, utilize air pump 6, the waste liquid that concentration is adjusted, send into (9 liters/minute of flows) in the vibratory screening apparatus 7 of removing classification part B, after removing foreign matters such as coarse particle and dust, in the input deironing classification case 8, utilization has the magnetic separator de-ironing of permanent magnet of 3500～10000 Gausses' magnetic induction density, removes the de-iron composition.Like this, just removed lapping rejects fully as the shredder of impurity.
Through the abrasive waste liquid of wet classification, send in the concentration adjusting tank 11 by pipeline.At this moment,, therefore want water, concentration is adjusted to 10%～40% because the solid components and concentration of abrasive waste liquid reaches more than 40% once more.Proceed continuous processing, when the liquid level of former hopper 1 when the regulation liquid level is following, with abrasive waste liquid base feed case 1.At this moment, control section F stops the automatic control to vibratory screening apparatus 7 and deironing classification case 8, and one time wet classification finishes.
Then, by air pump 12 the abrasive waste liquid of wet classification is sent in the rinse bath 13 of washing portion C.As liquid level detector 3c, when 3d detects liquid level and reaches the height of entry into service, stirrer 2d entry into service; Simultaneously, the washing cO of mechanism begins washing process.Like this, can be except that deoiling dust, unwanted materials inferior such as condensed matter that adheres to and bacterium.Then, with pump 15, waste liquid is sent in the wet classifier 16 of classification part D wet classifier 16 entrys into service, the classification of beginning secondary with classification.By graded operation, will be classified into the abrasive of regulation particle dia, send in the concentration adjusting tank 17 beginning concentration adjustment and stirring by pipeline.Like this, can reclaim solution.
Secondly, will be in powder regeneration section E, the abrasive waste liquid of concentration (water ratio) adjusted to 40% is sent among spray-drier 19a or the stoving oven 19b with air pump 18, and under 250 ℃, complete water-free abrasive is reclaimed in regeneration.In present embodiment 1, under 250 ℃ of lower temperature, carry out powdered with spray-drier 19a and handle, when in stoving oven 19b, during roasting, the whiteness that can obtain powder enlarges markedly under 1300 ℃～1400 ℃ high temperature, and crystal form is replied circular good powder.If condition changing, temperature also can be done some changes.
Particularly under the situation that the abrasive disk that makes cast iron with the most use (platform) grinds, the calcination process in powder regeneration section E is weight very.Cast iron contains about 3.8% carbon (carbon), and after the grinding, grinding waste liquid becomes Fe 3C and carbon and oily blended mud.In the waste liquid, the mixture of carbon and oil becomes inducing substance, makes Fe 3C cohesion becomes huge piece, and the regeneration abrasive characteristic after the regeneration is degenerated.This carbon can not go with pickling, therefore, can be at short notice, make and remove the function of milling machine and degenerate, only way is, at 900 ℃～1400 ℃ roasting temperatures, could regenerate partly and in the powder reproducing unit in washing of the present invention.In addition, containing under the situation of carbon, heating the most useful; But under situations such as SiC, forbid in air, heating, therefore, in rare gas element heating and in washing part washing very important.
Below, by regenerated inorganic abradant relatively, use contained particle in the inorganic abradant of (before using) and the slimy waste liquid of inorganic abradant, describe the abrasive characteristic of above-mentioned regenerated inorganic abradant in detail.
Fig. 3 (a) is the particle size distribution figure of the preceding inorganic abradant of the use of the embodiment of the invention 1; Fig. 3 (b) is contained particle distribution figure in the muddy waste liquid of inorganic abradant of the embodiment of the invention; Fig. 3 (c) is the particle size distribution figure of the regeneration inorganic abradant of the embodiment of the invention 1; Fig. 4 (a) is the microphotograph figure of the inorganic abradant before the embodiment of the invention 1 is used; Fig. 4 (b) is the microphotograph figure of particle contained in the muddy waste liquid of inorganic abradant of the embodiment of the invention 1; Fig. 4 (c) is the microphotograph figure of the regeneration inorganic abradant of the embodiment of the invention 1.
Selection is by above-mentioned fused Al 2O 3Composition and ZrSiO 4The inorganic abradant that the mixture of composition is formed does not more use the abrasive sample of (before using) as measuring sample, and regenerated abrasive sample and the contained grain sample of muddy waste liquid of inorganic abradant are carried out analysis of components.Analytical instrument is used each sample of fluorescent x-ray analyzer (the X ray SECROMETOR3270 of リ ガ Network corporate system), use the aluminium ring of diameter as 30mm, be clipped in the mould of usefulness not,, measure its fluorescent X-ray spectrometry with the pressing machine press molding of 20 tons of pressure.According to the fluorescent X-ray spectrometry that is drawn, the quantitative analysis results of utilizing the main FP method of measuring composition to calculate is illustrated in the table 1.Content converts with simple oxide compound and represents.
