JP2001313320A5 - - Google Patents

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Publication number
JP2001313320A5
JP2001313320A5 JP2000130404A JP2000130404A JP2001313320A5 JP 2001313320 A5 JP2001313320 A5 JP 2001313320A5 JP 2000130404 A JP2000130404 A JP 2000130404A JP 2000130404 A JP2000130404 A JP 2000130404A JP 2001313320 A5 JP2001313320 A5 JP 2001313320A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000130404A
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Japanese (ja)
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JP2001313320A (ja
JP4322396B2 (ja
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Publication date
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Priority to JP2000130404A priority Critical patent/JP4322396B2/ja
Priority claimed from JP2000130404A external-priority patent/JP4322396B2/ja
Publication of JP2001313320A publication Critical patent/JP2001313320A/ja
Publication of JP2001313320A5 publication Critical patent/JP2001313320A5/ja
Application granted granted Critical
Publication of JP4322396B2 publication Critical patent/JP4322396B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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JP2000130404A 2000-04-28 2000-04-28 半導体装置の試験方法及び試験装置 Expired - Fee Related JP4322396B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2000130404A JP4322396B2 (ja) 2000-04-28 2000-04-28 半導体装置の試験方法及び試験装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000130404A JP4322396B2 (ja) 2000-04-28 2000-04-28 半導体装置の試験方法及び試験装置

Publications (3)

Publication Number Publication Date
JP2001313320A JP2001313320A (ja) 2001-11-09
JP2001313320A5 true JP2001313320A5 (enExample) 2006-09-28
JP4322396B2 JP4322396B2 (ja) 2009-08-26

Family

ID=18639522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000130404A Expired - Fee Related JP4322396B2 (ja) 2000-04-28 2000-04-28 半導体装置の試験方法及び試験装置

Country Status (1)

Country Link
JP (1) JP4322396B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4173306B2 (ja) 2001-11-30 2008-10-29 東京エレクトロン株式会社 信頼性評価試験装置、信頼性評価試験システム及び信頼性評価試験方法
JP7126681B2 (ja) * 2018-05-08 2022-08-29 国立大学法人東海国立大学機構 金属膜の製造方法

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