JP2001339106A5 - - Google Patents

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Publication number
JP2001339106A5
JP2001339106A5 JP2000157075A JP2000157075A JP2001339106A5 JP 2001339106 A5 JP2001339106 A5 JP 2001339106A5 JP 2000157075 A JP2000157075 A JP 2000157075A JP 2000157075 A JP2000157075 A JP 2000157075A JP 2001339106 A5 JP2001339106 A5 JP 2001339106A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000157075A
Other languages
Japanese (ja)
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JP4868270B2 (ja
JP2001339106A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2000157075A priority Critical patent/JP4868270B2/ja
Priority claimed from JP2000157075A external-priority patent/JP4868270B2/ja
Publication of JP2001339106A publication Critical patent/JP2001339106A/ja
Publication of JP2001339106A5 publication Critical patent/JP2001339106A5/ja
Application granted granted Critical
Publication of JP4868270B2 publication Critical patent/JP4868270B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000157075A 2000-05-26 2000-05-26 圧電アクチュエータ素子 Expired - Fee Related JP4868270B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000157075A JP4868270B2 (ja) 2000-05-26 2000-05-26 圧電アクチュエータ素子

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000157075A JP4868270B2 (ja) 2000-05-26 2000-05-26 圧電アクチュエータ素子

Publications (3)

Publication Number Publication Date
JP2001339106A JP2001339106A (ja) 2001-12-07
JP2001339106A5 true JP2001339106A5 (de) 2007-06-14
JP4868270B2 JP4868270B2 (ja) 2012-02-01

Family

ID=18661771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000157075A Expired - Fee Related JP4868270B2 (ja) 2000-05-26 2000-05-26 圧電アクチュエータ素子

Country Status (1)

Country Link
JP (1) JP4868270B2 (de)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN101983438B (zh) * 2008-02-05 2014-10-29 摩根先进陶瓷有限公司 用于减少颗粒脱落的封装涂层
WO2014050720A1 (ja) 2012-09-27 2014-04-03 株式会社 村田製作所 圧電アクチュエータとその製造方法、磁気ディスク装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6146082A (ja) * 1984-08-10 1986-03-06 Nippon Telegr & Teleph Corp <Ntt> 圧電アクチユエ−タ
JPH10136665A (ja) * 1996-10-31 1998-05-22 Tdk Corp 圧電アクチュエータ
JPH10275439A (ja) * 1997-03-31 1998-10-13 Chichibu Onoda Cement Corp クランプ治具とその製造方法
JP4020454B2 (ja) * 1997-03-31 2007-12-12 Tdk株式会社 圧電セラミックスの製造方法
CN1119628C (zh) * 1997-09-08 2003-08-27 日本碍子株式会社 质量传感器和质量检测方法
JP3592057B2 (ja) * 1997-12-22 2004-11-24 株式会社リコー 圧電ユニットの製造方法及びインクジェットヘッドの製造方法
JPH11322424A (ja) * 1998-05-20 1999-11-24 Matsushita Electric Ind Co Ltd 圧電材料並びにそれを用いた圧電振動子、発音体、音声検出器、アクチュエータ及び圧電トランス

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