JP2001330853A - Active matrix type display device and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an active matrix type display device which is capable of finding a cutting position easily and, moreover, is capable of cutting a short ring when the short ring and a signal line or a scanning line generate a short circuit and the short ring is cut by a laser beam. SOLUTION: In this display device, marks for irradiation 160 for cutting the first branch line 152 of the short ring 150 by irradiating the ring with a laser beam are provided by swelling widths of neighboring signal lines intersecting the first branch line 152 of the short ring 150 and notching parts for cutting 162 are provided in the first branch line 152 positioned among signal lines 115 to 115.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a display device including a matrix wiring, and more particularly to an active matrix type display device provided with a countermeasure against static electricity and a manufacturing apparatus therefor.

[0002]

2. Description of the Related Art Flat panel display devices, especially liquid crystal display devices, are:
Because of low power consumption in addition to thinness and light weight, it has been used in various fields. Among them, an active matrix type liquid crystal display device in which a switch element is provided for each display pixel can minimize crosstalk between adjacent pixels, and is used particularly in a field where a high definition display image is required. ing.

For example, this active matrix type liquid crystal display device has a twisted nematic (TN) type liquid crystal held between an array substrate and a counter substrate via an alignment film.

In the array substrate, a plurality of signal lines and a plurality of scanning lines are arranged in a matrix with each other via an insulating film, and near each intersection, through an active element such as a thin film transistor (TFT) as a switching element. A pixel electrode is arranged. Further, the counter substrate includes a counter electrode facing the pixel electrode.

By the way, a transparent insulating substrate such as glass or quartz is usually used for such an array substrate, but since it is an insulating substrate, it is affected by static electricity generated during manufacturing. In other words, a high voltage is applied to the intersection of the signal line and the scanning line due to the influence of static electricity, thereby causing an insulation failure, causing a short circuit between the signal line and the scanning line or causing a failure of a thin film transistor element. .

Therefore, conventionally, an auxiliary electrode line (hereinafter, referred to as an auxiliary electrode line) has been used to distribute electric charges charged to a signal line and a scanning line.
Short ring) and signal line and scanning line are TFT
There is known a technique for preventing a high voltage from being locally applied by using a non-linear element or a high resistance element.

[0007]

A conventional structure of the above-described short ring will be described with reference to FIG.

As shown in FIG. 8, a plurality of signal lines 502 and a plurality of scanning lines 504 are arranged on an array substrate 500. The short ring 506 is connected to the array substrate 500.
Are arranged orthogonal to the signal lines 502 and the scanning lines 504 in the vicinity of the periphery of the short ring 506.
Are insulated from all signal lines 502 and scanning lines 504 via insulating layers. That is, the short ring and the signal line or the scanning line need to be electrically insulated except for a portion connected via a non-linear element or a high-resistance element.

However, in the manufacturing process, when the signal line 502 and the short ring 506 are electrically short-circuited at the intersection, that is, when the insulating layer has a pinhole or the like and is electrically short-circuited, It is necessary to insulate the signal line 502 and the short ring 506. Therefore, the short rings 506 located on both sides of the short-circuited signal line 502 are cut by a laser beam, and both are insulated.

[0010] Similarly, if the relationship between the scanning line 504 and the short ring 506 is also short-circuited, the short ring 506 is cut off by a laser beam to be insulated.

However, a short ring 5
When cutting 06, there is no mark for irradiating a laser beam, and conventionally, a part of the array substrate 500 is used as a mark. However, on the array substrate 500, the signal line 502
And the scanning line 504 and the short ring 506 all intersect at right angles, and there are only straight and right-angled patterns. Therefore, it has been extremely difficult to quickly and accurately find the irradiation position of the laser beam.

Therefore, sometimes the short ring 506 is used.
In some cases, the signal line 502 or the scanning line 504 is cut off by mistake and the adjacent signal line 502 or the scanning line 504 is cut off.

In view of the above problems, the present invention makes it possible to easily find the position when a short circuit occurs between a signal line or a scanning line and a short ring and the short ring is cut by a laser beam. An active matrix display device which can be cut and a manufacturing method thereof are provided.

