JP2001312986A5 - - Google Patents

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Publication number
JP2001312986A5
JP2001312986A5 JP2000131521A JP2000131521A JP2001312986A5 JP 2001312986 A5 JP2001312986 A5 JP 2001312986A5 JP 2000131521 A JP2000131521 A JP 2000131521A JP 2000131521 A JP2000131521 A JP 2000131521A JP 2001312986 A5 JP2001312986 A5 JP 2001312986A5
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JP
Japan
Prior art keywords
magnetic pole
electron gun
gun according
magnetic
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000131521A
Other languages
Japanese (ja)
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JP2001312986A (en
JP3900792B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2000131521A priority Critical patent/JP3900792B2/en
Priority claimed from JP2000131521A external-priority patent/JP3900792B2/en
Priority to US09/652,606 priority patent/US6583413B1/en
Publication of JP2001312986A publication Critical patent/JP2001312986A/en
Priority to US10/404,451 priority patent/US7098455B2/en
Publication of JP2001312986A5 publication Critical patent/JP2001312986A5/ja
Priority to US11/452,989 priority patent/US7397031B2/en
Application granted granted Critical
Publication of JP3900792B2 publication Critical patent/JP3900792B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Claims (5)

電子源と、該電子源を制御するための静電レンズ及び電磁レンズとを有し，
該電磁レンズは複数の磁極を有し，
該複数の磁極は、少なくとも1つの可動磁極と、該可動磁極に対して相対的に固定された固定磁極とを備えることを特徴とする電子銃。An electron source, and an electrostatic lens and an electromagnetic lens for controlling the electron source,
The electromagnetic lens has a plurality of magnetic poles,
The plurality of magnetic poles include at least one movable magnetic pole and a fixed magnetic pole fixed relative to the movable magnetic pole. 請求項１記載の電子銃において、
前記可動磁極を可動させるためのモータを備えたことを特徴とする請求項１記載の電子銃。The electron gun according to claim 1,
The electron gun according to claim 1, further comprising a motor for moving the movable magnetic pole. 請求項１記載の電子銃において、
前記電磁レンズを構成する該可動磁極に高電圧が印加され，該固定磁極が接地電位であることを特徴とする請求項１記載の電子銃。The electron gun according to claim 1,
2. The electron gun according to claim 1, wherein a high voltage is applied to the movable magnetic pole constituting the electromagnetic lens, and the fixed magnetic pole is at a ground potential. 電子源と、前記電子源の周囲に配置された第１の磁極と、前記第の磁極の周囲でかつ離間した位置に配置された第２の磁極と、前記第２の磁極を構成する磁路に磁界を供給する側の端部に着脱可能にした第３の磁極と、を具備したことを特徴する電子銃。An electron source, a first magnetic pole arranged around the electron source, a second magnetic pole arranged around and spaced from the first magnetic pole, and a magnetic path constituting the second magnetic pole An electron gun comprising: a third magnetic pole that is detachable at an end portion on a side for supplying a magnetic field to the magnetic pole. 請求項４記載の電子銃において、
前記第１の磁極と前記第２の磁極との空間に充填された非磁性の金属を備えたことを特徴とする電子銃。The electron gun according to claim 4, wherein
An electron gun comprising a nonmagnetic metal filled in a space between the first magnetic pole and the second magnetic pole.
JP2000131521A 1999-09-01 2000-04-26 Electron gun Expired - Lifetime JP3900792B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2000131521A JP3900792B2 (en) 2000-04-26 2000-04-26 Electron gun
US09/652,606 US6583413B1 (en) 1999-09-01 2000-08-30 Method of inspecting a circuit pattern and inspecting instrument
US10/404,451 US7098455B2 (en) 1999-09-01 2003-04-02 Method of inspecting a circuit pattern and inspecting instrument
US11/452,989 US7397031B2 (en) 1999-09-01 2006-06-15 Method of inspecting a circuit pattern and inspecting instrument

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2000131521A JP3900792B2 (en) 2000-04-26 2000-04-26 Electron gun

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2005218166A Division JP3901199B2 (en) 2005-07-28 2005-07-28 SEM circuit pattern inspection system

Publications (3)

Publication Number Publication Date
JP2001312986A JP2001312986A (en) 2001-11-09
JP2001312986A5 true JP2001312986A5 (en) 2005-03-03
JP3900792B2 JP3900792B2 (en) 2007-04-04

Family

ID=18640403

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000131521A Expired - Lifetime JP3900792B2 (en) 1999-09-01 2000-04-26 Electron gun

Country Status (1)

Country Link
JP (1) JP3900792B2 (en)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006324119A (en) * 2005-05-19 2006-11-30 Hitachi Ltd Electron gun
US8159118B2 (en) 2005-11-02 2012-04-17 United Technologies Corporation Electron gun
JP2008175726A (en) * 2007-01-19 2008-07-31 Tohoku Univ Electron beam irradiating device
JP6095338B2 (en) * 2012-11-28 2017-03-15 株式会社日立製作所 Electron gun and charged particle beam device
JP6218403B2 (en) * 2013-03-15 2017-10-25 株式会社マーストーケンソリューション X-ray tube equipped with a field emission electron gun and X-ray inspection apparatus using the same
JP6779847B2 (en) 2017-09-11 2020-11-04 株式会社ニューフレアテクノロジー Charged particle device, charged particle drawing device and charged particle beam control method

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57151159A (en) * 1981-03-13 1982-09-18 Internatl Precision Inc Objective lens of electron beam device
JPS60127645A (en) * 1983-12-14 1985-07-08 Hitachi Ltd Field emission type electron gun
JPS61131351A (en) * 1984-11-30 1986-06-19 Internatl Precision Inc Objective lens of electron beam device
JP2775071B2 (en) * 1989-02-22 1998-07-09 日本電信電話株式会社 Charged particle beam generator
JP2835265B2 (en) * 1992-08-27 1998-12-14 株式会社東芝 Magnetic field immersion type electron gun and method of operating magnetic field immersion type electron gun
JPH06139976A (en) * 1992-10-21 1994-05-20 Jeol Ltd Field emission electron gun

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