Table 1
Major ingredient Content (weight %)
Inorganic abradant before using The muddy waste liquid of inorganic abradant The regeneration inorganic abradant
Na 2O ????0.000 ????0.380 ????0.000
?MgO ????0.090 ????0.090 ????0.090
?Al 2O 3 ????49.600 ????48.300 ????49.350
?SiO 2 ????18.663 ????21.000 ????19.045
?P 2O 5 ????0.032 ????0.050 ????0.040
?SO 3 ????0.035 ????0.056 ????0.038
?TiO 2 ????1.230 ????1.300 ????1.240
?Fe 2O 3 ????0.090 ????1.574 ????0.098
?NiO ????0.100 ????0.100 ????0.100
?ZrO 2 ????29.600 ????26.600 ????29.449
?HfO 2 ????0.560 ????0.550 ????0.550
Can find out from table 1 do not use the inorganic abradant and the various compositions of regenerated abrasive of (before using) not to have what difference, even have, the composition difference is in the original untapped inorganic abradant composition limit of error also less than 1%.Like this, the purity of regenerated inorganic abradant and untapped inorganic abradant does not change fully.Corresponding therewith, Fe in the particle composition in the muddy waste liquid of inorganic abradant 2O 3And SiO 2Wait other impurity to increase, and Al 2O 3And ZrO 2Less.From this result, regenerating treater of the present invention, clean material inferior by the washing portion C, E carries out drying and roasting with the powder regeneration section, can remove above-mentioned impurity in the waste liquid of inorganic abradant and the invisible bacterium of naked eyes etc. fully, make the quality of regeneration inorganic abradant return to untapped quality.
Secondly, shown in Fig. 3 (a), Fig. 3 (b), Fig. 3 (c), measure size-grade distribution, carried out characteristic relatively.Determining instrument is the laser diffraction formula particle size distribution device (SALD-2000) of Shimadzu Seisakusho Ltd..Do not use the inorganic abradant of (before using) and the size-grade distribution of regenerated inorganic abradant, in width is about 12 micrometer ranges, distribute much at one; Near 10 microns, reach peak value.Beyond this scope, there is not the upward peak of distribution.No matter which kind of situation, abrasive all are made up of the uniform particle of about 10 microns sizes.For the size-grade distribution of muddy waste liquid of inorganic abradant, with 10 microns be the center, peak value reduces a little, contains in addition to be distributed in 6 microns with the most microparticals in 1 micron very wide scope.Also contain 30 microns to 50 microns bigger particle.These are illustrated in the waste liquid of inorganic abradant after the grinding, except abrasive particle, also have various particles.Regenerating treater of the present invention can be removed different lapping rejects and other particles of these diameters of sneaking in the abrasive waste liquid fully, reaches the particle distribution state identical with untapped inorganic abradant, can make abrasive regeneration.
And for example shown in Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), use the microscopic examination particle shape.Determining instrument is the EPMA1600 (1000 times of magnifications) of Shimadzu Scisakusho Ltd's system.Not using the inorganic abradant of (before using) and the particle shape of regeneration inorganic abradant all is the bulk of opening an angle, can be described as the shape that crest line becomes seamed edge.In these pieces, having has on several particle surfaces above very little point-like condensation product (dirt settling) sticks to.Do not using and regenerated abrasive in the two, the amount of particle shape and surface attachments does not have difference fully.Therefore, in the muddy waste liquid of inorganic abradant particle, sneaked into grinding useless many little particle.Generally, each particle be shaped as circle, not having becomes the crest line of seamed edge shape.This is because each particle surface is covered with a large amount of dirt settlings.Seamed edge does not exist with abrasive characteristic substantial connection, round-shaped, and in other words, surface coverage dirt settling, becomes the reason that reduces nonferromagnetic substance.Regenerating treater of the present invention is because in the washing portion C, removed the material inferior that becomes the dirt settling reason fully, in the powder regeneration section, carry out drying and roasting again, therefore, the nonferromagnetic substance of regeneration inorganic abradant is identical with untapped inorganic abradant, can regenerate reinstatement.
At last, table 2 is not use the inorganic abradant of (before using) and the comparison sheet of regenerated inorganic abradant abrasive characteristic.Abrasive characteristic is measured grinding rate, surfaceness (Ra), scratch (defective number/number of processes).Table 2
Figure A0012078300261
Test method is that abrasive is suspended in water and the lapping oil, utilizes shredder, grinds the grinding charge body, measures above-mentioned abrasive characteristic.
Grinding rate in the abrasive characteristic uses 20 silicon wafers as grinding charge, and the machinery that utilizes only corporate system more is as shredder, be to add weight 100 gram/square centimeters on 3 inches the workpiece at diameter, revolution is 70 rev/mins, and the slurry injection rate is to grind under 120 ml/min, measures.Grind consisting of: abrasive 600 grams, 450 milliliters of lapping oils, 2250 milliliters in water with slurry.Surfaceness (Ra) is after grinding, the silicon wafer roughness after grinding with roughmeter (Tokyo Micronics Inc. system) mensuration.Scratch is determined with 40 times of opticmicroscopes, the silicon wafer of observing after grinding.