[0014]

According to a first aspect of the present invention, there is provided an array substrate including a pixel electrode disposed via a switching element near each intersection of a plurality of signal lines and a plurality of scanning lines which intersect each other. Applying a video signal voltage to the signal line; and a display panel including a counter electrode facing the pixel electrode, a light modulation layer controlled based on a potential difference between the pixel electrode and the counter electrode. An active matrix including: a video signal supply unit; a scan signal supply unit that supplies a scan signal to turn on / off the switch element to the scan line; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. In the display device, a short ring intersecting with the scanning line via an insulating layer is provided on the array substrate, and the width of the scanning line near the intersection with the short ring is made wider than other portions. Form and an active matrix display device is characterized in that the irradiation mark for by irradiating a laser beam to cut the short ring.

According to a second aspect of the present invention, the short rings located on both sides of the scanning line are provided with cutting notches for cutting by irradiating a laser beam. An active matrix display device.

According to a third aspect of the present invention, there is provided an array substrate including a pixel electrode arranged via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines which intersect each other, and A display panel including a facing counter electrode, a light modulation layer controlled based on a potential difference between the pixel electrode and the counter electrode, and a video signal supply unit that applies a video signal voltage to the signal line; An active matrix display device comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off the switch element to the scanning line; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. Providing a short ring intersecting with the signal line via an insulating layer on the array substrate, forming a signal line near the intersection with the short ring wider than other portions, An active matrix type display device, characterized in that by irradiating the line was irradiated for mark for cutting the short ring.

According to a fourth aspect of the present invention, the short rings located on both sides of the signal line are provided with cutting notches for cutting by irradiating a laser beam. An active matrix display device.

According to a fifth aspect of the present invention, there is provided the active matrix type display device according to any one of the first to fourth aspects, wherein the irradiation mark is circular.

According to a sixth aspect of the present invention, there is provided the active matrix type display device according to the second or fourth aspect, wherein the cutting notches are cuts of an arc, a rectangle, or a triangle.

According to a seventh aspect of the present invention, there is provided the active matrix display device according to any one of the first to sixth aspects, wherein a counter electrode voltage is supplied to the short ring from the counter electrode driving means.

According to a further aspect of the present invention, there is provided an array substrate including a pixel electrode disposed via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines which intersect each other, and A display panel including a facing counter electrode, a light modulation layer controlled based on a potential difference between the pixel electrode and the counter electrode, and a video signal supply unit that applies a video signal voltage to the signal line; A method for manufacturing an active matrix display device, comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off the switch element to the scanning line; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. A step of providing a short ring that intersects with the scanning line via an insulating layer on the array substrate; and making the width of the scanning line near the intersection with the short ring wider than other portions. Forming and providing an irradiation mark, and recognizing the irradiation mark with a camera, based on an image taken by the camera, cutting a short ring located on both sides of the scanning line by a laser beam. ,
And a method for manufacturing an active matrix display device.

According to a ninth aspect of the present invention, there is provided an array substrate including a pixel electrode disposed via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines which intersect each other. A display panel including a facing counter electrode, a light modulation layer controlled based on a potential difference between the pixel electrode and the counter electrode, and a video signal supply unit that applies a video signal voltage to the signal line; A method for manufacturing an active matrix display device, comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off the switch element to the scanning line; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. A step of providing a short ring intersecting with the signal line via an insulating layer on the array substrate; and making the width of the signal line near the intersection with the short ring wider than other portions. Forming and providing an irradiation mark, and recognizing the irradiation mark with a camera, based on an image taken by the camera, cutting a short ring located on both sides of the signal line by a laser beam. ,
And a method for manufacturing an active matrix display device.

An invention according to claim 10 is an array substrate including a pixel electrode arranged via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines which intersect with each other;
A display panel including a counter electrode facing the pixel electrode, a light modulation layer controlled based on a potential difference between the pixel electrode and the counter electrode, and a video signal for applying a video signal voltage to the signal line. An active matrix display comprising: a supply unit; a scan signal supply unit that supplies a scan signal to turn on / off the switch element to the scan line; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. In the method of manufacturing a device, a step of providing a short ring that intersects with the scanning line via an insulating layer on the array substrate, and forming the width of the scanning line near the intersection with the short ring wider than other portions Providing an irradiation mark; and providing a cutting notch on each of the short rings located on both sides of the scanning line; and recognizing the irradiation mark with a camera. Based on the image captured by the camera, it is a manufacturing method of an active matrix display device characterized by comprising the a step of cutting the cutting notch portion of the short ring by a laser beam.

