JP2001339106A5 - - Google Patents
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- JP2001339106A5 JP2001339106A5 JP2000157075A JP2000157075A JP2001339106A5 JP 2001339106 A5 JP2001339106 A5 JP 2001339106A5 JP 2000157075 A JP2000157075 A JP 2000157075A JP 2000157075 A JP2000157075 A JP 2000157075A JP 2001339106 A5 JP2001339106 A5 JP 2001339106A5
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Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000157075A JP4868270B2 (ja) | 2000-05-26 | 2000-05-26 | 圧電アクチュエータ素子 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2000157075A JP4868270B2 (ja) | 2000-05-26 | 2000-05-26 | 圧電アクチュエータ素子 |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2001339106A JP2001339106A (ja) | 2001-12-07 |
JP2001339106A5 true JP2001339106A5 (de) | 2007-06-14 |
JP4868270B2 JP4868270B2 (ja) | 2012-02-01 |
Family
ID=18661771
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000157075A Expired - Fee Related JP4868270B2 (ja) | 2000-05-26 | 2000-05-26 | 圧電アクチュエータ素子 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP4868270B2 (de) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101983438B (zh) * | 2008-02-05 | 2014-10-29 | 摩根先进陶瓷有限公司 | 用于减少颗粒脱落的封装涂层 |
WO2014050720A1 (ja) | 2012-09-27 | 2014-04-03 | 株式会社 村田製作所 | 圧電アクチュエータとその製造方法、磁気ディスク装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6146082A (ja) * | 1984-08-10 | 1986-03-06 | Nippon Telegr & Teleph Corp <Ntt> | 圧電アクチユエ−タ |
JPH10136665A (ja) * | 1996-10-31 | 1998-05-22 | Tdk Corp | 圧電アクチュエータ |
JPH10275439A (ja) * | 1997-03-31 | 1998-10-13 | Chichibu Onoda Cement Corp | クランプ治具とその製造方法 |
JP4020454B2 (ja) * | 1997-03-31 | 2007-12-12 | Tdk株式会社 | 圧電セラミックスの製造方法 |
CN1119628C (zh) * | 1997-09-08 | 2003-08-27 | 日本碍子株式会社 | 质量传感器和质量检测方法 |
JP3592057B2 (ja) * | 1997-12-22 | 2004-11-24 | 株式会社リコー | 圧電ユニットの製造方法及びインクジェットヘッドの製造方法 |
JPH11322424A (ja) * | 1998-05-20 | 1999-11-24 | Matsushita Electric Ind Co Ltd | 圧電材料並びにそれを用いた圧電振動子、発音体、音声検出器、アクチュエータ及び圧電トランス |
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2000
- 2000-05-26 JP JP2000157075A patent/JP4868270B2/ja not_active Expired - Fee Related