Can find out from table 2, not use the inorganic abradant of (before using) and the abrasive characteristic of regenerated inorganic abradant to have nothing different.Like this, utilize regenerating treater of the present invention, the stable abrasive characteristic of the inorganic abradant that (uses) before can obtaining the purity height and using does not have the regeneration inorganic abradant of variation fully.
In stoving oven, during with 1300 ℃～1400 ℃ temperature roasting, the crystal form of inorganic abradant powder is measured with X-ray diffraction.Determining instrument is the X-ray diffraction device XD-1 of Shimadzu Seisakusho Ltd.'s system.Condition determination is: in the X-ray tube ball, target is a copper, and tube current is 15mA, and tube power is 35kW; In slot, disperse slot 1 degree, prevent air slot 1 degree at random, detect slot 0.30mm.In X ray peak value figure, clearly separate out the cusp of alumina abrasive crystalline aluminum oxide and zircon; With the same before the use, be by Al 2O 3Composition phase and ZrSiO 4The two-phase crystallization shape of composition phase is formed.

Claims (11)

  1. One kind from used muddy waste liquid of inorganic abradant, reclaim the waste liquid of inorganic abradant regenerating treater of Powdered inorganic abradant, it is characterized by, it has:
    Used waste liquid of inorganic abradant is stored, simultaneously its concentration is adjusted to the stoste storage tank part of given concentration;
    To remove foreign matter from the muddy waste liquid that above-mentioned stoste storage tank is partly supplied with, that the more above-mentioned waste liquid of removing foreign matter is carried out wet classification removes the classification part;
    Removing the muddy waste liquid that classification partly supplies with from above-mentioned, add washings, from this waste liquid, clean the washing part of the material inferior of influence regeneration abrasive characteristic;
    To carry out wet classification from the muddy waste liquid that above-mentioned washing is partly sent, with the classification part of aqueous muddy solid and solution separating;
    Isolating aqueous slurry shape solid in the above-mentioned classification part is carried out drying or roasting, do the powder regeneration section of powdered.
  2. 2. the regenerating treater of waste liquid of inorganic abradant as claimed in claim 1 is characterized by, and above-mentioned washings is the warm water or the hot water of 10 ℃～130 ℃ of temperature ranges, or the ethanol kind solvent.
  3. 3. waste liquid of inorganic abradant regenerating treater as claimed in claim 1 or 2, it is characterized by, above-mentioned stoste storage tank partly has former hopper and concentration adjusting tank, utilizes stirrer and liquid level detector and air pinched valve, the solid components and concentration in the management waste liquid of inorganic abradant.
  4. 4. the regenerating treater of waste liquid of inorganic abradant as claimed in claim 1 or 2 is characterized by, and above-mentionedly removes classification and partly has magnetic separator de-ironing except that the de-iron composition, removes the sieve and the wet classifier of other foreign matter; From waste liquid of inorganic abradant, remove foreign matter, carry out wet classification one time.
  5. 5. waste liquid of inorganic abradant regenerating treater as claimed in claim 1 or 2 is characterized by, and above-mentioned washing partly has rinse bath and cleans washing mechanism to the influential material inferior of regeneration abrasive characteristic of abrasive.
  6. 6. the regenerating treater of waste liquid of inorganic abradant as claimed in claim 5 is characterized by, and above-mentioned washing mechanism has the atomizer that is contained in the above-mentioned rinse bath, adds the back pressure more than the vapor pressure at least in above-mentioned washings, carries out spray washing.
  7. 7. the regenerating treater of waste liquid of inorganic abradant as claimed in claim 5 is characterized by, and above-mentioned washing mechanism has the heating unit that is contained in the above-mentioned rinse bath, with waste liquid and washings heating, clean.
  8. 8. waste liquid of inorganic abradant regenerating treater as claimed in claim 1 or 2 is characterized by, and above-mentioned classification partly has the wet classifier that carries out the secondary wet classification, and the separate particles in the solution is become particle dia and/or the different a plurality of ranks of proportion.
  9. 9. waste liquid of inorganic abradant regenerating treater as claimed in claim 1 or 2 is characterized by, above-mentioned powder regeneration section, and in 80 ℃～1400 ℃ temperature ranges, the aqueous muddy solid of drying or roasting.
  10. 10. the regenerating treater of waste liquid of inorganic abradant as claimed in claim 9 is characterized by, when making cast iron abrasive disk, and above-mentioned powder regeneration section, in 900 ℃～1400 ℃ temperature range, the aqueous muddy solid of drying or roasting.
  11. 11. the regenerating treater of waste liquid of inorganic abradant as claimed in claim 1 or 2 is characterized by, and is provided with to control above-mentioned stoste storage tank part according to given control action, removes the classification part, the control section of classification part and powder regeneration section.
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CN102233299B (en) * 2010-04-28 2013-03-20 郑州鑫智抛磨材料有限公司 Automatic micro-powder grader
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JP3776675B2 (en) 2006-05-17
JP2001341074A (en) 2001-12-11

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