An eleventh aspect of the present invention provides an array substrate including a pixel electrode disposed via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines that intersect with each other;
A display panel including a counter electrode facing the pixel electrode, a light modulation layer controlled based on a potential difference between the pixel electrode and the counter electrode, and a video signal for applying a video signal voltage to the signal line. An active matrix display comprising: a supply unit; a scan signal supply unit that supplies a scan signal to turn on / off the switch element to the scan line; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. In the method for manufacturing a device, a step of providing a short ring that intersects with the signal line via an insulating layer on the array substrate, and forming a width of a signal line near the intersection with the short ring wider than other portions Providing an irradiation mark, providing a cutting notch on each of the short rings located on both sides of the signal line, and recognizing the irradiation mark with a camera. Based on the image captured by the camera, it is a manufacturing method of an active matrix display device characterized by comprising the a step of cutting the cutting notch portion of the short ring by a laser beam.

The case where the scanning line and the short ring are short-circuited in the active matrix type display device of the present invention will be described.

Since the irradiation mark is provided by expanding the width of the scanning line in the vicinity of the intersection with the short ring, the position is recognized by the camera using the mark, and the short-circuit is performed based on the image taken by the camera. The cutting portion of the ring is cut by a laser beam.

In this case, it is easy to find the irradiation mark whose scanning line is expanded as a mark, and the short ring is easily cut because the cut portion is provided with a notch and has a small width. Can be.

Further, when the signal line and the short ring are short-circuited, they can be insulated in the same manner.

[0029]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a liquid crystal display device 1 according to the present embodiment of the present invention will be described in detail with reference to FIGS.

(Overall Configuration of Liquid Crystal Display 1) As shown in FIG. 4, the liquid crystal display 1 is an XGA light-transmitting active matrix type having an effective display area 3 of 15 inches diagonally. It includes a light-transmitting display panel 20 that performs display using light source light from the backlight 10. The display panel 20 is connected to a drive circuit unit 30 that supplies a video signal Vsig to a signal line, a scan signal Vg to a scan line, and a common electrode voltage Vcom to the common electrode and the short ring 150.

The display panel 20 is, as shown in FIG.
Array substrate 100, counter substrate 200, array substrate 100
And a TN type liquid crystal 300 having a thickness of about 5 μm which is disposed between the substrate and the counter substrate 200 via the alignment films 401 and 411.
including.

Next, a detailed description will be given with reference to FIGS.

The array substrate 100 is orthogonal to the 768 scanning lines 111 made of a molybdenum-tungsten alloy disposed on the glass substrate 101 via a silicon nitride film (SiNx) also serving as a gate insulating film 113 of a TFT 121 described later. 1024 × 3 (R, G, B) signal lines 115 made of aluminum.

In the vicinity of the intersection between the scanning line 111 and the signal line 115, the scanning line 111 itself is used as a gate electrode, the signal line 115 is used as a drain electrode 125, and an amorphous silicon (a-Si) film is used as an active layer. 123 is the a-Si film 1
Protection film 129 for protecting the semiconductor device 23 and the drain electrode 1
25 and the a-Si film 123, the source electrode 127 and a
-Inverted staggered TFT including low resistance semiconductor layers 126 and 128 disposed between the TFT and Si film 123, respectively.
121 are arranged. The source electrode 127 of the TFT 121 is a pixel electrode 131 made of a transparent electrode (ITO).
Is electrically connected to In this embodiment, the pixel electrode 131 is connected to the previous scanning line 111 and the gate insulating film 1.
The auxiliary capacitance Cs is formed between the pixel electrode 131 and the scanning line 111 at the preceding stage.

The opposing substrate 200 also includes an opposing electrode 231 made of a transparent electrode on a glass substrate 201, and a glass substrate 2
The light-shielding film 211, the color filter 221 and the like are arranged between the first substrate 01 and the counter substrate 231.

The signal lines 115 and the scanning lines 111 are led out to the ends of the glass substrate 101 to be electrically connected to external driving circuits, respectively.
It is led to 116.

The short ring 150 is connected to the signal line 11
5 and a second branch line 154 that intersects the scanning line 111.

The first branch line 152 is made of the same material and in the same process as the scanning line 111 (see FIG. 2).
54 is made of the same material and the same process as the signal line 115 (see FIG. 3). First branch line 152 and second branch line 15
4 are connected to each other via a through hole 156 near the intersection (see FIG. 1).

The first branch line 152 and the second branch line 154
Are drawn out to be electrically connected to the drive circuit unit 30 and are connected to the connection pads 158. Thus, the common electrode voltage Vcom is applied to the short ring 150.

Further, the first branch line 152 is connected to the signal line 115.
And a non-linear element such as a TFT or a high resistance element, and when a high voltage is applied to the signal line 115 by static electricity, the charge is distributed to the first branch line 152. Similarly, the second branch line 154 is connected to the scanning line 111 and the T line.
It is connected via a non-linear element such as FT or a high resistance element, and when a high voltage is applied to the scanning line 1115 by static electricity, the charge is distributed to the second branch line 154. This prevents element failure.

(Characteristics of the short ring 150)
The array substrate 100 of the present embodiment has the features as shown in FIG.

That is, in the vicinity where the signal line 115 and the first branch line 152 of the short ring 150 intersect,
The shape of the first branch line 152 and the shape of the signal line 115 are different from the conventional shape. Specifically, the signal line 115 intersecting with the first branch line 152 is provided with the irradiation mark 160.
Is provided. The irradiation mark 160 has a circular shape and a diameter of 80 μm. The signal line 1
The width of the other part of 15 is 20 μm.

The first branch line 152 located between the signal lines 115 is provided with a cutting notch 162. The width of the first branch line 152 is 20 μm,
The position where the cutting notch 162 is provided is
Each is cut into a rectangular shape by 5 μm, and the width is 10
μm. In addition, since the cutting notches 162 and 162 are provided on both sides of the signal line 115 at the end,
A cutting notch 162 is also provided on the first branch line 152 located on the left side of the signal line 115.

The scanning line 111 and the short ring 15
A similar structure is provided near the intersection with the second branch line 154 of 0. That is, although the width of the scanning line 111 is about 20 μm, a circular irradiation mark 160 is provided near the intersection of the second branch line 154 and the diameter thereof is set to 80 μm.
It is formed in μm. In addition, a cutting notch 162 is also provided in the second branch line 154 located between the scanning lines 111 and 111.
Is provided.

(Step when signal line 115 and short ring 150 are short-circuited) Next, based on FIG. 1 and FIG.
Signal line 115 and first branch line 152 of short ring 150
The following describes a case where a short circuit has occurred between these two cases.

In the manufacturing process of the array substrate 100, pinholes and the like are generated in the gate insulating film 118, and the signal lines 11
If an electrical short circuit occurs between the first branch line 5 and the first branch line 152, it is necessary to insulate this. Therefore, it is necessary to cut the first branch lines 152 located on both sides of the signal line 115.

As shown in FIG. 7, on the array substrate 100 mounted on the stage 164, the intersection of the short-circuited signal line 115 and the first branch line 152 is searched by the camera 166. In this case, the circular irradiation mark 160 serves as a mark, and the intersection between the signal line 115 and the first branch line 152 can be easily found. In other words, the straight line is orthogonal to the other parts, but since this part is circular,
It can be determined at a glance.

Then, the laser beam is irradiated from the irradiation device 168 toward the cutting notch 162 while the camera 166 takes an image near the cutting position as described above. Since the cutting notch 162 is narrower than the other portion of the first branch line 152, the cutting can be easily performed. For example, with a laser beam, 2-3 μm at a time
Since it can be cut, the width of the cutting notch 162 is 5
Since it is μm, it is possible to cut by two irradiations.

As described above, the signal line 115 short-circuited
By cutting the cutting notches 162 and 162 located on both sides of the first branch line 152, the first branch line 152 and the signal line 115 can be electrically insulated. In this case, since the irradiation mark 160 can be easily found by the camera 166, the laser beam is not irradiated to an incorrect position. Further, since the cutting position is formed to be narrower at the cutting notch 162 than other portions, the cutting can be easily performed.

Similarly, when the scanning line 111 and the second branch line 154 of the short ring 150 are short-circuited, the image near the image is captured by the camera 166 using the irradiation mark 160 as a mark, and the cutting device is cut by the irradiation device 168. By irradiating the laser beam toward 162, the second branch line 154 can be easily cut, and the scanning line 111 and the second branch line 154 can be insulated.

(Modification) In the above embodiment, the irradiation mark 16 is used.
Although 0 is a circle, it may be an ellipse instead, and any shape having a curved line that can be distinguished from other parts at a glance may be used.

In the above embodiment, the cutting notch 162 is cut into a rectangular shape. Alternatively, the cutting notch 162 may be cut into an arc or a triangle. It may have a narrow width.

In the above embodiment, the cutting notch 162
However, if the laser beam can be easily cut, there is no need to provide the cutting notch 162, and the short ring 150 may be a straight line.

The TFT 121 is not limited to the case where an a-Si film is used as an active layer, but includes p-Si,
It may be composed of microcrystal silicon, etc.
Further, a staggered structure may be used.

The short ring 150 may be formed of a semiconductor layer or the like forming the TFT 121, in addition to the connection using the metal wiring as described above.

The above-described drive circuit may be formed integrally on an array substrate or the like.

In the above-described embodiment, the liquid crystal layer is held between the array substrate having the pixel electrodes facing each other and the counter substrate having the counter electrodes. However, the pixel electrodes and the counter electrodes are arranged on the array substrate. The liquid crystal layer may be controlled by a horizontal electric field between the pixel electrode and the counter electrode.

It goes without saying that various liquid crystal layers can be used in place of the TN type liquid crystal described above.

[0059]

As described above, according to the present invention, the intersection of the signal line or the scanning line and the short ring can be easily recognized by the irradiation mark, and the laser beam is applied to the cutting notch using the mark as the mark. And the short rings located on both sides of the signal line or the scanning line can be cut.

Therefore, the production yield is improved.

[Brief description of the drawings]

FIG. 1 is a partially enlarged plan view of an array substrate showing one embodiment of the present invention.

FIG. 2 is a sectional view taken along line AA in FIG.

FIG. 3 is a sectional view taken along line BB in FIG.

FIG. 4 is an exploded perspective view of the liquid crystal display device 1.

FIG. 5 is a longitudinal sectional view of the liquid crystal display device 1.

FIG. 6 is a circuit diagram showing an electrical configuration of the liquid crystal display device 1.

FIG. 7 is a block diagram of an apparatus for cutting a short ring.

FIG. 8 is a partially enlarged plan view of a conventional array substrate.

[Explanation of symbols]

 Reference Signs List 1 liquid crystal display device 20 display panel 100 array substrate 111 scanning line 115 signal line 150 short ring 152 first branch line 154 second branch line 160 irradiation mark 162 cutting notch

──────────────────────────────────────────────────続 き Continued on the front page (51) Int.Cl. ⁷ Identification FI FI Theme Court ゛ (Reference) H01L 29/786 H01L 29/78 612A 623A (72) Inventor Jun Morimitsu 7 Nisshincho, Kawasaki-ku, Kawasaki-shi, Kanagawa Prefecture No. 1 Toshiba Electronic Engineering Co., Ltd. (72) Kenichi Arimoto, Inventor Kenichi Arimoto, Hyogo Pref. JB63 JB69 JB73 JB74 KA05 KA07 KA12 KA16 KA18 KB14 MA48 NA13 NA25 NA27 NA29 PA08 QA07 5C094 AA60 BA03 BA43 CA19 EA04 EA05 EB02 HA08 5F110 AA22 AA27 BB01 CC07 DD02 EE06 FF03 NN02 HK02 GG02 GG02 NN KK09

Claims (11)

[Claims] An array substrate including a pixel electrode disposed via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines that intersect each other, and a counter electrode facing the pixel electrode. A display panel that includes a light modulation layer that is controlled based on a potential difference between the pixel electrode and the counter electrode; a video signal supply unit that applies a video signal voltage to the signal line; An active matrix display device comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off a switch element; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. A short ring that intersects with the line via an insulating layer is provided, and the width of the scanning line near the intersection with the short ring is formed to be wider than other portions, and the laser beam is irradiated. Active matrix display device is characterized in that the irradiation mark for cutting the short ring. 2. The active matrix display device according to claim 1, wherein cutting shorts for irradiating a laser beam and cutting the laser beam are provided on short rings located on both sides of the scanning line. . 3. An array substrate including a pixel electrode disposed near a point of intersection between a plurality of signal lines and a plurality of scanning lines that intersect each other via a switch element; and a counter electrode facing the pixel electrode. A display panel that includes a light modulation layer that is controlled based on a potential difference between the pixel electrode and the counter electrode; a video signal supply unit that applies a video signal voltage to the signal line; An active matrix display device comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off a switch element; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. A short ring that intersects with the line via an insulating layer is provided, and the width of the signal line near the intersection with the short ring is formed to be wider than other portions, and the laser beam is irradiated. Active matrix display device is characterized in that the irradiation mark for cutting the short ring. 4. The active matrix type display device according to claim 3, wherein cutting shorts for irradiating a laser beam for cutting are provided on the short rings located on both sides of the signal line. . 5. The active matrix display device according to claim 1, wherein said irradiation mark is circular. 6. The cutting notch for cutting is arc-shaped, rectangular,
5. The active matrix display device according to claim 2, wherein the display device is a triangular cut. 7. The active matrix display device according to claim 1, wherein a counter electrode voltage is supplied to said short ring from said counter electrode driving means. 8. An array substrate including a pixel electrode arranged via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines that intersect each other, and a counter electrode facing the pixel electrode. A display panel that includes a light modulation layer that is controlled based on a potential difference between the pixel electrode and the counter electrode; a video signal supply unit that applies a video signal voltage to the signal line; A method for manufacturing an active matrix display device, comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off a switch element; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. Providing a short ring that intersects the scanning line with an insulating layer interposed therebetween, and forming the scanning line near the intersection with the short ring to be wider than other portions and illuminating Providing a mark for use; and recognizing the mark for irradiation with a camera, and cutting a short ring located on both sides of the scanning line with a laser beam based on an image taken by the camera. A method for manufacturing an active matrix display device, comprising: 9. An array substrate including a pixel electrode disposed near a point of intersection between a plurality of signal lines and a plurality of scanning lines that intersect with each other via a switch element; and a counter electrode facing the pixel electrode. A display panel that includes a light modulation layer that is controlled based on a potential difference between the pixel electrode and the counter electrode; a video signal supply unit that applies a video signal voltage to the signal line; A method for manufacturing an active matrix display device, comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off a switch element; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. Providing a short ring that intersects the signal line with an insulating layer interposed therebetween; and forming the signal line in the vicinity of the intersection with the short ring wider than other portions to illuminate. Providing a mark for use, and recognizing the mark for irradiation with a camera, and cutting short rings located on both sides of the signal line with a laser beam based on an image taken by the camera. A method for manufacturing an active matrix display device, comprising: 10. An array substrate including a pixel electrode disposed near a point of intersection between a plurality of signal lines and a plurality of scanning lines that intersect each other via a switch element; and a counter electrode facing the pixel electrode. A display panel that includes a light modulation layer that is controlled based on a potential difference between the pixel electrode and the counter electrode; a video signal supply unit that applies a video signal voltage to the signal line; A method for manufacturing an active matrix display device, comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off a switch element; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. Providing a short ring that intersects the scanning line with an insulating layer interposed therebetween, and forming the width of the scanning line near the intersection with the short ring wider than other portions. Providing a projection mark, and providing a cutting notch in each of the short rings located on both sides of the scanning line, recognizing the irradiation mark with a camera, based on an image taken by the camera, Cutting the notch for cutting of the short ring with a laser beam. A method for manufacturing an active matrix display device, comprising: 11. An array substrate including a pixel electrode disposed via a switch element near each intersection of a plurality of signal lines and a plurality of scanning lines that intersect each other, and a counter electrode facing the pixel electrode. A display panel that includes a light modulation layer that is controlled based on a potential difference between the pixel electrode and the counter electrode; a video signal supply unit that applies a video signal voltage to the signal line; A method for manufacturing an active matrix display device, comprising: a scanning signal supply unit that supplies a scanning signal for turning on / off a switch element; and a counter electrode driving unit that supplies a counter electrode voltage to the counter electrode. Providing a short ring that intersects with the signal line via an insulating layer; and forming a signal line near the intersection with the short ring to have a width wider than other portions. Providing a projection mark, and providing a cutting notch in each of the short rings located on both sides of the signal line; and recognizing the irradiation mark with a camera, based on an image taken by the camera, Cutting the notch for cutting of the short ring with a laser beam. A method for manufacturing an active matrix display device, comprising: